11 research outputs found
Recommended from our members
Lateral Selective SiGe Growth for Local Dislocation-Free SiGe-on-Insulator Virtual Substrate Fabrication
Dislocation free local SiGe-on-insulator (SGOI) virtual substrate is fabricated using lateral selective SiGe growth by reduced pressure chemical vapor deposition. The lateral selective SiGe growth is performed around a ∼1.25 μm square Si (001) pillar in a cavity formed by HCl vapor phase etching of Si at 850 °C from side of SiO2/Si mesa structure on buried oxide. Smooth root mean square roughness of SiGe surface of 0.14 nm, which is determined by interface roughness between the sacrificially etched Si and the SiO2 cap, is obtained. Uniform Ge content of ∼40% in the laterally grown SiGe is observed. In the Si pillar, tensile strain of ∼0.65% is found which could be due to thermal expansion difference between SiO2 and Si. In the SiGe, tensile strain of ∼1.4% along 〈010〉 direction, which is higher compared to that along 〈110〉 direction, is observed. The tensile strain is induced from both [110] and [−110] directions. Threading dislocations in the SiGe are located only ∼400 nm from Si pillar and stacking faults are running towards 〈110〉 directions, resulting in the formation of a wide dislocation-free area in SiGe along 〈010〉 due to horizontal aspect ratio trapping
Lattice deformation at the sub-micron scale: X-ray nanobeam measurements of elastic strain in electron shuttling devices
The lattice strain induced by metallic electrodes can impair the
functionality of advanced quantum devices operating with electron or hole
spins. Here we investigate the deformation induced by CMOS-manufactured
titanium nitride electrodes on the lattice of a buried, 10 nm-thick Si/SiGe
Quantum Well by means of nanobeam Scanning X-ray Diffraction Microscopy. We
were able to measure TiN electrode-induced local modulations of the strain
tensor components in the range of with ~60 nm lateral
resolution. We have evaluated that these strain fluctuations are reflected into
local modulations of the potential of the conduction band minimum larger than 2
meV, which is close to the orbital energy of an electrostatic quantum dot. We
observe that the sign of the strain modulations at a given depth of the quantum
well layer depends on the lateral dimensions of the electrodes. Since our work
explores the impact of device geometry on the strain-induced energy landscape,
it enables further optimization of the design of scaled CMOS-processed quantum
devices.Comment: 16 pages, 6 figure
Recommended from our members
Nanoscale Mapping of the 3D Strain Tensor in a Germanium Quantum Well Hosting a Functional Spin Qubit Device
A strained Ge quantum well, grown on a SiGe/Si virtual substrate and hosting two electrostatically defined hole spin qubits, is nondestructively investigated by synchrotron-based scanning X-ray diffraction microscopy to determine all its Bravais lattice parameters. This allows rendering the three-dimensional spatial dependence of the six strain tensor components with a lateral resolution of approximately 50 nm. Two different spatial scales governing the strain field fluctuations in proximity of the qubits are observed at 1 μm, respectively. The short-ranged fluctuations have a typical bandwidth of 2 × 10-4 and can be quantitatively linked to the compressive stressing action of the metal electrodes defining the qubits. By finite element mechanical simulations, it is estimated that this strain fluctuation is increased up to 6 × 10-4 at cryogenic temperature. The longer-ranged fluctuations are of the 10-3 order and are associated with misfit dislocations in the plastically relaxed virtual substrate. From this, energy variations of the light and heavy-hole energy maxima of the order of several 100 μeV and 1 meV are calculated for electrodes and dislocations, respectively. These insights over material-related inhomogeneities may feed into further modeling for optimization and design of large-scale quantum processors manufactured using the mainstream Si-based microelectronics technology
Nanoscale Mapping of the 3D Strain Tensor in a Germanium Quantum Well Hosting a Functional Spin Qubit Device
A strained Ge quantum well, grown on a SiGe/Si virtual substrate and hosting two electrostatically defined hole spin qubits, is nondestructively investigated by synchrotron-based scanning X-ray diffraction microscopy to determine all its Bravais lattice parameters. This allows rendering the three-dimensional spatial dependence of the six strain tensor components with a lateral resolution of approximately 50 nm. Two different spatial scales governing the strain field fluctuations in proximity of the qubits are observed at <100 nm and >1 μm, respectively. The short-ranged fluctuations have a typical bandwidth of 2 × 10-4 and can be quantitatively linked to the compressive stressing action of the metal electrodes defining the qubits. By finite element mechanical simulations, it is estimated that this strain fluctuation is increased up to 6 × 10-4 at cryogenic temperature. The longer-ranged fluctuations are of the 10-3 order and are associated with misfit dislocations in the plastically relaxed virtual substrate. From this, energy variations of the light and heavy-hole energy maxima of the order of several 100 μeV and 1 meV are calculated for electrodes and dislocations, respectively. These insights over material-related inhomogeneities may feed into further modeling for optimization and design of large-scale quantum processors manufactured using the mainstream Si-based microelectronics technology. </p
Nanoscale Mapping of the 3D Strain Tensor in a Germanium Quantum Well Hosting a Functional Spin Qubit Device
A strained Ge quantum
well, grown on a SiGe/Si virtual substrate
and hosting two electrostatically defined hole spin qubits, is nondestructively
investigated by synchrotron-based scanning X-ray diffraction microscopy
to determine all its Bravais lattice parameters. This allows rendering
the three-dimensional spatial dependence of the six strain tensor
components with a lateral resolution of approximately 50 nm. Two different
spatial scales governing the strain field fluctuations in proximity
of the qubits are observed at 1 μm, respectively.
The short-ranged fluctuations have a typical bandwidth of 2 ×
10–4 and can be quantitatively linked to the compressive
stressing action of the metal electrodes defining the qubits. By finite
element mechanical simulations, it is estimated that this strain fluctuation
is increased up to 6 × 10–4 at cryogenic temperature.
The longer-ranged fluctuations are of the 10–3 order
and are associated with misfit dislocations in the plastically relaxed
virtual substrate. From this, energy variations of the light and heavy-hole
energy maxima of the order of several 100 μeV and 1 meV are
calculated for electrodes and dislocations, respectively. These insights
over material-related inhomogeneities may feed into further modeling
for optimization and design of large-scale quantum processors manufactured
using the mainstream Si-based microelectronics technology
Nanoscale Mapping of the 3D Strain Tensor in a Germanium Quantum Well Hosting a Functional Spin Qubit Device
A strained Ge quantum well, grown on a SiGe/Si virtual substrate and hosting two electrostatically defined hole spin qubits, is nondestructively investigated by synchrotron-based scanning X-ray diffraction microscopy to determine all its Bravais lattice parameters. This allows rendering the three-dimensional spatial dependence of the six strain tensor components with a lateral resolution of approximately 50 nm. Two different spatial scales governing the strain field fluctuations in proximity of the qubits are observed at <100 nm and >1 μm, respectively. The short-ranged fluctuations have a typical bandwidth of 2 × 10-4 and can be quantitatively linked to the compressive stressing action of the metal electrodes defining the qubits. By finite element mechanical simulations, it is estimated that this strain fluctuation is increased up to 6 × 10-4 at cryogenic temperature. The longer-ranged fluctuations are of the 10-3 order and are associated with misfit dislocations in the plastically relaxed virtual substrate. From this, energy variations of the light and heavy-hole energy maxima of the order of several 100 μeV and 1 meV are calculated for electrodes and dislocations, respectively. These insights over material-related inhomogeneities may feed into further modeling for optimization and design of large-scale quantum processors manufactured using the mainstream Si-based microelectronics technology. QCD/Veldhorst LabBUS/TNO STAFFQN/Veldhorst LabQCD/Scappucci La