189 research outputs found
High resolution shadow mask patterning in deep holes and its application to an electrical wafer feed-through
The paper presents a technique to pattern materials in deep holes and/or on non-planar substrate surfaces. A rather old technique, namely, electron-beam evaporation of metals through a shadow mask, is used. The realization of high-resolution shadow masks using micromachining techniques is described. Further, a low ohmic electrical wafer foed-through with a small parasitic capacitance to the substrate and a high placing density is presented
Characterization of piezoelectrically actuated PLD Pb(Zr,Ti)O<sub>3</sub> thin film membranes
Low volume, large force (>1mN) and nanometer resolution, electrostatic microactuator for low displacement applications
Mechanical tuning of optical race-track ring resonators
This paper presents the fabrication and mechanical characterization of electrostatically actuated micro bimorphs integrated with race-track ring resonators, for optical tuning applications. The bimorphs, having an upward deflection in the off-state, are integrated by surface micromachining techniques with race-track ring resonators fabricated on Silicon On Insulator (SOI) wafers. Using electrostatic actuation, these bimorphs are pulled into the evanescent field of the ring resonator thereby modulating the propagation properties. Pull-in voltages of the bimorphs have been measured statically and the effect of electrostatic spring softening (ESS) on the resonance frequency has been measured dynamically. The resonance wavelength of the optical ring resonator could be tuned by 50 pm by applying an 8.5 V DC voltage to a 40 μm long bimorph, bringing it into close proximity of the ring resonator waveguide. To the best of our knowledge, this is the first experimental demonstration of tuning of race track ring resonators by integrated, electrostatically actuated bimorphs.\ud
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A method for making a 3D nanostructure having a nanosubstructure, and an insulating pyramid having a metallic tip, a pyramid having nano-apertures and horizontal and/or vertical nanovires obtainable by this method
On the zeta-function regularization of a two-dimensional series of epsten-Hurwitz type
For a few years now, the study of quantum field theories in partially compactified space-time manifolds has acquired increasing importance in several domains of quantum physics. Let me just mention the issues of dimensional reduction and spontaneous compactification, and the multiple questions associated with the study of quantum field theories in the presence of boundaries (like the Casimir effect) and on curved space-time (manifolds with curvature and nontrivial topology), a step towards quantum gravity
Planarization and fabrication of bridges across deep grooves or holes in silicon using a dry film photoresist followed by an etch back
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