Berenschot, Johan W.

Tas, Niels Roelof

Undetermined

The invention relates to a method for making a 3D nanostructure having a nanosubstructure, comprising the steps of : i) providing a mold comprising at least one sharp concave corner; ii) conformational depositing at least one structural material in the sharp concave corner; iii) isotropically removing structural material; iv) depositing at least one other structural material; v) removing earlier deposited structural material; vi) forming a nanosubstructure; and vii) removing the mold thereby providing the 3D nanostructure having the nanosubstructure

University of Twente Research Information

A method for making a 3D nanostructure having a nanosubstructure, and an insulating pyramid having a metallic tip, a pyramid having nano-apertures and horizontal and/or vertical nanovires obtainable by this method

https://ris.utwente.nl/ws/files/6017759/WO2009086915A1-erwin.pdf

A method for making a 3D nanostructure having a nanosubstructure, and an insulating pyramid having a metallic tip, a pyramid having nano-apertures and horizontal and/or vertical nanovires obtainable by this method

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University of Twente Research Information