CORE
🇺🇦Â
 make metadata, not war
Services
Services overview
Explore all CORE services
Access to raw data
API
Dataset
FastSync
Content discovery
Recommender
Discovery
OAI identifiers
OAI Resolver
Managing content
Dashboard
Bespoke contracts
Consultancy services
Support us
Support us
Membership
Sponsorship
Community governance
Advisory Board
Board of supporters
Research network
About
About us
Our mission
Team
Blog
FAQs
Contact us
Planarization and fabrication of bridges across deep grooves or holes in silicon using a dry film photoresist followed by an etch back
Authors
Johan W. Berenschot
Michael Curt Elwenspoek
V.L. Spiering
Publication date
6 September 1994
Publisher
Abstract
Abstract is not available.
Similar works
Full text
Available Versions
NARCIS
See this paper in CORE
Go to the repository landing page
Download from data provider
Last time updated on 15/10/2017