Small-scale Vacuum System for Deposition of Multilayer Metallic Films “MVU TM – Magna 3M”

A new small-scale vacuum system “MVU TM-Magna 3M” developed at JSC “Research Institute of Pre-cision Machine Manufacturing” is described. Its assembly and working conditions are considered. This sys-tem was used for magnetron sputtering multilayer metallic films. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/3612

Growth of crystals /

Vols. 1, 3 constitute reports of 1st-2nd Conference on Crystal Growth, held in 1956 and 1959 and sponsored by the Institute of Crystallography, Academy of Sciences, USSR; v. 2 contains interim reports between 1st & 2nd conferences; v. 5-6 contain the proceedings of the 3rd Moscow Conference on the Growth of Crystals.Vols. 7-8 contain proceedings of the Symposium on Crystal Growth held July 1966 at the 7th International Crystallography Congress.Vols. 5-6 issued in 2 parts