Plasma modeling for a nonsymmetric capacitive discharge driven by a nonsinusoidal radio frequency current

An analytical solution for the sheath dynamics of an asymmetrically driven capacitively coupled plasma is obtained under the assumptions of time-independent, collisionless ion motion, inertialess electrons, and uniform current density. Modeling is performed considering that the plasma is driven by a nonsinusoidal radio frequency (rf) current which can be resolved into a finite number of harmonic components. Together with different sheath parameters the equation for the bulk plasma impedance is also obtained to calculate the overall plasma impedance and the overall rf voltage. Assuming equal plate areas the solution for a symmetric discharge is also obtainable from this model. We have found that the even harmonic components of rf voltage and impedance are always present, even in a symmetric discharge. Experimental results are shown to be in qualitative agreement with the theoretical model. The values of normalized rf voltage and impedance harmonics assume lower values as the asymmetry of the plasma chamber decreases

Collisionless heating in capacitive discharges enhanced by dual-frequency excitation

We discuss collisionless electron heating in capacitive discharges excited by a combination of two disparate frequencies. By developing an analytical model, we find, contrary to expectation, that the net heating in this case is much larger than the sum of the effects occurring when the two frequencies act separately. This prediction is substantiated by kinetic simulations, which are also in excellent general quantitative agreement with the model for discharge parameters that are typical of recent experiments

Design and Preliminary Testing Plan of Electronegative Ion Thruster

Electronegative ion thrusters are a new iteration of existing gridded ion thruster technology differentiated by their ability to produce and accelerate both positive and negative ions. The primary motivations for electronegative ion thruster development include the elimination of lifetime-limiting cathodes from a thruster system and the ability to generate appreciable thrust through the acceleration of both positive or negative-charged ions. Proof-of-concept testing of the PEGASES (Plasma Propulsion with Electronegative GASES) thruster demonstrated the production of positively and negatively-charged ions (argon and sulfur hexafluoride, respectively) in an RF discharge and the subsequent acceleration of each charge species through the application of a time-varying electric field to a pair of metallic grids similar to those found in gridded ion thrusters. Leveraging the knowledge gained through experiments with the PEGASES I and II prototypes, the MINT (Marshall's Ion-ioN Thruster) is being developed to provide a platform for additional electronegative thruster proof-of-concept validation testing including direct thrust measurements. The design criteria used in designing the MINT are outlined and the planned tests that will be used to characterize the performance of the prototype are described

Determination of the levitation limits of dust particles within the sheath in complex plasma experiments

Experiments are performed in which dust particles are levitated at varying heights above the powered electrode in a RF plasma discharge by changing the discharge power. The trajectories of particles dropped from the top of the discharge chamber are used to reconstruct the vertical electric force acting on the particles. The resulting data, together with the results from a selfconsistent fluid model, are used to determine the lower levitation limit for dust particles in the discharge and the approximate height above the lower electrode where quasineutrality is attained, locating the sheath edge. These results are then compared with current sheath models. It is also shown that particles levitated within a few electron Debye lengths of the sheath edge are located outside the linearly increasing portion of the electric field

Anomalous Capacitive Sheath with Deep Radio Frequency Electric Field Penetration

A novel nonlinear effect of anomalously deep penetration of an external radio frequency electric field into a plasma is discribed. A self-consistent kinetic treatment reveals a transition region between the sheath and the plasma. Because of the electron velocity modulation in the sheath, bunches in the energetic electron density are formed in the transition region adjusted to the sheath. The width of the region is of order $V_{T}/\omega$, where V_{T} is the electron thermal velocity, and $\omega$ is frequency of the electric field. The presence of the electric field in the transition region results in a cooling of the energetic electrons and an additional heating of the cold electrons in comparison with the case when the transition region is neglected.Comment: 14,4 figure

Effect of Electron Energy Distribution Function on Power Deposition and Plasma Density in an Inductively Coupled Discharge at Very Low Pressures

A self-consistent 1-D model was developed to study the effect of the electron energy distribution function (EEDF) on power deposition and plasma density profiles in a planar inductively coupled plasma (ICP) in the non-local regime (pressure < 10 mTorr). The model consisted of three modules: (1) an electron energy distribution function (EEDF) module to compute the non-Maxwellian EEDF, (2) a non-local electron kinetics module to predict the non-local electron conductivity, RF current, electric field and power deposition profiles in the non-uniform plasma, and (3) a heavy species transport module to solve for the ion density and velocity profiles as well as the metastable density. Results using the non-Maxwellian EEDF model were compared with predictions using a Maxwellian EEDF, under otherwise identical conditions. The RF electric field, current, and power deposition profiles were different, especially at 1mTorr, for which the electron effective mean free path was larger than the skin depth. The plasma density predicted by the Maxwellian EEDF was up to 93% larger for the conditions examined. Thus, the non-Maxwellian EEDF must be accounted for in modeling ICPs at very low pressures.Comment: 19 pages submitted to Plasma Sources Sci. Techno

Plasma analysis of Inductively Coupled Impulse Sputtering of Cu, Ti and Ni

Inductively coupled impulse sputtering (ICIS) is a new development in the field of highly ionised pulsed PVD processes. For ICIS the plasma is generated by an internal inductive coil, replacing the need for a magnetron. To understand the plasma properties, measurements of the current and voltage waveforms at the cathode were conducted. The IEDFs were measured by energy resolved MS and plasma chemistry was analysed by OES and then compared to a model. The target was operated in pulsed DC mode and the coil was energised by pulsed RF power, with a duty cycle of 7.5 %. At a constant pressure (14 Pa) the set peak RF power was varied from 1000-4000 W. The DC voltage to the target was kept constant at 1900 V. OES measurements have shown a monotonic increase in intensity with increasing power. Excitation and ionisation processes were single step for ICIS of Ti and Ni and multi-step for Cu. The latter exhibited an unexpectedly steep rise in ionisation efficiency with power. The IEDFs measured by MS show the material- and time- dependant plasma potential in the range of 10-30 eV, ideal for increased surface mobility without inducing lattice defects. A lower intensity peak, of high energetic ions, is visible at 170 eV during the pulse

New combined PIC-MCC approach for fast simulation of a radio frequency discharge at low gas pressure

A new combined PIC-MCC approach is developed for accurate and fast simulation of a radio frequency discharge at low gas pressure and high density of plasma. Test calculations of transition between different modes of electron heating in a ccrf discharge in helium and argon show a good agreement with experimental data. We demonstrate high efficiency of the combined PIC-MCC algorithm, especially for the collisionless regime of electron heating.Comment: 6 paged, 8 figure