Experimental Research on Micro-electroforming for Fabricating Cantilever Used in Micro-machined Tunneling Gyroscope

悬臂梁式微机械隧道陀螺仪是一种以悬臂梁作为换能构件，以电子隧道效应作为输出敏感方式的高精度和高灵敏度的角振动传感器，解决了传统微机械陀螺仪因尺寸减小而导致的灵敏度降低的缺点。加工工艺是制约其产业化的关键。悬臂梁是其核心构件，它将输入的角速度转为梁的振动位移，为了达到高的响应频率和输出，悬臂梁应达到一定的厚度和尺寸精度，这给悬臂梁的制作带来一定的难度。本文利用近紫外线厚胶光刻和微电铸的方法实现悬臂梁的制作，主要的研究工作包含如下几个部分：  根据微机械隧道陀螺仪的工作原理和悬臂梁的结构特点，分析制作要求和工艺难点；查阅资料了解当前主要的MEMS加工工艺，特别是三维结构的加工，选...Micro-machined tunneling gyroscope with cantilever is a kind of angular rate sensor with high sensitivity and resolution, in which cantilever works as transducer and electron tunneling effect is employed as sensor. It overcomes the traditional one’s reduction in sensitivity when miniaturized. The fabrication problem is the key issue impeding its commercialization. The cantilever is the critical co...学位：工学硕士院系专业：物理与机电工程学院机电工程系_测试计量技术及仪器学号：20012900

中国・蒙古族の子どもの体力向上に関する基礎的研究 : 生活習慣や運動習慣及び体育授業の在り方を中心にして

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Mathematical Modeling and Numerical Analysis of Tooth Profiles Based on Line of Action

在研究直齿圆柱齿轮啮合原理的基础上,提出了面向啮合线的齿轮齿廓设计方法。建立了面向给定啮合线的齿轮齿廓的数学模型;并以啮合线为椭圆形状的齿轮齿廓设计为例;验证了设计方法的合理性和正确性,最后计算了利用该方法设计出的齿轮的重合度,并与相同参数的渐开线齿轮进行了比较。研究结果表明:通过给定的啮合线形状设计齿轮齿廓比直接给定齿廓形状更容易控制齿轮的啮合性能。On the basis of research on engagement principle of spur gear drive,a design method of tooth profile based on line of action is presented.The mathematical models,including the equation of action line,the equation of the tooth profile for the driving gear,and the equation of the conjugate tooth profile,are established based on the meshing theory.The simulation result of the specific example demonstrates the design method is correct and feasible.The contact ratio of the proposed gear drive is calculated.A comparison study of the contact ratio with the involute gear drive is also carried out in this work.It will be better to control the performances of a gear set by specifying the shape of action line rather than specifying tooth profiles of mating gear.国家自然科学基金项目(51205335;50975242); 福建省高校产学合作科技重大专项项目(2011H6024); 福建省教育厅项目(JB11175)资

WSNs中一种能耗均衡的传染路由

传染路由提高了传输数据包的可靠性,但因参与路由的节点数过多,增加了无线传感网络(Wireless Sensor Networks,WSNs)的能耗。为此,提出一种能耗均衡的传染路由(Energy Consumption Balance-Gossip,ECB-G)。ECB-G路由利用邻居节点的剩余能量和位置,计算节点成为转发节点的分值,再依据分值择优下一跳转发节点,从而限定了参与路由的节点数,进而减少网络能耗。仿真结果表明,提出的ECB-G路由降低了能耗,延长网络寿命。福建省高等学校新世纪优秀人才支持计划福建省中青年教师教育科研项目:移动通信用户故障分布式自主采集与智能分析系统(JAT170826

Research on Commonality Decision,Evaluation and its Application for Product Family

作为产品族规划或再设计的关键环节,通用性决策有效缓解产品系列繁殖的负面效应,成为企业资源整合的重要手段。通过研究产品族通用性相关文献,回顾了产品族通用性的基本概念并分析了通用性决策在产品族设计中的关键作用;基于通用性决策过程,着重从零部件层次、正反两个方面论述了通用性对产品族全生命周期各阶段成本的影响,总结了基于产品族体系结构的通用性评价指标和面向参数化产品族的通用性评价指标,分析了通用性与产品性能、通用性与市场绩效之间的权衡模型及其应用;最后讨论了目前研究中的不足之处并指出了产品族通用性的未来研究方向。As a key link in product family/platform planning or redesign,commonality decision effectively alleviates the negative effects of product line propagation,leading to an important measure in enterprise resources integration. Via analysis of pertinent literatures on product family commonality,basic concepts were reviewed and the pivotal role of commonality decision in product family design was demonstrated firstly. Then,based on the process of commonality decision,impacts of commonality on costs at each stage of the whole lifecycle were discussed from component level and both positive and negative aspects,evaluation indexes both based on the product family architecture and for parametric product family were summarized,tradeoff models between commonality and product performance and between commonality and market performance were examined in detail. Finally,deficiencies in recent researches were pointed out and future research directions were discussed.国家自然科学基金资助项目(71172055);; 科技部创新方法工作专项(2011IM020400);; 厦门市科技计划项目(3502Z20125017

Surface rendering algorithm of tenuous vasculature in medical images

在医学图像处理中,常常需要提取出特定的组织或者结构,再以提取到的二值体数据为基础,对组织结构进行三维重建。传统的MArCHIng CubE(MC)算法在对微细结构进行三维重建时,可能会产生断裂现象,不能有效保持原始体数据的连通性。以血管体数据为例,针对医学图像中微细管道结构重建提出一种改进的MC算法,以保持重建后组织结构的连通性。In medical image processing,special tissues and structures are usually extracted as binary data for 3D reconstruction.Traditional Marching Cube(MC) algorithm may cause separateness to tenuous tissues and structures when reconstructing the extracted volume data,and the connectivity of volume data can not be well reserved.In this paper,an improved method to MC algorithm is proposed for the tenuous vasculature reconstruction in medical images that can keep the connectivity of tissues and structures.国家自然科学基金No.60701022---

Two fabrication processes of micro-tip

【中文文摘】描述各向异性腐蚀结合键合和各向异性腐蚀结合电镀来制作微尖的方法,利用这两种方法制作出了针尖直径小于25nm的金字塔形微尖,通过实验证明:这是两种有良好可控性和工艺要求不高的制作方法。微尖的成功制作为传感器微型化提供了一种很有潜力的新型检测方式,解决了检测的灵敏度问题。 【英文文摘】Serial pyramid tips whose diameters are smaller than 25nm are designed and fabricated, utilizing anisotropic etching combining with banding and anisotropic etching combining with electroplating respectively. It is proved that these are two effective processes to fabricate micro-tip with well controllability and low processing restriction. The success of the fabrication of micro-tip provides a new kind of potential measuring mode for sensor miniaturization, which improves their sensitivity greatly.福建省自然科学基金(A0110003);; 福建省科技计划重点项目(2002H022

The sequential coupling analysis of a cantilever driving by electrostatic force in an optical switch

【中文文摘】采用顺序耦合法 ,对光开关中的、静电驱动的悬臂梁进行分析 ,得出了悬臂梁的动态响应特性 ,并指出了空气阻尼对器件性能的影响 ,为微机械传感器的设计提供了有力的分析方法 【英文文摘】In the article a sequence coupling method is used for the analysis of a cantilever beam in an optical switch , which is drived by electrostatic force. From the analysis , the dynamic character of the beam has been gained, that pointing out the influence of air damping. The method is a powerful method for designing sensors of Micro Electronics Mechanical System(MEMS).国家自然科学基金项目 ( 5 0 2 75 12 7

Inter‐Story Shear‐Wave Velocity Measurement of a Damaged Building Using Microtremor Records

After disastrous earthquakes, estimating building damage levels objectively and quantitatively is very necessary and important for making decisions of buildings to be continuously used, repaired or demolished. The decline of natural frequency of buildings can be used to estimate the damage condition of the whole building quantitatively. However, in order to scrutiny building damage of inner stories, the deliberation on natural frequency is not enough. Therefore, in this paper, a method to estimate shear-wave velocity traveling within stories from microtremor records is presented. Using the presented method, shear-wave velocity traveling with in damaged 9-story and 14-story SRC residential building are extracted, based on which damage condition of this building is evaluated

Fabrication and application of silicon tip in sensor technology

【中文文摘】介绍了硅尖的制备及其在传感器技术中的应用。硅尖的制备方法可与现代IC工艺兼容且易削尖,故比其它材料微尖更实用。硅尖的应用随着制备工艺的改进与其它相关技术的进步必将得到新的开发。 【英文文摘】Fabrication of silicon tip is described.Then the ap pl ication of silicon tip in sensor technology is summarized.The method of fabricat ion of silicon tip is compatible with modern IC processing,in addition to the si licon tip can be easy to sharp,it is practical than other materials.It is believ ed that the application of silicon tip would be developed with the improvement o f fabrication technology and other correlation technology.福建省自然科学基金(A0110003);; 福建省科技计划重点项目(2002H022