【中文文摘】采用顺序耦合法 ,对光开关中的、静电驱动的悬臂梁进行分析 ,得出了悬臂梁的动态响应特性 ,并指出了空气阻尼对器件性能的影响 ,为微机械传感器的设计提供了有力的分析方法
【英文文摘】In the article a sequence coupling method is used for the analysis of a cantilever beam in an optical switch , which is drived by electrostatic force. From the analysis , the dynamic character of the beam has been gained, that pointing out the influence of air damping. The method is a powerful method for designing sensors of Micro Electronics Mechanical System(MEMS).国家自然科学基金项目 ( 5 0 2 75 12 7
