Design, Development and Implementation of the Position Estimator Algorithm for Harmonic Motion on the XY Flexural Mechanism for High Precision Positioning

This article presents a novel concept of the position estimator algorithm for voice coil actuators used in precision scanning applications. Here, a voice coil motor was used as an actuator and a sensor using the position estimator algorithm, which was derived from an electro-mechanical model of a voice coil motor. According to the proposed algorithm, the position of coil relative to the fixed magnet position depends on the current drawn, voltage across coil and motor constant of the voice coil motor. This eliminates the use of a sensor that is an integral part of all feedback control systems. Proposed position estimator was experimentally validated for the voice coil actuator in integration with electro-mechanical modeling of the flexural mechanism. The experimental setup consisted of the flexural mechanism, voice coil actuator, current and voltage monitoring circuitry and its interfacing with PC via a dSPACE DS1104 R&D microcontroller board. Theoretical and experimental results revealed successful implementation of the proposed novel algorithm in the feedback control system with positioning resolution of less than ±5 microns at the scanning speed of more than 5 mm/s. Further, proportional-integral-derivative (PID) control strategy was implemented along with developed algorithm to minimize the error. The position determined by the position estimator algorithm has an accuracy of 99.4% for single direction motion with the experimentally observed position at those instantaneous states

Design, control and error analysis of a fast tool positioning system for ultra-precision machining of freeform surfaces

This thesis was previously held under moratorium from 03/12/19 to 03/12/21Freeform surfaces are widely found in advanced imaging and illumination systems, orthopaedic implants, high-power beam shaping applications, and other high-end scientific instruments. They give the designers greater ability to cope with the performance limitations commonly encountered in simple-shape designs. However, the stringent requirements for surface roughness and form accuracy of freeform components pose significant challenges for current machining techniques—especially in the optical and display market where large surfaces with tens of thousands of micro features are to be machined. Such highly wavy surfaces require the machine tool cutter to move rapidly while keeping following errors small. Manufacturing efficiency has been a bottleneck in these applications. The rapidly changing cutting forces and inertial forces also contribute a great deal to the machining errors. The difficulty in maintaining good surface quality under conditions of high operational frequency suggests the need for an error analysis approach that can predict the dynamic errors. The machining requirements also impose great challenges on machine tool design and the control process. There has been a knowledge gap on how the mechanical structural design affects the achievable positioning stability. The goal of this study was to develop a tool positioning system capable of delivering fast motion with the required positioning accuracy and stiffness for ultra-precision freeform manufacturing. This goal is achieved through deterministic structural design, detailed error analysis, and novel control algorithms. Firstly, a novel stiff-support design was proposed to eliminate the structural and bearing compliances in the structural loop. To implement the concept, a fast positioning device was developed based on a new-type flat voice coil motor. Flexure bearing, magnet track, and motor coil parameters were designed and calculated in detail. A high-performance digital controller and a power amplifier were also built to meet the servo rate requirement of the closed-loop system. A thorough understanding was established of how signals propagated within the control system, which is fundamentally important in determining the loop performance of high-speed control. A systematic error analysis approach based on a detailed model of the system was proposed and verified for the first time that could reveal how disturbances contribute to the tool positioning errors. Each source of disturbance was treated as a stochastic process, and these disturbances were synthesised in the frequency domain. The differences between following error and real positioning error were discussed and clarified. The predicted spectrum of following errors agreed with the measured spectrum across the frequency range. It is found that the following errors read from the control software underestimated the real positioning errors at low frequencies and overestimated them at high frequencies. The error analysis approach thus successfully revealed the real tool positioning errors that are mingled with sensor noise. Approaches to suppress disturbances were discussed from the perspectives of both system design and control. A deterministic controller design approach was developed to preclude the uncertainty associated with controller tuning, resulting in a control law that can minimize positioning errors. The influences of mechanical parameters such as mass, damping, and stiffness were investigated within the closed-loop framework. Under a given disturbance condition, the optimal bearing stiffness and optimal damping coefficients were found. Experimental positioning tests showed that a larger moving mass helped to combat all disturbances but sensor noise. Because of power limits, the inertia of the fast tool positioning system could not be high. A control algorithm with an additional acceleration-feedback loop was then studied to enhance the dynamic stiffness of the cutting system without any need for large inertia. An analytical model of the dynamic stiffness of the system with acceleration feedback was established. The dynamic stiffness was tested by frequency response tests as well as by intermittent diamond-turning experiments. The following errors and the form errors of the machined surfaces were compared with the estimates provided by the model. It is found that the dynamic stiffness within the acceleration sensor bandwidth was proportionally improved. The additional acceleration sensor brought a new error source into the loop, and its contribution of errors increased with a larger acceleration gain. At a certain point, the error caused by the increased acceleration gain surpassed other disturbances and started to dominate, representing the practical upper limit of the acceleration gain. Finally, the developed positioning system was used to cut some typical freeform surfaces. A surface roughness of 1.2 nm (Ra) was achieved on a NiP alloy substrate in flat cutting experiments. Freeform surfaces—including beam integrator surface, sinusoidal surface, and arbitrary freeform surface—were successfully machined with optical-grade quality. Ideas for future improvements were proposed in the end of this thesis.Freeform surfaces are widely found in advanced imaging and illumination systems, orthopaedic implants, high-power beam shaping applications, and other high-end scientific instruments. They give the designers greater ability to cope with the performance limitations commonly encountered in simple-shape designs. However, the stringent requirements for surface roughness and form accuracy of freeform components pose significant challenges for current machining techniques—especially in the optical and display market where large surfaces with tens of thousands of micro features are to be machined. Such highly wavy surfaces require the machine tool cutter to move rapidly while keeping following errors small. Manufacturing efficiency has been a bottleneck in these applications. The rapidly changing cutting forces and inertial forces also contribute a great deal to the machining errors. The difficulty in maintaining good surface quality under conditions of high operational frequency suggests the need for an error analysis approach that can predict the dynamic errors. The machining requirements also impose great challenges on machine tool design and the control process. There has been a knowledge gap on how the mechanical structural design affects the achievable positioning stability. The goal of this study was to develop a tool positioning system capable of delivering fast motion with the required positioning accuracy and stiffness for ultra-precision freeform manufacturing. This goal is achieved through deterministic structural design, detailed error analysis, and novel control algorithms. Firstly, a novel stiff-support design was proposed to eliminate the structural and bearing compliances in the structural loop. To implement the concept, a fast positioning device was developed based on a new-type flat voice coil motor. Flexure bearing, magnet track, and motor coil parameters were designed and calculated in detail. A high-performance digital controller and a power amplifier were also built to meet the servo rate requirement of the closed-loop system. A thorough understanding was established of how signals propagated within the control system, which is fundamentally important in determining the loop performance of high-speed control. A systematic error analysis approach based on a detailed model of the system was proposed and verified for the first time that could reveal how disturbances contribute to the tool positioning errors. Each source of disturbance was treated as a stochastic process, and these disturbances were synthesised in the frequency domain. The differences between following error and real positioning error were discussed and clarified. The predicted spectrum of following errors agreed with the measured spectrum across the frequency range. It is found that the following errors read from the control software underestimated the real positioning errors at low frequencies and overestimated them at high frequencies. The error analysis approach thus successfully revealed the real tool positioning errors that are mingled with sensor noise. Approaches to suppress disturbances were discussed from the perspectives of both system design and control. A deterministic controller design approach was developed to preclude the uncertainty associated with controller tuning, resulting in a control law that can minimize positioning errors. The influences of mechanical parameters such as mass, damping, and stiffness were investigated within the closed-loop framework. Under a given disturbance condition, the optimal bearing stiffness and optimal damping coefficients were found. Experimental positioning tests showed that a larger moving mass helped to combat all disturbances but sensor noise. Because of power limits, the inertia of the fast tool positioning system could not be high. A control algorithm with an additional acceleration-feedback loop was then studied to enhance the dynamic stiffness of the cutting system without any need for large inertia. An analytical model of the dynamic stiffness of the system with acceleration feedback was established. The dynamic stiffness was tested by frequency response tests as well as by intermittent diamond-turning experiments. The following errors and the form errors of the machined surfaces were compared with the estimates provided by the model. It is found that the dynamic stiffness within the acceleration sensor bandwidth was proportionally improved. The additional acceleration sensor brought a new error source into the loop, and its contribution of errors increased with a larger acceleration gain. At a certain point, the error caused by the increased acceleration gain surpassed other disturbances and started to dominate, representing the practical upper limit of the acceleration gain. Finally, the developed positioning system was used to cut some typical freeform surfaces. A surface roughness of 1.2 nm (Ra) was achieved on a NiP alloy substrate in flat cutting experiments. Freeform surfaces—including beam integrator surface, sinusoidal surface, and arbitrary freeform surface—were successfully machined with optical-grade quality. Ideas for future improvements were proposed in the end of this thesis

Application of precision engineering for nanometre focussing of hard X-rays in synchrotron beam lines

This thesis was submitted for the degree of Master of Philosophy and awarded by Brunel University.Many modern synchrotron beamlines are able to focus X-rays to a few microns in size. Although the technology to achieve this is well established, performing routine experiments with such beams is still time consuming and requires careful set up. Furthermore there is a need to be able to carry out experiments using hard X-ray beams with even smaller beams of between 100nm and 10nm. There are focussing optics that are able to do this but integrating these optics into a stable and a usable experimental set up are challenging. Experiments can often take some hours and any change in position of the beam on the sample will adversely affect the quality of the results. Experiments will often require scanning of the beam across the sample and so mechanisms suitable for high resolution but stable scanning are required. Performing routine experiments with nanometre sized beams requires mechanical systems to be able to position the sample, focussing optics, detectors and diagnostics with significantly higher levels of stability and motion resolution than is required from so called micro focus beam lines. This dissertation critically reviews precision engineering and associated technologies that are relevant for building nano focus beamlines, and the following key issues are explored: • Long term position stability due to thermal effects • Short term position stability due to vibration • Position motion with nanometre incremental motion • Results of some tests are presented and recommendations given. Some test results are presented and guidance on designing nano focus beamlines presented.Diamond Light Sourc

Mechatronic Design, Dynamics, Controls, and Metrology of a Long-Stroke Linear Nano-Positioner

Precision motion systems find a broad range of application in various fields such as micro/nano machining tools, lithography scanners, testing and metrology machines, micro-assembly, biotechnology, optics manufacturing, magnetic data-storage, and optical disk drives. In this thesis, an ultraprecision motion stage (nano-positioner) is designed and built based on the concept of a low-cost desktop precision micro machine tool. Linear positioning performance requirements of such a machine tool are used as design objectives. The nano-positioner’s mechatronic design is carried out in such a way to integrate different components towards high performance in terms of high dynamic range, high feedrate, servo accuracy, and geometric accuracy. A self-aligning air-bearing/bushing arrangement is employed for frictionless motion with infinite theoretical resolution, as well as reduced assembly costs and footprint. The air discharge from the air bearings/bushings are also utilized for assistance in the removal of heat dissipated from actuator coils. A voice coil actuator (VCA) is chosen for continuous, non-contact operation, and designed from scratch. A number of dimensional variables of the cylindrical VCA are set according to required forces, motion range, production/assembly tolerances, magnet availability, leakage flux, etc. The remainder of variables is determined according to two novel optimization objectives defined independent of the coil wire gauge, which separately aim for maximum stage acceleration capacity and minimum heat generation per generated force. The actuators are operated in a complementary double configuration for control simplicity which allows for a straightforward and robust design for controller stability. Controller design is carried out at current control and position control levels. Current frequency response of the voice coil actuators is obtained, and they are observed to possess additional high frequency dynamics on top of the expected first order lumped resistance and inductance model. These are attributed to the eddy currents in the stator structure. A closed loop bandwidth of better than 907 [Hz] is achieved using the integrator plus lead current controller. The position controller is designed using the identified overall plant which includes the moving body, current dynamics and the force response. The lead-lag position controller is tuned at 450 [Hz] cross-over frequency and 40 [deg] phase margin. The control error during the tracking of a step trajectory filtered at 40 [Hz] is found to vary between ±5 [nm], indicating a 4 million dynamic range over the 20 [mm] stroke length. Dynamic Error Budgeting (DEB) method has been used to resolve the components of the error, and the largest contributor is found to be the sensor noise. The actual positioning error, which is an ideal signal excluding sensor noise is estimated using the same methodology and disturbance models, and it is found to be 0.680 [nm] root-mean-square (RMS). For the trajectory following case, experiments are carried out with and without a compensation scheme for encoder quadrature detection errors. The compensation is observed to reduce the ±45 [nm] control error to ±15 [nm]. For the assessment of stage performance and the verification of design choices, modal testing and laser interferometric metrology have been applied to the linear nano-positioner. For modal testing, two independent methods are used and their predictions are compared. In the first method, a graphical approach, namely the peak-picking method, is employed to identify modal parameters (natural frequency and damping ratio) and mode shapes. In the second method, a modal testing software package is used to identify the same using automated algorithms. The first mode, which is the most critical one for controller design, is identified at 65 [Hz] as a roll mode, followed by horizontal, vertical, and pitch modes at 450, 484, and 960 [Hz], respectively. The geometric errors of the system are identified using laser interferometric measurements, using various optical setups for linear and angular components. An error budget is formed using these results, together with the estimated thermal errors and servo errors. The accuracy of the stage is determined to be ±5.0 [μm], which had a ±1.1 [μm] non-repeatable component. In the future, the controller structure can be enhanced with an additional pole beyond the crossover frequency, in order to suppress unnecessary oscillations of the control effort signal around the set point due to the encoder noise transmitted to the controller input. Using an estimation of air bearing pitch stiffness from the catalogue values for normal stiffness, the roll mode was predicted at 672 [Hz]. The much lower natural frequency for that mode identified in modal testing (65 [Hz]) can be attributed to the shortcomings of the estimation method, primarily the neglect of the distortion of the supporting air cushion at the bearing interface due to out of plane rotations. In the future, experimental data can be obtained to characterize the air bearing pitch stiffness more accurately. It was observed that the preferred compensation scheme for the encoder quadrature detection errors is unable to match third and fourth harmonics of the encoder measurement error sufficiently. In the future, better compensation methods can be investigated for an improved match. During laser interferometric measurements, measurement uncertainty due to laser beam misalignment and air turbulence were inferred to be high. In the future, better ways to align the laser with the optics, as well as methods for improved assessment and compensation of environmental effects can be investigated

Mechatronics Methods for Mitigating Undesirable Effects of Pre-motion Friction in Nanopositioning Stages with Mechanical Bearings

Nanopositioning (NP) stages are used to for precise positioning in a wide range of nanotech processes, ranging from substrate patterning to micro additive manufacturing. They are often used for point-to-point (P2P) motions, where the stage is commanded to travel to and settle within a pre-specified window of the target position, and for tracking motions, where the stage is commanded to follow a reference trajectory. The settling time, in-position stability and tracking accuracy of NP stages directly affects productivity and quality of the associated processes or manufactured products. NP stages can be constructed using flexure, fluidic, magnetic or mechanical bearings (i.e., sliding and, especially, rolling-element bearings). Of these choices, mechanical bearings are the most cost-effective, and are currently the only commercially viable option for a growing number of NP applications that must be performed in high vacuum environments. However, mechanical-bearing-guided NP stages experience nonlinear pre-motion (i.e., pre-sliding/pre-rolling) friction which adversely affects their precision and speed. Control-based compensation methods, commonly used to address this problem, often suffer from poor robustness and limited practicality due to the complexity and extreme variability of friction dynamics at the micro scale. Therefore, this dissertation proposes three novel mechatronics methods, featuring a combination of mechanical design and control strategy, as more effective and robust solutions to mitigate the undesirable effects of pre-motion friction. The first approach is vibration assisted nanopositioning (VAN), which utilizes high frequency vibration (i.e., dither) to mitigate the low speed (slow settling) of mechanical-bearing-guided NP stages during P2P motions. VAN allows the use of dither to mitigate pre-motion friction while maintaining nanometer-level positioning precision. P2P positioning experiments on an in-house built VAN stage demonstrates up to 66% reductions in the settling time, compared to a conventional mechanical bearing NP stage. A major shortcoming of VAN is that it increases the cost of NP stages. To address this limitation, a friction isolator (FI) is proposed as a simple and more cost-effective method for mitigating pre-motion friction. The idea of FI is to connect the mechanical bearing to the NP stage using a joint that is very compliant in the motion direction, thus effectively isolating the stage from bearing friction. P2P positioning tests on a NP stage equipped with FI prototypes demonstrate up to 84% reductions in the settling time. The introduction of FI also enables accurate and robust reductions of motion errors during circular tracking tests, using feedforward compensation with a simple friction model. One pitfall of FI is that it causes increased error of the stage during in position. Therefore, a semi-active isolator (SAI) is proposed to mitigate the slow settling problem using the FI, while maintaining the benefits of friction on in-position stability. The proposed SAI, which connects the bearing and NP stage, is equipped with solenoids to switch its stiffness from low, during settling, to high once the stage gets into position. P2P experiments demonstrate up to 81% improvements in the settling time without sacrificing in-position stability. The proposed mechatronics methods are compared and FI stands out as a result of its simplicity, cost-effectiveness and robust performance. Therefore, the influence of design parameters on the effectiveness of FI are investigated to provide design guidelines. It is recommended that the FI should be designed with the smallest stiffness in the motion direction, while satisfying other requirements such as in-position stability and off-axis rigidity.PHDMechanical EngineeringUniversity of Michigan, Horace H. Rackham School of Graduate Studieshttps://deepblue.lib.umich.edu/bitstream/2027.42/155296/1/terrydx_1.pd

Control of an over-actuated nanopositioning system by means of control allocation

This Master’s Thesis is devoted to the analysis and design of a control structure for the nanopositioning system LAU based on the dynamic control allocation technique. The objective is to control the vertical displacement with nanometer precision under a control effort distribution criterion among the actuator set. In this case, the pneumatic actuator is used as a passive gravity compensator while the voice coil motor generates the transient forces. The analysis of the system characteristics allows defining the design criterion for the control allocation. In this direction, the proposed dynamic control allocation stage considers a frequency distribution of the control effort. The lower frequency components are assigned to the pneumatic actuator while the higher frequencies are handled by the voice coil drive. The significant actuator dynamics are compensated through a Kalman filter approach. The position controller is based on a feedback linearization framework with a disturbance observer for enhanced robustness. The experimental validation demonstrates the feasibility of the proposed technique.Diese Masterarbeit widmet sich der Analyse und dem Entwurf einer Regelungsstruktur für das Nanopositioniersystem LAU. Dabei werden Methoden untersucht, welche das notwendige Stellsignal auf zwei Aktoren aufteilen. Ziel ist es, die vertikale Verschiebung des LAU mit Nanometerpräzision zu regeln. In diesem Fall wird der pneumatische Aktor als passiver Schwerkraftkompensator verwendet, während die elktromagnetische Tauchspule die transienten Kräfte erzeugt. Die Analyse der Eigenschaften des LAUSystems ermöglicht die Definition der Entwurfskriterien zur Aufteilung der Stellgröße. In dieser Richtung berücksichtigt die vorgeschlagene dynamische Methode eine Aufteilung der Stellgröße bezüglich der Frequenzanteile. Die niederfrequenten Komponenten werden dem pneumatischen Aktor zugeordnet. Dem elektromagnetische Aktor werden die verbliebenen hochfrequenten Anteile zugeordnet. Die signifikanten Effekte der Aktordynamik in Bezug auf die Bewegungsdynamik werden durch einen Kalman- Filteransatz kompensiert. Nichtlineare Streckenanteile werden basierend auf dem Modell und einem Störbeobachter kompensiert, sodass der verbleibende Anteil des Positionsreglers mit linearen Methoden entworfen werden kann. Die experimentelle Validierung zeigt die Effektivität des untersuchten Konzeptes.Tesi

A compliant self-stabilization nanopositioning device with modified active–passive hybrid vibration isolation strategy

Micro/mini light-emitting diodes (LEDs) display panel inspection and repairs have a high demand for vibration isolating devices to protect industrial-level atomic force microscopes (AFM scanning head) against vibrations. The motivation of this work is to combine the advantages of both passive and active vibration isolation strategies to improve inspection performance. The developed self-stabilization device achieves this objective with a design that incorporates a suspension-type passive vibration isolation unit and integrates it with the modified active–passive hybrid (MAPH) vibration isolation strategy using piezoelectric ceramics (PZT) and voice coil motors (VCM) as compensators. First, the design, modeling, and optimization of a self-stabilization device are presented based on the MAPH vibration isolation strategy. To satisfy the requirements of vibration isolation performance and a lightweight design, a multiobjective optimization task was conducted. Next, a tailor-made double compensating PID controller was designed to allow this mechanism to run in the MAPH method to effectively isolate vibrations. Finally, a series of validation experiments, including passive vibration isolation performance tests and MAPH closed-loop tests, were applied. From 1 to 500 Hz, more than 98% frequency domain achieved a vibration isolation rate of 90%, the vibration amplification effect of the passive vibration isolation was significantly suppressed, the steady-state positioning accuracy reached ±0.1μ m, load capacity was up to 2.5 kg, the attenuation ratio of the disturbances reached up to 70%, and the heat of the VCM was effectively reduced. All results comprehensively confirmed that the developed compliant MAPH vibration isolation system has achieved a satisfactory self-stabilization function

Diagnostic Methods for the Characterization of a Helicon Plasma Thruster

Programa de Doctorado en Mecánica de Fluidos por la Universidad Carlos III de Madrid; la Universidad de Jaén; la Universidad de Zaragoza; la Universidad Nacional de Educación a Distancia; la Universidad Politécnica de Madrid y la Universidad Rovira iPresidente: José Javier Honrubia Checa.- Secretario: José Miguel Reynolds Barredo.- Vocal: Eduardo de la Ca

39th Aerospace Mechanisms Symposium

The Aerospace Mechanisms Symposium (AMS) provides a unique forum for those active in the design, production, and use of aerospace mechanisms. A major focus is the reporting of problems and solutions associated with the development and flight certification of new mechanisms. Organized by the Mechanisms Education Association, NASA Marshall Space Flight Center (MSFC) and Lockheed Martin Space Systems Company (LMSSC) share the responsibility for hosting the AMS. Now in its 39th symposium, the AMS continues to be well attended, attracting participants from both the United States and abroad. The 39th AMS was held in Huntsville, Alabama, May 7-9, 2008. During these 3 days, 34 papers were presented. Topics included gimbals and positioning mechanisms, tribology, actuators, deployment mechanisms, release mechanisms, and sensors. Hardware displays during the supplier exhibit gave attendees an opportunity to meet with developers of current and future mechanism components