Flexible thin polymer waveguide Bragg grating sensor foils for strain sensing

This paper demonstrates that epoxy-based single mode polymer waveguides with Bragg gratings can be realized in very thin (down to 50 micron) polymer foils which are suitable for strain sensing when integrated inside glass fiber reinforced polymer composite materials. The single mode waveguides were fabricated using laser direct-write lithography and the gratings were realized using nanoimprint lithography. These steps were performed on a temporary rigid carrier substrate and afterwards the functional layers were released yielding the thin, flexible sensor foils which can be laser-cut to the required dimensions. The Bragg grating-based polymer waveguide sensor foils were characterized before and after embedding into the composite. As expected, there was a blue shift in the reflection spectrum because of residual strain due to the embedding process. However, the quality of the signal did not degrade after embedding, both for 50 and 100 micron thick sensor foils. Finally, the sensitivity to strain of the embedded sensors was determined using a tensile test and found to be about 1 pm / microstrain

Device Modelling of Silicon Based High-Performance Flexible Electronics

The area of flexible electronics is rapidly expanding and evolving. With applications requiring high speed and performance, ultra-thin silicon-based electronics has shown its prominence. However, the change in device response upon bending is a major concern. In absence of suitable analytical and design tool friendly model, the behavior under bent condition is hard to predict. This poses challenges to circuit designer working in the bendable electronics field, in laying out a design that can give a precise response in a stressed condition. This paper presents advances in this direction and investigates the effect of compressive and tensile stress on the performance of NMOS and PMOS transistor and a touch sensor comprising a transistor and piezoelectric capacitor

Implantable micromechanical parylene-based pressure sensors for unpowered intraocular pressure sensing

This paper presents the first implantable, unpowered, parylene-based microelectromechanical system (MEMS) pressure sensor for intraocular pressure (IOP) sensing. From in situ mechanical deformation of the compliant spiral-tube structures, this sensor registers pressure variations without electrical or powered signal transduction of any kind. Micromachined high-aspect-ratio polymeric hollow tubes with different geometric layouts are implemented to obtain high-sensitivity pressure responses. An integrated device packaging method has been developed toward enabling minimally invasive suture-less needle-based implantation of the device. Both in vitro and ex vivo device characterizations have successfully demonstrated mmHg resolution of the pressure responses. In vivo animal experiments have also been conducted to verify the biocompatibility and functionality of the implant fixation method inside the eye. Using the proposed implantation scheme, the pressure response of the implant can be directly observed from outside the eye under visible light, with the goal of realizing convenient, direct and faithful IOP monitoring in glaucoma patients

Tactile feedback display with spatial and temporal resolutions.

We report the electronic recording of the touch contact and pressure using an active matrix pressure sensor array made of transparent zinc oxide thin-film transistors and tactile feedback display using an array of diaphragm actuators made of an interpenetrating polymer elastomer network. Digital replay, editing and manipulation of the recorded touch events were demonstrated with both spatial and temporal resolutions. Analog reproduction of the force is also shown possible using the polymer actuators, despite of the high driving voltage. The ability to record, store, edit, and replay touch information adds an additional dimension to digital technologies and extends the capabilities of modern information exchange with the potential to revolutionize physical learning, social networking, e-commerce, robotics, gaming, medical and military applications

Electromechanical Reliability Testing of Three-Axial Silicon Force Sensors

This paper reports on the systematic electromechanical characterization of a new three-axial force sensor used in dimensional metrology of micro components. The siliconbased sensor system consists of piezoresistive mechanicalstress transducers integrated in thin membrane hinges supporting a suspended flexible cross structure. The mechanical behavior of the fragile micromechanical structure isanalyzed for both static and dynamic load cases. This work demonstrates that the silicon microstructure withstands static forces of 1.16N applied orthogonally to the front-side of the structure. A statistical Weibull analysis of the measured data shows that these values are significantly reduced if the normal force is applied to the back of the sensor. Improvements of the sensor system design for future development cycles are derived from the measurement results.Comment: Submitted on behalf of TIMA Editions (http://irevues.inist.fr/tima-editions

Circumferential pressure probe

A probe for measuring circumferential pressure inside a body cavity is disclosed. In the preferred embodiment, a urodynamic pressure measurement probe for evaluating human urinary sphincter function is disclosed. Along the length of the probe are disposed a multiplicity of deformable wall sensors which typically comprise support tube sections with flexible side wall areas. These are arranged along the length of the probe in two areas, one just proximal to the tip for the sensing of fluid pressure inside the bladder, and five in the sensing section which is positioned within the urethra at the point at which the urinary sphincter constricts to control the flow of urine. The remainder of the length of the probe comprises multiple rigid support tube sections interspersed with flexible support tube sections in the form of bellows to provide flexibility

Development of intelligent McKibben actuator

The aim of this study is to develop an intelligent McKibben actuator with an integrated soft displacement sensor inside, so that displacement of this actuator can be controlled without having any extra devices attached. In addition, the high compliance which is a positive feature of the McKibben actuator is still conserved. This paper consists of four main parts. First of all, different types of soft displacement sensors made out of rubber were composed, and tested for their functional characteristics. Secondly, the intelligent McKibben actuator was developed with the soft displacement sensor incorporated within. Then, experiments of the position servo control with a single intelligent McKibben actuator were carried out. At last a robot arm mechanism was designed with two intelligent McKibben actuators, and those experimental results showed a great potential for its future applications.</p