Influence of the structural non–linearity on the performance o fan electret–based vibration energy harvester

Films of electret material are currently used to cover the surface of electrodes of some vibration capacitive harvesters based on deformable beams, clamped at both ends. Nevertheless, performance of this device is often predicted through some simplified electromechanical model, which neglects the effect of geometric nonlinearity due to a mechanical coupling between the axial and flexural behaviors of the clamped beam. Stiffening of beam and nonlinear behaviour in dynamics is herein investigated, by resorting to a distributed model of the electromechanical copuling of the vibration harvester, based on the Finite Element Method. Influence upon the performance of the energy conversion is then analyzed and an optimization of the configuration is proposed

Nonlinear Modeling of MEMS Fixed-Fixed beams

This dissertation studies critical topics associated with MEMS fixed-fixed beams. One of the typical devices of fixed-fixed beams is radio frequency microelectromechanical system (MEMS) capacitive switches. The interesting topic for this device includes the instability at the pull-in voltage; the switches’ deformation characteristics when subject to an electrostatic force; nonlinear stretching effects, and the capacitance calculation in small scale. Specifically, the accuracy of parallel-plate theory in calculating the pull-in voltage and capacitance is investigated. The study shows that applying average displacement rather than maximum displacement into parallel-plate theory demonstrates better accuracy. The improvement increases with the bottom stationary electrode to moveable electrode ratio and it reaches 50% when the ratio is equal to 1. Besides average displacement, the nonlinear stretching effect and empirical linear correction coefficients are also added to the parallel-plate model to extend model\u27s validity range. In order to improve the lifetime of RF MEMS capacitive switch, a relationship between switches\u27 geometry and membrane strain is derived, which helps avoid switches operating beyond the elastic region.Furthermore, this dissertation presents a new coupled hyperbolic electro-mechanical model that is an improvement on the classical parallel-plate approximation. The model employs a hyperbolic function to account for the beam’s deformed shape and electrostatic field. Based on this, the model accurately calculates the deflection of a fixed-fixed beam subjected to an applied voltage and the switch’s capacitance-voltage characteristics without using parallel-plate assumption. For model validation, the model solutions are compared with ANSYS finite element results and experimental data. It is found that the model works especially well in residual stress dominant and stretching dominant cases. The model shows that the nonlinear stretching significantly increases the pull-in voltage and extend the beam’s maximum travel range. Based on the model, a graphene nanoelectromechanical systems (NEMS) resonator is designed and the performance agrees very well with the experimental data. The proposed coupled hyperbolic model demonstrates its capacity to guide the design and optimization of both RF MEMS capacitive switches and NEMS devices

Using the Nonlinear Duffing Effect of Piezoelectric Micro-Oscillators for Wide-Range Pressure Sensing

This paper investigates the resonant behaviour of silicon-based micro-oscillators with a length of 3600 µm, a width of 1800 µm and a thickness of 10 µm over a wide range of ambient gas (N2 ) pressures, extending over six orders of magnitude from 10−3 mbar to 900 mbar. The oscillators are actuated piezoelectrically by a thin-film aluminium-nitride (AlN) layer, with the cantilever coverage area being varied from 33% up to 100%. The central focus is on nonlinear Duffing effects, occurring at higher oscillation amplitudes. A theoretical background is provided. All relevant parameters describing a Duffing oscillator, such as stiffness parameters for each coverage size as well as for different bending modes and more complex modes, are extracted from the experimental data. The so-called 2nd roof-tile-shaped mode showed the highest stiffness value of −97.3·107 m−2 s −2 . Thus, it was chosen as being optimal for extended range pressure measurements. Interestingly, both a spring softening effect and a spring hardening effect were observed in this mode, depending on the percentage of the AlN coverage area. The Duffing-effect-induced frequency shift was found to be optimal for obtaining the highest pressure sensitivity, while the size of the hysteresis loop is also a very useful parameter because of the possibility of eliminating the temperature influences and long-term drift effects of the resonance frequency. An reasonable application-specific compromise between the sensitivity and the measurement range can be selected by adjusting the excitation voltage, offering much flexibility. This novel approach turns out to be very promising for compact, cost-effective, wide-range pressure measurements in the vacuum range

Bond graph simulation of error propagation in position estimation of a hydraulic cylinder using low cost accelerometers

The indirect calculation from acceleration of transversal displacement of the piston inside the body of a double effect linear hydraulic cylinder during its operating cycle is assessed. Currently an extensive effort exists in the improvement of the mechanical and electronic design of the highly sophisticated MEMS accelerometers. Nevertheless, the predictable presence of measurement errors in the current commercial accelerometers is the main origin of velocity and displacement measurement deviations during integration of the acceleration. A bond graph numerical simulation model of the electromechanical system has been developed in order to forecast the effect of several measurement errors in the use of low cost two axes accelerometers. The level of influence is assessed using quality indicators and visual signal evaluation, for both simulations and experimental results. The obtained displacements results are highly influenced by the diverse dynamic characteristics of each measuring axis. The small measuring errors of a simulated extremely high performance sensor generate only moderate effects in longitudinal displacement but deep deviations in the reconstruction of piston transversal movements. The bias error has been identified as the source of the higher deviations of displacement results; although, its consequences can be easily corrected.Peer ReviewedPostprint (published version

Mechanical Properties of Low Dimensional Materials

Recent advances in low dimensional materials (LDMs) have paved the way for unprecedented technological advancements. The drive to reduce the dimensions of electronics has compelled researchers to devise newer techniques to not only synthesize novel materials, but also tailor their properties. Although micro and nanomaterials have shown phenomenal electronic properties, their mechanical robustness and a thorough understanding of their structure-property relationship are critical for their use in practical applications. However, the challenges in probing these mechanical properties dramatically increase as their dimensions shrink, rendering the commonly used techniques inadequate. This Dissertation focuses on developing techniques for accurate determination of elastic modulus of LDMs and their mechanical responses under tensile and shear stresses. Fibers with micron-sized diameters continuously undergo tensile and shear deformations through many phases of their processing and applications. Significant attention has been given to their tensile response and their structure-tensile properties relations are well understood, but the same cannot be said about their shear responses or the structure-shear properties. This is partly due to the lack of appropriate instruments that are capable of performing direct shear measurements. In an attempt to fill this void, this Dissertation describes the design of an inexpensive tabletop instrument, referred to as the twister, which can measure the shear modulus (G) and other longitudinal shear properties of micron-sized individual fibers. An automated system applies a pre-determined twist to the fiber sample and measures the resulting torque using a sensitive optical detector. The accuracy of the instrument was verified by measuring G for high purity copper and tungsten fibers. Two industrially important fibers, IM7 carbon fiber and Kevlar® 119, were found to have G = 17 and 2.4 GPa, respectively. In addition to measuring the shear properties directly on a single strand of fiber, the technique was automated to allow hysteresis, creep and fatigue studies. Zinc oxide (ZnO) semiconducting nanostructures are well known for their piezoelectric properties and are being integrated into several nanoelectro-mechanical (NEMS) devices. In spite of numerous studies on the mechanical response of ZnO nanostructures, there is not a consensus in its measured bending modulus (E). In this Dissertation, by employing an all-electrical Harmonic Detection of Resonance (HDR) technique on ZnO nanowhisker (NW) resonators, the underlying origin for electrically-induced mechanical oscillations in a ZnO NW was elucidated. Based on visual detection and electrical measurement of mechanical resonances under a scanning electron microscope (SEM), it was shown that the use of an electron beam as a resonance detection tool alters the intrinsic electrical character of the ZnO NW, and makes it difficult to identify the source of the charge necessary for the electrostatic actuation. A systematic study of the amplitude of electrically actuated as-grown and gold-coated ZnO NWs in the presence (absence) of an electron beam using an SEM (dark-field optical microscope) suggests that the oscillations seen in our ZnO NWs are due to intrinsic static charges. In experiments involving mechanical resonances of micro and nanostructured resonators, HDR is a tool for detecting transverse resonances and E of the cantilever material. To add to this HDR capability, a novel method of measuring the G using HDR is presented. We used a helically coiled carbon nanowire (HCNW) in singly-clamped cantilever configuration, and analyzed the complex (transverse and longitudinal) resonance behavior of the nonlinear geometry. Accordingly, a synergistic protocol was developed which (i) integrated analytical, numerical (i.e., finite element using COMSOL ®) and experimental (HDR) methods to obtain an empirically validated closed form expression for the G and resonance frequency of a singly-clamped HCNW, and (ii) provided an alternative for solving 12th order differential equations. A visual detection of resonances (using in situ SEM) combined with HDR revealed intriguing non-planar resonance modes at much lower driving forces relative to those needed for linear carbon nanotube cantilevers. Interestingly, despite the presence of mechanical and geometrical nonlinearities in the HCNW resonance behavior, the ratio of the first two transverse modes f2/f1 was found to be similar to the ratio predicted by the Euler-Bernoulli theorem for linear cantilevers