웨어러블 센서 및 에너지 소자의 공간 신호 및 열 전달 증진을 위한 나노복합체를 이용한 기계적 순응성 향상

학위논문 (박사) -- 서울대학교 대학원 : 공과대학 전기·정보공학부, 2020. 8. 홍용택.Electronic skin (e-skin) that mimics mechanical and functional properties of human skin has a strong impact on the field of wearable electronics. Beyond being just wearable, e-skin seamlessly interfaces human, machine, and environment by perfectly adhering to soft and time-dynamic three-dimensional (3D) geometries of human skin and organs. Real-time and intimate access to the sources of physical and biological signals can be achieved by adopting soft or flexible electronic sensors that can detect pressure, strain, temperature, and chemical substances. Such extensions in accessible signals drastically accelerate the growth of the Internet of Things (IoT) and expand its application to health monitoring, medical implants, and novel human-machine interfaces. In wearable sensors and energy devices, which are essential building blocks for skin-like functionalities and self-power generation in e-skin, spatial signals and heat are transferred from time-dynamic 3D environments through numerous geometries and electrical devices. Therefore, the transfer of high-fidelity signals or a large amount of heat is of great importance in these devices. The mechanical conformability potentially enhances the signal/heat transfer by providing conformal geometries with the 3D sources. However, while the relation between system conformability and electrical signals has been widely investigated, studies on its effect on the transfer of other mechanical signals and heat remain in their early stages. Furthermore, because active materials and their designs for sensors and energy devices have been optimized to maximize their performances, it is challenging to develop ultrathin or soft forms of active layers without compromising their performances. Therefore, many devices in these fields suffer from poor spatial signal/heat transfer due to limited conformability. In this dissertation, to ultimately augment the functionalities of wearable sensors and energy devices, comprehensive studies on conformability enhancement via composite materials and its effect on signal/heat transfer, especially in pressure sensors and thermoelectric generators (TEGs), are conducted. A solution for each device is carefully optimized to reinforce its conformability, taking account of the structure, characteristics, and potential advantages of the device. As a result, the mechanical conformability of each device is significantly enhanced, improving signal/heat transfer and consequently augmenting its functionalities, which have been considered as tough challenges in each area. The effect of the superior conformability on signal/heat transfer is systematically analyzed via a series of experiments and finite element analyses. Demonstrations of practical wearable electronics show the feasibility of the proposed strategies. For wearable pressure sensors, ultrathin piezoresistive layers are developed using cellulose/nanowire nanocomposites (CNNs). The unique nanostructured surface enables unprecedentedly high sensor performances such as ultrahigh sensitivity, wide working range, and fast response time without microstructures in sensing layers. Because the ultrathin pressure sensor perfectly conforms to 3D contact objects, it transfers pressure distribution into conductivity distribution with high spatial fidelity. When integrated with a quantum dot-based electroluminescent film, the transferred high-resolution pressure distribution is directly visualized without the need for pixel structures. The electroluminescent skin enables real-time smart touch interfaces that can identify the user as well as touch force and location. For high-performance wearable TEGs, an intrinsically soft heat transfer and electrical interconnection platform (SHEP) is developed. The SHEP comprises AgNW random networks for intrinsically stretchable electrodes and magnetically self-assembled metal particles for soft thermal conductors (STCs). The stretchable electrodes lower the flexural rigidity, and the STCs enhance the heat exchange capability of the soft platform, maintaining its softness. As a result, a compliant TEG with SHEPs forms unprecedentedly conformal contact with 3D heat sources, thereby enhancing the heat transfer to the TE legs. This results in significant improvement in thermal energy harvesting on 3D surfaces. Self-powered wearable warning systems indicating an abrupt temperature increase with light-emitting alarms are demonstrated to show the feasibility of this strategy. This study provides a systematic and comprehensive framework for enhancing mechanical conformability of e-skin and consequently improving the transfer of spatial signals and energy from time-dynamic and complex 3D surfaces. The framework can be universally applied to other fields in wearable electronics that require improvement in signal/energy transfer through conformal contact with 3D surfaces. The materials, manufacturing methods, and devices introduced in this dissertation will be actively exploited in practical and futuristic applications of wearable electronics such as skin-attachable advanced user interfaces, implantable bio-imaging systems, nervous systems in soft robotics, and self-powered artificial tactile systems.인간 피부의 기계적 특성 및 기능을 모방하는 전자피부(electronic skin, e-skin)는 웨어러블 전자기기 분야의 트렌드를 바꾸고 있다. 기존의 웨어러블 전자기기가 단지 착용하는데 그쳤다면, 전자피부는 인간의 피부와 장기 표면에 완벽하게 붙어 동작함으로써 기존에는 접근 불가능 했던 다양한 생체 신호를 높은 신뢰도로 감지하고 처리할 수 있다. 실시간으로 감지 가능한 생체 신호의 확장은 사물인터넷(Internet of Things, IoT)의 성장을 획기적으로 가속화하고 헬스케어, 의료용 임플란트, 소프트 로봇 및 새로운 휴먼 머신 인터페이스로의 응용을 가능하게 한다. 전자피부의 필수요소인 센서와 에너지 소자에서는 삼차원 표면의 공간신호와 열에너지를 손실 없이 전달하는 것이 매우 중요하다. 이러한 공간 신호와 열에너지는 다양한 기하 구조와 전자소자를 거쳐 처리 가능한 신호로 전달된다. 이 과정에서 3차원 표면에 빈틈없이 붙는 기계적 순응성(mechanical conformability)은 공간신호와 열에너지를 왜곡 없이 전달하는 것을 가능하게 한다. 전자피부의 기계적 순응성을 증가시키는 방법은 크게 다음과 같이 두 가지로 나눌 수 있다. (1) 전자피부를 두께를 낮추는 전략과 (2) 전자피부의 영률(Youngs modulus)을 낮추어 고무와 같이 부드럽게 만드는 전략이다. 하지만, 기존 센서 및 에너지 소자를 위한 재료와 디자인이 각 장치의 성능을 향상시키는 것에 초점이 맞추어져 있기 때문에, 고성능을 유지하면서 매우 얇거나 연질 형태의 소자를 개발하는 것은 매우 도전적이었다. 따라서 고유연성을 확보하지 못한 기존 센서와 에너지 소자는 공간 신호 및 열 전달이 심각하게 저해되고, 이로 인해 공간 압력의 왜곡, 열전 효율의 저하와 같은 한계를 보여준다. 이 논문에서는 웨어러블 센서와 에너지 소자의 비약적인 기능 향상을 궁극적인 목표로, 각 소자에 최적화된 재료와 제작방식, 구조를 이용해 이들의 기계적 순응성을 획기적으로 높이고, 이를 통한 공간 신호 및 열 전달의 향상을 심도 있게 분석한다. 특히, 두께를 낮추거나 영률을 낮추는 두 가지 전략 중 각 소자에 가장 적합한 전략을 선택하고, 체계적인 방법론을 적용하여 이들의 기계적 순응성과 공간 신호 및 열 전달을 증진시킨다. 이 과정에서 나노융복합재료가 각 전략을 구현하는 핵심 요소로 작용한다. 각 소자에 따른 구체적인 연구 내용은 다음과 같다. 첫째, 압력 센서의 경우 초박막 셀룰로오스/나노와이어 복합체를 이용하여 고성능의 저항방식 압력 센서를 개발한다. 이러한 복합체는 표면에 형성된 고유한 나노구조 덕분에 마이크로구조체를 이용한 기존 압력 센서보다 월등한 성능을 보여준다. 특히, 1 마이크로 미터 수준의 매우 얇은 두께로 인해 접촉 물체의 복잡한 형상에 완벽하게 순응할 수 있고, 이로 인해 고해상도 압력 분포를 왜곡 없이 저항 분포로 전달할 수 있다. 이러한 압력 센서를 양자 점 발광소자와 결합하여 고해상도의 압력분포를 높은 정밀도로 이미징 가능한 발광 소자를 보고한다. 둘째, 열전 소자의 경우 기존의 금속 전극으로 인한 낮은 유연성과 탄성중합체의 낮은 열 전도도를 극복하기 위해 열 전달 능력이 획기적으로 향상된 낮은 영률의 소프트 전극 플랫폼을 개발한다. 소프트 플랫폼은 내부에 은 나노와이어 기반의 신축성 전극을 갖고 있으며, 자기장을 통해 자가 정렬된 금속 입자들이 효과적으로 외부 열을 열전 재료에 전달한다. 이를 기반으로 제작된 고유연성 열전 소자는 삼차원 열원에 빈틈없이 붙어 열 손실을 최소화 하며, 이로 인해 높은 열전 효율을 달성한다. 이 논문은 다양한 전자소자의 유연성을 증진시키고 이를 통한 공간 신호 및 열 전달의 향상을 도모하고 분석하는 체계적이고 종합적인 방법론을 제시했다는 데 큰 의의가 있다. 제안된 방법론은 분야에 국한되지 않고 다양한 소자의 개발에 적용할 수 있어 웨어러블 기기와 전자피부 분야의 기계적, 기능적 발전에 크게 기여할 것으로 기대된다. 뿐만 아니라 이 연구에서 최초로 개발한 소재 및 소자들은 다양한 웨어러블 어플리케이션과 산업에 곧바로 융합되고 응용될 수 있다. 이를 통해 신체 부착 및 삽입 가능한 생체 이미징 시스템, 소프트 로봇을 위한 신경 체계, 자가 발전이 가능한 인공 감각 기관, 가상 및 증강 현실을 위한 새로운 유저 인터페이스와 같은 미래 지향적 융합 어플리케이션의 실현을 앞당길 것으로 기대된다.Chapter 1. Introduction 1 1.1 Wearable Electronics and Electronic Skin 1 1.2 Mechanical Conformability of Electronic Skin 6 1.2.1 Definition and Advantages 6 1.2.2 Thickness-Based Conformability 11 1.2.3 Softness-Based Conformability 15 1.3 Conformability for Enhanced Signal/Heat Transfer in Wearable Sensors and Energy Devices 19 1.3.1 Conformability for Spatial Signal Transfer in Pressure Sensors 20 1.3.2 Conformability for Heat Transfer in Thermoelectric Generators 22 1.4 Motivation and Organization of This Dissertation 24 Chapter 2. Ultrathin Cellulose Nanocomposites for High-Performance Piezoresistive Pressure Sensors 28 2.1 Introduction 28 2.2 Experimental Section 31 2.2.1 Fabrication of the CNNs and Pressure Sensors 31 2.2.2 Measurements 34 2.3 Results and Discussion 38 2.3.1 Morphology of CNNs 38 2.3.2 Piezoresistive Characteristics of CNNs 41 2.3.3 Mechanism of High Sensitivity and Great Linearity 45 2.3.4 Fast Response Time of CNN-Based Pressure Sensors 49 2.3.5 Cyclic Reliability of CNN-Based Pressure Sensors 53 2.3.6 Mechanical Reliability and Conformability 57 2.3.7 Temperature and Humidity Tolerance 63 2.4 Conclusion 66 Chapter 3. Ultraflexible Electroluminescent Skin for High-Resolution Imaging of Pressure Distribution 67 3.1 Introduction 67 3.2 Main Concept 70 3.3 Experimental Section 72 3.3.1 Fabrication of Pressure-Sensitive Photonic Skin 72 3.3.2 Characterization of Photonic Skin 74 3.4 Results and Discussion 76 3.4.1 Structure and Morphology of Photonic Skin 76 3.4.2 Pressure Response of Photonic Skin 79 3.4.3 Effect of Conformability on Spatial Resolution 85 3.4.4 Demonstration of High-Resolution Pressure Imaging 99 3.4.5 Pressure Data Acquisition 104 3.4.6 Application to Smart Touch Interfaces 106 3.5 Conclusion 109 Chapter 4. Intrinsically Soft Heat Transfer and Electrical Interconnection Platforms Using Magnetic Nanocomposites 110 4.1 Introduction 110 4.2 Experimental Section 115 4.2.1 Fabrication of SHEPs 115 4.2.2 Measurements 117 4.3 Results and Discussion 119 4.3.1 Fabrication Scheme and Morphology of SHEPs 119 4.3.2 Calculation of Particle Concentration in STCs 124 4.3.3 Enhancement of Heat Transfer Ability via Magnetic Self-Assembly 127 4.3.4 Softness of STCs 131 4.3.5 Mechanical Reliability of Stretchable Electrodes 133 4.3.6 Optimization of Magnetic Self-Assembly Process 135 4.4 Conclusion 139 Chapter 5. Highly Conformable Thermoelectric Generators with Enhanced Heat Transfer Ability 140 5.1 Introduction 140 5.2 Experimental Section 142 5.2.1 Fabrication of Compliant TEGs 142 5.2.2 Measurements 144 5.2.3 Finite Element Analysis 147 5.3 Results and Discussion 149 5.3.1 Enhancement of TE Performance via STCs 149 5.3.2 Mechanical Reliability of Compliant TEGs 157 5.3.3 Enhanced TE Performance on 3D Surfaces via Conformability 162 5.3.4 Self-Powered Wearable Applications 167 5.4 Conclusion 171 Chapter 6. Summary, Limitations, and Recommendations for Future Researches 172 6.1 Summary and Conclusion 172 6.2 Limitations and Recommendations 176 6.2.1 Pressure Sensors and Photonic Skin 176 6.2.2 Compliant TEGs 177 Bibliography 178 Publication List 186 Abstract in Korean 192Docto

Wearable, low-power CMOS ISFETs and compensation circuits for on-body sweat analysis

Complementary metal-oxide-semiconductor (CMOS) technology has been a key driver behind the trend of reduced power consumption and increased integration of electronics in consumer devices and sensors. In the late 1990s, the integration of ion-sensitive field-effect transistors (ISFETs) into unmodified CMOS helped to create advancements in lab-on-chip technology through highly parallelised and low-cost designs. Using CMOS techniques to reduce power and size in chemical sensing applications has already aided the realisation of portable, battery-powered analysis platforms, however the possibility of integrating these sensors into wearable devices has until recently remained unexplored. This thesis investigates the use of CMOS ISFETs as wearable electrochemical sensors, specifically for on-body sweat analysis. The investigation begins by evaluating the ISFET sensor for wearable applications, identifying the key advantages and challenges that arise in this pursuit. A key requirement for wearable devices is a low power consumption, to enable a suitable operational life and small form factor. From this perspective, ISFETs are investigated for low power operation, to determine the limitations when trying to push down the consumption of individual sensors. Batteryless ISFET operation is explored through the design and implementation of a 0.35 \si{\micro\metre} CMOS ISFET sensing array, operating in weak-inversion and consuming 6 \si{\micro\watt}. Using this application-specific integrated circuit (ASIC), the first ISFET array powered by body heat is demonstrated and the feasibility of using near-field communication (NFC) for wireless powering and data transfer is shown. The thesis also presents circuits and systems for combatting three key non-ideal effects experienced by CMOS ISFETs, namely temperature variation, threshold voltage offset and drift. An improvement in temperature sensitivity by a factor of three compared to an uncompensated design is shown through measured results, while adding less than 70 \si{\nano\watt} to the design. A method of automatically biasing the sensors is presented and an approach to using spatial separation of sensors in arrays in applications with flowing fluids is proposed for distinguishing between signal and sensor drift. A wearable device using the ISFET-based system is designed and tested with both artificial and natural sweat, identifying the remaining challenges that exist with both the sensors themselves and accompanying components such as microfluidics and reference electrode. A new ASIC is designed based on the discoveries of this work and aimed at detecting multiple analytes on a single chip. %Removed In the latter half of the thesis, Finally, the future directions of wearable electrochemical sensors is discussed with a look towards embedded machine learning to aid the interpretation of complex fluid with time-domain sensor arrays. The contributions of this thesis aim to form a foundation for the use of ISFETs in wearable devices to enable non-invasive physiological monitoring.Open Acces

An Energy-Autonomous Smart Shirt employing wearable sensors for Users’ Safety and Protection in Hazardous Workplaces

none4siWearable devices represent a versatile technology in the IoT paradigm, enabling noninvasive and accurate data collection directly from the human body. This paper describes the development of a smart shirt to monitor working conditions in particularly dangerous workplaces. The wearable device integrates a wide set of sensors to locally acquire the user’s vital signs (e.g., heart rate, blood oxygenation, and temperature) and environmental parameters (e.g., the concentration of dangerous gas species and oxygen level). Electrochemical gas-monitoring modules were designed and integrated into the garment for acquiring the concentrations of CO, O2, CH2O, and H2S. The acquired data are wirelessly sent to a cloud platform (IBM Cloud), where they are displayed, processed, and stored. A mobile application was deployed to gather data from the wearable devices and forward them toward the cloud application, enabling the system to operate in areas where aWiFi hotspot is not available. Additionally, the smart shirt comprises a multisource harvesting section to scavenge energy from light, body heat, and limb movements. Indeed, the wearable device integrates several harvesters (thin-film solar panels, thermoelectric generators (TEGs), and piezoelectric transducers), a low-power conditioning section, and a 380 mAh LiPo battery to accumulate the recovered charge. Field tests indicated that the harvesting section could provide up to 216 mW mean power, fully covering the power requirements (P = 1.86 mW) of the sensing, processing, and communication sections in all considered conditions (3.54 mW in the worst-case scenario). However, the 380 mAh LiPo battery guarantees about a 16-day lifetime in the complete absence of energy contributions from the harvesting section.Special Issue “Innovative Materials, Smart Sensors and IoT-based Electronic Solutions for Wearable Applications”, https://www.mdpi.com/journal/applsci/special_issues/Materials_Sensors_Electronic_Solutions_Wearable_ApplicationsopenRoberto De Fazio, Abdel-Razzak Al-Hinnawi, Massimo De Vittorio, Paolo ViscontiDE FAZIO, Roberto; Al-Hinnawi, Abdel-Razzak; DE VITTORIO, Massimo; Visconti, Paol

A comprehensive survey of wireless body area networks on PHY, MAC, and network layers solutions

Recent advances in microelectronics and integrated circuits, system-on-chip design, wireless communication and intelligent low-power sensors have allowed the realization of a Wireless Body Area Network (WBAN). A WBAN is a collection of low-power, miniaturized, invasive/non-invasive lightweight wireless sensor nodes that monitor the human body functions and the surrounding environment. In addition, it supports a number of innovative and interesting applications such as ubiquitous healthcare, entertainment, interactive gaming, and military applications. In this paper, the fundamental mechanisms of WBAN including architecture and topology, wireless implant communication, low-power Medium Access Control (MAC) and routing protocols are reviewed. A comprehensive study of the proposed technologies for WBAN at Physical (PHY), MAC, and Network layers is presented and many useful solutions are discussed for each layer. Finally, numerous WBAN applications are highlighted

Thermal and Mechanical Energy Harvesting Using Lead Sulfide Colloidal Quantum Dots

The human body is an abundant source of energy in the form of heat and mechanical movement. The ability to harvest this energy can be useful for supplying low-consumption wearable and implantable devices. Thermoelectric materials are usually used to harvest human body heat for wearable devices; however, thermoelectric generators require temperature gradient across the device to perform appropriately. Since they need to attach to the heat source to absorb the heat, temperature equalization decreases their efficiencies. Moreover, the electrostatic energy harvester, working based on the variable capacitor structure, is the most compatible candidate for harvesting low-frequency-movement of the human body. Although it can provide a high output voltage and high-power density at a small scale, they require an initial start-up voltage source to charge the capacitor for initiating the conversion process. The current methods for initially charging the variable capacitor suffer from the complexity of the design and fabrication process. In this research, a solution-processed photovoltaic structure was proposed to address the temperature equalization problem of the thermoelectric generators by harvesting infrared radiations emitted from the human body. However, normal photovoltaic devices have the bandgap limitation to absorb low energy photons radiated from the human body. In this structure, mid-gap states were intentionally introduced to the absorbing layer to activate the multi-step photon absorption process enabling electron promotion from the valence band to the conduction band. The fabricated device showed promising performance in harvesting low energy thermal radiations emitted from the human body. Finally, in order to increase the generated power, a hybrid structure was proposed to harvest both mechanical and heat energy sources available in the human body. The device is designed to harvest both the thermal radiation of the human body based on the proposed solution-processed photovoltaic structure and the mechanical movement of the human body based on an electrostatic generator. The photovoltaic structure was used to charge the capacitor at the initial step of each conversion cycle. The simple fabrication process of the photovoltaic device can potentially address the problem associated with the charging method of the electrostatic generators. The simulation results showed that the combination of two methods can significantly increase the harvested energy

THE THERMOELECTRIC, THERMORESISTIVE, AND HYGRORESISTIVE PROPERTIES AND APPLICATIONS OF VAPOR PRINTED PEDOT-CL

Wearable electronics are a valuable tool to increase consumer access to real-time and long-term health care monitoring. The development of these technologies can also lead to major advancements in the field, such as self-charging systems that are completely removed from the electrical grid. However, much of the wearable technology available commercially contain rigid components, use unsustainable synthetic methods, or undesirable materials. The field has thus been moving towards wearables that mimic textiles or use textiles as a substrate. Herein, we discuss the use of oxidative chemical vapor deposition (oCVD) to produce textiles coated with poly(3,4-ethylenedioxythiophene) known as PEDOT-Cl. We evaluate the thermoelectric, thermoresistive, and hygroresistive properties of these PEDOT-Cl fabrics. We also explore the applications of these properties by creating humidity sensors, temperature sensors, and thermoelectric generators integrated with clothing. In general, we discuss the process of designing a wearable to best accommodate the desired application