Transistor Degradations in Very Large-Scale-Integrated CMOS Technologies

The historical evolution of hot carrier degradation mechanisms and their physical models are reviewed and an energy-driven hot carrier aging model is verified that can reproduce 62-nm-gate-long hot carrier degradation of transistors through consistent aging-parameter extractions for circuit simulation. A long-term hot carrier-resistant circuit design can be realized via optimal driver strength controls. The central role of the V GS ratio is emphasized during practical case studies on CMOS inverter chains and a dynamic random access memory (DRAM) word-line circuit. Negative bias temperature instability (NBTI) mechanisms are also reviewed and implemented in a hydrogen reaction-diffusion (R-D) framework. The R-D simulation reproduces time-dependent NBTI degradations interpreted into interface trap generation, Δ N it with a proper power-law dependency on time. The experimental evidence of pre-existing hydrogen-induced Si–H bond breakage is also proven by the quantifying R-D simulation. From this analysis, a low-pressure end-of-line (EOL) anneal can reduce the saturation level of NBTI degradation, which is believed to be caused by the outward diffusion of hydrogen from the gate regions and therefore prevents further breakage of Si–H bonds in the silicon-oxide interfaces

NEGATIVE BIAS TEMPERATURE INSTABILITY STUDIES FOR ANALOG SOC CIRCUITS

Negative Bias Temperature Instability (NBTI) is one of the recent reliability issues in sub threshold CMOS circuits. NBTI effect on analog circuits, which require matched device pairs and mismatches, will cause circuit failure. This work is to assess the NBTI effect considering the voltage and the temperature variations. It also provides a working knowledge of NBTI awareness to the circuit design community for reliable design of the SOC analog circuit. There have been numerous studies to date on the NBTI effect to analog circuits. However, other researchers did not study the implication of NBTI stress on analog circuits utilizing bandgap reference circuit. The reliability performance of all matched pair circuits, particularly the bandgap reference, is at the mercy of aging differential. Reliability simulation is mandatory to obtain realistic risk evaluation for circuit design reliability qualification. It is applicable to all circuit aging problems covering both analog and digital. Failure rate varies as a function of voltage and temperature. It is shown that PMOS is the reliabilitysusceptible device and NBTI is the most vital failure mechanism for analog circuit in sub-micrometer CMOS technology. This study provides a complete reliability simulation analysis of the on-die Thermal Sensor and the Digital Analog Converter (DAC) circuits and analyzes the effect of NBTI using reliability simulation tool. In order to check out the robustness of the NBTI-induced SOC circuit design, a bum-in experiment was conducted on the DAC circuits. The NBTI degradation observed in the reliability simulation analysis has given a clue that under a severe stress condition, a massive voltage threshold mismatch of beyond the 2mV limit was recorded. Bum-in experimental result on DAC proves the reliability sensitivity of NBTI to the DAC circuitry

Statistical compact model strategies for nano CMOS transistors subject of atomic scale variability

One of the major limiting factors of the CMOS device, circuit and system simulation in sub 100nm regimes is the statistical variability introduced by the discreteness of charge and granularity of matter. The statistical variability cannot be eliminated by tuning the layout or by tightening fabrication process control. Since the compact models are the key bridge between technology and design, it is necessary to transfer reliably the MOSFET statistical variability information into compact models to facilitate variability aware design practice. The aim of this project is the development of a statistical extraction methodology essential to capture statistical variability with optimum set of parameters particularly in industry standard compact model BSIM. This task is accomplished by using a detailed study on the sensitivity analysis of the transistor current in respect to key parameters in compact model in combination with error analysis of the fitted Id-Vg characteristics. The key point in the developed direct statistical compact model strategy is that the impacts of statistical variability can be captured in device characteristics by tuning a limited number of parameters and keeping the values for remaining major set equal to their default values obtained from the “uniform” MOSFET compact model extraction. However, the statistical compact model extraction strategies will accurately represent the distribution and correlation of the electrical MOSFET figures of merit. Statistical compact model parameters are generated using statistical parameter generation techniques such as uncorrelated parameter distributions, principal component analysis and nonlinear power method. The accuracy of these methods is evaluated in comparison with the results obtained from ‘atomistic’ simulations. The impact of the correlations in the compact model parameters has been analyzed along with the corresponding transistor figures of merit. The accuracy of the circuit simulations with different statistical compact model libraries has been studied. Moreover, the impact of the MOSFET width/length on the statistical trend of the optimum set of statistical compact model parameters and electrical figures of merit has been analyzed with two methods to capture geometry dependencies in proposed statistical models

A COMPARATIVE STUDY OF RELIABILITY FOR FINFET

The continuous downscaling of CMOS technologies over the last few decades resulted in higher Integrated Circuit (IC) density and performance. The emergence of FinFET technology has brought with it the same reliability issues as standard CMOS with the addition of a new prominent degradation mechanism. The same mechanisms still exist as for previous CMOS devices, including Bias Temperature Instability (BTI), Hot Carrier Degradation (HCD), Electro-migration (EM), and Body Effects. A new and equally important reliability issue for FinFET is the Self -heating, which is a crucial complication since thermal time-constant is generally much longer than the transistor switching times. FinFET technology is the newest technological paradigm that has emerged in the past decade, as downscaling reached beyond 20 nm, which happens also to be the estimated mean free path of electrons at room temperature in silicon. As such, the reliability physics of FinFET was modified in order to fit the newly developed transistor technology. This paper highlights the roles and impacts of these various effects and aging mechanisms on FinFET transistors compared to planar transistors on the basic approach of the physics of failure mechanisms to fit to a comprehensive aging model

EXPERIMENTAL STUDY OF BIAS TEMPERATURE INSTABILITY AND PROGRESSIVE BREAKDOWN OF ADVANCED GATE DIELECTRICS

With shrinking gate dielectrics, the reliability requirements of semiconductor gate dielectrics become more and more difficult to maintain. New physical mechanisms and phenomena are discovered and new challenges arise. At the same time, some issues, which have been minor in the past, begin to show bigger impact, such as the Negative Bias Temperature Instability issue. The dynamic NBTI phenomenon was studied with ultrathin SiO2 and HfO2 devices. With a dynamic stress condition, the device lifetime can be largely extended due to the reduced NBTI degradation. This reduction is contributed to the annealing of fixed oxide charges during the stress off period. A mathematical model is also established to explain this phenomenon. With alternative gate dielectrics' introduction, new issues associated with these materials and device structures are also raised. Those issues need to be studied in detail before fully incorporation of new materials. Compared with SiO2 devices, the NBTI degradation of HfO2 has a similar trend. However, it is found that they have different frequency response than the SiO2 devices. This difference is later found due to the traps inside the gate dielectrics. Detailed studies show that NBTI degradations at dc stress and dynamic stress conditions have different temperature acceleration factors due to the bulk traps. The disappearance of this difference by insetting a detrapping period further proves this observation. As we enter the ultrathin gate dielectrics regime, the electron tunneling mechanisms behind the gate dielectrics breakdown shift. Consequently, gate dielectrics breakdown mode also shifts from the clear-detected hard breakdown to the noisy soft breakdown. Thus new lifetime extrapolation models are needed. The progressive breakdown of ultrathin SiO2 is studied by a two-step test methodology. By monitoring the degradation of the progressive breakdown path in terms of the activation energy, the voltage acceleration factor, two kinds of breakdown filaments, the stable one and the unstable one, were studied. The stable filament is found to be a breakdown filament independent of the original breakdown filament, and the unstable filament is the continuing degradation of the original filament

Simulation study of scaling design, performance characterization, statistical variability and reliability of decananometer MOSFETs

This thesis describes a comprehensive, simulation based scaling study – including device design, performance characterization, and the impact of statistical variability – on deca-nanometer bulk MOSFETs. After careful calibration of fabrication processes and electrical characteristics for n- and p-MOSFETs with 35 nm physical gate length, 1 nm EOT and stress engineering, the simulated devices closely match the performance of contemporary 45 nm CMOS technologies. Scaling to 25 nm, 18 nm and 13 nm gate length n and p devices follows generalized scaling rules, augmented by physically realistic constraints and the introduction of high-k/metal-gate stacks. The scaled devices attain the performance stipulated by the ITRS. Device a.c. performance is analyzed, at device and circuit level. Extrinsic parasitics become critical to nano-CMOS device performance. The thesis describes device capacitance components, analyzes the CMOS inverter, and obtains new insights into the inverter propagation delay in nano-CMOS. The projection of a.c. performance of scaled devices is obtained. The statistical variability of electrical characteristics, due to intrinsic parameter fluctuation sources, in contemporary and scaled decananometer MOSFETs is systematically investigated for the first time. The statistical variability sources: random discrete dopants, gate line edge roughness and poly-silicon granularity are simulated, in combination, in an ensemble of microscopically different devices. An increasing trend in the standard deviation of the threshold voltage as a function of scaling is observed. The introduction of high-k/metal gates improves electrostatic integrity and slows this trend. Statistical evaluations of variability in Ion and Ioff as a function of scaling are also performed. For the first time, the impact of strain on statistical variability is studied. Gate line edge roughness results in areas of local channel shortening, accompanied by locally increased strain, both effects increasing the local current. Variations are observed in both the drive current, and in the drive current enhancement normally expected from the application of strain. In addition, the effects of shallow trench isolation (STI) on MOSFET performance and on its statistical variability are investigated for the first time. The inverse-narrow-width effect of STI enhances the current density adjacent to it. This leads to a local enhancement of the influence of junction shapes adjacent to the STI. There is also a statistical impact on the threshold voltage due to random STI induced traps at the silicon/oxide interface

Rf Power Amplifier And Oscillator Design For Reliability And Variability

CMOS RF circuit design has been an ever-lasting research field. It gained so much attention since RF circuits have high mobility and wide band efficiency, while CMOS technology has the advantage of low cost and better capability of integration. At the same time, IC circuits never stopped scaling down for the recent many decades. Reliability issues with RF circuits have become more and more severe with device scaling down: reliability effects such as gate oxide break down, hot carrier injection, negative bias temperature instability, have been amplified as the device size shrinks. Process variability issues also become more predominant as the feature size decreases. With these insights provided, reliability and variability evaluations on typical RF circuits and possible compensation techniques are highly desirable. In this work, a class E power amplifier is designed and laid out using TSMC 0.18 µm RF technology and the chip was fabricated. Oxide stress and hot electron tests were carried out at elevated supply voltage, fresh measurement results were compared with different stress conditions after 10 hours. Test results matched very well with mixed mode circuit simulations, proved that hot carrier effects degrades PA performances like output power, power efficiency, etc. Self- heating effects were examined on a class AB power amplifier since PA has high power operations. Device temperature simulation was done both in DC and mixed mode level. Different gate biasing techniques were analyzed and their abilities to compensate output power were compared. A simple gate biasing circuit turned out to be efficient to compensate selfheating effects under different localized heating situations. iv Process variation was studied on a classic Colpitts oscillator using Monte-Carlo simulation. Phase noise was examined since it is a key parameter in oscillator. Phase noise was modeled using analytical equations and supported by good match between MATLAB results and ADS simulation. An adaptive body biasing circuit was proposed to eliminate process variation. Results from probability density function simulation demonstrated its capability to relieve process variation on phase noise. Standard deviation of phase noise with adaptive body bias is much less than the one without compensation. Finally, a robust, adaptive design technique using PLL as on-chip sensor to reduce Process, Voltage, Temperature (P.V.T.) variations and other aging effects on RF PA was evaluated. The frequency and phase of ring oscillator need to be adjusted to follow the frequency and phase of input in PLL no matter how the working condition varies. As a result, the control signal of ring oscillator has to fluctuate according to the working condition, reflecting the P.V.T changes. RF circuits suffer from similar P.V.T. variations. The control signal of PLL is introduced to RF circuits and converted to the adaptive tuning voltage for substrate bias. Simulation results illustrate that the PA output power under different variations is more flat than the one with no compensation. Analytical equations show good support to what has been observed

Solid State Circuits Technologies

The evolution of solid-state circuit technology has a long history within a relatively short period of time. This technology has lead to the modern information society that connects us and tools, a large market, and many types of products and applications. The solid-state circuit technology continuously evolves via breakthroughs and improvements every year. This book is devoted to review and present novel approaches for some of the main issues involved in this exciting and vigorous technology. The book is composed of 22 chapters, written by authors coming from 30 different institutions located in 12 different countries throughout the Americas, Asia and Europe. Thus, reflecting the wide international contribution to the book. The broad range of subjects presented in the book offers a general overview of the main issues in modern solid-state circuit technology. Furthermore, the book offers an in depth analysis on specific subjects for specialists. We believe the book is of great scientific and educational value for many readers. I am profoundly indebted to the support provided by all of those involved in the work. First and foremost I would like to acknowledge and thank the authors who worked hard and generously agreed to share their results and knowledge. Second I would like to express my gratitude to the Intech team that invited me to edit the book and give me their full support and a fruitful experience while working together to combine this book

Design for prognostics and security in field programmable gate arrays (FPGAs).

There is an evolutionary progression of Field Programmable Gate Arrays (FPGAs) toward more complex and high power density architectures such as Systems-on- Chip (SoC) and Adaptive Compute Acceleration Platforms (ACAP). Primarily, this is attributable to the continual transistor miniaturisation and more innovative and efficient IC manufacturing processes. Concurrently, degradation mechanism of Bias Temperature Instability (BTI) has become more pronounced with respect to its ageing impact. It could weaken the reliability of VLSI devices, FPGAs in particular due to their run-time reconfigurability. At the same time, vulnerability of FPGAs to device-level attacks in the increasing cyber and hardware threat environment is also quadrupling as the susceptible reliability realm opens door for the rogue elements to intervene. Insertion of highly stealthy and malicious circuitry, called hardware Trojans, in FPGAs is one of such malicious interventions. On the one hand where such attacks/interventions adversely affect the security ambit of these devices, they also undermine their reliability substantially. Hitherto, the security and reliability are treated as two separate entities impacting the FPGA health. This has resulted in fragmented solutions that do not reflect the true state of the FPGA operational and functional readiness, thereby making them even more prone to hardware attacks. The recent episodes of Spectre and Meltdown vulnerabilities are some of the key examples. This research addresses these concerns by adopting an integrated approach and investigating the FPGA security and reliability as two inter-dependent entities with an additional dimension of health estimation/ prognostics. The design and implementation of a small footprint frequency and threshold voltage-shift detection sensor, a novel hardware Trojan, and an online transistor dynamic scaling circuitry present a viable FPGA security scheme that helps build a strong microarchitectural level defence against unscrupulous hardware attacks. Augmented with an efficient Kernel-based learning technique for FPGA health estimation/prognostics, the optimal integrated solution proves to be more dependable and trustworthy than the prevalent disjointed approach.Samie, Mohammad (Associate)PhD in Transport System

A novel deep submicron bulk planar sizing strategy for low energy subthreshold standard cell libraries

Engineering andPhysical Science ResearchCouncil (EPSRC) and Arm Ltd for providing funding in the form of grants and studentshipsThis work investigates bulk planar deep submicron semiconductor physics in an attempt to improve standard cell libraries aimed at operation in the subthreshold regime and in Ultra Wide Dynamic Voltage Scaling schemes. The current state of research in the field is examined, with particular emphasis on how subthreshold physical effects degrade robustness, variability and performance. How prevalent these physical effects are in a commercial 65nm library is then investigated by extensive modeling of a BSIM4.5 compact model. Three distinct sizing strategies emerge, cells of each strategy are laid out and post-layout parasitically extracted models simulated to determine the advantages/disadvantages of each. Full custom ring oscillators are designed and manufactured. Measured results reveal a close correlation with the simulated results, with frequency improvements of up to 2.75X/2.43X obs erved for RVT/LVT devices respectively. The experiment provides the first silicon evidence of the improvement capability of the Inverse Narrow Width Effect over a wide supply voltage range, as well as a mechanism of additional temperature stability in the subthreshold regime. A novel sizing strategy is proposed and pursued to determine whether it is able to produce a superior complex circuit design using a commercial digital synthesis flow. Two 128 bit AES cores are synthesized from the novel sizing strategy and compared against a third AES core synthesized from a state-of-the-art subthreshold standard cell library used by ARM. Results show improvements in energy-per-cycle of up to 27.3% and frequency improvements of up to 10.25X. The novel subthreshold sizing strategy proves superior over a temperature range of 0 °C to 85 °C with a nominal (20 °C) improvement in energy-per-cycle of 24% and frequency improvement of 8.65X. A comparison to prior art is then performed. Valid cases are presented where the proposed sizing strategy would be a candidate to produce superior subthreshold circuits