Materials modeling and development for use in double-exposure lithography applications

The current optical photolithography technology is approaching the physical barrier to the minimum achievable feature size. To produce smaller devices, new resolution enhancement technologies must be developed. Double-exposure lithography has shown promise as a potential pathway that is attractive because it is much cheaper than double-patterning lithography and can be deployed on existing imaging tools. However, this technology is not possible without the development of new materials with nonlinear response to exposure dose. The performance of existing materials such as reversible contrast enhancement layers (rCELs), and theoretical materials such as intermediate state two-photon (ISTP) and optical threshold layer (OTL) materials in double-exposure applications have been investigated through computer simulation. All three materials yielded process windows in double-exposure mode. OTL materials showed the largest process window (depth of focus (DOF) 0.14 µm, exposure latitude (EL) 5.1%). ISTP materials had the next-largest process window (DOF 0.12 µm, EL 3.2%), followed by the rCEL (0.11 µm, 0.58%). This study is an analysis of the feasibility of using the materials in double-exposure mode

An analysis of double exposure lithography options

The current optical photolithography technology is approaching the physical barrier to the minimum achievable feature size. To produce smaller devices, new resolution enhancement technologies must be developed. Double exposure lithography has shown promise as potential pathway that is attractive because it is much cheaper than double patterning lithography and it can be deployed on existing imaging tools. However, this technology is not possible without the development of new materials with nonlinear response to exposure dose. The performance of existing materials such as reversible contrast enhancement layers (rCELs) and theoretical materials such as intermediate state two-photon (ISTP) and optical threshold layer (OTL) materials in double exposure applications was investigated through computer simulation. All three materials yielded process windows in double exposure mode. OTL materials showed the largest process window (DOF 0.137 µm, EL 5.06 %). ISTP materials had the next largest process window (DOF 0.124 µm, EL 3.22 %) followed by the rCEL (0.105 µm, 0.58 %). This study is an analysis of the feasibility of using the materials in double exposure mode

Recurrent Painful Ophthalmoplegic Neuropathy: A case report with atypical features and a review of the literature

Introduction: Recurrent Painful Ophthalmoplegic Neuropathy, previously known as Ophthalmoplegic Migraine, is a poorly characterized disorder mainly because there are few cases described. We report a new case of Recurrent Painful Ophthalmoplegic Neuropathy and a review of the literature to contribute to increasing the knowledge of the clinical features of this disorder. Case report and review of literature: A 45-year-old woman presented with adult-onset recurrent attacks of abducens and oculomotor palsy associated with diplopia followed by headache. Most notably, pain always presented many days after oculomotor impairment, a feature never described in the literature. A diagnosis of possible Recurrent Painful Ophthalmoplegic Neuropathy was made after excluding other possible mimicking disorders. Symptoms usually resolved gradually with corticosteroid therapy, albeit without a clear-cut benefit.Clinical data collected from 1989 to 2022 showed that adult onset in Recurrent Painful Ophthalmoplegic Neuropathy is not uncommon. While III cranial nerve palsy is typical, VI and IV nerve palsy have also been described. Pathophysiology and diagnosis: Several hypotheses have been proposed, including nerve compression, ischemia or inflammation/demyelination, but none has been completely accepted.Diagnosis remains of exclusion; magnetic resonance imaging and blood exams are key in differential diagnosis. Conclusions: Our case gives us the possibility to expand the clinical features of Recurrent Painful Ophthalmoplegic Neuropathy, also contributing to updating the pathophysiological hypotheses

Contrast Enhanced Micro-Computed Tomography Resolves the 3-Dimensional Morphology of the Cardiac Conduction System in Mammalian Hearts

The general anatomy of the cardiac conduction system (CCS) has been known for 100 years, but its complex and irregular three-dimensional (3D) geometry is not so well understood. This is largely because the conducting tissue is not distinct from the surrounding tissue by dissection. The best descriptions of its anatomy come from studies based on serial sectioning of samples taken from the appropriate areas of the heart. Low X-ray attenuation has formerly ruled out micro-computed tomography (micro-CT) as a modality to resolve internal structures of soft tissue, but incorporation of iodine, which has a high molecular weight, into those tissues enhances the differential attenuation of X-rays and allows visualisation of fine detail in embryos and skeletal muscle. Here, with the use of a iodine based contrast agent (I2KI), we present contrast enhanced micro-CT images of cardiac tissue from rat and rabbit in which the three major subdivisions of the CCS can be differentiated from the surrounding contractile myocardium and visualised in 3D. Structures identified include the sinoatrial node (SAN) and the atrioventricular conduction axis: the penetrating bundle, His bundle, the bundle branches and the Purkinje network. Although the current findings are consistent with existing anatomical representations, the representations shown here offer superior resolution and are the first 3D representations of the CCS within a single intact mammalian heart

Scanning evanescent wave lithography for sub-22nm generations

Current assumptions for the limits of immersion optical lithography include NA values at 1.35, largely based on the lack of high-index materials. In this research we have been working with ultra-high NA evanescent wave lithography (EWL) where the NA of the projection system is allowed to exceed the corresponding acceptance angle of one or more materials of the system. This approach is made possible by frustrating the total internal reflection (TIR) evanescent field into propagation. With photoresist as the frustrating media, the allowable gap for adequate exposure latitude is in the sub-100 nm range. Through static imaging, we have demonstrated the ability to resolve 26 nm half-pitch features at 193 nm and 1.85 NA using existing materials. Such imaging could lead to the attainment of 13 nm half-pitch through double patterning. In addition, a scanning EWL imaging system was designed, prototyped with a two-stage gap control imaging head including a DC noise canceling carrying air-bearing, and a AC noise canceling piezoelectric transducer with real-time closed-loop feedback from gap detection. Various design aspects of the system including gap detection, feedback actuation, prism design and fabrication, software integration, and scanning scheme have been carefully considered to ensure sub-100 nm scanning. Experiments performed showed successful gap gauging at sub-100 nm scanning height. Scanning EWL results using a two-beam interference imaging approach achieved pattern resolution comparable to static EWL imaging results. With this scanning EWL approach and the imaging head developed, optical lithography becomes extendable to sub-22 nm generations

Spectroscopic Contrast of Diarylethene Molecules on Octanethiol Monolayer

We present a systematic scanning tunneling microscopy (STM) study of bias-dependent imaging of disulfur diarylethene (2S-DE) molecules on octanethiol (C8) monolayer at room temperature. In a rigid confinement of the C8 matrix, we did not observe any significant variation in the appearance of the 2S-DE. On the contrary, a reversal in the apparent height of the 2S-DE was present when the molecule was situated on a gold vacancy island. We attributed this finding to the presence of a new electronic state that became accessible for a tunneling event. In addition, the C8 surface structure underwent a reversible phase transformation from root 3 x root 3 R30 degrees hexagonal to c(4x2) square superlattice when the bias voltage was reduced from -825 mV to -425 mV or vice versa. Under a finite bias voltage, an appreciable topographic variation of the 2S-DE signature was demonstrated for the first time. This finding can be ascribed to a finite overlap of the associated wave functions that occurred between the tip state and the 2S-DE molecular energy level. We believe that physical insight on the bias-dependent imaging of organic molecules on solid surface is important towards the advancement of molecular electronics-based devices

Mortui vivos docent: a modern revival of temporal bone plug harvests

Human temporal bones (HTBs) are invaluable resources for the study of otologic disorders and for evaluating novel treatment approaches. Given the high costs and technical expertise required to collect and process HTBs, there has been a decline in the number of otopathology laboratories. Our objective is to encourage ongoing study of HTBs by outlining the necessary steps to establish a pipeline for collection and processing of HTBs. In this methods manuscript, we: (1) provide the design of a temporal bone plug sawblade that can be used to collect specimens from autopsy donors; (2) establish that decalcification time can be dramatically reduced from 9 to 3 months if ethylenediaminetetraacetic acid is combined with microwave tissue processing and periodic bone trimming; (3) show that serial sections of relatively-rapidly decalcified HTBs can be successfully immunostained for key inner ear proteins; (4) demonstrate how to drill down a HTB to the otic capsule within a few hours so that subsequent decalcification time can be further reduced to only weeks. We include photographs and videos to facilitate rapid dissemination of the developed methods. Collected HTBs can be used for many purposes, including, but not limited to device testing, imaging studies, education, histopathology, and molecular studies. As new technology develops, it is imperative to continue studying HTBs to further our understanding of the cellular and molecular underpinnings of otologic disorders

Imaging Myelin Basic Protein expression in a model of remyelination by Magnetic Resonance Imaging using an Organic Anion Transporter Protein gene reporter system.

Demyelination occurs in several CNS diseases. If demyelinated axons are not remyelinated they become vulnerable to irreversible degeneration. There is, therefore, a clinical need for therapies that enhance remyelination. This can be achieved by 1) pharmacologically targeting endogenous oligodendrocyte progenitor cells (OPCs) responsible for remyelination or 2) transplantation of myelinogenic cells (including OPCs). The first approach is appropriate for diseases with no defect in the myelinating cells, such as multiple sclerosis (MS), while the second approach is suitable for genetic disorders of myelination such as Pelizaeus Merzbacher disease (PMD). Translation into the clinic has or will shortly begin for both approaches. However, there are no current outcome measures providing direct evidence of OPCs differentiation to assess the efficacy of a remyelination therapy. This thesis presents data which it is hoped will form the foundation of a novel outcome measure for such therapies. It demonstrates that, by using a novel MRI gene reporter system; OATP, and controlling its expression under a Myelin Basic Protein promoter, OPCs can take up gadolinium based contrast, and be detected using T1 weighted MRI imaging in vitro and ex vivo. Using a constitutively active promoter, transplanted cells can be detected by an in vivo model of remyelination. It is hoped that this data will form the foundation for the development of an outcome measure for assessing the efficacy of new, pro-remyelination therapies, and provide a non- invasive, longitudinal, and translational imaging technique for use in drug discovery, or even personalised medicine.Wellcome Trus

AMOL

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2007.This electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections.Includes bibliographical references (p. 91-94).In this thesis, the concept of absorbance-modulation optical lithography (AMOL) is described, and the feasibility experimentally verified. AMOL is an implementation of nodal lithography, which is not bounded by the diffraction limit of incident lights. Experimental results showed promising capability of AMOL and matched well with simulation. Several key elements of the AMOL system are discussed: the material systems of AMOL, limitations on the material and optical systems presented, and the design and fabrication of spiral phase elements that generate ring-shaped beams required by AMOL.by Hsin-Yu Sidney Tsai.S.M

Micro-computed tomography for high resolution soft tissue imaging; applications in the normal and failing heart

The normal structure and function of the heart, the common pathological changes that cause abnormal function and the interventions proposed to improve or restore its function are fundamentally based on cardiac anatomy. Therefore in all these areas a detailed and accurate understanding of 3D structure is essential. However there is still disparity over some aspects of the form and function of the healthy heart. Furthermore, in heart failure (HF) the transition from compensated to decompensated HF is poorly understood, and details of ventricular, and particularly atrial, remodelling and their effects on cardiac function are yet to be fully elucidated. In addition little is known on how the 3D morphology of the cardiac conduction system is affected in disease, and further knowledge is required on the structural substrates for arrhythmogenesis associated with HF. Here we have developed contrast enhanced micro-CT for soft tissue imaging, allowing non-invasive high resolution (~5 µm attainable) differentiation of multiple soft tissue types including; muscle, connective tissue and fat. Micro-CT was optimised for imaging of whole intact mammalian hearts and from these data we reveal novel morphological and anatomical detail in healthy hearts and in hearts after experimental HF (volume and pressure overload). Remodelling of the myocardium in HF was dramatic with significant hypertrophy and dilatation observed in both atria and ventricles. The atria showed a 67% increase in myocardial volume, with the left atrium showing a 93% increase. The pectinate muscle: wall thickness ratio was significantly increased in both atria (p