Design for pre-bond testability in 3D integrated circuits

In this dissertation we propose several DFT techniques specific to 3D stacked IC systems. The goal has explicitly been to create techniques that integrate easily with existing IC test systems. Specifically, this means utilizing scan- and wrapper-based techniques, two foundations of the digital IC test industry. First, we describe a general test architecture for 3D ICs. In this architecture, each tier of a 3D design is wrapped in test control logic that both manages tier test pre-bond and integrates the tier into the large test architecture post-bond. We describe a new kind of boundary scan to provide the necessary test control and observation of the partial circuits, and we propose a new design methodology for test hardcore that ensures both pre-bond functionality and post-bond optimality. We present the application of these techniques to the 3D-MAPS test vehicle, which has proven their effectiveness. Second, we extend these DFT techniques to circuit-partitioned designs. We find that boundary scan design is generally sufficient, but that some 3D designs require special DFT treatment. Most importantly, we demonstrate that the functional partitioning inherent in 3D design can potentially decrease the total test cost of verifying a circuit. Third, we present a new CAD algorithm for designing 3D test wrappers. This algorithm co-designs the pre-bond and post-bond wrappers to simultaneously minimize test time and routing cost. On average, our algorithm utilizes over 90% of the wires in both the pre-bond and post-bond wrappers. Finally, we look at the 3D vias themselves to develop a low-cost, high-volume pre-bond test methodology appropriate for production-level test. We describe the shorting probes methodology, wherein large test probes are used to contact multiple small 3D vias. This technique is an all-digital test method that integrates seamlessly into existing test flows. Our experimental results demonstrate two key facts: neither the large capacitance of the probe tips nor the process variation in the 3D vias and the probe tips significantly hinders the testability of the circuits. Taken together, this body of work defines a complete test methodology for testing 3D ICs pre-bond, eliminating one of the key hurdles to the commercialization of 3D technology.PhDCommittee Chair: Lee, Hsien-Hsin; Committee Member: Bakir, Muhannad; Committee Member: Lim, Sung Kyu; Committee Member: Vuduc, Richard; Committee Member: Yalamanchili, Sudhaka

A Low-Overhead Method for Pre-bond Test of Resonant 3-D Clock Distribution Networks

Designing a low power clock network in synchronous circuits is an important task. This requirement is stricter for 3-D circuits due to the increased power densities. Resonant clock networks are considered efficient low power alternatives to con- ventional clock distribution schemes. These networks utilize ad- ditional inductive circuits to reduce power while delivering a full swing clock signal to the sink nodes. Test is another complex task for 3-D ICs, where pre-bond test is a prerequisite. Contactless test has been considered as an alternative for conventional test methods. This paper, consequently, introduces a design method- ology for resonant 3-D clock networks that supports wireless pre- bond testing through the use of inductive links. By employing the inductors comprising the LC tanks of the resonant clock net- works as the receiver circuit for the links, the need for additional circuits and/or interconnect resources during pre-bond test is essentially eliminated. The proposed technique produces low power and pre-bond testable 3-D clock distribution networks. Simulation results indicate 98.5% and 99% decrease in the area overhead and power consumed by the contactless testing method as compared to existing methods

Signaling in 3-D integrated circuits, benefits and challenges

Three-dimensional (3-D) or vertical integration is a design and packaging paradigm that can mitigate many of the increasing challenges related to the design of modern integrated systems. 3-D circuits have recently been at the spotlight, since these circuits provide a potent approach to enhance the performance and integrate diverse functions within amulti-plane stack. Clock networks consume a great portion of the power dissipated in a circuit. Therefore, designing a low-power clock network in synchronous circuits is an important task. This requirement is stricter for 3-D circuits due to the increased power densities. Synchronization issues can be more challenging for 3-D circuits since a clock path can spread across several planes with different physical and electrical characteristics. Consequently, designing low power clock networks for 3-D circuits is an important issue. Resonant clock networks are considered efficient low-power alternatives to conventional clock distribution schemes. These networks utilize additional inductive circuits to reduce power while delivering a full swing clock signal to the sink nodes. In this research, a design method to apply resonant clocking to synthesized clock trees is proposed. Manufacturing processes for 3-D circuits include some additional steps as compared to standard CMOS processes which makes 3-D circuits more susceptible to manufacturing defects and lowers the overall yield of the bonded 3-D stack. Testing is another complicated task for 3-D ICs, where pre-bond test is a prerequisite. Pre-bond testability, in turn, presents new challenges to 3-D clock network design primarily due to the incomplete clock distribution networks prior to the bonding of the planes. A design methodology of resonant 3-D clock networks that support wireless pre-bond testing is introduced. To efficiently address this issue, inductive links are exploited to wirelessly transmit the clock signal to the disjoint resonant clock networks. The inductors comprising the LC tanks are used as the receiver circuit for the links, essentially eliminating the need for additional circuits and/or interconnect resources during pre-bond test. Recent FPGAs are quite complex circuits which provide reconfigurablity at the cost of lower performance and higher power consumption as compared to ASIC circuits. Exploiting a large number of programmable switches, routing structures are mainly responsible for performance degradation in FPAGs. Employing 3-D technology can providemore efficient switches which drastically improve the performance and reduce the power consumption of the FPGA. RRAM switches are one of the most promising candidates to improve the FPGA routing architecture thanks to their low on-resistance and non-volatility. Along with the configurable switches, buffers are the other important element of the FPGAs routing structure. Different characteristics of RRAM switches change the properties of signal paths in RRAM-based FPGAs. The on resistance of RRAMswitches is considerably lower than CMOS pass gate switches which results in lower RC delay for RRAM-based routing paths. This different nature in critical path and signal delay in turn affect the need for intermediate buffers. Thus the buffer allocation should be reconsidered. In the last part of this research, the effect of intermediate buffers on signal propagation delay is studied and a modified buffer allocation scheme for RRAM-based FPGA routing path is proposed

Integrating specification and test requirements as constraints in verification strategies for 2D and 3D analog and mixed signal designs

Analog and Mixed Signal (AMS) designs are essential components of today’s modern Integrated Circuits (ICs) used in the interface between real world signals and the digital world. They present, however, significant verification challenges. Out-of-specification failures in these systems have steadily increased, and have reached record highs in recent years. Increasing design complexity, incomplete/wrong specifications (responsible for 47% of all non functional ICs) as well as additional challenges faced when testing these systems are obvious reasons. A particular example is the escalating impact of realistic test conditions with respect to physical (interface between the device under test (DUT) and the test instruments, input-signal conditions, input impedance, etc.), functional (noise, jitter) and environmental (temperature) constraints. Unfortunately, the impact of such constraints could result in a significant loss of performance and design failure even if the design itself was flawless. Current industrial verification methodologies, each addressing specific verification challenges, have been shown to be useful for detecting and eliminating design failures. Nevertheless, decreases in first pass silicon success rates illustrate the lack of cohesive, efficient techniques to allow a predictable verification process that leads to the highest possible confidence in the correctness of AMS designs. In this PhD thesis, we propose a constraint-driven verification methodology for monitoring specifications of AMS designs. The methodology is based on the early insertion of test(s) associated with each design specification. It exploits specific constraints introduced by these planned tests as well as by the specifications themselves, as they are extracted and used during the verification process, thus reducing the risk of costly errors caused by incomplete, ambiguous or missing details in the specification documents. To fully analyze the impact of these constraints on the overall AMS design behavior, we developed a two-phase algorithm that automatically integrates them into the AMS design behavioral model and performs the specifications monitoring in a Matlab simulation environment. The effectiveness of this methodology is demonstrated for two-dimensional (2D) and three-dimensional (3D) ICs. Our results show that our approach can predict out-of-specification failures, corner cases that were not covered using previous verification methodologies. On one hand, we show that specifications satisfied without specification and test-related constraints have failed in the presence of these additional constraints. On the other hand, we show that some specifications may degrade or even cannot be verified without adding specific specification and test-related constraints

Physical design methodologies for monolithic 3D ICs

The objective of this research is to develop physical design methodologies for monolithic 3D ICs and use them to evaluate the improvements in the power-performance envelope offered over 2D ICs. In addition, design-for-test (DfT) techniques essential for the adoption of shorter term through-silicon-via (TSV) based 3D ICs are explored. Testing of TSV-based 3D ICs is one of the last challenges facing their commercialization. First, a pre-bond testable 3D scan chain construction technique is developed. Next, a transition-delay-fault test architecture is presented, along with a study on how to mitigate IR-drop. Finally, to facilitate partitioning, a quick and accurate framework for test-TSV estimation is developed. Block-level monolithic 3D ICs will be the first to emerge, as significant IP can be reused. However, no physical design flows exist, and hence a monolithic 3D floorplanning framework is developed. Next, inter-tier performance differences that arise due to the not yet mature fabrication process are investigated and modeled. Finally, an inter-tier performance-difference aware floorplanner is presented, and it is demonstrated that high quality 3D floorplans are achievable even under these inter-tier differences. Monolithic 3D offers sufficient integration density to place individual gates in three dimensions and connect them together. However, no tools or techniques exist that can take advantage of the high integration density offered. Therefore, a gate-level framework that leverages existing 2D ICs tools is presented. This framework also provides congestion modeling and produces results that minimize routing congestion. Next, this framework is extended to commercial 2D IC tools, so that steps such as timing optimization and clock tree synthesis can be applied. Finally, a voltage-drop-aware partitioning technique is presented that can alleviate IR-drop issues, without any impact on the performance or maximum operating temperature of the chip.Ph.D

Low-power clock distribution networks for 3-D ICs

Designing a low power clock network in synchronous circuits is an important task. This requirement is stricter for 3-D circuits due to the increased power densities. Resonant clock networks are considered efficient low-power alternatives to conventional clock distribution schemes. These networks utilize additional inductive circuits to reduce the power consumption while delivering a full swing clock signal to the sink nodes. Test is another complex task for 3-D ICs, where pre-bond test is a prerequisite. This paper, consequently, introduces a design methodology for resonant 3-D clock networks that lowers the power of the clock networks while supporting pre-bond test. Several 3-D clock network topologies are explored in a 0.18 μm CMOS technology. Simulation results indicate 43% reduction in the power consumed by the resonant 3-D clock network as compared to a conventional buffered clock network. By properly distributing the inductance within the layers of the 3-D stack, resonance is ensured both in pre-bond test and normal operation. The important aspects of this approach are introduced in this paper

공정변이를 고려한 3차원 집적 회로 설계 및 패키징 기법

학위논문 (박사)-- 서울대학교 대학원 : 전기·컴퓨터공학부, 2014. 2. 김태환.As CMOS scaling down, The control of variation in chip performance (i.e. speed and power) becomes highly important to improve the chip yield. The increased variation of chip performance demands additional design efforts such as the increase of guard-band or longer design turnaround time (TAT), which cause degradation of both chip performance and economic profit. Meanwhile, through-silicon via (TSV) based 3D technology has been regarded as the promising solution for long interconnect wire and huge die size problem. Since a 3D IC is manufactured by stacking multiple dies which are fabricated in different wafers, integration of the dies that have far different process characteristic can enlarge the difference of device performance on different dies within a single chip. In this dissertation, we analyze the effect of on-package (within-chip) variation on 3D IC and presents effective methods to mitigate the onpackage variation. First, a parametric yield improvement method is presented to resolve the mismatches of dies having different process characteristic. Comprehensive 3D integration algorithms considering post-silicon tuning technique is developed for the multi-layered 3D IC. Then, we show that a careful clock edge embedding in 3D clock tree can greatly reduce the impact of on-package variation on 3D clock skew and propose a two-step solution for the problem of on-package variation-aware layer embedding in 3D clock tree synthesis. In summary, this dissertation presents effective 3D integration method and 3D clock tree synthesis algorithm for process-variation tolerant 3D IC designs.Abstract i Contents ii List of Figures iv List of Tables vii 1 Introduction 1 1.1 Process Variation in 3D ICs . . . . . . . . . . . . . . . . . . . . . . . 1 1.2 Contributions of This Dissertation . . . . . . . . . . . . . . . . . . . 6 2 Post-silicon Tuning Aware Die/WaferMatching Algorithms for Enhancing Parametric Yield of 3D IC Design 7 2.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7 2.2 Preliminaries . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 2.3 The Die-to-Die Matching Problem and Proposed Algorithm Considering Body Biasing . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13 2.3.1 Motivation and Problem Definition . . . . . . . . . . . . . . 13 2.3.2 The Proposed Die-to-Die Matching Algorithm . . . . . . . . 15 2.4 TheWafer-to-Wafer Matching Problem and Proposed Algorithm Considering Body Biasing . . . . . . . . . . . . . . . . . . . . . . . . . . 18 2.4.1 Problem Definition and The Proposed Wafer-to-Wafer Matching Algorithm . . . . . . . . . . . . . . . . . . . . . . . . . . 18 2.5 Experimental Results . . . . . . . . . . . . . . . . . . . . . . . . . . 20 2.6 Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31 3 Edge Layer Embedding Algorithm for Mitigating On-Package Variation in 3D Clock Tree Synthesis 32 3.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32 3.2 Problem Definitions and Motivation . . . . . . . . . . . . . . . . . . 35 3.3 The Proposed Algorithm for On-Package Variation Aware Edge Embedding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39 3.3.1 Algorithm for Maximizing Layer Sharing of Edges . . . . . . 39 3.3.2 Refinement: Partial Edge Embedding on Layers . . . . . . . . 47 3.3.3 Clock Tree Routing and Buffer Insertion . . . . . . . . . . . . 49 3.4 Experimental Results . . . . . . . . . . . . . . . . . . . . . . . . . . 52 3.5 Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57 4 Conclusion 64 4.1 Chapter 2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64 4.2 Chapter 3 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65 Abstract in Korean 72Docto

Investigation into yield and reliability enhancement of TSV-based three-dimensional integration circuits

Three dimensional integrated circuits (3D ICs) have been acknowledged as a promising technology to overcome the interconnect delay bottleneck brought by continuous CMOS scaling. Recent research shows that through-silicon-vias (TSVs), which act as vertical links between layers, pose yield and reliability challenges for 3D design. This thesis presents three original contributions.The first contribution presents a grouping-based technique to improve the yield of 3D ICs under manufacturing TSV defects, where regular and redundant TSVs are partitioned into groups. In each group, signals can select good TSVs using rerouting multiplexers avoiding defective TSVs. Grouping ratio (regular to redundant TSVs in one group) has an impact on yield and hardware overhead. Mathematical probabilistic models are presented for yield analysis under the influence of independent and clustering defect distributions. Simulation results using MATLAB show that for a given number of TSVs and TSV failure rate, careful selection of grouping ratio results in achieving 100% yield at minimal hardware cost (number of multiplexers and redundant TSVs) in comparison to a design that does not exploit TSV grouping ratios. The second contribution presents an efficient online fault tolerance technique based on redundant TSVs, to detect TSV manufacturing defects and address thermal-induced reliability issue. The proposed technique accounts for both fault detection and recovery in the presence of three TSV defects: voids, delamination between TSV and landing pad, and TSV short-to-substrate. Simulations using HSPICE and ModelSim are carried out to validate fault detection and recovery. Results show that regular and redundant TSVs can be divided into groups to minimise area overhead without affecting the fault tolerance capability of the technique. Synthesis results using 130-nm design library show that 100% repair capability can be achieved with low area overhead (4% for the best case). The last contribution proposes a technique with joint consideration of temperature mitigation and fault tolerance without introducing additional redundant TSVs. This is achieved by reusing spare TSVs that are frequently deployed for improving yield and reliability in 3D ICs. The proposed technique consists of two steps: TSV determination step, which is for achieving optimal partition between regular and spare TSVs into groups; The second step is TSV placement, where temperature mitigation is targeted while optimizing total wirelength and routing difference. Simulation results show that using the proposed technique, 100% repair capability is achieved across all (five) benchmarks with an average temperature reduction of 75.2? (34.1%) (best case is 99.8? (58.5%)), while increasing wirelength by a small amount