Finite Element Simulation of Light Propagation in Non-Periodic Mask Patterns

Rigorous electromagnetic field simulations are an essential part for scatterometry and mask pattern design. Today mainly periodic structures are considered in simulations. Non-periodic structures are typically modeled by large, artificially periodified computational domains. For systems with a large radius of influence this leads to very large computational domains to keep the error sufficiently small. In this paper we review recent advances in the rigorous simulation of isolated structures embedded into a surrounding media. We especially address the situation of a layered surrounding media (mask or wafer) with additional infinite inhomogeneities such as resist lines. Further we detail how to extract the far field information needed for the aerial image computation in the non-periodic setting.Comment: Proceedings SPIE conference Photomask Japan (2008

Accurate and efficient algorithms for boundary element methods in electromagnetic scattering: a tribute to the work of F. Olyslager

Boundary element methods (BEMs) are an increasingly popular approach to model electromagnetic scattering both by perfect conductors and dielectric objects. Several mathematical, numerical, and computational techniques pullulated from the research into BEMs, enhancing its efficiency and applicability. In designing a viable implementation of the BEM, both theoretical and practical aspects need to be taken into account. Theoretical aspects include the choice of an integral equation for the sought after current densities on the geometry's boundaries and the choice of a discretization strategy (i.e. a finite element space) for this equation. Practical aspects include efficient algorithms to execute the multiplication of the system matrix by a test vector (such as a fast multipole method) and the parallelization of this multiplication algorithm that allows the distribution of the computation and communication requirements between multiple computational nodes. In honor of our former colleague and mentor, F. Olyslager, an overview of the BEMs for large and complex EM problems developed within the Electromagnetics Group at Ghent University is presented. Recent results that ramified from F. Olyslager's scientific endeavors are included in the survey

An efficient 1-D periodic boundary integral equation technique to analyze radiation onto straight and meandering microstrip lines

A modeling technique to analyze the radiation onto arbitrary 1-D periodic metallizations residing on a microstrip substrate is presented. In particular, straight and meandering lines are being studied. The method is based on a boundary integral equation, more specifically on a mixed potential integral equation (MPIE), that is solved by means of the method of moments. A plane wave excites the microstrip structure, and according to the Floquet-Bloch theorem, the analysis can be restricted to one single unit cell. Thereto, the MPIE must be constructed using the pertinent 1-D periodic layered medium Green's functions. Here, these Green's functions are obtained in closed form by invoking the perfectly matched layer paradigm. The proposed method is applied to assess the radiation onto 1) a semi-infinite plate, 2) a straight microstrip line, and 3) a serpentine delay line. These three types of examples clearly illustrate and validate the method. Also, its efficiency, compared to a previously developed fast microstrip analysis technique, is demonstrated