ULTRAPRECISION MACHINING OF HYBRID FREEFORM SURFACES USING MULTIPLE-AXIS DIAMOND TURNING

Ph.DDOCTOR OF PHILOSOPH

Study and Performance Enhancement of Fast Tool Servo Diamond Turning of Micro-structured Surfaces

Ph.DDOCTOR OF PHILOSOPH

Micro/Nano Manufacturing

Micro manufacturing involves dealing with the fabrication of structures in the size range of 0.1 to 1000 µm. The scope of nano manufacturing extends the size range of manufactured features to even smaller length scales—below 100 nm. A strict borderline between micro and nano manufacturing can hardly be drawn, such that both domains are treated as complementary and mutually beneficial within a closely interconnected scientific community. Both micro and nano manufacturing can be considered as important enablers for high-end products. This Special Issue of Applied Sciences is dedicated to recent advances in research and development within the field of micro and nano manufacturing. The included papers report recent findings and advances in manufacturing technologies for producing products with micro and nano scale features and structures as well as applications underpinned by the advances in these technologies

Optimization of Tool Path for Uniform Scallop-Height in Ultra-precision Grinding of Free-form Surfaces

Free-form surfaces have been widely used in complex optical devices to improve the functional performance of imaging and illumination quality and reduce sizes. Ultra-precision grinding is a kind of ultra-precision machining technology for fabricating free-form surfaces with high form accuracy and good surface finish. However, the complexity and variation of curvature of the free-form surface impose a lot of challenges to make the process more predictable. Tool path as a critical factor directly determines the form error and surface quality in ultra-precision grinding of free-form surfaces. In conventional tool path planning, the constant angle method is widely used in machining free-form surfaces, which resulted in non-uniform scallop-height and degraded surface quality of the machined surfaces. In this paper, a theoretical scallop-height model is developed to relate the residual height and diverse curvature radius. Hence, a novel tool-path generation method is developed to achieve uniform scallop-height in ultra-precision grinding of free-form surfaces. Moreover, the iterative closest-point matching method, which is a well-known algorithm to register two surfaces, is exploited to make the two surfaces match closely through rotation and translation. The deviation of corresponding points between the theoretical and the measured surfaces is determined. Hence, an optimized tool-path generator is developed that is experimentally verified through a series of grinding experiments conducted on annular sinusoidal surface and single sinusoidal surface, which allows the realization of the achievement of uniform scallop-height in ultra-precision grinding of free-form surfaces

Frontiers in Ultra-Precision Machining

Ultra-precision machining is a multi-disciplinary research area that is an important branch of manufacturing technology. It targets achieving ultra-precision form or surface roughness accuracy, forming the backbone and support of today’s innovative technology industries in aerospace, semiconductors, optics, telecommunications, energy, etc. The increasing demand for components with ultra-precision accuracy has stimulated the development of ultra-precision machining technology in recent decades. Accordingly, this Special Issue includes reviews and regular research papers on the frontiers of ultra-precision machining and will serve as a platform for the communication of the latest development and innovations of ultra-precision machining technologies

DEVELOPMENT AND APPLICATION OF ON-MACHINE SURFACE MEASUREMENT FOR ULTRA-PRECISION TURNING PROCESS

Optical freeform components, featured with high functional performance, are of enormous demand in advanced imaging and illumination applications. However, the geometrical complexity and high accuracy demand impose considerable challenges on the existing ultra-precision freeform machining technologies. Surface measurement and characterisation become the key to further improving machining performance. In order to further increase the metrology availability and efficiency, a shift in the approach of surface metrology from offline lab-based solutions towards the use of metrology upon manufacturing platforms is needed. On-machine surface measurement (OMSM) will not only allow the assessment of manufactured surfaces just-in-time without transportation and repositioning, but also provide feedback for process optimization and post-process correction with consistent coordinate frame. In the thesis, a single point robust interferometer is integrated onto a diamond turning lathe to establish the metrology-embedded ultra-precision manufacturing platform. To extract a priori information for the subsequent OMSM, a theoretical and experimental study of surface generation was carried out for ultra-precision turning of optical freeform surfaces. With the proposed machining methodology and surface generation simulation, two freeform surfaces (sinusoidal grid and micro-lens arrays) were successfully fabricated using the slow tool servo technique. The machined topography of freeform surfaces was uniformly distributed and in agreement with simulated results. Since it operates in the manufacturing environment, the machine tool effects on the OMSM were comprehensively evaluated, including on-machine vibration test, machine kinematic error mapping and linearity error calibration. A systematic calibration methodology for single point OMSM was proposed. Both theoretical and experimental investigation have been conducted to prove the validity of the proposed calibration methodology and the effectiveness of OMSM. With the aid of OMSM, potential applications were explored to exploit the integration benefits to further enhance the ultra-precision machining performance. OMSM integration will increase the automation level of the manufacturing. As OMSM preserves the coordinate system between the machining and measurement, the process investigation can be carried out in a more deterministic manner. The effect of process parameters on the surface form errors was investigated for ultra-precision cylindrical turning process. An empirical model based on response surface methodology has been established and validated with the experimental results. Moreover, a corrective machining methodology was proposed to further improve the accuracy of diamond turned surfaces with OMSM. According to different correction tasks, corresponding OMSM data processing methods were presented. Profile and surface correction experiments were performed to validate the proposed corrective machining methodology and 40% improvement of surface accuracy was achieved

DESIGN, FABRICATION AND TESTING OF HIERARCHICAL MICRO-OPTICAL STRUCTURES AND SYSTEMS

Micro-optical systems are becoming essential components in imaging, sensing, communications, computing, and other applications. Optically based designs are replacing electronic, chemical and mechanical systems for a variety of reasons, including low power consumption, reduced maintenance, and faster operation. However, as the number and variety of applications increases, micro-optical system designs are becoming smaller, more integrated, and more complicated. Micro and nano-optical systems found in nature, such as the imaging systems found in many insects and crustaceans, can have highly integrated optical structures that vary in size by orders of magnitude. These systems incorporate components such as compound lenses, anti-reflective lens surface structuring, spectral filters, and polarization selective elements. For animals, these hybrid optical systems capable of many optical functions in a compact package have been repeatedly selected during the evolutionary process. Understanding the advantages of these designs gives motivation for synthetic optical systems with comparable functionality. However, alternative fabrication methods that deviate from conventional processes are needed to create such systems. Further complicating the issue, the resulting device geometry may not be readily compatible with existing measurement techniques. This dissertation explores several nontraditional fabrication techniques for optical components with hierarchical geometries and measurement techniques to evaluate performance of such components. A micro-transfer molding process is found to produce high-fidelity micro-optical structures and is used to fabricate a spectral filter on a curved surface. By using a custom measurement setup we demonstrate that the spectral filter retains functionality despite the nontraditional geometry. A compound lens is fabricated using similar fabrication techniques and the imaging performance is analyzed. A spray coating technique for photoresist application to curved surfaces combined with interference lithography is also investigated. Using this technique, we generate polarizers on curved surfaces and measure their performance. This work furthers an understanding of how combining multiple optical components affects the performance of each component, the final integrated devices, and leads towards realization of biomimetically inspired imaging systems

Design, control and error analysis of a fast tool positioning system for ultra-precision machining of freeform surfaces

This thesis was previously held under moratorium from 03/12/19 to 03/12/21Freeform surfaces are widely found in advanced imaging and illumination systems, orthopaedic implants, high-power beam shaping applications, and other high-end scientific instruments. They give the designers greater ability to cope with the performance limitations commonly encountered in simple-shape designs. However, the stringent requirements for surface roughness and form accuracy of freeform components pose significant challenges for current machining techniques—especially in the optical and display market where large surfaces with tens of thousands of micro features are to be machined. Such highly wavy surfaces require the machine tool cutter to move rapidly while keeping following errors small. Manufacturing efficiency has been a bottleneck in these applications. The rapidly changing cutting forces and inertial forces also contribute a great deal to the machining errors. The difficulty in maintaining good surface quality under conditions of high operational frequency suggests the need for an error analysis approach that can predict the dynamic errors. The machining requirements also impose great challenges on machine tool design and the control process. There has been a knowledge gap on how the mechanical structural design affects the achievable positioning stability. The goal of this study was to develop a tool positioning system capable of delivering fast motion with the required positioning accuracy and stiffness for ultra-precision freeform manufacturing. This goal is achieved through deterministic structural design, detailed error analysis, and novel control algorithms. Firstly, a novel stiff-support design was proposed to eliminate the structural and bearing compliances in the structural loop. To implement the concept, a fast positioning device was developed based on a new-type flat voice coil motor. Flexure bearing, magnet track, and motor coil parameters were designed and calculated in detail. A high-performance digital controller and a power amplifier were also built to meet the servo rate requirement of the closed-loop system. A thorough understanding was established of how signals propagated within the control system, which is fundamentally important in determining the loop performance of high-speed control. A systematic error analysis approach based on a detailed model of the system was proposed and verified for the first time that could reveal how disturbances contribute to the tool positioning errors. Each source of disturbance was treated as a stochastic process, and these disturbances were synthesised in the frequency domain. The differences between following error and real positioning error were discussed and clarified. The predicted spectrum of following errors agreed with the measured spectrum across the frequency range. It is found that the following errors read from the control software underestimated the real positioning errors at low frequencies and overestimated them at high frequencies. The error analysis approach thus successfully revealed the real tool positioning errors that are mingled with sensor noise. Approaches to suppress disturbances were discussed from the perspectives of both system design and control. A deterministic controller design approach was developed to preclude the uncertainty associated with controller tuning, resulting in a control law that can minimize positioning errors. The influences of mechanical parameters such as mass, damping, and stiffness were investigated within the closed-loop framework. Under a given disturbance condition, the optimal bearing stiffness and optimal damping coefficients were found. Experimental positioning tests showed that a larger moving mass helped to combat all disturbances but sensor noise. Because of power limits, the inertia of the fast tool positioning system could not be high. A control algorithm with an additional acceleration-feedback loop was then studied to enhance the dynamic stiffness of the cutting system without any need for large inertia. An analytical model of the dynamic stiffness of the system with acceleration feedback was established. The dynamic stiffness was tested by frequency response tests as well as by intermittent diamond-turning experiments. The following errors and the form errors of the machined surfaces were compared with the estimates provided by the model. It is found that the dynamic stiffness within the acceleration sensor bandwidth was proportionally improved. The additional acceleration sensor brought a new error source into the loop, and its contribution of errors increased with a larger acceleration gain. At a certain point, the error caused by the increased acceleration gain surpassed other disturbances and started to dominate, representing the practical upper limit of the acceleration gain. Finally, the developed positioning system was used to cut some typical freeform surfaces. A surface roughness of 1.2 nm (Ra) was achieved on a NiP alloy substrate in flat cutting experiments. Freeform surfaces—including beam integrator surface, sinusoidal surface, and arbitrary freeform surface—were successfully machined with optical-grade quality. Ideas for future improvements were proposed in the end of this thesis.Freeform surfaces are widely found in advanced imaging and illumination systems, orthopaedic implants, high-power beam shaping applications, and other high-end scientific instruments. They give the designers greater ability to cope with the performance limitations commonly encountered in simple-shape designs. However, the stringent requirements for surface roughness and form accuracy of freeform components pose significant challenges for current machining techniques—especially in the optical and display market where large surfaces with tens of thousands of micro features are to be machined. Such highly wavy surfaces require the machine tool cutter to move rapidly while keeping following errors small. Manufacturing efficiency has been a bottleneck in these applications. The rapidly changing cutting forces and inertial forces also contribute a great deal to the machining errors. The difficulty in maintaining good surface quality under conditions of high operational frequency suggests the need for an error analysis approach that can predict the dynamic errors. The machining requirements also impose great challenges on machine tool design and the control process. There has been a knowledge gap on how the mechanical structural design affects the achievable positioning stability. The goal of this study was to develop a tool positioning system capable of delivering fast motion with the required positioning accuracy and stiffness for ultra-precision freeform manufacturing. This goal is achieved through deterministic structural design, detailed error analysis, and novel control algorithms. Firstly, a novel stiff-support design was proposed to eliminate the structural and bearing compliances in the structural loop. To implement the concept, a fast positioning device was developed based on a new-type flat voice coil motor. Flexure bearing, magnet track, and motor coil parameters were designed and calculated in detail. A high-performance digital controller and a power amplifier were also built to meet the servo rate requirement of the closed-loop system. A thorough understanding was established of how signals propagated within the control system, which is fundamentally important in determining the loop performance of high-speed control. A systematic error analysis approach based on a detailed model of the system was proposed and verified for the first time that could reveal how disturbances contribute to the tool positioning errors. Each source of disturbance was treated as a stochastic process, and these disturbances were synthesised in the frequency domain. The differences between following error and real positioning error were discussed and clarified. The predicted spectrum of following errors agreed with the measured spectrum across the frequency range. It is found that the following errors read from the control software underestimated the real positioning errors at low frequencies and overestimated them at high frequencies. The error analysis approach thus successfully revealed the real tool positioning errors that are mingled with sensor noise. Approaches to suppress disturbances were discussed from the perspectives of both system design and control. A deterministic controller design approach was developed to preclude the uncertainty associated with controller tuning, resulting in a control law that can minimize positioning errors. The influences of mechanical parameters such as mass, damping, and stiffness were investigated within the closed-loop framework. Under a given disturbance condition, the optimal bearing stiffness and optimal damping coefficients were found. Experimental positioning tests showed that a larger moving mass helped to combat all disturbances but sensor noise. Because of power limits, the inertia of the fast tool positioning system could not be high. A control algorithm with an additional acceleration-feedback loop was then studied to enhance the dynamic stiffness of the cutting system without any need for large inertia. An analytical model of the dynamic stiffness of the system with acceleration feedback was established. The dynamic stiffness was tested by frequency response tests as well as by intermittent diamond-turning experiments. The following errors and the form errors of the machined surfaces were compared with the estimates provided by the model. It is found that the dynamic stiffness within the acceleration sensor bandwidth was proportionally improved. The additional acceleration sensor brought a new error source into the loop, and its contribution of errors increased with a larger acceleration gain. At a certain point, the error caused by the increased acceleration gain surpassed other disturbances and started to dominate, representing the practical upper limit of the acceleration gain. Finally, the developed positioning system was used to cut some typical freeform surfaces. A surface roughness of 1.2 nm (Ra) was achieved on a NiP alloy substrate in flat cutting experiments. Freeform surfaces—including beam integrator surface, sinusoidal surface, and arbitrary freeform surface—were successfully machined with optical-grade quality. Ideas for future improvements were proposed in the end of this thesis

Conference on Binary Optics: An Opportunity for Technical Exchange

The papers herein were presented at the Conference on Binary Optics held in Huntsville, AL, February 23-25, 1993. The papers were presented according to subject as follows: modeling and design, fabrication, and applications. Invited papers and tutorial viewgraphs presented on these subjects are included