All-copper chip-to-substrate interconnects for high performance integrated circuit devices

In this work, all-copper connections between silicon microchips and substrates are developed. The semiconductor industry advances the transistor density on a microchip based on the roadmap set by Moore's Law. Communicating with a microprocessor which has nearly one billion transistors is a daunting challenge. Interconnects from the chip to the system (i.e. memory, graphics, drives, power supply) are rapidly growing in number and becoming a serious concern. Specifically, the solder ball connections that are formed between the chip itself and the package are challenging to make and still have acceptable electrical and mechanical performance. These connections are being required to increase in number, increase in power current density, and increase in off-chip operating frequency. Many of the challenges with using solder connections are limiting these areas. In order to advance beyond the limitations of solder for electrical and mechanical performance, a novel approach to creating all-copper connections from the chip-to-substrate has been developed. The development included characterizing the electroless plating and annealing process used to create the connections, designing these connections to be compatible with the stress requirements for fragile low-k devices, and finally by improving the plating/annealing process to become process time competitive with solder. It was found that using a commercially available electroless copper bath for the plating, followed by annealing at 180 C for 1 hour, the shear strength of the copper-copper bond was approximately 165 MPa. This work resulted in many significant conclusions about the mechanism for bonding in the all-copper process and the significance of materials and geometry on the mechanical design for these connections.Ph.D.Committee Chair: Kohl, Paul; Committee Member: Bidstrup Allen, Sue Ann; Committee Member: Fuller, Thomas; Committee Member: Hesketh, Peter; Committee Member: Hess, Dennis; Committee Member: Meindl, Jame

Ultra thin ultrafine-pitch chip-package interconnections for embedded chip last approach

Ever growing demands for portability and functionality have always governed the electronic technology innovations. IC downscaling with Moore s law and system miniaturization with System-On-Package (SOP) paradigm has resulted and will continue to result in ultraminiaturized systems with unprecedented functionality at reduced cost. The trend towards 3D silicon system integration is expected to downscale IC I/O pad pitches from 40µm to 1- 5 µm in future. Device- to- system board interconnections are typically accomplished today with either wire bonding or solders. Both of these are incremental and run into either electrical or mechanical barriers as they are extended to higher density of interconnections. Alternate interconnection approaches such as compliant interconnects typically require lengthy connections and are therefore limited in terms of electrical properties, although expected to meet the mechanical requirements. As supply currents will increase upto 220 A by 2012, the current density will exceed the maximum allowable current density of solders. The intrinsic delay and electromigration in solders are other daunting issues that become critical at nanometer size technology nodes. In addition, formation of intermetallics is also a bottleneck that poses significant mechanical issues. Recently, many research groups have investigated various techniques for copper-copper direct bonding. Typically, bonding is carried out at 400oC for 30 min followed by annealing for 30 min. High thermal budget in such process makes it less attractive for integrated systems because of the associated process incompatibilities. In the present study, copper-copper bonding at ultra fine-pitch using advanced nano-conductive and non-conductive adhesives is evaluated. The proposed copper-copper based interconnects using advanced conductive and non-conductive adhesives will be a new fundamental and comprehensive paradigm to solve all the four barriers: 1) I/O pitch 2) Electrical performance 3) Reliability and 4) Cost. This thesis investigates the mechanical integrity and reliability of copper-copper bonding using advanced adhesives through test vehicle fabrication and reliability testing. Test vehicles were fabricated using low cost electro-deposition techniques and assembled onto glass carrier. Experimental results show that proposed copper-copper bonding using advanced adhesives could potentially meet all the system performance requirements for the emerging micro/nano-systems.M.S.Committee Chair: Prof. Rao R Tummala; Committee Member: Dr. Jack Moon; Committee Member: Dr. P M Ra

Novel fine pitch interconnection methods using metallised polymer spheres

There is an ongoing demand for electronics devices with more functionality while reducing size and cost, for example smart phones and tablet personal computers. This requirement has led to significantly higher integrated circuit input/output densities and therefore the need for off-chip interconnection pitch reduction. Flip-chip processes utilising anisotropic conductive adhesives anisotropic conductive films (ACAs/ACFs) have been successfully applied in liquid crystal display (LCD) interconnection for more than two decades. However the conflict between the need for a high particle density, to ensure sufficient the conductivity, without increasing the probability of short circuits has remained an issue since the initial utilization of ACAs/ACFs for interconnection. But this issue has become even more severe with the challenge of ultra-fine pitch interconnection. This thesis advances a potential solution to this challenge where the conductive particles typically used in ACAs are selectively deposited onto the connections ensuring conductivity without bridging. The research presented in this thesis work has been undertaken to advance the fundamental understanding of the mechanical characteristics of micro-sized metal coated polymer particles (MCPs) and their application in fine or ultra-fine pitch interconnections. This included use of a new technique based on an in-situ nanomechanical system within SEM which was utilised to study MCP fracture and failure when undergoing deformation. Different loading conditions were applied to both uncoated polymer particles and MCPs, and the in-situ system enables their observation throughout compression. The results showed that both the polymer particles and MCP display viscoelastic characteristics with clear strain-rate hardening behaviour, and that the rate of compression therefore influences the initiation of cracks and their propagation direction. Selective particle deposition using electrophoretic deposition (EPD) and magnetic deposition (MD) of Ni/Au-MCPs have been evaluated and a fine or ultra-fine pitch deposition has been demonstrated, followed by a subsequent assembly process. The MCPs were successfully positively charged using metal cations and this charging mechanism was analysed. A new theory has been proposed to explain the assembly mechanism of EPD of Ni/Au coated particles using this metal cation based charging method. The magnetic deposition experiments showed that sufficient magnetostatic interaction force between the magnetized particles and pads enables a highly selective dense deposition of particles. Successful bonding to form conductive interconnections with pre-deposited particles have been demonstrated using a thermocompression flip-chip bonder, which illustrates the applicable capability of EPD of MCPs for fine or ultra-fine pitch interconnection

Nanowires for 3d silicon interconnection – low temperature compliant nanowire-polymer film for z-axis interconnect

Semiconductor chip packaging has evolved from single chip packaging to 3D heterogeneous system integration using multichip stacking in a single module. One of the key challenges in 3D integration is the high density interconnects that need to be formed between the chips with through-silicon-vias (TSVs) and inter-chip interconnects. Anisotropic Conductive Film (ACF) technology is one of the low-temperature, fine-pitch interconnect method, which has been considered as a potential replacement for solder interconnects in line with continuous scaling of the interconnects in the IC industry. However, the conventional ACF materials are facing challenges to accommodate the reduced pad and pitch size due to the micro-size particles and the particle agglomeration issue. A new interconnect material - Nanowire Anisotropic Conductive Film (NW-ACF), composed of high density copper nanowires of ~ 200 nm diameter and 10-30 µm length that are vertically distributed in a polymeric template, is developed in this work to tackle the constrains of the conventional ACFs and serves as an inter-chip interconnect solution for potential three-dimensional (3D) applications

ELECTRICAL AND MECHANICAL CHARACTERIZATION OF MWNT FILLED CONDUCTIVE ADHESIVE FOR ELECTRONICS PACKAGING

Lead-tin solder has been widely used as interconnection material in electronics packaging for a long time. In response to environmental legislation, the lead-tin alloys are being replaced with lead-free alloys and electrically conductive adhesives in consumer electronics. Lead-free solder usually require higher reflow temperatures than the traditional lead-tin alloys, which can cause die crack and board warpage in assembly process, thereby impacting the assembly yields. The high tin content in lead-free solder forms tin whiskers, which has the potential to cause short circuits failure. Conductive adhesives are an alternative to solder reflow processing, however, conductive adhesives require up to 80 wt% metal filler to ensure electrical and thermal conductivity. The high loading content degrades the mechanical properties of the polymer matrix and reduces the reliability and assembly yields when compared to soldered assemblies. Carbon nanotubes (CNTs) have ultra high aspect ratio as well as many novel properties. The high aspect ratio of CNTs makes them easy to form percolation at low loading and together with other novel properties make it possible to provide electrical and thermal conductivity for the polymer matrix while maintaining or even reinforcing the mechanical properties. Replacing the metal particles with CNTs in conductive adhesive compositions has the potential benefits of being lead free, low process temperature, corrosion resistant, electrically/thermally conductive, high mechanical strength and lightweight. In this paper, multiwall nanotubes (MWNTs) with different dimensions are mixed with epoxy. The relationships among MWNTs dimension, volume resistivity and thermal conductivity of the composite are characterized. Different loadings of CNTs, additives and mixing methods were used to achieve satisfying electrical and mechanical properties and pot life. Different assembly technologies such as pressure dispensing, screen and stencil printing are used to simplify the processing method and raise the assembly yields. Contact resistance, volume resistivity, high frequency performance, thermal conductivity and mechanical properties were measured and compared with metal filled conductive adhesive and traditional solder paste

Index to 1986 NASA Tech Briefs, volume 11, numbers 1-4

Short announcements of new technology derived from the R&D activities of NASA are presented. These briefs emphasize information considered likely to be transferrable across industrial, regional, or disciplinary lines and are issued to encourage commercial application. This index for 1986 Tech Briefs contains abstracts and four indexes: subject, personal author, originating center, and Tech Brief Number. The following areas are covered: electronic components and circuits, electronic systems, physical sciences, materials, life sciences, mechanics, machinery, fabrication technology, and mathematics and information sciences

A novel transparent and flexible pressure sensor for the human machine interface

The movement towards flexible and transparent electronics for use in displays, electronic skins, musical instruments and automotive industries, demands electrical components such as pressure sensors to evolve alongside circuitry and electrodes to ensure a fully flexible and transparent system. In the past, piezoresistive pressure sensors made with flexible electrodes have been fabricated, however, many of these systems are opaque. For the first time, we present a technology that exploits the natural self-assembly of polystyrene nanospheres to reproducibly create nanostructured materials to be used in optically transparent pressure sensors with sensing performance comparable to opaque industry standards. The performance of the piezoresistive pressure sensor relies on uniform elastic nano-dome arrays. A thin and homogeneous lining of poly(3,4-ethylenedioxythiophene) polystyrene sulfonate (PEDOT:PSS) renders the domes conductive and retains the transparent and flexible qualities of the underlying polymer. The film transparency is primarily dependant on PEDOT:PSS film thickness where transparencies as high as 79.3 \% are achieved for films of less than 100 nm in thickness. The sensors demonstrate a resistance response across the force range appropriate for all human machine interface interactions, which correspond here to 0.07 to 26 N. The fabrication process involves the creation of an electroactive mould which is used to create nanostructred polymer layers. To enable mould reuse and enhance process efficiency, an anti-adhesive treatment in the form of a self-assembled monolayer of alkanethiols has been developed. Three chain lengths for the alkanethiol of chemical structure H$_{3}$C-(CH$_{2}$)$_{n}$-SH where n = 3, 5, and 11 are investigated and SAM functionalisation is confirmed with XPS. Peel tests prove that all three are effective at preventing adhesion between the mould and PEDOT:PSS and the treatment is shown not to be detrimental to the polymer electrodeposition process. An adapted fabrication procedure with custom designed electrode housing enables larger samples to be created for prototype devices. A simple functional prototype in the form of a multi-pixel force sensor atop of an LED display is successfully designed and fabricated to highlight the technology for use at the human machine interface.Open Acces

Micro/Nano Structures and Systems

Micro/Nano Structures and Systems: Analysis, Design, Manufacturing, and Reliability is a comprehensive guide that explores the various aspects of micro- and nanostructures and systems. From analysis and design to manufacturing and reliability, this reprint provides a thorough understanding of the latest methods and techniques used in the field. With an emphasis on modern computational and analytical methods and their integration with experimental techniques, this reprint is an invaluable resource for researchers and engineers working in the field of micro- and nanosystems, including micromachines, additive manufacturing at the microscale, micro/nano-electromechanical systems, and more. Written by leading experts in the field, this reprint offers a complete understanding of the physical and mechanical behavior of micro- and nanostructures, making it an essential reference for professionals in this field