1,454 research outputs found
Coupling carbon nanotube mechanics to a superconducting circuit
The quantum behaviour of mechanical resonators is a new and emerging field
driven by recent experiments reaching the quantum ground state. The high
frequency, small mass, and large quality-factor of carbon nanotube resonators
make them attractive for quantum nanomechanical applications. A common element
in experiments achieving the resonator ground state is a second quantum system,
such as coherent photons or superconducting device, coupled to the resonators
motion. For nanotubes, however, this is a challenge due to their small size.
Here, we couple a carbon nanoelectromechanical (NEMS) device to a
superconducting circuit. Suspended carbon nanotubes act as both superconducting
junctions and moving elements in a Superconducting Quantum Interference Device
(SQUID). We observe a strong modulation of the flux through the SQUID from
displacements of the nanotube. Incorporating this SQUID into superconducting
resonators and qubits should enable the detection and manipulation of nanotube
mechanical quantum states at the single-phonon level
CMOS systems and circuits for sub-degree per hour MEMS gyroscopes
The objective of our research is to develop system architectures and CMOS circuits that interface with high-Q silicon microgyroscopes to implement navigation-grade angular rate sensors. The MEMS sensor used in this work is an in-plane bulk-micromachined mode-matched tuning fork gyroscope (M² – TFG
), fabricated on silicon-on-insulator substrate. The use of CMOS transimpedance amplifiers (TIA) as front-ends in high-Q MEMS resonant sensors is explored. A T-network TIA is proposed as the front-end for resonant capacitive detection. The T-TIA provides on-chip transimpedance gains of 25MΩ, has a measured capacitive resolution of 0.02aF /√Hz at 15kHz, a dynamic range of 104dB in a bandwidth of 10Hz and consumes 400μW of power. A second contribution is the development of an automated scheme to adaptively bias the mechanical structure, such that the sensor is operated in the mode-matched condition. Mode-matching leverages the inherently high quality factors of the microgyroscope, resulting in significant improvement in the Brownian noise floor, electronic noise, sensitivity and bias drift of the microsensor. We developed a novel architecture that utilizes the often ignored residual quadrature error in a gyroscope to achieve and maintain perfect mode-matching (i.e.0Hz split between the drive and sense mode frequencies), as well as electronically control the sensor bandwidth. A CMOS implementation is developed that allows mode-matching of the drive and sense frequencies of a gyroscope at a fraction of the time taken by current state of-the-art techniques. Further, this mode-matching technique allows for maintaining a controlled separation between the drive and sense resonant frequencies, providing a means of increasing sensor bandwidth and dynamic range. The mode-matching CMOS IC, implemented in a 0.5μm 2P3M process, and control algorithm have been interfaced with a 60μm thick M2−TFG to implement an angular rate sensor with bias drift as low as 0.1°/hr ℃ the lowest recorded to date for a silicon MEMS gyro.Ph.D.Committee Chair: Farrokh Ayazi; Committee Member: Jennifer Michaels; Committee Member: Levent Degertekin; Committee Member: Paul Hasler; Committee Member: W. Marshall Leac
Micro-Resonators: The Quest for Superior Performance
Microelectromechanical resonators are no longer solely a subject of research in university and government labs; they have found a variety of applications at industrial scale, where their market is predicted to grow steadily. Nevertheless, many barriers to enhance their performance and further spread their application remain to be overcome. In this Special Issue, we will focus our attention to some of the persistent challenges of micro-/nano-resonators such as nonlinearity, temperature stability, acceleration sensitivity, limits of quality factor, and failure modes that require a more in-depth understanding of the physics of vibration at small scale. The goal is to seek innovative solutions that take advantage of unique material properties and original designs to push the performance of micro-resonators beyond what is conventionally achievable. Contributions from academia discussing less-known characteristics of micro-resonators and from industry depicting the challenges of large-scale implementation of resonators are encouraged with the hopes of further stimulating the growth of this field, which is rich with fascinating physics and challenging problems
Performance optimization of lateral-mode thin-film piezoelectric-on-substrate resonant systems
The main focus of this dissertation is to characterize and improve the performance of thin-film piezoelectric-on-substrate (TPoS) lateral-mode resonators and filters. TPoS is a class of piezoelectric MEMS devices which benefits from the high coupling coefficient of the piezoelectric transduction mechanism while taking advantage of superior acoustic properties of a substrate. The use of lateral-mode TPoS designs allows for fabrication of dispersed-frequency filters on a single substrate, thus significantly reducing the size and manufacturing cost of devices. TPoS filters also offer a lower temperature coefficient of frequency, and better power handling capability compared to rival technologies all in a very small footprint. Design and fabrication process of the TPoS devices is discussed. Both silicon and diamond substrates are utilized for fabrication of TPoS devices and results are compared. Specifically, the superior acoustic properties of nanocrystalline diamond in scaling the frequency and energy density of the resonators is highlighted in comparison with silicon. The performance of TPoS devices in a variety of applications is reported. These applications include lateral-mode TPoS filters with record low IL values (as low as 2dB) and fractional bandwidth up to 1%, impedance transformers, very low phase noise oscillators, and passive wireless temperature sensors
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The impact of damping on the frequency stability of nonlinear MEMS oscillators
Linear models for oscillator noise predict an improvement in frequency stability with increasing Quality factor. Although it is well known that this result does not apply to non-linear oscillators, systematic experimental investigations of the impact of damping on frequency stability of non-linear MEMS oscillators has not been previously reported. This paper studies the frequency stability of a nonlinear MEMS oscillator under variable damping conditions. Analytical and experimental investigation of a MEMS square-wave oscillator embedding a double-ended tuning fork resonator driven into the non-linear regime is introduced. The experimental results indicate that for a pre-set drive level, the variation of air-damping changes the onset of nonlinear behaviour in the resonator, which not only impacts the output frequency but also the phase/frequency noise of a nonlinear MEMS square wave oscillator. The random walk frequency noise and flicker frequency noise levels are strongly correlated with the non-linear operating point of the resonator, whereas the white phase and white frequency noise levels are impacted both by the output power and by operative nonlinearities.This is the accepted manuscript. The final version is available from IEEE at http://dx.doi.org/10.1109/JMEMS.2015.2391832
Particle Sensor Using Solidly Mounted Resonators
This paper describes the development of a novel particle sensing system employing zinc oxide based solidly mounted resonator (SMR) devices for the detection of airborne fine particles (i.e., PM2.5 and PM10). The system operates in a dual configuration in which two SMR devices are driven by Colpitts-type oscillators in a differential mode. Particles are detected by the frequency shift caused by the mass of particles present on one resonator with while the other acts as a reference channel. Experimental validation of the system was performed inside an environmental chamber using a dust generator with the particles of known size and concentration. A sensor sensitivity of 4.6 Hz per μg/m3 was demonstrated for the SMRs resonating at a frequency of 970 MHz. Our results demonstrate that the SMR-based system has the potential to be implemented in CMOS technology as a low-cost, miniature smart particle detector for the real-time monitoring of airborne particles
Measurement and control of a mechanical oscillator at its thermal decoherence rate
In real-time quantum feedback protocols, the record of a continuous
measurement is used to stabilize a desired quantum state. Recent years have
seen highly successful applications in a variety of well-isolated
micro-systems, including microwave photons and superconducting qubits. By
contrast, the ability to stabilize the quantum state of a tangibly massive
object, such as a nanomechanical oscillator, remains a difficult challenge: The
main obstacle is environmental decoherence, which places stringent requirements
on the timescale in which the state must be measured. Here we describe a
position sensor that is capable of resolving the zero-point motion of a
solid-state, nanomechanical oscillator in the timescale of its thermal
decoherence, a critical requirement for preparing its ground state using
feedback. The sensor is based on cavity optomechanical coupling, and realizes a
measurement of the oscillator's displacement with an imprecision 40 dB below
that at the standard quantum limit, while maintaining an
imprecision-back-action product within a factor of 5 of the Heisenberg
uncertainty limit. Using the measurement as an error signal and radiation
pressure as an actuator, we demonstrate active feedback cooling (cold-damping)
of the 4.3 MHz oscillator from a cryogenic bath temperature of 4.4 K to an
effective value of 1.10.1 mK, corresponding to a mean phonon number of
5.30.6 (i.e., a ground state probability of 16%). Our results set a new
benchmark for the performance of a linear position sensor, and signal the
emergence of engineered mechanical oscillators as practical subjects for
measurement-based quantum control.Comment: 24 pages, 10 figures; typos corrected in main text and figure
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