높은 전류 구동능력을 가지는 SiGe 나노시트 구조의 터널링 전계효과 트랜지스터

학위논문 (박사) -- 서울대학교 대학원 : 공과대학 전기·정보공학부, 2021. 2. 박병국.The development of very-large-scale integration (VLSI) technology has continuously demanded smaller devices to achieve high integration density for faster computing speed or higher capacity. However, in the recent complementary-metal-oxide-semiconductor (CMOS) technology, simple downsizing the dimension of metal-oxide-semiconductor field-effect transistor (MOSFET) no longer guarantees the boosting performance of IC chips. In particular, static power consumption is not reduced while device size is decreasing because voltage scaling is slowed down at some point. The increased off-current due to short-channel effect (SCE) of MOSFET is a representative cause of the difficulty in voltage scaling. To overcome these fundamental limits of MOSFET, many researchers have been looking for the next generation of FET device over the last ten years. Tunnel field-effect transistor (TFET) has been intensively studied for its steep switching characteristics. Nevertheless, the poor current drivability of TFET is the most serious obstacle to become competitive device for MOSFET. In this thesis, TFET with high current drivability in which above-mentioned problem is significantly solved is proposed. Vertically-stacked SiGe nanosheet channels are used to boost carrier injection and gate control. The fabrication technique to form highly-condensed SiGe nanosheets is introduced. TFET is fabricated with MOSFET with the same structure in the CMOS-compatible process. Both technology-computer-aided-design (TCAD) simulation and experimental results are utilized to support and examine the advantages of proposed TFET. From the perspective of the single device, the improvement in switching characteristics and current drivability are quantitatively and qualitatively analyzed. In addition, the device performance is compared to the benchmark of previously reported TFET and co-fabricated MOSFET. Through those processes, the feasibility of SiGe nanosheet TFET is verified. It is revealed that the proposed SiGe nanosheet TFET has notable steeper switching and low leakage in the low drive voltage as an alternative to conventional MOSFET.초고밀도 집적회로 기술의 발전은 고집적도 달성을 통해 단위 칩의 연산 속도 및 용량 향상에 기여할 소형의 소자를 끊임없이 요구하고 있다. 하지만 최신의 상보형 금속-산화막-반도체 (CMOS) 기술에서 금속-산화막-반도체 전계 효과 트랜지스터 (MOSFET) 의 단순한 소형화는 더 이상 집적회로의 성능 향상을 보장해 주지 못하고 있다. 특히 소자의 크기가 줄어드는 반면 정적 전력 소모량은 전압 스케일링의 둔화로 인해 감소되지 않고 있는 상황이다. MOSFET의 짧은 채널 효과로 인해 증가된 누설 전류가 전압 스케일링의 어려움을 주는 대표적 원인으로 꼽힌다. 이러한 근본적인 MOSFET의 한계를 극복하기 위하여 지난 10여년간 새로운 단계의 전계 효과 트랜지스터 소자들이 연구되고 있다. 그 중 터널 전계 효과 트랜지스터(TFET)은 그 특유의 우수한 전원 특성으로 각광받아 집중적으로 연구되고 있다. 많은 연구에도 불구하고, TFET의 부족한 전류 구동 능력은 MOSFET의 대체재로 자리매김하는 데 가장 큰 문제점이 되고 있다. 본 학위논문에서는 상기된 문제점을 해결할 수 있는 우수한 전류 구동 능력을 가진 TFET이 제안되었다. 반송자 유입과 게이트 컨트롤을 향상시킬 수 있는 수직 적층된 실리콘저마늄(SiGe) 나노시트 채널이 사용되었다. 또한, 제안된 TFET은 CMOS 기반 공정을 활용하여 MOSFET과 함께 제작되었다. 테크놀로지 컴퓨터 지원 설계(TCAD) 시뮬레이션과 실제 측정 결과를 활용하여 제안된 소자의 우수성을 검증하였다. 단위 CMOS 소자의 관점에서, 전원 특성과 전류 구동 능력의 향상을 정량적, 정성적 방법으로 분석하였다. 그리고, 제작된 소자의 성능을 기존 제작 및 보고된 TFET 및 함께 제작된 MOSSFET과 비교하였다. 이러한 과정을 통해, 실리콘저마늄 나노시트 TFET의 활용 가능성이 입증되었다. 제안된 실리콘저마늄 나노시트 소자는 주목할 만한 전원 특성을 가졌고 저전압 구동 환경에서 한층 더 낮은 누설 전류를 가짐으로써 향후 MOSFET을 대체할만한 충분한 가능성을 보여주었다.Chapter 1 Introduction 1 1.1. Power Crisis of Conventional CMOS Technology 1 1.2. Tunnel Field-Effect Transistor (TFET) 6 1.3. Feasibility and Challenges of TFET 9 1.4. Scope of Thesis 11 Chapter 2 Device Characterization 13 2.1. SiGe Nanosheet TFET 13 2.2. Device Concept 15 2.3. Calibration Procedure for TCAD simulation 17 2.4. Device Verification with TCAD simulation 21 Chapter 3 Device Fabrication 31 3.1. Fabrication Process Flow 31 3.2. Key Processes for SiGe Nanosheet TFET 33 3.2.1. Key Process 1 : SiGe Nanosheet Formation 34 3.2.2. Key Process 2 : Source/Drain Implantation 41 3.2.3. Key Process 3 : High-κ/Metal gate Formation 43 Chapter 4 Results and Discussion 53 4.1. Measurement Results 53 4.2. Analysis of Device Characteristics 56 4.2.1. Improved Factors to Performance in SiGe Nanosheet TFET 56 4.2.2. Performance Comparison with SiGe Nanosheet MOSFET 62 4.3. Performance Evaluation through Benchmarks 64 4.4. Optimization Plan for SiGe nanosheet TFET 66 4.4.1. Improvement of Quality of Gate Dielectric 66 4.4.2. Optimization of Doping Junction at Source 67 Chapter 5 Conclusion 71 Bibliography 73 Abstract in Korean 81 List of Publications 83Docto

Design and Modelling of Tunnel Field Effect Transistor- using TCAD Modeling

The purpose of this research was to suggest a junction-less strategy for a vertical Tunnel Field Effect Transistor, which would increase the device's efficiency. In this study, we examine the similarities and differences between a negative capacitor TFET and a vertically generated TFET with a source pocket and a heterostructure-based nanowire gate. And how the channel transit impacts the output qualities of a sub-100 nanometer sized device. The Silvaco TCAD (a commercially available tool) was used to simulate a tri-layer high-K dielectric made of hafnium zirconium oxide (HZO) and titanium dioxide (TiO2) materials as gate stacking to the V-TFET and GAA-NC-TFET structures, and the tunnelling and transport parameters were calibrated experimentally. A short bandgap material, GaSb, in the home region to enhance carrier tunnelling via the mentioned three source (GaSb)-channel (Si) heterojunction at varying biases were utilized. Motion, tube length, and saturating velocity are only few of the transport channel characteristics that are investigated. As a result of the building's vertical orientation, the electric field is enhanced, allowing for an ION current of up to 104 Am2. The most unexpected result of this device is that a high ION/IOFF may increase mobility and reduce saturation velocity, perhaps reducing the drain voltage at saturation. The proposed biosensor's sensitivity was multiplied by 108 when vertical and lateral tunnelling were used in tandem. We apply a variety of optimisation strategies to deal with this problem, despite the fact that quantum confinement reduces the effect of mobility variations on device performance. When biomolecules were positively charged, the drain current increased, and when they were negatively charged, the drain current decreased

Vertical III-V Nanowire Transistors for Low-Power Electronics

Power dissipation has been the major challenge in the downscaling of transistor technology. Metal-Oxide-Semiconductor Field-Effect Transistors (MOSFETs) have struggled to keep a low power consumption while still maintaining a high performance due to the low carrier mobilities of Si but also due to their inherent minimum inverse subthreshold slope (S ≥ 60 mV/dec) which is limited by thermionic emission. This thesis work studied the capabilities and limitations of III-V based vertical nanowire n-type Tunneling Field-Effect Transistor (TFET) and p-type MOSFET (PMOS). InAs/InGaAsSb/GaSb heterojunction was employed in the whole study. The main focus was to understand the influence of the device fabrication processes and the structural factors of the nanowires such as band alignment, composition and doping on the electrical performance of the TFET. Optimizations of the device processes including spacer technology improvement, Equivalent Oxide Thickness (EOT) downscaling, and gate underlap/overlap were explored utilizing structural characterizations. Systematic fine tuning of the band alignment of the tunnel junction resultedin achieving the best performing sub-40 mV/dec TFETs with S = 32 mV/decand ION = 4μA/μm for IOFF = 1 nA/μm at VDS = 0.3 V. The suitability of employing TFET for electronic applications at cryogenic temperatures has been explored utilizing experimental device data. The impact of the choice of heterostructure and dopant incorporation were investigated to identify the optimum operating temperature and voltage in different temperature regimes. A novel gate last process self-aligning the gate and drain contacts to the intrinsic and doped segments, respectively was developed for vertical InGaAsSb-GaAsSb core-shell nanowire transistors leading to the first sub-100 mV/dec PMOS with S = 75 mV/dec, significant ION/ IOFF = 104 and IMIN < 1 nA/μm at VDS = -0.5 V

A review of selected topics in physics based modeling for tunnel field-effect transistors

The research field on tunnel-FETs (TFETs) has been rapidly developing in the last ten years, driven by the quest for a new electronic switch operating at a supply voltage well below 1 V and thus delivering substantial improvements in the energy efficiency of integrated circuits. This paper reviews several aspects related to physics based modeling in TFETs, and shows how the description of these transistors implies a remarkable innovation and poses new challenges compared to conventional MOSFETs. A hierarchy of numerical models exist for TFETs covering a wide range of predictive capabilities and computational complexities. We start by reviewing seminal contributions on direct and indirect band-to-band tunneling (BTBT) modeling in semiconductors, from which most TCAD models have been actually derived. Then we move to the features and limitations of TCAD models themselves and to the discussion of what we define non-self-consistent quantum models, where BTBT is computed with rigorous quantum-mechanical models starting from frozen potential profiles and closed-boundary Schr\uf6dinger equation problems. We will then address models that solve the open-boundary Schr\uf6dinger equation problem, based either on the non-equilibrium Green's function NEGF or on the quantum-transmitting-boundary formalism, and show how the computational burden of these models may vary in a wide range depending on the Hamiltonian employed in the calculations. A specific section is devoted to TFETs based on 2D crystals and van der Waals hetero-structures. The main goal of this paper is to provide the reader with an introduction to the most important physics based models for TFETs, and with a possible guidance to the wide and rapidly developing literature in this exciting research field

Vertical III-V Nanowire Tunnel Field-Effect Transistor

In this thesis fabrication and optimization of vertical III-V Tunneling Field-Effect transistors was explored. Usage of vertical nanowires, allows for combination of materials with large lattice mismatch in the same nanowire structure. TFETs in this thesis were fabricated using vertical InAs/GaSb or InAs/InGaAsSb/GaSb nanowires of high material quality. Usage of these material systems allowed for fabrication of devices with staggered and broken band-gap alignment. To fully harvest the benefits from these structures, the fabrication process was optimized. This was performed by exploring different spacer and gate technologies, required for vertical devices. Furthermore, improvement of electrostatics was achieved by reduction of the channel diameter and high-κ interface. Further improvements of the performance were achieved by scaling of the device dimensions such as nanowire lengths, spacer thickness, and gate-length. Used fabrication techniques allowed us to fabricate devices with a channel diameter of 11 nm. By switching from InAs/GaSb to InAs/InGaAsSb/GaSb allowed for optimization of the heterojunction, which allowed us to fabricate devices with record performance, reaching a minimum subthreshold swing of 48 mV/decade and a record high I60 of 0.31 μA/μm at a drive voltage of 0.3 V. Stability of the process allowed us to demonstrate data from a large number of TFETs with ability to operate below the thermal limit of 60 mV/decade. This allowed us to study correlations between important device parameter such as: I60, on-current, subthreshold swing, and off-current. Using transmission electron microscopy, the heterojunction was characterized. Furthermore, TCAD modeling was performed to understand what limits the performance of these devices. Also, electrical measurement of the random telegraph noise allowed us to understand the impact the oxide defects have on highly scaled devices

Development of a thin-film space-charge- limited triode Final report, Mar. 1965 - Jun. 1966

Development of thin film space charge limited triod

EFFECTS OF SOURCE DOPING PROFILE ON DEVICE CHARACTERISTICS OF LATERAL AND VERTICAL TUNNEL FIELD-EFFECT TRANSISTORS

The source doping engineering, the low bandgap material and the vertical tunneling structure have recently been considered as most effective techniques to resolve the on-current issue in tunnel field-effect transistors (TFETs). In this paper, the effects of source doping profile, including the concentration and gradient, on the device characteristics are adequately elucidated in lateral and vertical TFETs using low bandgap germanium to allow a comprehensive comparison between the two major TFET architectures for the first time. Similar dependences of the on-current on the source concentration are observed in lateral and vertical TFETs, except that the on-current of vertical TFETs is always greater than that of lateral TFETs approximately one order of magnitude. With different contributions of the lateral and vertical tunneling components in the subthreshold region, the subthreshold swing of vertical TFETs first decreases at small concentrations, then increases at medium values, and finally decreases again at high concentrations, whereas that of lateral counterparts always decreases exponentially with increase in the source concentration. The on-current of lateral TFETs is significantly decreased, while that of vertical TFETs is almost invariable with increasing the source doping gradient. With competitive advantages of the vertical TFET architecture in on-current, subthreshold swing and device fabrication, vertical TFETs using low bandgap semiconductors are promising for use in low power applications