The Impact of LSI (Large Scale Integration) on System Packaging

System packaging of LSI circuit

The Development and Packaging of a High-Density, Three-Phase, Silicon Carbide (SiC) Motor Drive

Technology advances within the power electronics field are resulting in systems characterized by higher operating efficiencies, reduced footprint, minimal form factor, and decreasing mass. In particular, these attributes and characteristics are being inserted into numerous consumer applications, such as light-emitting diode lighting, compact fluorescent lighting, smart phones, and tablet PCs, to industrial applications that include hybrid, electric, and plug-in electric vehicles and more electric aircraft. To achieve the increase in energy efficiency and significant reduction in size and mass of these systems, power semiconductor device manufacturers are developing silicon carbide (SiC) semiconductor technology. In this dissertation, the author discusses the design, development, packaging, and fabrication of the world\u27s first multichip power module (MCPM) that integrates SiC power transistors with silicon-on-insulator (SOI) integrated circuits. The fabricated MCPM prototype is a 4 kW, three-phase inverter that operates at temperatures in excess of 250 °C. The integration of high-temperature metal-oxide semiconductor (HTMOS) SOI bare die control components with SiC power JFET bare die into a single compact module are presented in this work. The high-temperature operation of SiC switches allows for increased power density over silicon electronics by an order of magnitude, leading to highly miniaturized power converters. This dissertation is organized into a compilation of publications written by the author over the course of his Ph.D. work. The work presented throughout these publications covers the challenges associated with power electronics miniaturization and packaging including high-power density, high-temperature, and high-efficiency operation of the power electronic system under study

Packaging Design of IGBT Power Module Using Novel Switching Cells

Parasitic inductance in power modules generates voltage spikes and current ringing during switching which cause extra stress in power electronic devices, increase electromagnetic interference (EMI), and degrade the performance of the power converter system. As newer power devices have faster switching speeds and higher power ratings, the effect of the parasitic inductance of the power module is more pronounced. This dissertation proposes a novel packaging method for power electronics modules based on the concepts of novel switching cells: P-cell and N-cell. It can reduce the stray inductance in the current commutation path in a phase-leg module and hence improve the switching behavior. Taking an insulated gate bipolar transistor (IGBT) as an example, two phase-leg modules, specifically a conventional module and a P-cell and N-cell based module were designed. Using Ansoft Q3D Extractor, electromagnetic simulation was carried out to extract the stray inductance from the two modules. An ABB 1200 V / 75 A IGBT model and a diode model were built for simulation study. Circuit parasitics were extracted and modeled. Switching behavior with different package parasitics was studied based on the Saber simulation. Two prototype phase-leg modules were fabricated. The parasitics were measured using a precision impedance analyzer. The measurement results agree with the simulation very well. A double pulse tester was built in laboratory. Several approaches were used to reduce the circuit and measuring parasitics. From the switching characteristics of the two modules, it was verified that the larger stray inductance in the layout causes higher voltage overshoot during turn off, which in turn increases the turn off losses. Multichip (two in parallel) IGBT modules applying novel switching cells was also designed. The parasitics were extracted and compared to a conventional design. The overall loop inductance was reduced in the proposed module. However, the mismatch of the paralleled branches was larger

Materials for high-density electronic packaging and interconnection

Electronic packaging and interconnections are the elements that today limit the ultimate performance of advanced electronic systems. Materials in use today and those becoming available are critically examined to ascertain what actions are needed for U.S. industry to compete favorably in the world market for advanced electronics. Materials and processes are discussed in terms of the final properties achievable and systems design compatibility. Weak points in the domestic industrial capability, including technical, industrial philosophy, and political, are identified. Recommendations are presented for actions that could help U.S. industry regain its former leadership position in advanced semiconductor systems production

Development and Packaging of Microsystems Using Foundry Services

Micro-electro-mechanical systems (MEMS) are a new and rapidly growing field of research. Several advances to the MEMS state of the art were achieved through design and characterization of novel devices. Empirical and theoretical model of polysilicon thermal actuators were developed to understand their behavior. The most extensive investigation of the Multi-User MEMS Processes (MUMPs) polysilicon resistivity was also performed. The first published value for the thermal coefficient of resistivity (TCR) of the MUMPs Poly 1 layer was determined as 1.25 x 10(exp -3)/K. The sheet resistance of the MUMPs polysilicon layers was found to be dependent on linewidth due to presence or absence of lateral phosphorus diffusion. The functional integration of MEMS with CMOS was demonstrated through the design of automated positioning and assembly systems, and a new power averaging scheme was devised. Packaging of MEMS using foundry multichip modules (MCMs) was shown to be a feasible approach to physical integration of MEMS with microelectronics. MEMS test die were packaged using Micro Module Systems MCM-D and General Electric High Density Intercounect and Chip-on-Flex MCM foundries. Xenon difluoride (XeF2) was found to be an excellent post-packaging etchant for bulk micromachined MEMS. For surface micromachining, hydrofluoric acid (HF) can be used

Design specifications for manufacturability of MCM-C multichip modules

A comprehensive guide for ceramic-based multichip modules (MCMS) has been developed by AlliedSignal Federal Manufacturing & Technologies (FM&T) to provide manufacturability information for its customers about how MCM designs can be affected by existing process and equipment capabilities. This guide extends beyond a listing of design rules by providing information about design layout, low- temperature cofired ceramic (LTCC) substrate fabrication, MCM assembly and electrical testing Electrical mechanical packaging, environmental, and producibility issues are reviewed. Examples of three MCM designs are shown in the form of packaging cross-sectional views, LTCC substrate layer allocations, and overall MCM photographs. The guide has proven to be an effective tool for enhancing communications between MCM designers and manufacturers and producing a microcircuit that meets design requirements within the limitations of process capabilities

Design and simulation of a multichip module

Electronic packaging has undergone basic changes in the last few years to keep up with an ever increasing demand for speed and miniaturization. Multichip Modules (MCM) represent a class of advanced packaging technologies. This thesis examines various MCM technologies and their relative advantages and disadvantages. Further, the design process for an MCM is presented in detail. The physical design and simulation for the performance ( electrical and thermal) is also detailed. A design example ties together all the issues that are relevant to the design of an MCM

JTEC Panel report on electronic manufacturing and packaging in Japan

This report summarizes the status of electronic manufacturing and packaging technology in Japan in comparison to that in the United States, and its impact on competition in electronic manufacturing in general. In addition to electronic manufacturing technologies, the report covers technology and manufacturing infrastructure, electronics manufacturing and assembly, quality assurance and reliability in the Japanese electronics industry, and successful product realization strategies. The panel found that Japan leads the United States in almost every electronics packaging technology. Japan clearly has achieved a strategic advantage in electronics production and process technologies. Panel members believe that Japanese competitors could be leading U.S. firms by as much as a decade in some electronics process technologies

Evaluation of 3D Plus Packaging Test Structures for NASA Goddard Space Flight Center

Environmental tests were performed on packaging test structures designed and manufactured for ESA and CNES by 3D PLus ELectronics. The design provided circuit elements that acted as thermal, mechanical and moisture sensors. Other design features showed the compatibility of the packaging with chip passives, bare electronic dice and plastic encapsulated microcircuits packaged together in an innovative, stacked multichip module. The NASA GSFC testing augmented long duration testing on the same units carried out by ESA and CNES. The NASA portion demonstrated packaging stability over temperature, in moisture, with voltage stress, in shock and in vibration environments

Modeling and analysis of semiconductor manufacturing processes using petri nets

This thesis addresses the issues in modeling and analysis of multichip module (MCM) manufacturing processes using Petri nets. Building such graphical and mathematical models is a crucial step to understand MCM technologies and to enhance their application scope. In this thesis, the application of Petri nets is presented with top-down and bottom-up approaches. The theory of Petri nets is summarized with its basic notations and properties at first. After that, the capability of calculating and analyzing Petri nets with deterministic timing information is extended to meet the requirements of the MCM models. Then, using top-down refining and system decomposition, MCM models are built from an abstract point to concrete systems with timing information. In this process, reduction theory based on a multiple-input-single-output modules for deterministic Petri nets is applied to analyze the cycle time of Petri net models. Besides, this thesis is of significance in its use of the reduction theory which is derived for timed marked graphs - an important class of Petri nets