Force feedback linearization for higher-order electromechanical sigma-delta modulators.

Abstract A higher-order electromechanical sigma–delta modulator can greatly improve the signal-to-noise ratio compared with a second-order loop that only uses the sensing element as a loop filter. However, the electrostatic force feedback on the proof mass is inherently nonlinear, which will produce harmonics in the output spectrum and limits the total signal-to-noise and distortion ratio. High performance inertial sensors, which use sigma–delta modulators as a closed-loop control system, have strict requirements on the output signal distortion. In this paper, nonlinear effects from the force feedback and pick-off circuits are analysed and a strategy for force feedback linearization is put forward which can considerably improve the signal-to-noise and distortion ratio. A PCB prototype of a fifth-order electromechanical modulator with a bulk micromachined accelerometer was used to demonstrate the concept

Synthesis of the System Modeling and Signal Detecting Circuit of a Novel Vacuum Microelectronic Accelerometer

A novel high-precision vacuum microelectronic accelerometer has been successfully fabricated and tested in our laboratory. This accelerometer has unique advantages of high sensitivity, fast response, and anti-radiation stability. It is a prototype intended for navigation applications and is required to feature micro-g resolution. This paper briefly describes the structure and working principle of our vacuum microelectronic accelerometer, and the mathematical model is also established. The performances of the accelerometer system are discussed after Matlab modeling. The results show that, the dynamic response of the accelerometer system is significantly improved by choosing appropriate parameters of signal detecting circuit, and the signal detecting circuit is designed. In order to attain good linearity and performance, the closed-loop control mode is adopted. Weak current detection technology is studied, and integral T-style feedback network is used in I/V conversion, which will eliminate high-frequency noise at the front of the circuit. According to the modeling parameters, the low-pass filter is designed. This circuit is simple, reliable, and has high precision. Experiments are done and the results show that the vacuum microelectronic accelerometer exhibits good linearity over -1 g to +1 g, an output sensitivity of 543 mV/g, and a nonlinearity of 0.94 %

Study of First-Order Thermal Sigma-Delta Architecture for Convective Accelerometers

This paper presents the study of an original closed-loop conditioning approach for fully-integrated convective inertial sensors. The method is applied to an accelerometer manufactured on a standard CMOS technology using an auto-aligned bulk etching step. Using the thermal behavior of the sensor as a summing function, a first order sigma-delta modulator is built. This "electro-physical" modulator realizes an analog-to-digital conversion of the signal. Besides the feedback scheme should improve the sensor performance.Comment: Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838

Inertial control of the mirror suspensions of the VIRGO interferometer for gravitational wave detection

In order to achieve full detection sensitivity at low frequencies, the mirrors of interferometric gravitational wave detectors must be isolated from seismic noise. The VIRGO vibration isolator, called 'superattenuator', is fully effective at frequencies above 4 Hz. Nevertheless, the residual motion of the mirror at the mechanical resonant frequencies of the system are too large for the interferometer locking system and must be damped. A multidimensional feedback system, using inertial sensors and digital processing, has been designed for this purpose. An experimental procedure for determining the feedback control of the system has been defined. In this paper a full description of the system is given and experimental results are presented.Comment: 17 pages, 11 figures, accepted for publication on Review of Scientific Instrument

Vibration control strategies for proof-mass actuators

Proof-mass actuators have been considered for a broad range of structural vibration control problems, from seismic protection for tall buildings to the improvement of metal machining productivity by stabilizing the self-excited vibrations known as chatter. This broad range of potential applications means that a variety of controllers have been proposed, without drawing direct comparisons with other controller designs that have been considered for different applications. This article takes three controllers that are potentially suitable for the machining chatter problem: Direct velocity feedback, tuned-mass-damper control (or vibration absorber control), and active-tuned-mass-damper control (or active vibration absorber control). These control strategies are restated within the more general framework of Virtual Passive Control. Their performance is first compared using root locus techniques, with a model based on experimental data, including the low frequency dynamics of the proof-mass. The frequency response of the test structure is then illustrated under open and closed-loop conditions. The application of the control strategies to avoid machine-tool chatter vibrations is then discussed, without going into detail on the underlying physical mechanisms of chatter. It is concluded that virtual passive absorber control is more straightforward to implement than virtual skyhook damping, and may be better suited to the problem of machining chatter

Flutter suppression for the active flexible wing: Control system design and experimental validation AIAA-92-2097

The synthesis and experimental validation of a control law for13; an actiqe flutter suppression system for the Active Flexible13; Wing wind-tunnel model is presenied. The design was13; accomplished with traditional root locus and Nyquist methods13; using interactive computer graphics tools and with extensive use13; of simulation-based analysis. The design approach relied on a13; fundamental understanding of the flutter mechanism to13; formulate a simple control law structure. Experimentally, the13; flutter suppression controller succeeded in simultaneous13; suppression of two flutter modes, significantly increasing the13; flutter dynamic pressure despite errors in the design model. The13; flutter suppression controller was also successfully operated in13; combination with a rolling maneuver controller to perform13; flutter suppression during rapid rolling maneuvers

Distributed control using linear momentum exchange devices

MSFC has successfully employed the use of the Vibrational Control of Space Structures (VCOSS) Linear Momentum Exchange Devices (LMEDs), which was an outgrowth of the Air Force Wright Aeronautical Laboratory (AFWAL) program, in a distributed control experiment. The control experiment was conducted in MSFC's Ground Facility for Large Space Structures Control Verification (GF/LSSCV). The GF/LSSCV's test article was well suited for this experiment in that the LMED could be judiciously placed on the ASTROMAST. The LMED placements were such that vibrational mode information could be extracted from the accelerometers on the LMED. The LMED accelerometer information was processed by the control algorithms so that the LMED masses could be accelerated to produce forces which would dampen the vibrational modes of interest. Experimental results are presented showing the LMED's capabilities