A novel actuator-internal micro/nano positioning stage with an arch-shape bridge type amplifier

This paper presents a novel actuator-internal two degree-of-freedom (2-DOF) micro/nano positioning stage actuated by piezoelectric (PZT) actuators, which can be used as a fine actuation part in dual-stage system. To compensate the positioning error of coarse stage and achieve a large motion stroke, a symmetrical structure with an arch-shape bridge type amplifier based on single notch circular flexure hinges is proposed and utilized in the positioning stage. Due to the compound bridge arm configuration and compact flexure hinge structure, the amplification mechanism can realize high lateral stiffness and compact structure simultaneously, which is of great importance to protect PZT actuators. The amplification mechanism is integrated into the decoupling mechanism to improve compactness, and to produce decoupled motion in X- and Y- axes. An analytical model is established to explore the static and dynamic characteristics, and the geometric parameters are optimized. The performance of the positioning stage is evaluated through finite element analysis (FEA) and experimental test. The results indicate that the stage can implement 2-DOF decoupled motion with a travel range of 55.4×53.2 μm2, and the motion resolution is 8 nm. The stage can be used in probe tip-based micro/nano scratching

Fuzzy control of the dual-stage feeding system consisting of a piezoelectric actuator and a linear motor for electrical discharge machining

Gap width is an important factor that affects material removal rate, surface finish, and machining stability in electrical discharge machining processes. This research is to develop a novel control method for a new hybrid positioning system which consists of a linear motor and a piezoelectric actuator for high-efficiency electrical discharge machining processes. In the new system, the linear motor provides the macro feeding while the piezoelectric actuator feeds the workpiece in micro scale at high frequency. To reduce the delay caused by separate movements of the linear motor and piezoelectric actuator, a new control algorithm was developed to synchronize the movements of the motor and piezoelectric actuator. A fuzzy control system was used to control the feeding process. Piezoelectric actuator position and its speed were selected as the fuzzy inputs, while the fuzzy output was the linear motor speed. Cutting experiments were conducted, and results show that the fuzzy system is more powerful than the conventional algorithm and the new algorithm with constant motor speed. An increase in material removal rate of 1.6 times was achieved using the proposed fuzzy control algorithm

A steady state tip control strategy for long reach robots

The work presented in this thesis describes the development of a novel strategy for the steady state tip position control of a single link flexible robot arm. Control is based upon a master/slave relationship. Arm trajectory is defined by through 'master' positioning head which moves a laser through a programmed path. Tip position is detected by an optical system which produces an error signal proportional to the displacement of the tip from the demand laser spot position. The error signal and its derivative form inputs to the arm 'slave' controller so enabling direct tip control with simultaneous correction for arm bending. Trajectory definition is not model-based as it is defined optically through movement of the positioning head alone. A critical investigation of vacuum tube and solid state sensing methods is undertaken leading to the development of a photodiode quadrant detector beam tracking system. The effect of varying the incident light parameters on the beam tracker performance are examined from which the optimum illumination characteristics are determined. Operational testing of the system on a dual-axis prototype robot using the purpose-built beam tracker has shown that successful steady state tip control can be achieved through a PD based slave controller. Errors of less than 0.05 mm and settling times of 0.2 s are obtained. These results compare favourably with those for the model-based tip position correction strategies where tracking errors of ± 0.6 mm are recorded

DEVELOPMENT OF A NOVEL Z-AXIS PRECISION POSITIONING STAGE WITH MILLIMETER TRAVEL RANGE BASED ON A LINEAR PIEZOELECTRIC MOTOR

Piezoelectric-based positioners are incorporated into stereotaxic devices for microsurgery, scanning tunneling microscopes for the manipulation of atomic and molecular-scale structures, nanomanipulator systems for cell microinjection and machine tools for semiconductor-based manufacturing. Although several precision positioning systems have been developed for planar motion, most are not suitable to provide long travel range with large load capacity in vertical axis because of their weights, size, design and embedded actuators. This thesis develops a novel positioner which is being developed specifically for vertical axis motion based on a piezoworm arrangement in flexure frames. An improved estimation of the stiffness for Normally Clamped (NC) clamp is presented. Analytical calculations and finite element analysis are used to optimize the design of the lifting platform as well as the piezoworm actuator to provide maximum thrust force while maintaining a compact size. To make a stage frame more compact, the actuator is integrated into the stage body. The complementary clamps and the amplified piezoelectric actuators based extenders are designed such that no power is needed to maintain a fixed vertical position, holding the payload against the force of gravity. The design is extended to a piezoworm stage prototype and validated through several tests. Experiments on the prototype stage show that it is capable of a speed of 5.4 mm/s, a force capacity of 8 N and can travel over 16 mm

In-Mold Assembly of Multi-Functional Structures

Combining the recent advances in injection moldable polymer composites with the multi-material molding techniques enable fabrication of multi-functional structures to serve multiple functions (e.g., carry load, support motion, dissipate heat, store energy). Current in-mold assembly methods, however, cannot be simply scaled to create structures with miniature features, as the process conditions and the assembly failure modes change with the feature size. This dissertation identifies and addresses the issues associated with the in-mold assembly of multi-functional structures with miniature components. First, the functional capability of embedding actuators is developed. As a part of this effort, computational modeling methods are developed to assess the functionality of the structure with respect to the material properties, process parameters and the heat source. Using these models, the effective material thermal conductivity required to dissipate the heat generated by the embedded small scale actuator is identified. Also, the influence of the fiber orientation on the heat dissipation performance is characterized. Finally, models for integrated product and process design are presented to ensure the miniature actuator survivability during embedding process. The second functional capability developed as a part of this dissertation is the in-mold assembly of multi-material structures capable of motion and load transfer, such as mechanisms with compliant hinges. The necessary hinge and link design features are identified. The shapes and orientations of these features are analyzed with respect to their functionality, mutual dependencies, and the process cost. The parametric model of the interface design is developed. This model is used to minimize both the final assembly weight and the mold complexity as the process cost measure. Also, to minimize the manufacturing waste and the risk of assembly failure due to unbalanced mold filling, the design optimization of runner systems used in multi-cavity molds for in-mold assembly is developed. The complete optimization model is characterized and formulated. The best method to solve the runner optimization problem is identified. To demonstrate the applicability of the tools developed in this dissertation towards the miniaturization of robotic devices, a case study of a novel miniature air vehicle drive mechanism is presented

The design and characterisation of miniature robotics for astronomical instruments

Micro robotics has the potential to improve the efficiency and reduce cost of future multi-object instruments for astronomy. This thesis reports on the development and evolution of a micro autonomous pick-off mirror called the Micro Autonomous Positioning System (MAPS) that can be used in a multi-object spectrograph. The design of these micro-autonomous pick-off mirrors is novel as they are capable of high precision positioning using electromagnetic propulsion through utilising non-conventional components and techniques. These devices are self-driven robotic units, which with the help of an external control system are capable of positioning themselves on an instruments focal plane to within 24 μm. This is different from other high precision micro robotics as they normally use piezoelectric actuators for propulsion. Micro robots have been developed that use electromagnetic motors, however they are not used for high precision applications. Although there is a plethora of literature covering design, functionality and capability of precision micro autonomous systems, there is limited research on characterisation methods for their use in astronomical applications. This work contributes not only to the science supporting the design of a micro-autonomous pick-off mirror but also presents a framework for characterising such miniature mechanisms. The majority of instruments are presented with a curved focal plane. Therefore, to ensure that the pick-off mirrors are aligned properly with the receiving optics, either the pick-off mirror needs to be tipped or the receiving optics repositioned. Currently this function is implemented in the beam steering mirror (i.e. the receiving optics). The travel range required by the beam steering mirror is relatively large, and as such, it is more difficult to achieve the positional accuracy and stability. By incorporating this functionality in the pick-off mirror, the instrument can be optimised in terms of size, accuracy and stability. A unique self-adjusting mirror (SAM) is thus proposed as a solution and detailed. As a proof-of-concepts both MAPS and SAM usability in multi-object spectrographs was evaluated and validated. The results indicate their potential to meet the requirements of astronomical instruments and reduce both the size and cost

Sliding-Mode control for high-precision motion control systems

In many of today's mechanical systems, high precision motion has become a necessity. As performance requirements become more stringent, classical industrial controllers such as PID can no longer provide satisfactory results. Although many control approaches have been proposed in the literature, control problems related to plant parameter uncertainties, disturbances and high-order dynamics remain as big challenges for control engineers. Theory of Sliding Mode Control provides a systematic approach to controller design while allowing stability in the presence of parametric uncertainties and external disturbances. In this thesis a brief study of the concepts behind Sliding Mode Control will be shown. Description of Sliding Mode Control in discrete-time systems and the continuous Sliding Mode Control will be shown. The description will be supported with the design and robustness analysis of Sliding Mode Control for discrete-time systems. In this thesis a simplified methodology based on discrete-time Sliding Mode Control will be presented. The main issues that this thesis aims to solve are friction and internal nonlinearities. The thesis can be outlined as follows: -Implementation of discrete-time Sliding Mode Control to systems with nonlinearities and friction. Systems include; piezoelectric actuators that are known to suffer from nonlinear hysteresis behavior and ball-screw drives that suffer from high friction. Finally, the controller will be implemented on a 6-dof Stewart platform which is a system of higher complexity. -It will also be shown that performance can be enhanced with the aid of disturbance compensation based on a nominal plant disturbance observer

Design and implementation of a control system for use of galvanometric scanners in laser micromachining applications

In the recent years, laser machining technology has been used widely in industrial applications usually with the aim of increasing the production capability of mass production lines - especially for fast marking, engraving type of applications where speed is an important concern - or manufacturing quality of a certain facility by increasing the level of accuracy in material processing applications such as drilling, cutting; or any scientific research oriented work where high precision machining of parts in sub millimeter scale might be required. A galvanometric scanner is a high precision device that is able to steer a laser beam with a mirror attached to a motor, whose rotor angular range is usually limited with tens of degrees in both directions of rotation; and position is controlled either by voltage or current. Due to their lightness, the rotor and the mirror can move very fast, allowing fast marking (burning out) operation with the laser beam. This can be evaluated as a great advantage compared to slower mechanical appliances used for cutting/machining of different materials. This study concentrates on the analysis of galvanometric scanner system components; and the design and implementation of a hardware and software based control system for a dual-axis galvo setup; and their adaptation for use in laser micromachining applications either as a standalone system or a modular subsystem. Analysis part of the thesis work contains: evaluation of dominant laser micromachining techniques, an overview of the galvanometric scanner system based approach and related components (e.g. electromechanical, electrical, optical), understanding of working principles and related simulation work, compatibility issues with the target micromachining applications. Design part of the thesis work includes: the design and implementation of electronic controller board, intermediate drive electronics stage, microcontroller programming for machining control algorithm, interfacing with graphical user interface based control software and production of necessary mechanical parts. The study has been finalized with experimental work and evaluation of obtained results. The results of these studies are promising and motivate the use of laser galvanometric scanner systems in laser micromachining applications