Scheduling of Batch Processors in Semiconductor Manufacturing – A Review

In this paper a review on scheduling of batch processors (SBP) in semiconductor manufacturing (SM) is presented. It classifies SBP in SM into 12 groups. The suggested classification scheme organizes the SBP in SM literature, summarizes the current research results for different problem types. The classification results are presented based on various distributions and various methodologies applied for SBP in SM are briefly highlighted. A comprehensive list of references is presented. It is hoped that, this review will provide a source for other researchers/readers interested in SBP in SM research and help simulate further interest.Singapore-MIT Alliance (SMA

Mathematical Models for a Batch Scheduling Problem to Minimize Earliness and Tardiness

Purpose: Today’s manufacturing facilities are challenged by highly customized products and just in time manufacturing and delivery of these products. In this study, a batch scheduling problem has been addressed to enable on-time completion of customer orders in a lean manufacturing environment. The problem is optimizing the partitioning of product components into batches and scheduling of the resulting batches where each customer order is received as a set of products made of various components. Design/methodology/approach: Three different mathematical models for minimization of total earliness and tardiness of customer orders are developed to provide on-time completion of customer orders and also, to avoid excess final product inventory. The first model is a non-linear integer programming model whereas the second is a linearized version of the first. Finally, to solve larger sized instances of the problem, an alternative linear integer model is presented. Findings: Computational study using a suit set of test instances showed that the alternative linear integer model is able to solve all test instances in varying sizes within quite shorter computer times compared to the other two models. It has also been showed that the alternative model is able to solve moderate sized real-world problems. Originality/value: The problem under study differentiates from existing batch scheduling problems in the literature owing to the inclusion of new circumstances that are present in real-world applications. Those are: customer orders consisting of multi-products made of multi-parts, processing of all parts of the same product from different orders in the same batch, and delivering the orders only when all related products are completed. This research also contributes to the literature of batch scheduling problem by presenting new optimization models.Peer Reviewe

Production Scheduling

Generally speaking, scheduling is the procedure of mapping a set of tasks or jobs (studied objects) to a set of target resources efficiently. More specifically, as a part of a larger planning and scheduling process, production scheduling is essential for the proper functioning of a manufacturing enterprise. This book presents ten chapters divided into five sections. Section 1 discusses rescheduling strategies, policies, and methods for production scheduling. Section 2 presents two chapters about flow shop scheduling. Section 3 describes heuristic and metaheuristic methods for treating the scheduling problem in an efficient manner. In addition, two test cases are presented in Section 4. The first uses simulation, while the second shows a real implementation of a production scheduling system. Finally, Section 5 presents some modeling strategies for building production scheduling systems. This book will be of interest to those working in the decision-making branches of production, in various operational research areas, as well as computational methods design. People from a diverse background ranging from academia and research to those working in industry, can take advantage of this volume

Approximation schemes for minimizing total (weighted) completion time with release dates on a batch machine

2005-2006 > Academic research: refereed > Publication in refereed journalAccepted ManuscriptPublishe

Performance of a Serial-Batch Processor System with Incompatible Job Families under Simple Control Policies

A typical example of a batch processor is the diffusion furnace used in wafer fabrication facilities (otherwise known as wafer fabs). In diffusion, silicon wafers are placed inside the furnace, and dopant is flown through the wafers via nitrogen gas. The higher the temperature, the faster the dopant penetrates the wafer surface. Then, a thin layer of silicon dioxide is grown, to help the dopant diffuse into the silicon. This operation can take 10 hours or more to finish processing, as compared to one or two hours for other wafer fab operations, according to Uzsoy [8]. Diffusion furnaces typically can process six to eight lots concurrently; we call the lots processed concurrently a batch. The quantity of lots loaded into the furnace does not affect the processing time. Only lots that require the same chemical recipe and temperature may be batched together at the diffusion furnace. We wish to control the production of a manufacturing system, comprised of a serial processor feeding the batch processor. The system produces different job types, and each job can only be batched together with jobs of the same type. More specifically, we explore the idea of controlling the production of the serial processor, based on the wip found in front of the batch processor. We evaluate the performance of our manufacturing system under several simple control policies under a range of loading conditions and determine which control policies perform better under which conditions. It is hoped that the results obtained from this small system could be extended to larger systems involving a batch processor, with particular emphasis placed on the applicability of such policies in wafer fabrication.Singapore-MIT Alliance (SMA

Cycle Time Analysis For Photolithography Tools In Semiconductor Manufacturing Industry With Simulation Model : A Case Study [TR940. S618 2008 f rb].

Perkembangan industri semikonduktor dalam bidang fabrikasi biasanya melibatkan kos pelaburan yang tinggi terutamanya dalam alatan photolithography. The industry of semiconductor wafer fabrication (“fab”) has invested a huge amount of capital on the manufacturing equipments particular in photolithograph