Full-field 3D shape measurement of discontinuous specular objects by direct phase measuring deflectometry

With the advent of intelligent manufacturing, phase measuring deflectometry (PMD) has been widely studied for the measurement of the three-dimensional (3D) shape of specular objects. However, existing PMDs cannot measure objects having discontinuous specular surfaces. This paper presents a new direct PMD (DPMD) method that measures the full-field 3D shape of complicated specular objects. A mathematical model is derived to directly relate an absolute phase map to depth data, instead of the gradient. Two relevant parameters are calibrated using a machine vision-based method. On the basis of the derived model, a full-field 3D measuring system was developed. The accuracy of the system was evaluated using a mirror with known positions along an accurate translating stage. The 3D shape of a monolithic multi-mirror array having multiple specular surfaces was measured. Experimental results show that the proposed DPMD method can obtain the full-field 3D shape of specular objects having isolated and/or discontinuous surfaces accurately and effectively

3D shape measurement of discontinuous specular objects based on advanced PMD with bi-telecentric lens

This paper presents an advanced phase measuring deflectometry (PMD) method based on a novel mathematical model to obtain three dimensional (3D) shape of discontinuous specular object using a bi-telecentric lens. The proposed method uses an LCD screen, a flat beam splitter, a camera with a bi-telecentric lens, and a translating stage. The LCD screen is used to display sinusoidal fringe patterns and can be moved by the stage to two different positions along the normal direction of a reference plane. The camera captures the deformed fringe patterns reflected by the measured specular surface. The splitter realizes the fringe patterns displaying and imaging from the same direction. Using the proposed advanced PMD method, the depth data can be directly calculated from absolute phase, instead of integrating gradient data. In order to calibrate the relative orientation of the LCD screen and the camera, an auxiliary plane mirror is used to reflect the pattern on the LCD screen three times. After the geometric calibration, 3D shape data of the measured specular objects are calculated from the phase differences between the reference plane and the reflected surface. The experimental results show that 3D shape of discontinuous specular object can be effectively and accurately measured from absolute phase data by the proposed advanced PMD method

Cavlectometry: Towards Holistic Reconstruction of Large Mirror Objects

We introduce a method based on the deflectometry principle for the reconstruction of specular objects exhibiting significant size and geometric complexity. A key feature of our approach is the deployment of an Automatic Virtual Environment (CAVE) as pattern generator. To unfold the full power of this extraordinary experimental setup, an optical encoding scheme is developed which accounts for the distinctive topology of the CAVE. Furthermore, we devise an algorithm for detecting the object of interest in raw deflectometric images. The segmented foreground is used for single-view reconstruction, the background for estimation of the camera pose, necessary for calibrating the sensor system. Experiments suggest a significant gain of coverage in single measurements compared to previous methods. To facilitate research on specular surface reconstruction, we will make our data set publicly available

Three-Dimensional Shape Measurements of Specular Objects Using Phase-Measuring Deflectometry

The fast development in the fields of integrated circuits, photovoltaics, the automobile industry, advanced manufacturing, and astronomy have led to the importance and necessity of quickly and accurately obtaining three-dimensional (3D) shape data of specular surfaces for quality control and function evaluation. Owing to the advantages of a large dynamic range, non-contact operation, full-field and fast acquisition, high accuracy, and automatic data processing, phase-measuring deflectometry (PMD, also called fringe reflection profilometry) has been widely studied and applied in many fields. Phase information coded in the reflected fringe patterns relates to the local slope and height of the measured specular objects. The 3D shape is obtained by integrating the local gradient data or directly calculating the depth data from the phase information. We present a review of the relevant techniques regarding classical PMD. The improved PMD technique is then used to measure specular objects having discontinuous and/or isolated surfaces. Some influential factors on the measured results are presented. The challenges and future research directions are discussed to further advance PMD techniques. Finally, the application fields of PMD are briefly introduce

Full-Field 3D Shape Measurement of Specular Surfaces by Direct Phase to Depth Relationship

This paper presents a new Phase Measuring Deflectometry (PMD) method to measure specular object having discontinuous surfaces. A mathematical model is established to directly relate absolute phase and depth, instead of phase and gradient. Based on the model, a hardware measuring system has been set up, which consists of a beam splitter to change the optical path, and two LCD screens to display the same sinusoidal fringe patterns. By using model-based and machine vision method, system calibration is accomplished to provide the required parameters and conditions. The verification tests are given to evaluate the effectiveness of the developed system. The 3D shape of an artificial step having multiple specular surfaces and a concave mirror has been measured. Initial experimental results show that the proposed measurement method can obtain 3D shape of specular objects with discontinuous surface effectively

Reproducibility of two calibration procedures for phase-measuring deflectometry

Phase-measuring deflectometry is an optical inspection technique for reflective surfaces. It enables absolute, quantitative surface measurements, given a calibrated measurement setup. Two general calibration approaches can be found in literature: First, the stepwise approach uses a calibration pattern and determines internal camera parameters and external geometrical parameters in separate, consecutive steps. Second, the holistic approach optimizes all parameters collectively, based on deflectometric measurements of a calibration mirror. Whereas both approaches have been compared regarding the accuracy of subsequent surface measurements, the present contribution focuses on experimental examination of their reproducibility. In experiment E1, we assess the parameter variability by repeating both calibration procedures ten times. In an additional experiment E2, we repeat all calibration measurements related to a mirror/pattern position ten times in a row before rearranging the mirror/pattern, in order to examine the purely noise-related parameter variability. Finally, we calculate the coordinate variability of a set of world points projected onto the image planes of the calibrated cameras. The measured variability is consistently higher in E1 than in E2 (average ratio: 3.2). Unexpectedly, in both experiments, the external parameter variability also turns out to be higher for the holistic approach compared to stepwise calibration (average ratio: 2.3). This is of importance, since the holistic approach is known from literature to be more accurate than the stepwise approach, regarding their respective application to surface measurements. The image coordinate variability is comparable for both calibration approaches with an average of 0.84 and 0.21 camera pixels for E1 and E2, respectively

The effects of pattern screen surface deformation on deflectometric measurements - A simulation study

Phase-measuring deflectometry (PMD) is an optical inspection technique for full-field topography measurements of reflective sample surfaces. The measurement principle relies on the analysis of specific patterns, reflected at the sample surface. Evaluation algorithms often model the respective pattern screen as a planar light source. However, the 32\u27\u27 pattern screen in our inspection setup exhibits a central bulge of its surface of about 2–3 mm. This paper presents a simulation framework for PMD to evaluate the effects of a deformed screen surface. The idea is to simulate image data acquired with screen surface deformations and to examine the effects on the PMD evaluation results. The simulated setup consists of a 32\u27\u27 pattern screen with an adjustable central bulge height of 0–3 mm and two cameras with a field of view (FOV) of approximately 225 mm by 172 mm on the sample surface. A first experiment examines the reconstruction errors for a planar sample surface if the reconstruction algorithm uses perfect calibration data (i.e. the same parameters used for the simulated image acquisition). The reconstructed surfaces exhibit a tilt with a maximum height difference of 174 μm across the FOV. A second experiment repeats the reconstruction process of the same sample surface, using camera parameters determined in a simulated calibration process. The resulting surfaces possess irregular, wave-like errors with amplitudes of up to 9 μm in the FOV. The presented simulation results reveal the accuracy limits if a deformation model of the pattern screen is not explicitly included in the reconstruction process