Design Optimization for an Electro-Thermally Actuated Polymeric Microgripper

Thermal micro-actuators are a promising solution to the need for large-displacement, gentle handling force, low-power MEMS actuators. Potential applications of these devices are micro-relays, assembling and miniature medical instrumentation. In this paper the development of thermal microactuators based on SU-8 polymer is described. The paper presents the development of a new microgripper which can realize a movement of the gripping arms with possibility for positioning and manipulating of the gripped object. Two models of polymeric microgripper electrothermo- mechanical actuated, using low actuation voltages, designed for SU-8 polymer fabrication were presented. The electro-thermal microgrippers were designed and optimized using finite element simulations. Electro-thermo-mechanical simulations based on finite element method were performed for each of the model in order to compare the results. Preliminary experimental tests were carried out.Comment: Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838

Hybrid Design of a Polymeric Electrothermal Actuator for Microgripper

Thermal micro actuators are widely used for large displacement, high accuracy and repeatability. The applications of these devices are in the fields of micro assembly, micro surgery and manipulation of micro particles. In this paper, the development of electro thermal micro actuator based on PMMA (Poly Meta Methyl Acrylate) is described. The paper presents the development of a new micro actuator for a microgripper which has a combination of asymmetric arm and bi-layer structure to completely eliminate the undesirable out of plane movement. Three models of electro thermally actuated polymeric micro actuators using low voltage of 0.1 V are designed and analyzed using COMSOL Multiphysics software. The results are discussed and compared to show the efficiency of the hybrid design. The hybrid design gives 2.5 μm of in plane gripping displacement and 0.02 μm out of plane displacement at 0.1 V

Micro Electromechanical Systems (MEMS) Based Microfluidic Devices for Biomedical Applications

Micro Electromechanical Systems (MEMS) based microfluidic devices have gained popularity in biomedicine field over the last few years. In this paper, a comprehensive overview of microfluidic devices such as micropumps and microneedles has been presented for biomedical applications. The aim of this paper is to present the major features and issues related to micropumps and microneedles, e.g., working principles, actuation methods, fabrication techniques, construction, performance parameters, failure analysis, testing, safety issues, applications, commercialization issues and future prospects. Based on the actuation mechanisms, the micropumps are classified into two main types, i.e., mechanical and non-mechanical micropumps. Microneedles can be categorized according to their structure, fabrication process, material, overall shape, tip shape, size, array density and application. The presented literature review on micropumps and microneedles will provide comprehensive information for researchers working on design and development of microfluidic devices for biomedical applications

Fully Polymeric Domes as High-Stroke Biasing System for Soft Dielectric Elastomer Actuators

The availability of compliant actuators is essential for the development of soft robotic systems. Dielectric elastomers (DEs) represent a class of smart actuators which has gained a significant popularity in soft robotics, due to their unique mix of large deformation (>100%), lightweight, fast response, and low cost. A DE consists of a thin elastomer membrane coated with flexible electrodes on both sides. When a high voltage is applied to the electrodes, the membrane undergoes a controllable mechanical deformation. In order to produce a significant actuation stroke, a DE membrane must be coupled with a mechanical biasing system. Commonly used spring-like bias elements, however, are generally made of rigid materials such as steel, and thus they do not meet the compliance requirements of soft robotic applications. To overcome this issue, in this paper we propose a novel type of compliant mechanism as biasing elements for DE actuators, namely a threedimensional polymeric dome. When properly designed, such types of mechanisms exhibit a region of negative stiffness in their force-displacement behavior. This feature, in combination with the intrinsic softness of the polymeric material, ensures large actuation strokes as well as compliance compatibility with soft robots. After presenting the novel biasing concept, the overall soft actuator design, manufacturing, and assembly are discussed. Finally, experimental characterization is conducted, and the suitability for soft robotic applications is assessed

Finite element modeling and validation of a soft array of spatially coupled dielectric elastomer transducers

Dielectric elastomer (DE) transducers are suitable candidates for the development of compliant mechatronic devices, such as wearable smart skins and soft robots. If many independently-controllable DEs are closely arranged in an array-like configuration, sharing a common elastomer membrane, novel types of cooperative and soft actuator/sensor systems can be obtained. The common elastic substrate, however, introduces strong electro-mechanical coupling effects among neighboring DEs, which highly influence the overall membrane system actuation and sensing characteristics. To effectively design soft cooperative systems based on DEs, these effects need to be systematically understood and modeled first. As a first step towards the development of soft cooperative DE systems, in this paper we present a finite element simulation approach for a 1-by-3 silicone array of DE units. After defining the system constitutive equations and the numerical assumptions, an extensive experimental campaign is conducted to calibrate and validate the model. The simulation results accurately predict the changes in force (actuation behavior) and capacitance (sensing behavior) of the different elements of the array, when their neighbors are subjected to different electro-mechanical loads. Quantitatively, the model reproduces the force and capacitance responses with an average fit higher than 93% and 92%, respectively. Finally, the validated model is used to perform parameter studies, aimed at highlighting how the array performance depends on a relevant set of design parameters, i.e. DE-DE spacing, DE-outer structure spacing, membrane pre-stretch, array scale, and electrode shape. The obtained results will provide important guidelines for the future design of cooperative actuator/sensor systems based on DE transducers

Dynamic modelling for thermal micro-actuators using thermal networks.

International audienceThermal actuators are extensively used in microelectromechanical systems (MEMS). Heat transfer through and around these microstructures are very complex. Knowing and controlling them in order to improve the performance of the micro-actuator, is currently a great challenge. This paper deals with this topic and proposes a dynamic thermal modelling of thermal micro-actuators. Thermal problems may be modelled using electrical analogy. However, current equivalent electrical models (thermal networks) are generally obtained considering only heat transfers through the thickness of structures having considerable height and length in relation to width (walls). These models cannot be directly applied to micro-actuators. In fact, microactuator congurations are based on 3D beam structures, and heat transfers occur through and around length. New dynamic and static thermal networks are then proposed in this paper. The validities of both types of thermal networks have been studied. They are successfully validated by comparison with nite elements simulation and analytical calculations

A microgripper for single cell manipulation

This thesis presents the development of an electrothermally actuated microgripper for the manipulation of cells and other biological particles. The microgripper has been fabricated using a combination of surface and bulk micromachining techniques in a three mask process. All of the fabrication details have been chosen to enable a tri-layer, polymer (SU8) - metal (Au) - polymer (SU8), membrane to be released from the substrate stress free and without the need for sacrificial layers. An actuator design, which completely eliminates the parasitic resistance of the cold arm, is presented. When compared to standard U-shaped actuators, it improves the thermal efficiency threefold. This enables larger displacements at lower voltages and temperatures. The microgripper is demonstrated in three different configurations: normally open mode, normally closed mode, and normally open/closed mode. It has-been modelled using two coupled analytical models - electrothermal and thermomechanical - which have been custom developed for this application. Unlike previously reported models, the electrothermal model presented here includes the heat exchange between hot and cold arms of the actuators that are separated by a small air gap. A detailed electrothermomechanical characterisation of selected devices has permitted the validation of the models (also performed using finite element analysis) and the assessment of device performance. The device testing includes electrical, deflection, and temperature measurements using infrared (IR) thermography, its use in polymeric actuators reported here for the first time. Successful manipulation experiments have been conducted in both air and liquid environments. Manipulation of live cells (mice oocytes) in a standard biomanipulation station has validated the microgripper as a complementary and unique tool for the single cell experiments that are to be conducted by future generations of biologists in the areas of human reproduction and stem cell research

Adhesion modulation In bio-inspired micropatterned adhesives by electrical fields

With steps towards Industry 4.0, it becomes imperative to the development of next-generation industrial assembly lines, to be able to modulate adhesion dynamically for handling complex and diverse substrates. The inspiration for the design and functionality of such adhesive pads comes from gecko’s remarkable ability to traverse rough and smooth topographies with great ease and agility. The emphasis in this thesis was to equip artificial micropatterned adhesives with such functionalities of tunability and devise an on-demand release mechanism. The project evaluates the potential of electric fields in this direction. The first part of this work focusses on integrating electric fields with polymeric micropatterns and studying the synergistic effect of Van der Waals and electrostatic forces. An in-house electroadhesion set up was built to measure the pull-off forces with and without electric fields. As a function of the applied voltage, adhesion forces can be tuned. The second part of the work demonstrates a novel route that exploits the in-plane actuation of the dielectric elastomeric actuators integrated with microstructure to induce peeling in them. Voltage-dependent actuation has been harnessed to generate the requisite peel force to detach the micropatterns. Overall, the findings of this thesis combine disciplines of electroadhesion, electroactuation, and reversible dry adhesives to gain dynamic control over adhesion.Im Einklang mit dem Fortschreiten in Richtung Industrie 4.0, wird es auch für die Entwicklung von industriellen Montagelinien der nächsten Generation unerlässlich sein, die Handhabung komplexer und unterschiedlicher Objekte zu flexibilisieren. Bioinspirierte Haftpads nach dem Vorbild des Gecko könnten zukünftig hierzu wesentlich beitragen. Der Schwerpunkt dieser Arbeit bestand darin, künstliche mikrostrukturierte Haftpads mit einem elektrisch schaltbaren Adhäsions- und Ablösemechanismus zu funktionalisieren, um die Grundlage für einen schnell schaltbaren, intelligenten Greifer zu schaffen. Der erste Teil dieser Arbeit konzentriert sich auf die Kombination elektrischer Felder mit elastomeren Mikrostrukturen und die Untersuchung der synergistischen Wirkung von Van der Waals- und elektrostatischen Kräften. Zur Messung der Adhäsion wurde ein individueller Aufbau realisiert und mit diesem die Feldstärkeabhängigkeit der Haftkräfte nachgewiesen. Der zweite Teil der Arbeit demonstriert einen neuartigen Ablösemechanismus unter Ausnutzung der lateralen Bewegung dielektrischer elastomerer Aktuatoren, um so ein Abschälen der Haftpads vom Substrat zu induzieren. Durch Variation der elektrischen Spannung wurde untersucht, wie sich diese auf die Ablösegeschwindigkeit der Haftpads auswirkt. Insgesamt kombinieren die Ergebnisse dieser Arbeit die Disziplinen Elektroadhäsion, Elektroaktuation und reversible trockene Klebstoffe, um so eine dynamische Kontrolle über die Adhäsion zu erhalten