Workshop on "Robotic assembly of 3D MEMS".

Proceedings of a workshop proposed in IEEE IROS'2007.The increase of MEMS' functionalities often requires the integration of various technologies used for mechanical, optical and electronic subsystems in order to achieve a unique system. These different technologies have usually process incompatibilities and the whole microsystem can not be obtained monolithically and then requires microassembly steps. Microassembly of MEMS based on micrometric components is one of the most promising approaches to achieve high-performance MEMS. Moreover, microassembly also permits to develop suitable MEMS packaging as well as 3D components although microfabrication technologies are usually able to create 2D and "2.5D" components. The study of microassembly methods is consequently a high stake for MEMS technologies growth. Two approaches are currently developped for microassembly: self-assembly and robotic microassembly. In the first one, the assembly is highly parallel but the efficiency and the flexibility still stay low. The robotic approach has the potential to reach precise and reliable assembly with high flexibility. The proposed workshop focuses on this second approach and will take a bearing of the corresponding microrobotic issues. Beyond the microfabrication technologies, performing MEMS microassembly requires, micromanipulation strategies, microworld dynamics and attachment technologies. The design and the fabrication of the microrobot end-effectors as well as the assembled micro-parts require the use of microfabrication technologies. Moreover new micromanipulation strategies are necessary to handle and position micro-parts with sufficiently high accuracy during assembly. The dynamic behaviour of micrometric objects has also to be studied and controlled. Finally, after positioning the micro-part, attachment technologies are necessary

Micro motion amplification – A Review

Many motion-active materials have recently emerged, with new methods of integration into actuator components and systems-on-chip. Along with established microprocessors, interconnectivity capabilities and emerging powering methods, they offer a unique opportunity for the development of interactive millimeter and micrometer scale systems with combined sensing and actuating capabilities. The amplification of nanoscale material motion to a functional range is a key requirement for motion interaction and practical applications, including medical micro-robotics, micro-vehicles and micro-motion energy harvesting. Motion amplification concepts include various types of leverage, flextensional mechanisms, unimorphs, micro-walking /micro-motor systems, and structural resonance. A review of the research state-of-art and product availability shows that the available mechanisms offer a motion gain in the range of 10. The limiting factor is the aspect ratio of the moving structure that is achievable in the microscale. Flexures offer high gains because they allow the application of input displacement in the close vicinity of an effective pivotal point. They also involve simple and monolithic fabrication methods allowing combination of multiple amplification stages. Currently, commercially available motion amplifiers can provide strokes as high as 2% of their size. The combination of high-force piezoelectric stacks or unimorph beams with compliant structure optimization methods is expected to make available a new class of high-performance motion translators for microsystems

Potentialities of optimal design methods and associated numerical tools for the development of new micro- and nanointelligent systems based on structural compliance - An example -

11 pagesInternational audienceThis paper deals with the interest and potential use of intelligent structures mainly based on compliant mechanisms (and optionally including smart materials), for the development of new micro- and nano-robotics devices. The state of the art in optimal design methods for the synthesis of intelligent compliant structures is briefly done. Then, we present the optimal method developed at CEA LIST, called FlexIn, and its new and still in development functionalities, which will be illustrated by a few simple design examples. An opening will be given about the possibility to address the field of Nanorobotics, while adding functionalities to the optimal design method

A microgripper for single cell manipulation

This thesis presents the development of an electrothermally actuated microgripper for the manipulation of cells and other biological particles. The microgripper has been fabricated using a combination of surface and bulk micromachining techniques in a three mask process. All of the fabrication details have been chosen to enable a tri-layer, polymer (SU8) - metal (Au) - polymer (SU8), membrane to be released from the substrate stress free and without the need for sacrificial layers. An actuator design, which completely eliminates the parasitic resistance of the cold arm, is presented. When compared to standard U-shaped actuators, it improves the thermal efficiency threefold. This enables larger displacements at lower voltages and temperatures. The microgripper is demonstrated in three different configurations: normally open mode, normally closed mode, and normally open/closed mode. It has-been modelled using two coupled analytical models - electrothermal and thermomechanical - which have been custom developed for this application. Unlike previously reported models, the electrothermal model presented here includes the heat exchange between hot and cold arms of the actuators that are separated by a small air gap. A detailed electrothermomechanical characterisation of selected devices has permitted the validation of the models (also performed using finite element analysis) and the assessment of device performance. The device testing includes electrical, deflection, and temperature measurements using infrared (IR) thermography, its use in polymeric actuators reported here for the first time. Successful manipulation experiments have been conducted in both air and liquid environments. Manipulation of live cells (mice oocytes) in a standard biomanipulation station has validated the microgripper as a complementary and unique tool for the single cell experiments that are to be conducted by future generations of biologists in the areas of human reproduction and stem cell research

Development of novel micropneumatic grippers for biomanipulation

Microbjects with dimensions from 1 μm to 1 mm have been developed recently for different aspects and purposes. Consequently, the development of handling and manipulation tools to fulfil this need is urgently required. Micromanipulation techniques could be generally categorized according to their actuation method such as electrostatic, thermal, shape memory alloy, piezoelectric, magnetic, and fluidic actuation. Each of which has its advantage and disadvantage. The fluidic actuation has been overlooked in MEMS despite its satisfactory output in the micro-scale. This thesis presents different families of pneumatically driven, low cost, compatible with biological environment, scalable, and controllable microgrippers. The first family demonstrated a polymeric microgripper that was laser cut and actuated pneumatically. It was tested to manipulate microparticles down to 200 microns. To overcome the assembly challenges that arise in this family, the second family was proposed. The second family was a micro-cantilever based microgripper, where the device was assembled layer by layer to form a 3D structure. The microcantilevers were fabricated using photo-etching technique, and demonstrated the applicability to manipulate micro-particles down to 200 microns using automated pick-and-place procedure. In addition, this family was used as a tactile-detector as well. Due to the angular gripping scheme followed by the above mentioned families, gripping smaller objects becomes a challenging task. A third family following a parallel gripping scheme was proposed allowing the gripping of smaller objects to be visible. It comprises a compliant structure microgripper actuated pneumatically and fabricated using picosecond laser technology, and demonstrated the capability of gripping microobject as small as 100 μm microbeads. An FEA modelling was employed to validate the experimental and analytical results, and excellent matching was achieved

Optical MEMS Switches: Theory, Design, and Fabrication of a New Architecture

The scalability and cost of microelectromechanical systems (MEMS) optical switches are now the important factors driving the development of MEMS optical switches technology. The employment of MEMS in the design and fabrication of optical switches through the use of micromachining fabricated micromirrors expands the capability and integrity of optical backbone networks. The focus of this dissertation is on the design, fabrication, and implementation of a new type of MEMS optical switch that combines the advantages of both 2-D and 3-D MEMS switch architectures. This research presents a new digital MEMS switch architecture for 1×N and N×N optical switches. The architecture is based on a new microassembled smart 3-D rotating inclined micromirror (3DRIM). The 3DRIM is the key device in the new switch architectures. The 3DRIM was constructed through a microassembly process using a passive microgripper, key, and inter-lock (PMKIL) assembly system. An electrostatic micromotor was chosen as the actuator for the 3DRIM since it offers continuous rotation as well as small, precise step motions with excellent repeatability that can achieve repeatable alignment with minimum optical insertion loss between the input and output ports of the switch. In the first 3DRIM prototype, a 200×280 microns micromirror was assembled on the top of the electrostatic micromotor and was supported through two vertical support posts. The assembly technique was then modified so that the second prototype can support micromirrors with dimensions up to 400×400 microns. Both prototypes of the 3DRIM are rigid and stable during operation. Also, rotor pole shaping (RPS) design technique was introduced to optimally reshape the physical dimensions of the rotor pole in order to maximize the generated motive torque of the micromotor and minimize the required driving voltage signal. The targeted performance of the 3DRIM was achieved after several PolyMUMPs fabrication runs. The new switch architecture is neither 2-D nor 3-D. Since it is composed of two layers, it can be considered 2.5-D. The new switch overcomes many of the limitations of current traditional 2-D MEMS switches, such as limited scalability and large variations in the insertion loss across output ports. The 1×N MEMS switch fabric has the advantage of being digitally operated. It uses only one 3DRIM to switch the light signal from the input port to any output port. The symmetry employed in the switch design gives it the ability to incorporate a large number of output ports with uniform insertion losses over all output channels, which is not possible with any available 2-D or 3-D MEMS switch architectures. The second switch that employs the 3DRIM is an N×N optical cross-connect (OXC) switch. The design of an N×N OXC uses only 2N of the 3DRIM, which is significantly smaller than the N×N switching micromirrors used in 2-D MEMS architecture. The new N×N architecture is useful for a medium-sized OXC and is simpler than 3-D architecture. A natural extension of the 3DRIM will be to extend its application into more complex optical signal processing, i.e., wavelength-selective switch. A grating structures have been selected to explore the selectivity of the switch. For this reason, we proposed that the surface of the micromirror being replaced by a suitable gratings instead of the flat reflective surface. Thus, this research has developed a rigorous formulation of the electromagnetic scattered near-field from a general-shaped finite gratings in a perfect conducting plane. The formulation utilizes a Fourier-transform representation of the scattered field for the rapid convergence in the upper half-space and the staircase approximation to represent the field in the general-shaped groove. This method provides a solution for the scattered near-field from the groove and hence is considered an essential design tool for near-field manipulation in optical devices. Furthermore, it is applicable for multiple grooves with different profiles and different spacings. Each groove can be filled with an arbitrary material and can take any cross-sectional profile, yet the solution is rigorous because of the rigorous formulations of the fields in the upper-half space and the groove reigns. The efficient formulation of the coefficient matrix results in a banded-matrix form for an efficient and time-saving solution

Flexible micro-assembly system equiped with an automated tool changer.

International audienceThis paper deals with the design, fabrication and experimental validation of several modules of a micro-assembly system. On one hand, a microgripper is integrated in a four degrees of freedom system. On the other hand, a tool changer is designed. It enables to exchange automatically the tip part of the microgripper and then dedicated tools can be used to achieve specific tasks. The principle of this tool changer relies on a thermal glue whose phase (liquid or solid) is controlled by heat generators. This system is based on the modeling of thermal phenomena in the tools during a cycle of tool exchange. A compliant system is added to limit micromanipulation forces applied during assembly tasks like insertions. Finally, the successful assembly of several microcomponents is detailed, highlighting the capabilities and benefits of the whole system

Mechanical and control-oriented design of a monolithic piezoelectric microgripper using a new topological optimisation method.

International audienceThis paper presents a new method developed for the optimal design of piezoactive compliant micromechanisms. It is based on a flexible building block method, called FlexIn, which uses an evolutionary approach, to optimize a truss-like planar structure made of passive and active building blocks, made of piezoelectric material. An electromechanical approach, based on a mixed finite element formulation, is used to establish the model of the active piezoelectric blocks. From the first design step, in addition to conventional mechanical criteria, innovative control-based metrics can be considered in the optimization procedure to fit the open-loop frequency response of the synthetized mechanisms. In particular, these criteria have been drawn here to optimize modal controllability and observability of the system, which is particularly interesting when considering control of flexible structures. Then, a planar monolithic compliant micro-actuator has been synthetized using FlexIn and prototyped. Finally, simulations and experimental tests of the FlexIn optimally synthetized device demonstrate the interests of the proposed optimization method for the design of micro-actuators, microrobots, and more generally for adaptronic structures

Modeling, simulation and control of microrobots for the microfactory.

Future assembly technologies will involve higher levels of automation in order to satisfy increased microscale or nanoscale precision requirements. Traditionally, assembly using a top-down robotic approach has been well-studied and applied to the microelectronics and MEMS industries, but less so in nanotechnology. With the boom of nanotechnology since the 1990s, newly designed products with new materials, coatings, and nanoparticles are gradually entering everyone’s lives, while the industry has grown into a billion-dollar volume worldwide. Traditionally, nanotechnology products are assembled using bottom-up methods, such as self-assembly, rather than top-down robotic assembly. This is due to considerations of volume handling of large quantities of components, and the high cost associated with top-down manipulation requiring precision. However, bottom-up manufacturing methods have certain limitations, such as components needing to have predefined shapes and surface coatings, and the number of assembly components being limited to very few. For example, in the case of self-assembly of nano-cubes with an origami design, post-assembly manipulation of cubes in large quantities and cost-efficiency is still challenging. In this thesis, we envision a new paradigm for nanoscale assembly, realized with the help of a wafer-scale microfactory containing large numbers of MEMS microrobots. These robots will work together to enhance the throughput of the factory, while their cost will be reduced when compared to conventional nanopositioners. To fulfill the microfactory vision, numerous challenges related to design, power, control, and nanoscale task completion by these microrobots must be overcome. In this work, we study two classes of microrobots for the microfactory: stationary microrobots and mobile microrobots. For the stationary microrobots in our microfactory application, we have designed and modeled two different types of microrobots, the AFAM (Articulated Four Axes Microrobot) and the SolarPede. The AFAM is a millimeter-size robotic arm working as a nanomanipulator for nanoparticles with four degrees of freedom, while the SolarPede is a light-powered centimeter-size robotic conveyor in the microfactory. For mobile microrobots, we have introduced the world’s first laser-driven micrometer-size locomotor in dry environments, called ChevBot to prove the concept of the motion mechanism. The ChevBot is fabricated using MEMS technology in the cleanroom, following a microassembly step. We showed that it can perform locomotion with pulsed laser energy on a dry surface. Based on the knowledge gained with the ChevBot, we refined tits fabrication process to remove the assembly step and increase its reliability. We designed and fabricated a steerable microrobot, the SerpenBot, in order to achieve controllable behavior with the guidance of a laser beam. Through modeling and experimental study of the characteristics of this type of microrobot, we proposed and validated a new type of deep learning controller, the PID-Bayes neural network controller. The experiments showed that the SerpenBot can achieve closed-loop autonomous operation on a dry substrate

Magnetic Levitation of Polymeric Photo-thermal Microgrippers

Precise manipulation of micro objects became great interest in engineering and science with the advancements in microengineering and microfabrication. In this thesis, a magnetically levitated microgripper is presented for microhandling tasks. The use of magnetic levitation for positioning reveals the problems associated with modeling of complex surface forces and the use of jointed parts or wires. The power required for the levitation of the microgripper is generated by an external drive unit that makes further minimization of the gripper possible. The gripper is made of a biocompatible material and can be activated remotely. These key features make the microgripper a great candidate for manipulation of micro components and biomanipulation. In order to achieve magnetic levitation of microrobots, the magnetic field generated by the magnetic levitation setup is simulated. The magnetic flux density in the air gap region is improved by the integration of permanent magnets and an additional electromagnet to the magnetic loop assembly. The levitation performance is evaluated with millimeter size permanent magnets. An eddy current damping method is implemented and the levitation accuracy is doubled by reducing the positioning error to 20.3 µm. For a MEMS-compatible microrobot design, the electrodeposition of Co-Ni-Mn-P magnetic thin films is demonstrated. Magnetic films are deposited on silicon substrate to form the magnetic portion of the microrobot. The electrodeposited films are extensively characterized. The relationship between the deposition parameters and structural properties is discussed leading to an understanding of the effect of deposition parameters on the magnetic properties. It is shown that both in-plane and out-of-plane magnetized films can be obtained using electrodeposition with slightly differentiated deposition parameters. The levitation of the electrodeposited magnetic samples shows a great promise toward the fabrication of levitating MEMS devices. The end-effector tool of the levitating microrobot is selected as a microgripper that can achieve various manipulation operations such as pulling, pushing, tapping, grasping and repositioning. The microgripper is designed based on a bent-beam actuation technique. The motion of the gripper fingers is achieved by thermal expansion through laser heat absorption. This technique provided non-contact actuation for the levitating microgripper. The analytical model of the displacement of the bent-beam actuator is developed. Different designs of microgripper are fabricated and thoroughly characterized experimentally and numerically. The two microgripper designs that lead to the maximum gripper deflection are adapted for the levitating microrobot. The experimental results show that the levitating microrobot can be positioned in a volume of 3 x 3 x 2 cm^3. The positioning error is measured as 34.3 µm and 13.2 µm when electrodeposited magnets and commercial permanent magnets are used, respectively. The gripper fingers are successfully operated on-the-fly by aligning a visible wavelength laser beam on the gripper. Micromanipulation of 100 µm diameter electrical wire, 125 µm diameter optical fiber and 1 mm diameter cable strip is demonstrated. The microgripper is also positioned in a closed chamber without sacrificing the positioning accuracy