A micro-positioning motion system to enhance lithography in semiconductor manufacturing machines

This study proposes a novel precision micro-motion system to enhance the lithography process in the semiconductor manufacturing machines. This proposed micro-motion system is a new smart-materials stage that integrates piezoelectric actuators in the reticle stage of the future semiconductor manufacturing machines. The proposed smart-materials based reticle (SMBR) implements piezoelectric actuators to a novel flexure hinge-based mechanism to enhance the precision of the reticle stage; such that it reduces the relative in-plane micro-positioning errors in the synchronization motion between the reticle stage and the wafer stage in a time period less than the current settling time in lithography machines, 10 ms. The proposed SMBR can provide in-plane translational motions along x- and y-axes, and in-plane θz-rotational motion around z-axis with an amount of 11:7462 μm x 11:7462 μm x 0:4713 mrad, respectively, to correct the orientation of the reticle stage which governs the pattern of the integrated circuit being printed. The proposed SMBR considers the current dynamic performance of reticle stage of the semiconductor manufacturing machines; such that (i) it corrects the in-plane synchronization errors in a time period less than the settling time of the short-stroke, and (ii) the working frequency bandwidth remains above 550 Hz. The proposed SMBR can be integrated with the precision motion systems of the semiconductor manufacturing machines to enhance the storage capacity, the functionality of the devices, and the CPU processing capability

SEIS: Insight's Seismic Experiment for Internal Structure of Mars.

By the end of 2018, 42 years after the landing of the two Viking seismometers on Mars, InSight will deploy onto Mars' surface the SEIS (Seismic Experiment for Internal Structure) instrument; a six-axes seismometer equipped with both a long-period three-axes Very Broad Band (VBB) instrument and a three-axes short-period (SP) instrument. These six sensors will cover a broad range of the seismic bandwidth, from 0.01 Hz to 50 Hz, with possible extension to longer periods. Data will be transmitted in the form of three continuous VBB components at 2 sample per second (sps), an estimation of the short period energy content from the SP at 1 sps and a continuous compound VBB/SP vertical axis at 10 sps. The continuous streams will be augmented by requested event data with sample rates from 20 to 100 sps. SEIS will improve upon the existing resolution of Viking's Mars seismic monitoring by a factor of ∼ 2500 at 1 Hz and ∼ 200 000 at 0.1 Hz. An additional major improvement is that, contrary to Viking, the seismometers will be deployed via a robotic arm directly onto Mars' surface and will be protected against temperature and wind by highly efficient thermal and wind shielding. Based on existing knowledge of Mars, it is reasonable to infer a moment magnitude detection threshold of M w ∼ 3 at 40 ∘ epicentral distance and a potential to detect several tens of quakes and about five impacts per year. In this paper, we first describe the science goals of the experiment and the rationale used to define its requirements. We then provide a detailed description of the hardware, from the sensors to the deployment system and associated performance, including transfer functions of the seismic sensors and temperature sensors. We conclude by describing the experiment ground segment, including data processing services, outreach and education networks and provide a description of the format to be used for future data distribution.Electronic supplementary materialThe online version of this article (10.1007/s11214-018-0574-6) contains supplementary material, which is available to authorized users

Robot Manipulators

Robot manipulators are developing more in the direction of industrial robots than of human workers. Recently, the applications of robot manipulators are spreading their focus, for example Da Vinci as a medical robot, ASIMO as a humanoid robot and so on. There are many research topics within the field of robot manipulators, e.g. motion planning, cooperation with a human, and fusion with external sensors like vision, haptic and force, etc. Moreover, these include both technical problems in the industry and theoretical problems in the academic fields. This book is a collection of papers presenting the latest research issues from around the world

The 29th Aerospace Mechanisms Symposium

The proceedings of the 29th Aerospace Mechanisms Symposium, which was hosted by NASA Johnson Space Center and held at the South Shore Harbour Conference Facility on May 17-19, 1995, are reported. Technological areas covered include actuators, aerospace mechanism applications for ground support equipment, lubricants, pointing mechanisms joints, bearings, release devices, booms, robotic mechanisms, and other mechanisms for spacecraft

Performance-driven control of nano-motion systems

The performance of high-precision mechatronic systems is subject to ever increasing demands regarding speed and accuracy. To meet these demands, new actuator drivers, sensor signal processing and control algorithms have to be derived. The state-of-the-art scientific developments in these research directions can significantly improve the performance of high-precision systems. However, translation of the scientific developments to usable technology is often non-trivial. To improve the performance of high-precision systems and to bridge the gap between science and technology, a performance-driven control approach has been developed. First, the main performance limiting factor (PLF) is identified. Then, a model-based compensation method is developed for the identified PLF. Experimental validation shows the performance improvement and reveals the next PLF to which the same procedure is applied. The compensation method can relate to the actuator driver, the sensor system or the control algorithm. In this thesis, the focus is on nano-motion systems that are driven by piezo actuators and/or use encoder sensors. Nano-motion systems are defined as the class of systems that require velocities ranging from nanometers per second to millimeters per second with a (sub)nanometer resolution. The main PLFs of such systems are the actuator driver, hysteresis, stick-slip effects, repetitive disturbances, coupling between degrees-of-freedom (DOFs), geometric nonlinearities and quantization errors. The developed approach is applied to three illustrative experimental cases that exhibit the above mentioned PLFs. The cases include a nano-motion stage driven by a walking piezo actuator, a metrological AFM and an encoder system. The contributions of this thesis relate to modeling, actuation driver development, control synthesis and encoder sensor signal processing. In particular, dynamic models are derived of the bimorph piezo legs of the walking piezo actuator and of the nano-motion stage with the walking piezo actuator containing the switching actuation principle, stick-slip effects and contact dynamics. Subsequently, a model-based optimization is performed to obtain optimal drive waveforms for a constant stage velocity. Both the walking piezo actuator and the AFM case exhibit repetitive disturbances with a non-constant period-time, for which dedicated repetitive control methods are developed. Furthermore, control algorithms have been developed to cope with the present coupling between and hysteresis in the different axes of the AFM. Finally, sensor signal processing algorithms have been developed to cope with the quantization effects and encoder imperfections in optical incremental encoders. The application of the performance-driven control approach to the different cases shows that the different identified PLFs can be successfully modeled and compensated for. The experiments show that the performance-driven control approach can largely improve the performance of nano-motion systems with piezo actuators and/or encoder sensors

Robotic System Development for Precision MRI-Guided Needle-Based Interventions

This dissertation describes the development of a methodology for implementing robotic systems for interventional procedures under intraoperative Magnetic Resonance Imaging (MRI) guidance. MRI is an ideal imaging modality for surgical guidance of diagnostic and therapeutic procedures, thanks to its ability to perform high resolution, real-time, and high soft tissue contrast imaging without ionizing radiation. However, the strong magnetic field and sensitivity to radio frequency signals, as well as tightly confined scanner bore render great challenges to developing robotic systems within MRI environment. Discussed are potential solutions to address engineering topics related to development of MRI-compatible electro-mechanical systems and modeling of steerable needle interventions. A robotic framework is developed based on a modular design approach, supporting varying MRI-guided interventional procedures, with stereotactic neurosurgery and prostate cancer therapy as two driving exemplary applications. A piezoelectrically actuated electro-mechanical system is designed to provide precise needle placement in the bore of the scanner under interactive MRI-guidance, while overcoming the challenges inherent to MRI-guided procedures. This work presents the development of the robotic system in the aspects of requirements definition, clinical work flow development, mechanism optimization, control system design and experimental evaluation. A steerable needle is beneficial for interventional procedures with its capability to produce curved path, avoiding anatomical obstacles or compensating for needle placement errors. Two kinds of steerable needles are discussed, i.e. asymmetric-tip needle and concentric-tube cannula. A novel Gaussian-based ContinUous Rotation and Variable-curvature (CURV) model is proposed to steer asymmetric-tip needle, which enables variable curvature of the needle trajectory with independent control of needle rotation and insertion. While concentric-tube cannula is suitable for clinical applications where a curved trajectory is needed without relying on tissue interaction force. This dissertation addresses fundamental challenges in developing and deploying MRI-compatible robotic systems, and enables the technologies for MRI-guided needle-based interventions. This study applied and evaluated these techniques to a system for prostate biopsy that is currently in clinical trials, developed a neurosurgery robot prototype for interstitial thermal therapy of brain cancer under MRI guidance, and demonstrated needle steering using both asymmetric tip and pre-bent concentric-tube cannula approaches on a testbed

Modeling and experimental validation of a parallel microrobot for biomanipulation

The main purpose of this project is the development of a commercial micropositioner's (SmarPod 115.25, SmarAct GmbH) geometrical model. SmarPod is characterized by parallel kinematics and is employed for precise and accurate sample's positioning under SEM microscope, being vacuum-compatible, for various applications. Geometrical modeling represents the preliminar step to fully understand, and possibly improve, robot's closed loop behaviour in terms of task's quality precision, when enterprises does not provide sufficient documentation. The robotic system, in fact, represents in this case a "black box" from which it's possible to extract information. This step is essential in order to improve, consequently, the reliability of bio-microsystem manipulation and characterization. Disposing of a detailed microrobot's model becomes essential to deal with the typical lack of sensing at microscale, as it allows a 3D precise and adequate reconstruction, realized through proper softwares, of the manipulation set-up. The roles of Virtual Reality (VR) and of simulations, carried out, in this case, in Blender environment, are asserted as well as an essential helping tool in mycrosystem's task planning. Blender is a professional free and open-source 3D computer graphics software and it is proven to be a basic instrument to validate microrobot's model, even to simplify it in case of complex system's geometries

Parallel Manipulators

In recent years, parallel kinematics mechanisms have attracted a lot of attention from the academic and industrial communities due to potential applications not only as robot manipulators but also as machine tools. Generally, the criteria used to compare the performance of traditional serial robots and parallel robots are the workspace, the ratio between the payload and the robot mass, accuracy, and dynamic behaviour. In addition to the reduced coupling effect between joints, parallel robots bring the benefits of much higher payload-robot mass ratios, superior accuracy and greater stiffness; qualities which lead to better dynamic performance. The main drawback with parallel robots is the relatively small workspace. A great deal of research on parallel robots has been carried out worldwide, and a large number of parallel mechanism systems have been built for various applications, such as remote handling, machine tools, medical robots, simulators, micro-robots, and humanoid robots. This book opens a window to exceptional research and development work on parallel mechanisms contributed by authors from around the world. Through this window the reader can get a good view of current parallel robot research and applications