Manufacturing Metrology

Metrology is the science of measurement, which can be divided into three overlapping activities: (1) the definition of units of measurement, (2) the realization of units of measurement, and (3) the traceability of measurement units. Manufacturing metrology originally implicates the measurement of components and inputs for a manufacturing process to assure they are within specification requirements. It can also be extended to indicate the performance measurement of manufacturing equipment. This Special Issue covers papers revealing novel measurement methodologies and instrumentations for manufacturing metrology from the conventional industry to the frontier of the advanced hi-tech industry. Twenty-five papers are included in this Special Issue. These published papers can be categorized into four main groups, as follows: Length measurement: covering new designs, from micro/nanogap measurement with laser triangulation sensors and laser interferometers to very-long-distance, newly developed mode-locked femtosecond lasers. Surface profile and form measurements: covering technologies with new confocal sensors and imagine sensors: in situ and on-machine measurements. Angle measurements: these include a new 2D precision level design, a review of angle measurement with mode-locked femtosecond lasers, and multi-axis machine tool squareness measurement. Other laboratory systems: these include a water cooling temperature control system and a computer-aided inspection framework for CMM performance evaluation

Optical MEMS

Optical microelectromechanical systems (MEMS), microoptoelectromechanical systems (MOEMS), or optical microsystems are devices or systems that interact with light through actuation or sensing at a micro- or millimeter scale. Optical MEMS have had enormous commercial success in projectors, displays, and fiberoptic communications. The best-known example is Texas Instruments’ digital micromirror devices (DMDs). The development of optical MEMS was impeded seriously by the Telecom Bubble in 2000. Fortunately, DMDs grew their market size even in that economy downturn. Meanwhile, in the last one and half decade, the optical MEMS market has been slowly but steadily recovering. During this time, the major technological change was the shift of thin-film polysilicon microstructures to single-crystal–silicon microsructures. Especially in the last few years, cloud data centers are demanding large-port optical cross connects (OXCs) and autonomous driving looks for miniature LiDAR, and virtual reality/augmented reality (VR/AR) demands tiny optical scanners. This is a new wave of opportunities for optical MEMS. Furthermore, several research institutes around the world have been developing MOEMS devices for extreme applications (very fine tailoring of light beam in terms of phase, intensity, or wavelength) and/or extreme environments (vacuum, cryogenic temperatures) for many years. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on (1) novel design, fabrication, control, and modeling of optical MEMS devices based on all kinds of actuation/sensing mechanisms; and (2) new developments of applying optical MEMS devices of any kind in consumer electronics, optical communications, industry, biology, medicine, agriculture, physics, astronomy, space, or defense

Research on profile compensation, on-machine metrology and precision monitoring of ultrahigh precision machining process using real-time position capture system

東京電機大学202

Contrast enhanced spectroscopic optical coherence tomography

A method of forming an image of a sample includes performing SOCT on a sample. The sample may include a contrast agent, which may include an absorbing agent and/or a scattering agent. A method of forming an image of tissue may include selecting a contrast agent, delivering the contrast agent to the tissue, acquiring SOCT data from the tissue, and converting the SOCT data into an image. The contributions to the SOCT data of an absorbing agent and a scattering agent in a sample may be quantified separately

Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry

This Open Access book discusses an extension to low-coherence interferometry by dispersion-encoding. The approach is theoretically designed and implemented for applications such as surface profilometry, polymeric cross-linking estimation and the determination of thin-film layer thicknesses. During a characterization, it was shown that an axial measurement range of 79.91 µm with an axial resolution of 0.1 nm is achievable. Simultaneously, profiles of up to 1.5 mm in length were obtained in a scan-free manner. This marked a significant improvement in relation to the state-of-the-art in terms of dynamic range. Also, the axial and lateral measurement range were decoupled partially while functional parameters such as surface roughness were estimated. The characterization of the degree of polymeric cross-linking was performed as a function of the refractive index. It was acquired in a spatially-resolved manner with a resolution of 3.36 x 10-5. This was achieved by the development of a novel mathematical analysis approach

Biomedical Engineering

Biomedical engineering is currently relatively wide scientific area which has been constantly bringing innovations with an objective to support and improve all areas of medicine such as therapy, diagnostics and rehabilitation. It holds a strong position also in natural and biological sciences. In the terms of application, biomedical engineering is present at almost all technical universities where some of them are targeted for the research and development in this area. The presented book brings chosen outputs and results of research and development tasks, often supported by important world or European framework programs or grant agencies. The knowledge and findings from the area of biomaterials, bioelectronics, bioinformatics, biomedical devices and tools or computer support in the processes of diagnostics and therapy are defined in a way that they bring both basic information to a reader and also specific outputs with a possible further use in research and development

Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry

This Open Access book discusses an extension to low-coherence interferometry by dispersion-encoding. The approach is theoretically designed and implemented for applications such as surface profilometry, polymeric cross-linking estimation and the determination of thin-film layer thicknesses. During a characterization, it was shown that an axial measurement range of 79.91 µm with an axial resolution of 0.1 nm is achievable. Simultaneously, profiles of up to 1.5 mm in length were obtained in a scan-free manner. This marked a significant improvement in relation to the state-of-the-art in terms of dynamic range. Also, the axial and lateral measurement range were decoupled partially while functional parameters such as surface roughness were estimated. The characterization of the degree of polymeric cross-linking was performed as a function of the refractive index. It was acquired in a spatially-resolved manner with a resolution of 3.36 x 10-5. This was achieved by the development of a novel mathematical analysis approach

Gemini Planet Imager: Preliminary Design Report

For the first time in history, direct and indirect detection techniques have enabled the exploration of the environments of nearby stars on scales comparable to the size of our solar system. Precision Doppler measurements have led to the discovery of the first extrasolar planets, while high-contrast imaging has revealed new classes of objects including dusty circumstellar debris disks and brown dwarfs. The ability to recover spectrophotometry for a handful of transiting exoplanets through secondary-eclipse measurements has allowed us to begin to study exoplanets as individual entities rather than points on a mass/semi-major-axis diagram and led to new models of planetary atmospheres and interiors, even though such measurements are only available at low SNR and for a handful of planets that are automatically those most modified by their parent star. These discoveries have galvanized public interest in science and technology and have led to profound new insights into the formation and evolution of planetary systems, and they have set the stage for the next steps--direct detection and characterization of extrasolar Jovian planets with instruments such as the Gemini Planet Imager (GPI). As discussed in Volume 1, the ability to directly detect Jovian planets opens up new regions of extrasolar planet phase space that in turn will inform our understanding of the processes through which these systems form, while near-IR spectra will advance our understanding of planetary physics. Studies of circumstellar debris disks using GPI's polarimetric mode will trace the presence of otherwise-invisible low-mass planets and measure the build-up and destruction of planetesimals. To accomplish the science mission of GPI will require a dedicated instrument capable of achieving contrast of 10{sup -7} or more. This is vastly better than that delivered by existing astronomical AO systems. Currently achievable contrast, about 10{sup -5} at separations of 1 arc second or larger, is completely limited by quasi-static wave front errors, so that contrast does not improve with integration times longer than about 1 minute. Using the rotation of the Earth to distinguish companions from artifacts or multiwavelength imaging improves this somewhat, but GPI will still need to surpass the performance of existing systems by one to two orders of magnitude--an improvement comparable to the transition from photographic plates to CCDs. This may sound daunting, but other areas of optical science have achieved similar breakthroughs, for example, the transition to nanometer-quality optics for extreme ultraviolet lithography, the development of MEMS wave front control devices, and the ultra-high contrast demonstrated by JPL's High Contrast Imaging Test-bed. In astronomy, the Sloan Digital Sky Survey, long baseline radio interferometry, and multi-object spectrographs have led to improvements of similar or greater order of magnitude. GPI will be the first project to apply these revolutionary techniques to ground-based astronomy, with a systems engineering approach that studies the impact of every design decision on the key metric--final detectable planet contrast