NEW APPROACHES TO WIDEBAND RF SWITCHING IN SILICON-GERMANIUM TECHNOLOGY

The objective of this research is to develop and investigate radio frequency (RF) switches utilizing silicon-germanium (SiGe) heterojunction bipolar transistors (HBTs) to provide a novel design approach for next-generation wideband circuits and systems. SiGe HBTs offer relatively small parasitic capacitance, making them suitable for wideband RF switching transistors with low insertion loss. Despite the available performance, the effective utilization of SiGe HBTs as RF series switches remains largely unexplored. The research presented in this dissertation introduces a novel RF series switch architecture, namely an anti-parallel (AP) SiGe HBT pair, as a potential wideband switching element for next-generation systems. The benefits of this novel RF series switch architecture are investigated, as well as insightful optimization techniques and an analysis of its operational principles. The dissertation then provides implemented design examples and develops design techniques leveraging properties possessed by the AP SiGe HBT pair.Ph.D

Bidirectional common-path for 8-to-24 gHz low noise SiGe BiCMOS T/R module core-chip

This thesis is based on the design of an 8-to-24 GHz low noise SiGe BiCMOS Transmitter/Receiver (T/R) Module core-chip in a small area by bidirectional common-path. The next-generation phased array systems require multi-functionality and multi-band operation to form multi-purpose integrated circuits. Wide bandwidth becomes a requirement for the system in various applications, such as electronic warfare, due to leading cheaper and lighter system solutions. Although III-V technologies can satisfy the high-frequency specifications, they are expensive and have a large area. The silicon-based technologies promise high integration capability with low cost, but they sacrifice from the performance to result in desired bandwidth. The presented dissertation targets system and circuit level solutions on the described content. The wideband core-chip utilized a bidirectional common path to surpass the bandwidth limitations. The bidirectionality enhances the bandwidth, noise, gain and area of the transceiver by the removal of the repetitive blocks in the unidirectional common chain. This approach allows succeeding desired bandwidth and compactness without sacrificing from the other high-frequency parameters. The realized core-chip has 31.5 and 32 dB midband gain for the receiver and transmitter respectively, with a + 2.1 dB /GHz of positive slope. Its RMS phase and amplitude errors are lower than 5.60 and 0.8 dB, respectively for 4-bit of resolution. The receiver noise figure is lower than 5 dB for the defined bandwidth while dissipating 112 mW of power in a 5.5 mm2 area. The presented results verify the advantage of the favored architecture and might replace the III-V based counterparts

A 90-GHz Asymmetrical Single-Pole Double-Throw Switch with >19.5-dBm 1-dB Compression Point in Transmission Mode Using 55-nm Bulk CMOS Technology

© Copyright 2021 IEEE. This is the accepted manuscript version of an article which has been published in final form at https://doi.org/10.1109/TCSI.2021.3106231The millimeter-wave (mm-wave) single-pole double-throw (SPDT) switch designed in bulk CMOS technology has limited power-handling capability in terms of 1-dB compression point (P1dB) inherently. This is mainly due to the low threshold voltage of the switching transistors used for shunt-connected configuration. To solve this issue, an innovative approach is presented in this work, which utilizes a unique passive ring structure. It allows a relatively strong RF signal passing through the TX branch, while the switching transistors are turned on. Thus, the fundamental limitation for P1dB due to reduced threshold voltage is overcome. To prove the presented approach is feasible in practice, a 90-GHz asymmetrical SPDT switch is designed in a standard 55-nm bulk CMOS technology. The design has achieved an insertion loss of 3.2 dB and 3.6 dB in TX and RX mode, respectively. Moreover, more than 20 dB isolation is obtained in both modes. Because of using the proposed passive ring structure, a remarkable P1dB is achieved. No gain compression is observed at all, while a 19.5 dBm input power is injected into the TX branch of the designed SPDT switch. The die area of this design is only 0.26 mm2.Peer reviewe

SOI RF-MEMS Based Variable Attenuator for Millimeter-Wave Applications

The most-attractive feature of microelectromechanical systems (MEMS) technology is that it enables the integration of a whole system on a single chip, leading to positive effects on the performance, reliability and cost. MEMS has made it possible to design IC-compatible radio frequency (RF) devices for wireless and satellite communication systems. Recently, with the advent of 5G, there is a huge market pull towards millimeter-wave devices. Variable attenuators are widely employed for adjusting signal levels in high frequency equipment. RF circuits such as automatic gain control amplifiers, broadband vector modulators, full duplex wireless systems, and radar systems are some of the primary applications of variable attenuators. This thesis describes the development of a millimeter-wave RF MEMS-based variable attenuator implemented by monolithically integrating Coplanar Waveguide (CPW) based hybrid couplers with lateral MEMS varactors on a Silicon–on–Insulator (SOI) substrate. The MEMS varactor features a Chevron type electrothermal actuator that controls the lateral movement of a thick plate, allowing precise change in the capacitive loading on a CPW line leading to a change in isolation between input and output. Electrothermal actuators have been employed in the design instead of electrostatic ones because they can generate relatively larger in-line deflection and force within a small footprint. They also provide the advantage of easy integration with other electrical micro-systems on the same chip, since their fabrication process is compatible with general IC fabrication processes. The development of an efficient and reliable actuator has played an important role in the performance of the proposed design of MEMS variable attenuator. A Thermoreflectance (TR) imaging system is used to acquire the surface temperature profiles of the electrothermal actuator employed in the design, so as to study the temperature distribution, displacement and failure analysis of the Chevron actuator. The 60 GHz variable attenuator was developed using a custom fabrication process on an SOI substrate with a device footprint of 3.8 mm x 3.1 mm. The fabrication process has a high yield due to the high-aspect-ratio single-crystal-silicon structures, which are free from warping, pre-deformation and sticking during the wet etching process. The SOI wafer used has a high resistivity (HR) silicon (Si) handle layer that provides an excellent substrate material for RF communication devices at microwave and millimeter wave frequencies. This low-cost fabrication process provides the flexibility to extend this module and implement more complex RF signal conditioning functions. It is thus an appealing candidate for realizing a wide range of reconfigurable RF devices. The measured RF performance of the 60 GHz variable attenuator shows that the device exhibits attenuation levels (|S21|) ranging from 10 dB to 25 dB over a bandwidth of 4 GHz and a return loss of better than 20 dB. The thesis also presents the design and implementation of a MEMS-based impedance tuner on a Silicon-On-Insulator (SOI) substrate. The tuner is comprised of four varactors monolithically integrated with CPW lines. Chevron actuators control the lateral motion of capacitive thick plates used as contactless lateral MEMS varactors, achieving a capacitance range of 0.19 pF to 0.8 pF. The improvement of the Smith chart coverage is achieved by proper choice of the electrical lengths of the CPW lines and precise control of the lateral motion of the capacitive plates. The measured results demonstrate good impedance matching coverage, with an insertion loss of 2.9 dB. The devices presented in this thesis provide repeatable and reliable operation due to their robust, thick-silicon structures. Therefore, they exhibit relatively low residual stress and are free from stiction and micro-welding problems

High-frequency silicon-germanium reconfigurable circuits for radar, communication, and radiometry applications

The objective of the proposed research is to create new reconfigurable RF and millimeter-wave circuit topologies that enable significant systems benefits. The market of RF systems has long evolved under a paradigm where once a system is built, performance cannot be changed. Companies have recognized that building flexibility into RF systems and providing mechanisms to reconfigure the RF performance can enable significant benefits, including: the ability support multiple modulation schemes and standards, the reduction of product size and overdesign, the ability to adapt to environmental conditions, the improvement in spectrum utilization, and the ability to calibrate, characterize, and monitor system performance. This work demonstrates X-band LNA designs with the ability to change the frequency of operation, improve linearity, and digitally control the tradeoff between performance and power dissipation. At W-band frequencies, a novel device configuration is developed, which significantly improves state-of-the-art silicon-based switch performance. The excellent switch performance is leveraged to address major issues in current millimeter-wave systems. A front-end built-in-self-test switch topology is developed to facilitate the characterization of millimeter-wave transceivers without expensive millimeter-wave equipment. A highly integrated Dicke radiometer is also created to enable sensitive measurements of thermal noise.Ph.D

CMOS Front-End Circuits in 45-nm SOI Suitable for Modular Phased-Array 60-GHz Radios

Next Fifth-generation (5G) wireless technologies enabling ultra-wideband spectrum availability and increased system capacity can achieve multi-gigabit/s (Gbps) data rates suitable for ultra-high-speed internet access around the 60-GHz band (i.e., Wi-Gig Technology). This mm-wave band is unlicensed and experiences high propagation power losses. Therefore, it is suitable for short-range communications and requires antenna arrays to satisfy the link budget requirements. Half-duplex reconfigurable phased-array transceivers require wideband, low-cost, highly integrated front-end circuits such as bilateral RF switches, low-noise/power amplifiers, passive RF splitters/combiners, and phase shifters implemented in deep sub-micron CMOS. In this dissertation, analysis, design, and verification of essential CMOS front-end components are covered and fabricated in GlobalFoundries 45-nm RF-SOI CMOS technology. Firstly, a fully-differential, single-pole, single-throw (SPST) switch capable of high isolation in broadband CMOS transceivers is described. The SPST switch realizes better than 50-dB isolation (ISO) across DC to 43 GHz while maintaining an insertion loss (IL) below 3 dB. Measured RF input power for 1-dB compression (IP1dB) of the IL is +19.6 dBm, and the measured input third-order intercept point (IIP3) is +30.4 dBm (both assuming differential inputs at 20 GHz). The prototype has an active area of 0.0058 mm^2. Secondly, a single-pole double-throw (SPDT) switch is implemented using the SPST concept by using a balun to convert the shared differential path to a single-ended antenna port. The SPDT simulations predict less than 3.5-dB IL and greater than 40-dB ISO across 55 to 65 GHz frequency band. An IP1dB of +21 dBm is expected from large-signal simulations. The prototype has an active area of 0.117 mm^2. Thirdly, a fully-differential switched-LC topology adopted with slow-wave artificial transmission line concept, and phase inversion network is described for a 360-degree phase shift range with 11.25-degree phase resolution. The average IL of the complete phase shifter is 5.3 dB with less than 1-dB rms IL error. Furthermore, the IP1dB of the phase shifter is +16 dBm. The prototype has an active area of 0.245 mm^2. Lastly, a fully-differential, 2-stage, common-source (CS) low-noise amplifier (LNA) is developed with wideband matching from 57.8 GHz to 67 GHz, a maximum simulated forward power gain of 20.8 dB, and a minimum noise figure of 3.07 dB. The LNA consumes 21 mW and predicts an OP1dB of 4.8 dBm from the 1-V supply. The LNA consumes an active area of 0.028 mm^2

SiGe/CMOS Millimeter-Wave Integrated Circuits and Wafer-Scale Packaging for Phased Array Systems.

Phased array systems have been used to achieve electronic beam control and fast beam scanning. In the RF-phase shifting architecture, T/R modules are required for each antenna element, and have been traditionally developed using GaAs or InP technology. This thesis demonstrates that Ka-band (35 GHz) T/R modules can also be developed using the SiGe BiCMOS technology. The designed circuit blocks include a low noise amplifier, a 4-bit phase shifter, a variable gain amplifier/attenuator, and SPDT switches. The Ka-band phase shifters are designed based on CMOS switch and miniature low-pass networks for a single-ended and differential applications, and result in 3-degree rms phase error at 35 GHz. The SiGe LNA results in a peak gain of 24 dB and a noise figure of 2.9-3.1 dB with 11 mW power consumption. The CMOS variablestep attenuator has 12-dB attenuation range (1 dB step) with very low loss and phase imbalance at 10-50 GHz. A variable gain LNA is also demonstrated at 30-40 GHz for the differential phased array receiver, and has 20-dB gain and <1-degree rms phase imbalance between the 8 different gain states and 10 dB gain control. All of these circuits show state-of-the-art performance, and the phase shifter, distributed attenuator and VGA are also first-time demonstrations at Ka-band frequencies. These circuit blocks were used in a miniature SiGe/CMOS Ka-band T/R module with a dimension of 0.93x1.33mm2, and a measured performance of 19 dB receive gain, 4-5 dB NF, 9 dB transmit gain and +5.5 dBm output P1dB. The T/R module also has 4-bit phase control and 10 dB gain control in both the transmit and receive modes. To our knowledge, this is the first demonstration of a Ka-band SiGe/CMOS T/R module to-date. Finally, a DC-110 GHz Si wafer-scale packaging technique has been developed using thermo-compression bonding and is suitable for Ka-band and even W-band T/R modules. The package transition has an insertion loss of 0.1-0.26 dB at 30-110 GHz, and the package resonances and leakage were drastically reduced by grounding the sealing ring. This is the first demonstration of a wideband resonance-free (DC-110 GHz) package using silicon technology.Ph.D.Electrical EngineeringUniversity of Michigan, Horace H. Rackham School of Graduate Studieshttp://deepblue.lib.umich.edu/bitstream/2027.42/58380/1/bmin_1.pd

Circuit Design And Reliability Of A Cmos Receiver

This dissertation explores CMOS RF design and reliability for portable wireless receivers. The objective behind this research is to achieve an increase in integration level, and gain more understanding for RF reliability. The fields covered include device, circuit and system. What is under investigation is a multi-band multi-mode receiver with GSM, DCS-1800 and CDMA compatibility. To my understanding, GSM and CDMA dual-mode mobile phones are progressively investigated in industries, and few commercial products are available. The receiver adopts direct conversion architecture. Some improved circuit design methods are proposed, for example, for low noise amplifier (LNA). Except for band filters, local oscillators, and analog-digital converters which are usually implemented by COTS SAW filters and ICs, all the remaining blocks such as switch, LNA, mixer, and local oscillator are designed in MOSIS TSMC 0.35[micro]m technology in one chip. Meanwhile, this work discusses related circuit reliability issues, which are gaining more and more attention. Breakdown (BD) and hot carrier (HC) effects are important issues in semiconductor industry. Soft-breakdown (SBD) and HC effects on device and RF performance has been reported. Hard-breakdown (HBD) effects on digital circuits have also been investigated. This work uniquely address HBD effects on the RF device and circuit performance, taking low noise amplifier and power amplifier as targets