A low-voltage three-axis electromagnetically actuated micromirror for fine alignment among optical devices

In this paper, a new three-axis electromagnetically actuated micromirror structure has been proposed and fabricated. It is electromagnetically actuated at low voltage using an external magnetic field. The main purpose of this work was to obtain a three-axis actuated micromirror in a mechanically robust structure with large static angular and vertical displacement at low actuation voltage for fine alignment among optical components in an active alignment module as well as conventional optical systems. The mirror plate and torsion bars are made of bulk silicon using a SOI wafer, and the actuation coils are made of electroplated Au. The maximum static deflection angles were measured as +/-4.2 for x -axis actuation and +/-.2 for y -axis actuation, respectively. The maximum static vertical displacement was measured as +/-42 um for z -axis actuation. The actuation voltages were below 3 V for all actuation. The simulated resonant frequencies are several kHz, and these imply that the fabricated micromirror can be operated in sub-millisecond order. The measured radius of curvature (ROC) of the fabricated micromirror is 7.72 cm, and the surface roughness of the reflector is below 1.29 nm which ensure high optical performance such as high directionality and reflectivity. The fabricated micromirror has demonstrated large actuated displacement at low actuation voltage, and it enables us to compensate a larger misalignment value when it is used in an active alignment module. The robust torsion bar and lifting bar structure formed by bulk silicon allowed the proposed micromirror to have greater operating stability. The additional degree of freedom with z -axis actuation can decrease the difficulty in the assembly of optical components and increase the coupling efficiency between optical components.Peer Reviewedhttp://deepblue.lib.umich.edu/bitstream/2027.42/65102/2/jmm9_8_085007.pd

MEMS Technology for Biomedical Imaging Applications

Biomedical imaging is the key technique and process to create informative images of the human body or other organic structures for clinical purposes or medical science. Micro-electro-mechanical systems (MEMS) technology has demonstrated enormous potential in biomedical imaging applications due to its outstanding advantages of, for instance, miniaturization, high speed, higher resolution, and convenience of batch fabrication. There are many advancements and breakthroughs developing in the academic community, and there are a few challenges raised accordingly upon the designs, structures, fabrication, integration, and applications of MEMS for all kinds of biomedical imaging. This Special Issue aims to collate and showcase research papers, short commutations, perspectives, and insightful review articles from esteemed colleagues that demonstrate: (1) original works on the topic of MEMS components or devices based on various kinds of mechanisms for biomedical imaging; and (2) new developments and potentials of applying MEMS technology of any kind in biomedical imaging. The objective of this special session is to provide insightful information regarding the technological advancements for the researchers in the community

MEMS micromirrors for imaging applications

Strathclyde theses - ask staff. Thesis no. : T13478Optical MEMS (microelectromechanical systems) are widely used in various applications. In this thesis, the design, simulation and characterisation of two optical MEMS devices for imaging applications, a varifocal micromirror and a 2D scanning micromirror, are introduced. Both devices have been fabricated using the commercial Silicon-on-Insulator multi-users MEMS processes (SOIMUMPs), in the 10 m thick Silicon-on-Insulator (SOI) wafer. Optical MEMS device with variable focal length is a critical component for imaging system miniaturisation. In this thesis, a thermally-actuated varifocal micromirror (VFM) with 1-mm-diameter aperture is introduced. The electrothermal actuation through Joule heating of the micromirror suspensions and the optothermal actuation using incident laser power absorption have been demonstrated as well as finite element method (FEM) simulation comparisons. Especially, the optical aberrations produced by this VFM have been statistically quantified to be negligible throughout the actuation range. A compact imaging system incorporating this VFM has been demonstrated with high quality imaging results. MEMS 2D scanners, or scanning micromirrors, are another type of optical MEMS which have been widely investigated for applications such as biomedical microscope imaging, projection, retinal display and optical switches for telecommunication network, etc. For large and fast scanning motions, the actuation scheme to scan a micromirror in two axes, the structural connections and arrangement are fundamental. The microscanner introduced utilises two types of actuators, electrothermal actuators and electrostatic comb-drives, to scan a 1.2-mm-diameter gold coated silicon micromirror in two orthogonal axes. With assistance of FEM software, CoventorWare, the structure optimisation of actuators and flexure connections are presented. The maximum optical scan angles in two axes by each type of actuator individually and by actuating the two at the same time have been characterised experimentally. By programming actuation signals, the microscanner has achieved a rectangular scan pattern with 7° 10° angular-scan-field at a line-scan rate of around 1656 Hz.Optical MEMS (microelectromechanical systems) are widely used in various applications. In this thesis, the design, simulation and characterisation of two optical MEMS devices for imaging applications, a varifocal micromirror and a 2D scanning micromirror, are introduced. Both devices have been fabricated using the commercial Silicon-on-Insulator multi-users MEMS processes (SOIMUMPs), in the 10 m thick Silicon-on-Insulator (SOI) wafer. Optical MEMS device with variable focal length is a critical component for imaging system miniaturisation. In this thesis, a thermally-actuated varifocal micromirror (VFM) with 1-mm-diameter aperture is introduced. The electrothermal actuation through Joule heating of the micromirror suspensions and the optothermal actuation using incident laser power absorption have been demonstrated as well as finite element method (FEM) simulation comparisons. Especially, the optical aberrations produced by this VFM have been statistically quantified to be negligible throughout the actuation range. A compact imaging system incorporating this VFM has been demonstrated with high quality imaging results. MEMS 2D scanners, or scanning micromirrors, are another type of optical MEMS which have been widely investigated for applications such as biomedical microscope imaging, projection, retinal display and optical switches for telecommunication network, etc. For large and fast scanning motions, the actuation scheme to scan a micromirror in two axes, the structural connections and arrangement are fundamental. The microscanner introduced utilises two types of actuators, electrothermal actuators and electrostatic comb-drives, to scan a 1.2-mm-diameter gold coated silicon micromirror in two orthogonal axes. With assistance of FEM software, CoventorWare, the structure optimisation of actuators and flexure connections are presented. The maximum optical scan angles in two axes by each type of actuator individually and by actuating the two at the same time have been characterised experimentally. By programming actuation signals, the microscanner has achieved a rectangular scan pattern with 7° 10° angular-scan-field at a line-scan rate of around 1656 Hz

A low-voltage Two-axis Electromagnetically Actuated Micromirror with Bulk Silicon Mirror

ABSTRACT In this paper, a new micromirror structure has been proposed and fabricated. The proposed micromirror is electromagnetically actuated along two-axis at low voltage using an external magnetic field. The mirror plates and torsion bars are made of bulk silicon and the actuation coils are made of electroplated copper. The maximum deflection angles have been measured as ±4.35° for x-axis actuation and ±15.7° for y-axis actuation. The actuation voltages are below 4.2V for xaxis actuation and 1.76V for y-axis actuation, respectively

Applications of programmable MEMS micromirrors in laser systems

The use of optical microelectromechanical systems (MEMS) as enabling devices has been shown widely over the last decades, creating miniaturisation possibilities and added functionality for photonic systems. In the work presented in this thesis angular vertical offset comb-drive (AVC) actuated scanning micromirrors, and their use as intracavity active Q-switch elements in solid-state laser systems, are investigated. The AVC scanning micromirrors are created through a multi-user fabrication process, with theoretical and experimental investigations undertaken on the influence of the AVC initial conditions on the scanning micromirror dynamic resonant tilt movement behaviour. A novel actuator geometry is presented to experimentally investigate this influence, allowing a continuous variation of the initial AVC comb-offset angle through an integrated electrothermal actuator. The experimentally observed changes of the resonant movement with varying initial AVC offset are compared with an analytical model, simulating this varying resonant movement behaviour. In the second part of this work AVC scanning micromirrors are implemented as active intra-cavity Q-switch elements of a Nd:YAG solid-state laser system. The feasibility of achieving pulsed laser outputs with pulse durations limited by the laser cavity and not the MEMS Q-switch is shown, combined with a novel theoretical model for the Q-switch behaviour of the laser when using a bi-directional intra-cavity scanning micromirror. A detailed experimental investigation of the pulsed laser output behaviour for varying laser cavity geometries is presented, also discussing the influence of thin film coatings deposited on the mirror surfaces for further laser output power scaling. The MEMS Q-switch system is furthermore expanded using a micromirror array to create a novel Q-switched laser system with multiple individual controllable output beams using a common solid-state gain medium. Experimental results showing the simultaneous generation of two laser outputs are presented, with cavity limited pulse durations and excellent laser beam quality.The use of optical microelectromechanical systems (MEMS) as enabling devices has been shown widely over the last decades, creating miniaturisation possibilities and added functionality for photonic systems. In the work presented in this thesis angular vertical offset comb-drive (AVC) actuated scanning micromirrors, and their use as intracavity active Q-switch elements in solid-state laser systems, are investigated. The AVC scanning micromirrors are created through a multi-user fabrication process, with theoretical and experimental investigations undertaken on the influence of the AVC initial conditions on the scanning micromirror dynamic resonant tilt movement behaviour. A novel actuator geometry is presented to experimentally investigate this influence, allowing a continuous variation of the initial AVC comb-offset angle through an integrated electrothermal actuator. The experimentally observed changes of the resonant movement with varying initial AVC offset are compared with an analytical model, simulating this varying resonant movement behaviour. In the second part of this work AVC scanning micromirrors are implemented as active intra-cavity Q-switch elements of a Nd:YAG solid-state laser system. The feasibility of achieving pulsed laser outputs with pulse durations limited by the laser cavity and not the MEMS Q-switch is shown, combined with a novel theoretical model for the Q-switch behaviour of the laser when using a bi-directional intra-cavity scanning micromirror. A detailed experimental investigation of the pulsed laser output behaviour for varying laser cavity geometries is presented, also discussing the influence of thin film coatings deposited on the mirror surfaces for further laser output power scaling. The MEMS Q-switch system is furthermore expanded using a micromirror array to create a novel Q-switched laser system with multiple individual controllable output beams using a common solid-state gain medium. Experimental results showing the simultaneous generation of two laser outputs are presented, with cavity limited pulse durations and excellent laser beam quality

Silicon-micromachined Vibratory Diffraction Gratings for Miniaturized High-resolution Rapid Laser Scanning

Ph.DDOCTOR OF PHILOSOPH

Polymer NdFeB Hard Magnetic Scanner for Biomedical Scanning Applications

Micromirror scanners are the most significant of the micro-optical actuator elements with applications in portable digital displays, automotive head-up displays, barcode scanners, optical switches and scanning optical devices in the health care arena for external scanning diagnostics and in vivo scanning diagnostics. Recent development in microscanning technology has seen a shift from conventional electrostatic actuation to electromagnetic actuation mechanisms with major advantages in the ability to produce large scan angles with low voltages, remote actuation, the absence of the pull-in failure mode and the acceptable electrical safety compared to their electrostatic counterparts. Although attempts have been made to employ silicon substrate based MEMS deposition techniques for magnetic materials, the quality and performance of the magnets are poor compared to commercial magnets. In this project, we have developed novel low-cost single and dual-axis polymer hard magnetic micromirror scanners with large scan angles and low power consumption by employing the hybrid fabrication technique of squeegee coating to combine the flexibility of polydimethylsiloxane (PDMS) and the superior magnetic performance of fine particle isotropic NdFeB micropowders. PCB coils produce the Lorentz force required to actuate the mirror for scanning applications. The problem of high surface roughness, low radius of curvature and the magnetic field interaction between the gimbal frame and the mirror have been solved by a part PDMS-part composite fabrication process. Optimum magnetic, electrical and time dependent parameters have been characterized for the high performance operating conditions of the micromirror scanner. The experimental results have been demonstrated to verify the large scan angle actuation of the micromirror scanners at low power consumption

Optical MEMS

Optical microelectromechanical systems (MEMS), microoptoelectromechanical systems (MOEMS), or optical microsystems are devices or systems that interact with light through actuation or sensing at a micro- or millimeter scale. Optical MEMS have had enormous commercial success in projectors, displays, and fiberoptic communications. The best-known example is Texas Instruments’ digital micromirror devices (DMDs). The development of optical MEMS was impeded seriously by the Telecom Bubble in 2000. Fortunately, DMDs grew their market size even in that economy downturn. Meanwhile, in the last one and half decade, the optical MEMS market has been slowly but steadily recovering. During this time, the major technological change was the shift of thin-film polysilicon microstructures to single-crystal–silicon microsructures. Especially in the last few years, cloud data centers are demanding large-port optical cross connects (OXCs) and autonomous driving looks for miniature LiDAR, and virtual reality/augmented reality (VR/AR) demands tiny optical scanners. This is a new wave of opportunities for optical MEMS. Furthermore, several research institutes around the world have been developing MOEMS devices for extreme applications (very fine tailoring of light beam in terms of phase, intensity, or wavelength) and/or extreme environments (vacuum, cryogenic temperatures) for many years. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on (1) novel design, fabrication, control, and modeling of optical MEMS devices based on all kinds of actuation/sensing mechanisms; and (2) new developments of applying optical MEMS devices of any kind in consumer electronics, optical communications, industry, biology, medicine, agriculture, physics, astronomy, space, or defense

3D laser scanner based on surface silicon micromachining techniques for shape and size reconstruction of the human ear canal

2005/2006As technology advances, hearing aids can be packaged into increasingly smaller housings. Devices that fit entirely within the deeper portion of the external auditory canal have been developed, called completely-in-the-canal (CIC). These aids are custom moulded and have high cosmetic appeal because they are virtually undetectable. They also have several acoustic advantages: reduced occlusion effect, reduced gain requirements, and preservation of the natural acoustic properties of the pinna and external ear. However, CIC hearing aids require proper fitting of the hearing aid shell to the subject ear canal to achieve satisfactory wearing comfort, reduction in acoustic feedback, and unwanted changes in the electro-acoustic characteristics of the aid. To date, the hearing aid shell manufacturing process is fully manual: the shell is fabricated as a replica of the impression of the subject ear canal. Conventional impression acquisition method is very invasive and imprecise, moreover the typical post-impression processes made on the ear impression leaves room for error and may not accurately represent the structural anatomy of patient’s ear canal. There are some laser approaches able to perform a 3D laser scanning of the original ear impression but, the entire shell-making process is completely dependent on the ear impression and often is the sole cause of poor fitting shell. Therefore, direct ear canal scanning is the only way to perform accurate and repeatable measurements without the use of physical ear impression. The conventional optical elements are not able to enter in the inner part of the ear and perform a scanning of the cavity. This work is devoted to the direct scanning of human external auditory canal by using electromagnetically actuated torsion micromirror fabricated by micromachining technique as scanner. This is the first ever demonstration of actual scanning of human external auditory canal by a single integral Micro-Electro-Mechanical System (MEMS). A novel prototype 3D scanning system is developed together with surface reconstruction algorithm to obtain an explicit 3D reconstruction of actual human auditory canal. The system is based on acquisition of optical range data by conoscopic holographic laser interferometer using electromagnetically actuated scanning MEMS micromirror. An innovative fabrication process based on poly(methylmethacrylate) (PMMA) sacrificial layer for fabrication of free standing micromirror is used. Micromirror actuation is achieved by using magnetic field generated with an electromagnetic coil stick. Micromirror and electromagnet coil assembly composes the opto-mechanical scanning probe used for entering in ear auditory canal. Based on actual scan map, a 3D reconstructed digital model of the ear canal was built using a surface point distribution approach. The proposed system allows noninvasive 3D imaging of ear canal with spatial resolution in the 10 μm range. Fabrication of actual shell from in-vivo ear canal scanning is also accomplished. The actual human ear canal measurement techniques presented provide a characterization of the ear canal shape, which help in the design and refining of hearing aids fabrication approaches to patient personalized based.XIX Ciclo197