A Petri-Net-Based Scheduling Strategy for Dual-Arm Cluster Tools With Wafer Revisiting

International audienceThere are wafer fabrication processes in cluster tools that require wafer revisiting. The adoption of a swap strategy for such tools forms a 3-wafer cyclic (3-WC) period with three wafers completed in each period. It has been shown that, by such a scheduling strategy, the minimal cycle time cannot be reached for some cases. This raises a question of whether there is a scheduling method such that the performance can be improved. To answer this question, a dual-arm cluster tool with wafer revisiting is modeled by a Petri net. Based on the model, the dynamical behavior of the process is analyzed. Then, a 2-wafer cyclic (2-WC) scheduling strategy is revealed for the first time. Cycle time analysis is conducted for the proposed strategy to evaluate its performance. It shows that, for some cases, the performance obtained by a 2-WC schedule is better than that obtained by any existing 3-WC ones. Thus, they can be used to complement each other in scheduling dual-arm cluster tools with wafer revisiting. Illustrative examples are given

Modeling of quad-station module cluster tools using petri nets

The semiconductor industry is highly competitive, and with the recent chip shortage, the throughput of wafers has become more important than ever. One of the tools that the industry has deployed is to use of quad-station modules instead of the traditional single-station modules that allow for higher throughput and better wafer consistency by processing multiple wafers at the same time and distributing work. The industry trend is to use multiple transfer chamber robots to stack the quad-station modules in a series, particularly for etch products. In this work, the quad-station cluster tool wafer movement is modeled by using Petri net as a process-bounded system. The system analysis and simulations are performed by using timed and colored Petri nets. The results are useful to deepen our understanding of the discrete-event dynamics of quad-station module cluster tools and offer the highly needed insight into their efficient and deadlock-free operation

Modeling and formal verification of probabilistic reconfigurable systems

In this thesis, we propose a new approach for formal modeling and verification of adaptive probabilistic systems. Dynamic reconfigurable systems are the trend of all future technological systems, such as flight control systems, vehicle electronic systems, and manufacturing systems. In order to meet user and environmental requirements, such a dynamic reconfigurable system has to actively adjust its configuration at run-time by modifying its components and connections, while changes are detected in the internal/external execution environment. On the other hand, these changes may violate the memory usage, the required energy and the concerned real-time constraints since the behavior of the system is unpredictable. It might also make the system's functions unavailable for some time and make potential harm to human life or large financial investments. Thus, updating a system with any new configuration requires that the post reconfigurable system fully satisfies the related constraints. We introduce GR-TNCES formalism for the optimal functional and temporal specification of probabilistic reconfigurable systems under resource constraints. It enables the optimal specification of a probabilistic, energetic and memory constraints of such a system. To formally verify the correctness and the safety of such a probabilistic system specification, and the non-violation of its properties, an automatic transformation from GR-TNCES models into PRISM models is introduced. Moreover, a new approach XCTL is also proposed to formally verify reconfigurable systems. It enables the formal certification of uncompleted and reconfigurable systems. A new version of the software ZIZO is also proposed to model, simulate and verify such GR-TNCES model. To prove its relevance, the latter was applied to case studies; it was used to model and simulate the behavior of an IPV4 protocol to prevent the energy and memory resources violation. It was also used to optimize energy consumption of an automotive skid conveyor.In dieser Arbeit wird ein neuer Ansatz zur formalen Modellierung und Verifikation dynamisch rekonfigurierbarer Systeme vorgestellt. Dynamische rekonfigurierbare Systeme sind in vielen aktuellen und zukünftigen Anwendungen, wie beispielsweise Flugsteuerungssystemen, Fahrzeugelektronik und Fertigungssysteme zu finden. Diese Systeme weisen ein probabilistisches, adaptives Verhalten auf. Um die Benutzer- und Umgebungsbedingungen kontinuierlich zu erfüllen, muss ein solches System seine Konfiguration zur Laufzeit aktiv anpassen, indem es seine Komponenten, Verbindungen zwischen Komponenten und seine Daten modifiziert (adaptiv), sobald Änderungen in der internen oder externen Ausführungsumgebung erkannt werden (probabilistisch). Diese Anpassungen dürfen Beschränkungen bei der Speichernutzung, der erforderlichen Energie und bestehende Echtzeitbedingungen nicht verletzen. Eine nicht geprüfte Rekonfiguration könnte dazu führen, dass die Funktionen des Systems für einige Zeit nicht verfügbar wären und potenziell menschliches Leben gefährdet würde oder großer finanzieller Schaden entstünde. Somit erfordert das Aktualisieren eines Systems mit einer neuen Konfiguration, dass das rekonfigurierte System die zugehörigen Beschränkungen vollständig einhält. Um dies zu überprüfen, wird in dieser Arbeit der GR-TNCES-Formalismus, eine Erweiterung von Petrinetzen, für die optimale funktionale und zeitliche Spezifikation probabilistischer rekonfigurierbarer Systeme unter Ressourcenbeschränkungen vorgeschlagen. Die entstehenden Modelle sollen über probabilistische model checking verifiziert werden. Dazu eignet sich die etablierte Software PRISM. Um die Verifikation zu ermöglichen wird in dieser Arbeit ein Verfahren zur Transformation von GR-TNCES-Modellen in PRISM-Modelle beschrieben. Eine neu eingeführte Logik (XCTL) erlaubt zudem die einfache Beschreibung der zu prüfenden Eigenschaften. Die genannten Schritte wurden in einer Softwareumgebung für den automatisierten Entwurf, die Simulation und die formale Verifikation (durch eine automatische Transformation nach PRISM) umgesetzt. Eine Fallstudie zeigt die Anwendung des Verfahren