Entwicklung und Einführung von Produktionssteuerungsverbesserungen für die kundenorientierte Halbleiterfertigung

Production control in a semiconductor production facility is a very complex and timeconsuming task. Different demands regarding facility performance parameters are defined by customer and facility management. These requirements are usually opponents, and an efficient strategy is not simple to define. In semiconductor manufacturing, the available production control systems often use priorities to define the importance of each production lot. The production lots are ranked according to the defined priorities. This process is called dispatching. The priority allocation is carried out by special algorithms. In literature, a huge variety of different strategies and rules is available. For the semiconductor foundry business, there is a need for a very flexible and adaptable policy taking the facility state and the defined requirements into account. At our case the production processes are characterized by a low-volume high-mix product portfolio. This portfolio causes additional stability problems and performance lags. The unstable characteristic increases the influence of reasonable production control logic. This thesis offers a very flexible and adaptable production control policy. This policy is based on a detailed facility model with real-life production data. The data is extracted from a real high-mix low-volume semiconductor facility. The dispatching strategy combines several dispatching rules. Different requirements like line balance, throughput optimization and on-time delivery targets can be taken into account. An automated detailed facility model calculates a semi-optimal combination of the different dispatching rules under a defined objective function. The objective function includes different demands from the management and the customer. The optimization is realized by a genetic heuristic for a fast and efficient finding of a close-to-optimal solution. The strategy is evaluated with real-life production data. The analysis with the detailed facility model of this fab shows an average improvement of 5% to 8% for several facility performance parameters like cycle time per mask layer. Finally the approach is realized and applied at a typical high-mix low-volume semiconductor facility. The system realization bases on a JAVA implementation. This implementation includes common state-of-the-art technologies such as web services. The system replaces the older production control solution. Besides the dispatching algorithm, the production policy includes the possibility to skip several metrology operations under defined boundary conditions. In a real-life production process, not all metrology operations are necessary for each lot. The thesis evaluates the influence of the sampling mechanism to the production process. The solution is included into the system implementation as a framework to assign different sampling rules to different metrology operations. Evaluations show greater improvements at bottleneck situations. After the productive introduction and usage of both systems, the practical results are evaluated. The staff survey offers good acceptance and response to the system. Furthermore positive effects on the performance measures are visible. The implemented system became part of the daily tools of a real semiconductor facility.Produktionssteuerung im Bereich der kundenorientierten Halbleiterfertigung ist heutzutage eine sehr komplexe und zeitintensive Aufgabe. Verschiedene Anforderungen bezüglich der Fabrikperformance werden seitens der Kunden als auch des Fabrikmanagements definiert. Diese Anforderungen stehen oftmals in Konkurrenz. Dadurch ist eine effiziente Strategie zur Kompromissfindung nicht einfach zu definieren. Heutige Halbleiterfabriken mit ihren verfügbaren Produktionssteuerungssystemen nutzen oft prioritätsbasierte Lösungen zur Definition der Wichtigkeit eines jeden Produktionsloses. Anhand dieser Prioritäten werden die Produktionslose sortiert und bearbeitet. In der Literatur existiert eine große Bandbreite verschiedener Algorithmen. Im Bereich der kundenorientierten Halbleiterfertigung wird eine sehr flexible und anpassbare Strategie benötigt, die auch den aktuellen Fabrikzustand als auch die wechselnden Kundenanforderungen berücksichtigt. Dies gilt insbesondere für den hochvariablen geringvolumigen Produktionsfall. Diese Arbeit behandelt eine flexible Strategie für den hochvariablen Produktionsfall einer solchen Produktionsstätte. Der Algorithmus basiert auf einem detaillierten Fabriksimulationsmodell mit Rückgriff auf Realdaten. Neben synthetischen Testdaten wurde der Algorithmus auch anhand einer realen Fertigungsumgebung geprüft. Verschiedene Steuerungsregeln werden hierbei sinnvoll kombiniert und gewichtet. Wechselnde Anforderungen wie Linienbalance, Durchsatz oder Liefertermintreue können adressiert und optimiert werden. Mittels einer definierten Zielfunktion erlaubt die automatische Modellgenerierung eine Optimierung anhand des aktuellen Fabrikzustandes. Die Optimierung basiert auf einen genetischen Algorithmus für eine flexible und effiziente Lösungssuche. Die Strategie wurde mit Realdaten aus der Fertigung einer typischen hochvariablen geringvolumigen Halbleiterfertigung geprüft und analysiert. Die Analyse zeigt ein Verbesserungspotential von 5% bis 8% für die bekannten Performancekriterien wie Cycletime im Vergleich zu gewöhnlichen statischen Steuerungspolitiken. Eine prototypische Implementierung realisiert diesen Ansatz zur Nutzung in der realen Fabrikumgebung. Die Implementierung basiert auf der JAVA-Programmiersprache. Aktuelle Implementierungsmethoden erlauben den flexiblen Einsatz in der Produktionsumgebung. Neben der Fabriksteuerung wurde die Möglichkeit der Reduktion von Messoperationszeit (auch bekannt unter Sampling) unter gegebenen Randbedingungen einer hochvariablen geringvolumigen Fertigung untersucht und geprüft. Oftmals ist aufgrund stabiler Prozesse in der Fertigung die Messung aller Lose an einem bestimmten Produktionsschritt nicht notwendig. Diese Arbeit untersucht den Einfluss dieses gängigen Verfahrens aus der Massenfertigung für die spezielle geringvolumige Produktionsumgebung. Die Analysen zeigen insbesondere in Ausnahmesituationen wie Anlagenausfällen und Kapazitätsengpässe einen positiven Effekt, während der Einfluss unter normalen Produktionsbedingungen aufgrund der hohen Produktvariabilität als gering angesehen werden kann. Nach produktiver Einführung in einem typischen Vertreter dieser Halbleiterfabriken zeigten sich schnell positive Effekte auf die Fabrikperformance als auch eine breite Nutzerakzeptanz. Das implementierte System wurde Bestandteil der täglichen genutzten Werkzeuglandschaft an diesem Standort

A Novel Fuzzy-Neural Slack-Diversifying Rule Based on Soft Computing Applications for Job Dispatching in a Wafer Fabrication Factory

This study proposes a slack-diversifying fuzzy-neural rule to improve job dispatching in a wafer fabrication factory. Several soft computing techniques, including fuzzy classification and artificial neural network prediction, have been applied in the proposed methodology. A highly effective fuzzy-neural approach is applied to estimate the remaining cycle time of a job. This research presents empirical evidence of the relationship between the estimation accuracy and the scheduling performance. Because dynamic maximization of the standard deviation of schedule slack has been shown to improve performance, this work applies such maximization to a slack-diversifying fuzzy-neural rule derived from a two-factor tailored nonlinear fluctuation smoothing rule for mean cycle time (2f-TNFSMCT). The effectiveness of the proposed rule was checked with a simulated case, which provided evidence of the rule’s effectiveness. The findings in this research point to several directions that can be exploited in the future

Intelligent shop scheduling for semiconductor manufacturing

Semiconductor market sales have expanded massively to more than 200 billion dollars annually accompanied by increased pressure on the manufacturers to provide higher quality products at lower cost to remain competitive. Scheduling of semiconductor manufacturing is one of the keys to increasing productivity, however the complexity of manufacturing high capacity semiconductor devices and the cost considerations mean that it is impossible to experiment within the facility. There is an immense need for effective decision support models, characterizing and analyzing the manufacturing process, allowing the effect of changes in the production environment to be predicted in order to increase utilization and enhance system performance. Although many simulation models have been developed within semiconductor manufacturing very little research on the simulation of the photolithography process has been reported even though semiconductor manufacturers have recognized that the scheduling of photolithography is one of the most important and challenging tasks due to complex nature of the process. Traditional scheduling techniques and existing approaches show some benefits for solving small and medium sized, straightforward scheduling problems. However, they have had limited success in solving complex scheduling problems with stochastic elements in an economic timeframe. This thesis presents a new methodology combining advanced solution approaches such as simulation, artificial intelligence, system modeling and Taguchi methods, to schedule a photolithography toolset. A new structured approach was developed to effectively support building the simulation models. A single tool and complete toolset model were developed using this approach and shown to have less than 4% deviation from actual production values. The use of an intelligent scheduling agent for the toolset model shows an average of 15% improvement in simulated throughput time and is currently in use for scheduling the photolithography toolset in a manufacturing plant

Online Simulation in Semiconductor Manufacturing

In semiconductor manufacturing discrete event simulation systems are quite established to support multiple planning decisions. During the recent years, the productivity is increasing by using simulation methods. The motivation for this thesis is to use online simulation not only for planning decisions, but also for a wide range of operational decisions. Therefore an integrated online simulation system for short term forecasting has been developed. The production environment is a mature high mix logic wafer fab. It has been selected because of its vast potential for performance improvement. In this thesis several aspects of online simulation will be addressed: The first aspect is the implementation of an online simulation system in semiconductor manufacturing. The general problem is to achieve a high speed, a high level of detail, and a high forecast accuracy. To resolve these problems, an online simulation system has been created. The simulation model has a high level of detail. It is created automatically from underling fab data. To create such a simulation model from fab data, additional problems related to the underlying data arise. The major parts are the data access, the data integration, and the data quality. These problems have been solved by using an integrated data model with several data extraction, data transformation, and data cleaning steps. The second aspect is related to the accuracy of online simulation. The overall problem is to increase the forecast horizon, increase the level of detail of the forecast and reduce the forecast error. To provide useful forecast results, the simulation model contains a high level of modeling details and a proper initialization. The influences on the forecast quality will be analyzed. The results show that the simulation forecast accuracy achieves good quality to predict future fab performance. The last aspect is to find ways to use simulation forecast results to improve the fab performance. Numerous applications have been identified. For each application a description is available. It contains the requirements of such a forecast, the decision variables, and background information. An application example shows, where a performance problem exists and how online simulation is able to resolve it. To further enhance the real time capability of online simulation, a major part is to investigate new ways to connect the simulation model with the wafer fab. For fab driven simulation, the simulation model and the real wafer fab run concurrently. The wafer fab provides several events to update the simulation during runtime. So the model is always synchronized with the real fab. It becomes possible to start a simulation run in real time. There is no further delay for data extraction, data transformation and model creation. A prototype for a single work center has been implemented to show the feasibility

Analysis and Evaluation of the Impacts of Predictive Analytics on Production System Performances in the Semiconductor Industry

Problem Statement: Predictive Analytics (PA) may effectively support semiconductor industry (SI) companies in order to manage the special challenges in SI value chains. To discover the implications of PA, the realistic benefits as well as its limitations of its application to semiconductor manufacturing, it is necessary to assess in which ways the application of PA affects the production system (PS) performances. However, based on the literature survey, the influences of PA on the various performance characteristics of an SI PS are not as clear as expected for the efficiently operative application. Besides, the existing performance models are not effective to predict the impacts of PA on the SI PS performances. Therefore, the overall aim of this thesis is to analyse and evaluate the impacts of PA on the SI PS performances and to identify under which conditions a PA application would generate the most significant performance improvements. The focus of this thesis is predictive maintenance (PdM). Research Methodology: Based on a post-positivist philosophy, the thesis applies a deductive research approach using mixed-methods for data collection. The research design has the following stages: (1) theory, (2) hypothesis, (3) state of research, (4) case study and (5) verification. Main Achievements: (1) The systematic literature review is carried out to identify the gaps of the existing research and based on these findings, a conceptual framework is proposed and developed. (2) The existing performance models are analysed and evaluated against their applicability to this study. (3) A causal loop model for SI PS is generated based on the assessment of experts with industrial engineering and equipment maintenance expertise. (4) An expert system is developed and evaluated in order to investigate transitive and contradictory effects of PdM on SI PS performances. (5) A simulation model is developed and validated for investigating the strengths and limitations of PdM regarding SI PS performances under different circumstances. Results: The results of the logical inference study show that PdM has 34 positive effects as well as 4 contradictory effects on SI PS performance characteristics. Based on the various simulation experiments, it has been found that (1) ’Mean Time to Repair’ decreases only if PdM supports proportionate reduction of failures and repair times. (2) Logistics performance improves only if the underlying workcenter is limited in capacity or the four partners are nonsynchronous. (3) PdM supports optimal cost decreases for workcenters where the degree of exhausting wear limits can be most effectively improved and (4) the degree of yield improvement gained by PdM is dependent on the operation scrap rate. However, (5) if a workcenter has overcapacity, PdM will potentially worsen PS performances, even if the particular workcenter performance can be improved. These new insights advance existing knowledge in production managements when adopting predictive technologies at SI PS in order to improve PS performances. The findings above enable SI practitioners to justify a PdM investment and to select suitable workcenters in order to improve SI PS performances by applying the proposed PdM. Contributions: The main contributions of this PhD project can be divided into practical application and theoretical work. The contributions from the theoretical perspective are: 1) The critical review and evaluation of the state of the research for PA in the context of semiconductor manufacturing and the models for predicting and evaluating SI PS performances. 2) A new framework for investigating the implications of PA on the challenges such as gaining high utilizations and controlling the variability in production processes in SI value chains. 3) The new knowledge about transitive and contradictory effects of PdM on SI PS performances, which indicates that PdM can be used to improve PS performances beyond a single machine. 4) The new knowledge about strengths and limitations of PdM in order to improve SI PS performances under particular circumstances. The contributions from the practical application perspective are: 1) A practical method for identifying workcenters where PdM delivers the most significant benefits for SI PS performances. 2) An expert system that provides a comprehensive knowledge base about causes and effects within SI PS in order to justify a PdM investment. 3) A concise review of important PA applications, their capabilities for the wafer fabrication and the most suited PA methods. These findings can be adopted by SI practitioners

Constant Flow Management - Investigating manufacturing flow variability

This project investigates the manufacturing flow variability in order to stabilize the factory process flow. Nowadays, in manufacturing production lines and particularly in modern front end semiconductor lines, processes and equipments are very complex. Any disturbance of the process creates variability in the line, and causes substantial losses in productivity for manufacturing corporations. These disturbances are unpredictable, difficult to control and result in long recovery times. Variability occurring in a production system disturbs the whole processing flow and results in long product cycle times. Hence, a range of sources of variability was determined from the literature and analyzed. This lead with the cooperation of factory managers to the development of four main objectives: (1) Determine a proper metric to measure the variability in the production system. (2) Determine the effect of batching and tool availability on the process flow. (3) Understand the interaction between operations. (4) Develop a release strategy in order to stabilize the production flow. First, from the observation of real production data, a difference metric was developed and operations creating or removing variability were identified. The propagation of variability can be followed using a correlation coefficient. Nevertheless, the data were not detailed enough to explain the origin of the variability. Consequently, several simulation models were created to investigate variability. The simulations‘ results show that the release strategy should be adjusted as a function of batch, tool availability and constraint parameters, in order to stabilize the flow of items in the line and control cycle time and cycle time variability. The notion of critical availability is introduced and defined. Improvement of the line performance is obtained through a tighter control of the availability of high capacity operations. This lead to the development of a new hybrid push pull release strategy, named CONFLOW, to regulate the flow of items reaching the constraint operation. CONFLOW was tested under many simulating conditions (batching, parallel processing, and different line length). Compared to a push system, CONFLOW release strategy results, into significant improvement (up to 80%) in cycle time, cycle time standard deviation and WIP level at the cost of 13% reduction in throughput. CONFLOW performances were compared to common TOC strategies (SA and DBR). The results are encouraging. In the specific conditions considered, CONFLOW performances are similar to SA and slightly better than DBR

Genetic Algorithm for Solving the Integrated Production-Distribution-Direct Transportation Planning

This paper proposes a model of integrated production, distribution and transportation planning for 4-echelon supply chain system that consists of a manufacturer using a continuous production process, a distribution center, distributors and retailers. By means of time-dependent demand at all retailers and direct transportation from one echelon to its successive echelons, the purpose of this paper is to determine production/replenishment and transportation policies at manufacturer, distribution center, distributors and retailers in order to minimize annually total system cost. Due to the proposed model is classified as a mixed integer non-linear programming so it is almost impossible to solve the model using the exact optimization methods and a lot of time is needed when the enumeration methods is applied to solve only a small scale problem. In this paper, we apply the genetic algorithm for solving the model. Using integer encoding for constructing the chromosome, the best solution is going to be searched. Compared with enumeration method, the difference of the result is only 0.0594% with the consumption time is only 0.5609% time that enumeration methods need

Ordonnancement et contrôle avancé des procédés en fabrication de semi-conducteurs.

Dans cette thèse, nous avons examiné différentes possibilités d'intégration des décisions d'ordonnancement avec des informations provenant de systèmes avancés des contrôles des procédés dans la fabrication de semi-conducteurs. Nous avons développé des idées d'intégration et défini des nouveaux problèmes d'ordonnancement originales : Problème d'ordonnancement avec des contraintes de temps (PTC) et problème d'ordonnancement avec l'état de santé des équipement (PEHF). PTC et PEHF ont des fonctions objectives multicritères.PTC est un problème d'ordonnancement des familles de jobs sur des machines parallèles non identiques en tenant compte des temps de setup et des contraintes de temps. Les machines non identiques signifient que toutes les machines ne peuvent pas traités (qualifiés) tous les types de familles d'emplois. Les contraintes de temps nommés aussi Thresholds sont inspirées des besoins de l'APC. Elle est liée à l'alimentation régulière des boucles de contrôle de l'APC. L'objectif est de minimiser la somme des dates de fin et les pertes de qualification des machines lorsqu'une famille de jobs n'est pas ordonnancée sur la machine donnée avant un seuil de temps donné.D'autre part, PEHF est une extension de PTC. Il consiste d'intégrer les indices de santé des équipements (EHF). EHF est un indicateur associé à l'équipement qui donne l'état de la. L'objectif est d'ordonnancer des tâches de familles de jobs différents sur les machines tout en minimisant la somme des temps d'achèvement, les pertes de qualification de la machine et d'optimiser un rendement attendu. Ce rendement est défini comme une fonction d'EDH et de la criticité de jobs considérés.In this thesis, we discussed various possibilities of integrating scheduling decisions with information and constraints from Advanced Process Control (APC) systems in semiconductor Manufacturing. In this context, important questions were opened regarding the benefits of integrating scheduling and APC. An overview on processes, scheduling and Advanced Process Control in semiconductor manufacturing was done, where a description of semiconductor manufacturing processes is given. Two of the proposed problems that result from integrating bith systems were studied and analyzed, they are :Problem of Scheduling with Time Constraints (PTC) and Problem of Scheduling with Equipement health Factor (PEHF). PTC and PEHF have multicriteria objective functions.PTC aims at scheduling job in families on non-identical parallel machines with setup times and time constraints.Non-identical machines mean that not all miachines can (are qualified to) process all types of job families. Time constraints are inspired from APC needs, for which APC control loops must be regularly fed with information from metrology operations (inspection) within a time interval (threshold). The objective is to schedule job families on machines while minimizing the sum of completion times and the losses in machine qualifications.Moreover, PEHF was defined which is an extension of PTC where scheduling takes into account the equipement Health Factors (EHF). EHF is an indicator on the state of a machine. Scheduling is now done by considering a yield resulting from an assignment of a job to a machine and this yield is defined as a function of machine state and job state.ST ETIENNE-ENS des Mines (422182304) / SudocGARDANNE-Centre microélec. (130412301) / SudocSudocFranceF