12 research outputs found

    Frequency Multipliers in SiGe BiCMOS for Local Oscillator Generation in D-band Wireless Transceivers

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    Communications at millimeter-wave (mm-Wave) have drawn a lot of attention in recent years due to the wide available bandwidth which translates directly to higher data transmission capacity. Generation of the transceivers local oscillation (LO) is critical because many contrasting requirements, i.e. tuning range (TR), phase noise (PN), output power, and level of spurious tones, affect the system performance. Differently from what is commonly pursued at Radio Frequency, LO generation with a PLL embedding a VCO at the desired output frequency is not viable at mm-wave. A more promising approach consists of a PLL in the 10-20GHz range, where silicon VCOs feature the best figure of merit, followed by a frequency multiplier. In this thesis, a frequency multiplication chain is investigated to up-convert an LO signal from X-band to D-band by a multiplication factor of 12. The multiplication is done in steps of 3, 2, and 2. A sextupler chip comprises the tripler and the first doubler and the last doubler stage which upconverts the LO signal from E- to D-band is realized in a separate chip, all in a 55nm SiGe BiCMOS technology. The frequency tripler circuit is based on a novel circuit topology which yields a remarkable improvement on the suppression of the driving signal frequency at the output, compared to conventional designs exploiting transistors in class-C. The active core of the circuit approximates the transfer characteristic of a third-order polynomial that ideally produces only a third-harmonic of the input signal. Implemented in a separate break-out chip and consuming 23mW of DC power, the tripler demonstrates ~40dB suppression of the input signal and its 5th harmonic over 16% fractional bandwidth and robustness to power variation of the driving signal over a 15dB range. Including the E-band doubler, the sextupler chip achieves a peak output power of 1.7dBm at 74.4GHz and remains within 2dB variation from 70GHz to 82GHz, corresponding to 16% fractional BW. In this frequency range, the leakages of all harmonics are suppressed by more than 40dBc. The design of the D-band doubler was aimed at delivering high output power with high efficiency and high conversion gain. Toward this end, the efficiency of a push-push pair was improved by a stacked Colpitts oscillator to boost the power conversion gain by 10dB. Moreover, the common-collector configuration keeps separate the oscillator tank from the load, allowing independent optimization of the harmonic conversion efficiency and the load impedance for maximum power delivery. The measured performance of the test chip demonstrated Pout up to 8dBm at 130GHz with 13dB conversion gain and 6.3% Power Added Efficiency

    High Tolerance of Charge Pump Leakage Current in Integer-N PLL Frequency Synthesizer for 5G Networks

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    One of the most promising solutions for the future fifth generation communication systems is to utilize millimeter wave (mm-W) radio frequencies. There is, however, little works about Phase Locked Loop (PLL) frequency synthesizer designed for mm-W band frequency for 5G applications. This article discusses integer PLL architecture for frequency synthesis; it targets the highest range of 5G mmW [81-86] GHz using ultra-wide channel spacing of 1GHz. This work investigates the design of a third passive loop filter for frequency synthesizer using a Phase Frequency Detector and a current switch Charge Pump such as analog devices ADF4155. The critical performance for the Charge Pump depends on the leakage current produced by the technology of its transistors. This undesirable current can have a high impact on the loop stability. However, by optimizing PLL filter parameters, the synthesizer was able to tolerate up to 117 nA. With such a high leakage current, a high performance of the system was achieved. As a result, less than โˆ’71 dBc reference spur level at 50 MHz offset frequency was ensured and 3.23 ยตs settling time for a hopping frequency of 5 GHz was achieved

    Self-Calibrated, Low-Jitter and Low-Reference-Spur Injection-Locked Clock Multipliers

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    Department of Electrical EngineeringThis dissertation focuses primarily on the design of calibrators for the injection-locked clock multiplier (ILCM). ILCMs have advantage to achieve an excellent jitter performance at low cost, in terms of area and power consumption. The wide loop bandwidth (BW) of the injection technique could reject the noise of voltage-controlled oscillator (VCO), making it thus suitable for the rejection of poor noise of a ring-VCO and a high frequency LC-VCO. However, it is difficult to use without calibrators because of its sensitiveness in process-voltage-temperature (PVT) variations. In Chapter 2, conventional frequency calibrators are introduced and discussed. This dissertation introduces two types of calibrators for low-power high-frequency LC-VCO-based ILFMs in Chapter 3 and Chapter 4 and high-performance ring-VCO-based ILCM in Chapter 5. First, Chapter 3 presents a low power and compact area LC-tank-based frequency multiplier. In the proposed architecture, the input signals have a pulsed waveform that involves many high-order harmonics. Using an LC-tank that amplifies only the target harmonic component, while suppressing others, the output signal at the target frequency can be obtained. Since the core current flows for a very short duration, due to the pulsed input signals, the average power consumption can be dramatically reduced. Effective removal of spurious tones due to the damping of the signal is achieved using a limiting amplifier. In this work, a prototype frequency tripler using the proposed architecture was designed in a 65 nm CMOS process. The power consumption was 950 ??W, and the active area was 0.08 mm2. At a 3.12 GHz frequency, the phase noise degradation with respect to the theoretical bound was less than 0.5 dB. Second, Chapter 4 presents an ultra-low-phase-noise ILFM for millimeter wave (mm-wave) fifth-generation (5G) transceivers. Using an ultra-low-power frequency-tracking loop (FTL), the proposed ILFM is able to correct the frequency drifts of the quadrature voltage-controlled oscillator of the ILFM in a real-time fashion. Since the FTL is monitoring the averages of phase deviations rather than detecting or sampling the instantaneous values, it requires only 600??W to continue to calibrate the ILFM that generates an mm-wave signal with an output frequency from 27 to 30 GHz. The proposed ILFM was fabricated in a 65-nm CMOS process. The 10-MHz phase noise of the 29.25-GHz output signal was ???129.7 dBc/Hz, and its variations across temperatures and supply voltages were less than 2 dB. The integrated phase noise from 1 kHz to 100 MHz and the rms jitter were???39.1 dBc and 86 fs, respectively. Third, Chapter 5 presents a low-jitter, low-reference-spur ring voltage-controlled oscillator (ring VCO)-based ILCM. Since the proposed triple-point frequency/phase/slope calibrator (TP-FPSC) can accurately remove the three root causes of the frequency errors of ILCMs (i.e., frequency drift, phase offset, and slope modulation), the ILCM of this work is able to achieve a low-level reference spur. In addition, the calibrating loop for the frequency drift of the TP-FPSC offers an additional suppression to the in-band phase noise of the output signal. This capability of the TP-FPSC and the naturally wide bandwidth of the injection-locking mechanism allows the ILCM to achieve a very low RMS jitter. The ILCM was fabricated in a 65-nm CMOS technology. The measured reference spur and RMS jitter were ???72 dBc and 140 fs, respectively, both of which are the best among the state-of-the-art ILCMs. The active silicon area was 0.055 mm2, and the power consumption was 11.0 mW.clos

    Algorithms and Circuits for Analog-Digital Hybrid Multibeam Arrays

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    Fifth generation (5G) and beyond wireless communication systems will rely heavily on larger antenna arrays combined with beamforming to mitigate the high free-space path-loss that prevails in millimeter-wave (mmW) and above frequencies. Sharp beams that can support wide bandwidths are desired both at the transmitter and the receiver to leverage the glut of bandwidth available at these frequency bands. Further, multiple simultaneous sharp beams are imperative for such systems to exploit mmW/sub-THz wireless channels using multiple reflected paths simultaneously. Therefore, multibeam antenna arrays that can support wider bandwidths are a key enabler for 5G and beyond systems. In general, N-beam systems using N-element antenna arrays will involve circuit complexities of the order of N2. This dissertation investigates new analog, digital and hybrid low complexity multibeam beamforming algorithms and circuits for reducing the associated high size, weight, and power (SWaP) complexities in larger multibeam arrays. The research efforts on the digital beamforming aspect propose the use of a new class of discrete Fourier transform (DFT) approximations for multibeam generation to eliminate the need for digital multipliers in the beamforming circuitry. For this, 8-, 16- and 32-beam multiplierless multibeam algorithms have been proposed for uniform linear array applications. A 2.4 GHz 16-element array receiver setup and a 5.8 GHz 32-element array receiver system which use field programmable gate arrays (FPGAs) as digital backend have been built for real-time experimental verification of the digital multiplierless algorithms. The multiplierless algorithms have been experimentally verified by digitally measuring beams. It has been shown that the measured beams from the multiplierless algorithms are in good agreement with the exact counterpart algorithms. Analog realizations of the proposed approximate DFT transforms have also been investigated leading to low-complex, high bandwidth circuits in CMOS. Further, a novel approach for reducing the circuit complexity of analog true-time delay (TTD) N-beam beamforming networks using N-element arrays has been proposed for wideband squint-free operation. A sparse factorization of the N-beam delay Vandermonde beamforming matrix is used to reduce the total amount of TTD elements that are needed for obtaining N number of beams in a wideband array. The method has been verified using measured responses of CMOS all-pass filters (APFs). The wideband squint-free multibeam algorithm is also used to propose a new low-complexity hybrid beamforming architecture targeting future 5G mmW systems. Apart from that, the dissertation also explores multibeam beamforming architectures for uniform circular arrays (UCAs). An algorithm having N log N circuit complexity for simultaneous generation of N-beams in an N-element UCA is explored and verified

    High Speed Integrated Circuits for High Speed Coherent Optical Communications

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    With the development of (sub) THz transistor technologies, high speed integrated circuits up to sub-THz frequencies are now feasible. These high speed and wide bandwidth ICs can improve the performance of optical components, coherent optical fiber communication, and imaging systems. In current optical systems, electrical ICs are used primarily as driving amplifiers for optical modulators, and in receiver chains including TIAs, AGCs, LPFs, ADCs and DSPs. However, there are numerous potential applications in optics using high speed ICs, and different approaches may be required for more efficient, compact and flexible optical systems.This dissertation will discuss three different approaches for optical components and communication systems using high speed ICs: a homodyne optical phase locked loop (OPLL), a heterodyne OPLL, and a new WDM receiver architecture.The homodyne OPLL receiver is designed for short-link optical communication systems using coherent modulation for high spectral efficiency. The phase-locked coherent receiver can recover the transmitted data without requiring complex back-end digital signal processing to recover the phase of the received optical carrier. The main components of the homodyne OPLL are a photonic IC (PIC), an electrical IC (EIC), and a loop filter. One major challenge in OPLL development is loop bandwidth; this must be of order 1 GHz in order for the loop to adequately track and suppress the phase fluctuations of the locked laser, yet a 1 GHz loop bandwidth demands small (<100 ps) propagation delays if the loop is to be stable. Monolithic integration of the high-speed loop components into one electrical and one photonic IC decreases the total loop delay. We have designed and demonstrated an OPLL with a compact size of 10 ร— 10 mm2, stably operating with a loop bandwidth of 1.1 GHz, a loop delay of 120 ps, a pull-in time of 0.55 ฮผs and lock time of <10 ns. The coherent receiver can receive 40 Gb/s BPSK data with a bit error rate (BER) of <10-7, and operates up to 35 Gb/s with BER 10-12.The thesis also describes heterodyne OPLLs. These can be used to synthesize optical wavelengths of a broad bandwidth (optical wavelength synthesis) with narrow linewidth and with fast frequency switching. There are many applications of such narrow linewidth optical signal sources, including low phase noise mm-wave and THz-signal sources, wavelength-division-multiplexed optical transmitters, and coherent imaging and sensor systems. The heterodyne OPLL also has the same stability issues (loop delay and sensitivity) as the homodyne OPLL. In the EIC, a single sideband mixer operating using digital design principles (DSSBM) enables precisely controlled sweeping of the frequency of the locked laser, with control of the sign of the frequency offset. The loop's phase and frequency difference detector (PFD) uses digital design techniques to make the OPLL loop parameters only weakly sensitive to optical signal levels or optical or electrical component gains. The heterodyne OPLL operates stably with a loop bandwidth of 550 MHz and loop delay of <200 ps. An initial OPLL design exhibited optical frequency (wavelength) synthesis from -6 GHz to -2 GHz and from 2 GHz to 9 GHz. An improved OPLL reached frequency tuning up to 25 GHz. The homodyne OPLL exhibits -110 dBc/Hz phase noise at 10 MHz offset and -80 dBc/Hz at 5 kHz offset.Finally, the thesis describes a new WDM receiver architecture using broadband electrical ICs. In the proposed WDM receiver, a set of received signals at different optical wavelengths are mixed against a single optical local oscillator. This mixing converts the WDM channels to electrical signals in the receiver photocurrent, with each WDM signal being converted to an RF sub-carrier of different frequency. An electrical IC then separately converts each sub-carrier signal to baseband using single-sideband mixers and quadrature local oscillators. The proposed receiver needs less complex hardware than the arrays of wavelength-sensitive receivers now used for WDM, and can readily adjust to changes in the WDM channel frequencies. The proposed WDM receiver concept was demonstrated through several system experiments. Image rejection of greater than 25 dB, adjacent channel suppression of greater than 20 dB, operation with gridless channels, and six-channel data reception at a total 15 Gb/s (2.5 Gb/s BPSK ร— 6-channels) were demonstrated

    5์„ธ๋Œ€ ํ†ต์‹ ์„ ์œ„ํ•œ Zn ์น˜ํ™˜๋œ W-ํƒ€์ž… ํ—ฅ์‚ฌํŽ˜๋ผ์ดํŠธ์™€ ์นด๋ณด๋‹ ์ฒ ์˜ ๋งˆ์ดํฌ๋กœํŒŒ ํก์ˆ˜ ํŠน์„ฑ

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    ํ•™์œ„๋…ผ๋ฌธ(๋ฐ•์‚ฌ) -- ์„œ์šธ๋Œ€ํ•™๊ต๋Œ€ํ•™์› : ๊ณต๊ณผ๋Œ€ํ•™ ์žฌ๋ฃŒ๊ณตํ•™๋ถ€, 2021.8. ์œ ์ƒ์ž„.5์„ธ๋Œ€ (5G) ๊ธฐ์ˆ ์˜ ๋ฐœ๋‹ฌ๋กœ ๋ฌด์„  ํ†ต์‹ ์„ ์œ„ํ•œ ๋งˆ์ดํฌ๋กœํŒŒ ์ „์ž ๊ธฐ๊ธฐ๋“ค์ด ์‚ฌ์šฉ๋˜์–ด ์˜ค๊ณ  ์žˆ๋‹ค. ์ด์™€ ๋™์‹œ์— ์ธ๊ฐ„๊ณผ ๋™๋ฌผ์— ์‹ฌ๊ฐํ•œ ๋ฌธ์ œ๋ฅผ ์ผ์œผํ‚ค๊ณ , ๋ฟ๋งŒ ์•„๋‹ˆ๋ผ ์ „์ž ๊ธฐ๊ธฐ์—๋„ ์˜ค์ž‘๋™์„ ์ผ์œผํ‚ฌ ์ˆ˜ ์žˆ๋Š” ์ „์ž๊ธฐํŒŒ ๊ฐ„์„ญ(EMI)์ด ํฐ ๋ฌธ์ œ๋กœ ๋– ์˜ค๋ฅด๊ณ  ์žˆ๋‹ค. ๋”ฐ๋ผ์„œ ์ด๋Ÿฌํ•œ EMI ๋ฌธ์ œ๋ฅผ ํ•ด๊ฒฐํ•˜๊ธฐ ์œ„ํ•ด์„œ ๋งŽ์€ ๊ทธ๋ฃน์—์„œ ๋ฌด๊ฒŒ๊ฐ€ ๊ฐ€๋ณ๊ณ , ๋‚ฎ์€ ๋ถ€ํ”ผ ๋ถ„์œจ, ๋„“์€ ๋Œ€์—ญํญ, ์šฐ์ˆ˜ํ•œ ๋งˆ์ดํฌ๋กœํŒŒ ํก์ˆ˜ ํŠน์„ฑ์„ ๊ฐ€์ง€๋Š” ๊ณ ํŠน์„ฑ ๋งˆ์ดํฌ๋กœํŒŒ ํก์ˆ˜ ์žฌ๋ฃŒ(MAM)์˜ ๊ฐœ๋ฐœ์„ ์œ„ํ•ด ๋…ธ๋ ฅํ•˜๊ณ  ์žˆ๋‹ค. ํ•œํŽธ ๋งˆ์ดํฌ๋กœํŒŒ ํก์ˆ˜ ํŠน์„ฑ์€ ์ฃผ๋กœ ๋ณต์†Œ ์œ ์ „์œจ (ฮตr = ฮตสน โˆ’ jฮตสนสน)๊ณผ ๋ณต์†Œ ํˆฌ์ž์œจ (ฮผr = ฮผสน โˆ’ jฮผสนสน)์— ์˜ํ•ด ๊ฒฐ์ •๋˜๋ฉฐ, ํก์ˆ˜์ฒด์˜ ๋‘๊ป˜๋Š” ๊ตด์ ˆ๋ฅ ์— ๋ฐ˜๋น„๋ก€ํ•˜๊ธฐ ๋•Œ๋ฌธ์— ์—ฐ๊ตฌ์ž๋“ค์€ ์‹ค์ œ ์‘์šฉ์„ ์œ„ํ•ด ์œ ์ „์œจ๊ณผ ํˆฌ์ž์œจ์˜ ๊ฐ’์„ ๊ฐœ์„ ์‹œํ‚ค๋Š” ๋ฐ ์ค‘์ ์„ ๋‘๊ณ  ์žˆ๋‹ค. ๋‹ค์–‘ํ•œ ๋งˆ์ดํฌ๋กœํŒŒ ํก์ˆ˜ ์žฌ๋ฃŒ ์ค‘์—์„œ ์Šคํ”ผ๋„ฌ ํŽ˜๋ผ์ดํŠธ์™€ M-ํƒ€์ž… ํ—ฅ์‚ฌํŽ˜๋ผ์ดํŠธ๋Š” ๊ฐ€์žฅ ๋„๋ฆฌ ์‚ฌ์šฉ๋˜๋Š” ์žฌ๋ฃŒ์ด๋ฉฐ, W-ํƒ€์ž… ํ—ฅ์‚ฌํŽ˜๋ผ์ดํŠธ์™€ ์นด๋ณด๋‹ ์ฒ ์€ ๊ฑฐ์˜ ๋ณด๊ณ ๋˜์–ด ์žˆ์ง€ ์•Š์€ ์‹ค์ •์ด๋‹ค. ํŠนํžˆ 5์„ธ๋Œ€ ํ†ต์‹ ์—์„œ 3.5 GHz ์™€ 28 GHz๋Š” ๊ฐ€์žฅ ๋ณดํŽธ์ ์ธ ์ฃผํŒŒ์ˆ˜๋กœ ์•Œ๋ ค์ ธ ์žˆ๋‹ค. ๋”ฐ๋ผ์„œ ๋ณธ ์—ฐ๊ตฌ์—์„œ๋Š” 3.5 GHz์™€ 28 GHz ์ฃผํŒŒ์ˆ˜ ์˜์—ญ์—์„œ ์–‡๊ณ  ๋„“์€ ๋Œ€์—ญํญ์˜ ์ „์žํŒŒ ํก์ˆ˜์ฒด๋ฅผ ์œ„ํ•ด Zn ๊ฐ€ ์น˜ํ™˜๋œ SrW-ํƒ€์ž… ํ—ฅ์‚ฌํŽ˜๋ผ์ดํŠธ (SrFe2-xZnxFe16O27; SrFe2-xZnxW, 0.0 โ‰ค x โ‰ค 2.0)์˜ ๋งˆ์ดํฌ๋กœํŒŒ ํก์ˆ˜ ํŠน์„ฑ์„ ์‚ดํŽด๋ณด๊ณ ์ž ํ–ˆ๋‹ค. ๋˜ํ•œ 3.5 GHz์—์„œ ์šฐ์ˆ˜ํ•œ ํŠน์„ฑ์˜ ์ „์žํŒŒ ํก์ˆ˜์ฒด๋ฅผ ์œ„ํ•ด sol-gel ๋ฒ•์œผ๋กœ ํ•ฉ์„ฑํ•œ ์•Œ๋ฃจ๋ฏธ๋‚˜ ์ฝ”ํŒ…๋œ ์นด๋ณด๋‹ ์ฒ ์˜ ๋งˆ์ดํฌ๋กœํŒŒ ํก์ˆ˜ ํŠน์„ฑ์„ ์‚ดํŽด๋ณด๊ณ ์ž ํ–ˆ๋‹ค. Zn ์ด์˜จ์„ ๋ถ€๋ถ„์ ์œผ๋กœ ์น˜ํ™˜ํ•œ ์ด์œ ๋Š” ๋‹ค์Œ๊ณผ ๊ฐ™๋‹ค. ์ฒซ ๋ฒˆ์งธ, ํฌํ™” ์žํ™”๊ฐ’ (Ms)์€ x = 1.0 ๊นŒ์ง€ ์ฆ๊ฐ€ํ•จ์— ๋”ฐ๋ผ ๊ฑฐ์˜ ์„ ํ˜•์ ์œผ๋กœ ์ฆ๊ฐ€ํ•˜๋Š” ๋ฐ˜๋ฉด ์ž๊ธฐ ์ด๋ฐฉ์„ฑ (Ha)์€ ๊ฐ์†Œํ•œ๋‹ค. ๊ทธ ์ดํ›„๋ถ€ํ„ฐ x = 2.0 ๊นŒ์ง€๋Š” ํฌํ™” ์žํ™”๊ฐ’์€ ์•„์ฃผ ํฌ๊ฒŒ ๊ฐ์†Œํ•˜๋Š” ๋ฐ˜๋ฉด์— ์ž๊ธฐ ์ด๋ฐฉ์„ฑ ๊ฐ’์€ ์•ฝ๊ฐ„ ๊ฐ์†Œํ•œ๋‹ค. ๋ณต์†Œ ํˆฌ์ž์œจ์€ Ms/Ha์— ๋น„๋ก€ ๊ด€๊ณ„์— ์žˆ๊ธฐ ๋•Œ๋ฌธ์— ๋ณต์†Œ ํˆฌ์ž์œจ์˜ ๊ฐ’์€ x = 1.0 ๊นŒ์ง€๋Š” ์ฆ๊ฐ€ํ•  ๊ฒƒ์ด๋ผ ์˜ˆ์ƒํ–ˆ๋‹ค. ๋‘ ๋ฒˆ์งธ, Fe2+์™€ Fe3+ ์ด์˜จ ์‚ฌ์ด์˜ ์ „์ž ๋„์•ฝ์— ๋”ฐ๋ฅธ ๋ถ„๊ทน์˜ ์ฆ๊ฐ€๋กœ ๋ณต์†Œ ์œ ์ „์œจ ๋˜ํ•œ ํ–ฅ์ƒ๋  ๊ฒƒ์ด๋ผ ์˜ˆ์ƒํ–ˆ๋‹ค. ๋”ฐ๋ผ์„œ, ๋ถ€๋ถ„์ ์œผ๋กœ Zn๊ฐ€ ์น˜ํ™˜๋œ SrW-ํƒ€์ž… ํ—ฅ์‚ฌํŽ˜๋ผ์ดํŠธ์˜ ๋ณต์†Œ ์œ ์ „์œจ๊ณผ ๋ณต์†Œ ํˆฌ์ž์œจ์˜ ๊ฐ’์„ ๋™์‹œ์— ์ฆ๊ฐ€์‹œํ‚ด์œผ๋กœ์จ ๋งˆ์ดํฌ๋กœํŒŒ ํก์ˆ˜ ํŠน์„ฑ๋„ ํ–ฅ์ƒ๋  ๊ฒƒ์ด๋ผ ํŒ๋‹จํ–ˆ๋‹ค. ๋ฐ˜๋ฉด์— ์นด๋ณด๋‹ ์ฒ ์€ ๋†’์€ ํฌํ™” ์žํ™”๊ฐ’๊ณผ ๋‚ฎ์€ ์ž๊ธฐ ์ด๋ฐฉ์„ฑ ๊ฐ’ ๋•Œ๋ฌธ์— ๋†’์€ ์‹ค์ˆ˜๋ถ€ ํˆฌ์ž์œจ ๊ฐ’์„ ๊ฐ€์ง„๋‹ค๊ณ  ์•Œ๋ ค์ ธ ์žˆ๋‹ค. ๊ทธ๋Ÿฌ๋‚˜ ๋†’์€ ์™€์ „๋ฅ˜ ์†์‹ค ๋•Œ๋ฌธ์— ์šฐ์ˆ˜ํ•œ ํŠน์„ฑ์˜ ์ „์žํŒŒ ํก์ˆ˜์ฒด๋ฅผ ์–ป๋Š” ๋ฐ ์–ด๋ ค์›€์„ ๊ฒช๊ณ  ์žˆ๋‹ค. ์ด๋Ÿฌํ•œ ๋ฌธ์ œ์ ์„ ํ•ด๊ฒฐํ•˜๊ธฐ ์œ„ํ•ด์„œ sol-gel ๋ฒ•์„ ํ†ตํ•œ ์นด๋ณด๋‹ ์ฒ ๊ณผ ๋น„์ •์งˆ ์•Œ๋ฃจ๋ฏธ๋‚˜์˜ core-shell ๊ตฌ์กฐ๋ฅผ ๋งŒ๋“ค์–ด ์คŒ์œผ๋กœ์จ ์ž…์ž ๊ฐ„ ์™€์ „๋ฅ˜ ์†์‹ค์„ ํšจ๊ณผ์ ์œผ๋กœ ์–ต์ œํ•˜๊ณ ์ž ํ•˜์˜€๋‹ค. ์•Œ๋ฃจ๋ฏธ๋‚˜ ์ ˆ์—ฐ ์ฝ”ํŒ… ์ธต์€ ๋น„์ž์„ฑ ๋ฌผ์งˆ๋กœ์„œ ์ž๊ธฐ์  ํŠน์„ฑ์„ ๊ฐ์†Œ์‹œํ‚ค๋ฉฐ ํŠนํžˆ ํˆฌ์ž์œจ์˜ ํ—ˆ์ˆ˜๋ถ€๋ฅผ ๊ฐ์†Œ์‹œํ‚ค๋Š” ์—ญํ• ์„ ํ•˜๊ธฐ ๋•Œ๋ฌธ์— ์•Œ๋ฃจ๋ฏธ๋‚˜ ์ฝ”ํŒ… ๋‘๊ป˜๋ฅผ ์„ฌ์„ธํ•˜๊ฒŒ ์กฐ์ ˆํ•˜์˜€๋‹ค. ๋˜ํ•œ ๋ณต์†Œ ์œ ์ „์œจ์„ ์กฐ์ ˆํ•˜๊ธฐ ์œ„ํ•ด์„œ ๋น„์ •์งˆ ์•Œ๋ฃจ๋ฏธ๋‚˜ ๋˜๋Š” ฮฑ-์•Œ๋ฃจ๋ฏธ๋‚˜์™€ ๊ฐ™์€ ์œ ์ „ ๋ฌผ์งˆ์„ ์ถ”๊ฐ€์ ์œผ๋กœ ์„ž์–ด์ฃผ์—ˆ๋‹ค. ๋ณตํ•ฉ์ฒด ์ƒ˜ํ”Œ์˜ ์ „์žํŒŒ ํก์ˆ˜ ํŠน์„ฑ ์ธก์ •์„ ์œ„ํ•ด์„œ ์‹œํŽธ์€ ๋‹ค์Œ๊ณผ ๊ฐ™์€ ๊ณผ์ •์„ ํ†ตํ•ด ์ค€๋น„ํ•˜์˜€๋‹ค. ๊ฐ ํ—ฅ์‚ฌํŽ˜๋ผ์ดํŠธ ๋˜๋Š” ์นด๋ณด๋‹ ์ฒ  ๋ถ„๋ง์€ ์—ํญ์‹œ ๋ ˆ์ง„๊ณผ ํ•จ๊ป˜ ์„ž์–ด์ฃผ์—ˆ๊ณ , ์ง์‚ฌ๊ฐํ˜• ๋˜๋Š” toroidal ํ˜•ํƒœ๋กœ ์ผ์ถ• ์„ฑํ˜•ํ•œ ๋‹ค์Œ 175 หšC ์—์„œ 1์‹œ๊ฐ„ ๋™์•ˆ ๊ฒฝํ™”ํ•˜์˜€๋‹ค. ๋ณต์†Œ ์œ ์ „์œจ๊ณผ ๋ณต์†Œ ํˆฌ์ž์œจ ์ธก์ •์„ ์œ„ํ•ด์„œ VNA (Agilent PNA N5525A) ์‚ฌ์šฉํ•˜์˜€๋‹ค. ๋ณต์†Œ ์œ ์ „์œจ๊ณผ ๋ณต์†Œ ํˆฌ์ž์œจ์€Nicolson and Ross ์•Œ๊ณ ๋ฆฌ์ฆ˜์— ์˜ํ•ด ๊ณ„์‚ฐ๋œ S-๋ณ€์ˆ˜๋“ค์„ ํ†ตํ•ด ๊ณ„์‚ฐ๋˜์—ˆ๋‹ค. SrFe2-xZnxW (0.0 โ‰ค x โ‰ค 2.0) ํ—ฅ์‚ฌํŽ˜๋ผ์ดํŠธ์˜ ๋งˆ์ดํฌ๋กœํŒŒ ํก์ˆ˜ ํŠน์„ฑ์„ Ku (0.5-18 GHz)์™€ Ka (26.5-40 GHz)์˜ ์˜์—ญ์—์„œ ์‚ดํŽด๋ณด์•˜๋‹ค. ๋ฐ˜๋ฉด ์•Œ๋ฃจ๋ฏธ๋‚˜ ์ฝ”ํŒ…๋œ ์นด๋ณด๋‹ ์ฒ ์˜ ๋งˆ์ดํฌ๋กœํŒŒ ํก์ˆ˜ ํŠน์„ฑ์€ Ku-band์—์„œ๋งŒ ์‚ดํŽด๋ณด์•˜๋‹ค. ์˜ˆ์ƒํ•œ ๊ฒƒ๊ณผ ๊ฐ™์ด ์ฆ๊ฐ€ํ•œ ๋ณต์†Œ ์œ ์ „์œจ ๊ทธ๋ฆฌ๊ณ  ๋ณต์†Œ ํˆฌ์ž์œจ ๋•๋ถ„์— Zn ์น˜ํ™˜๋œ SrW-ํƒ€์ž… ํ—ฅ์‚ฌํŽ˜๋ผ์ดํŠธ๋Š” ๋„“์€ ๋Œ€์—ญํญ์„ ๊ฐ€์ง€๋ฉฐ ์šฐ์ˆ˜ํ•œ ๋งˆ์ดํฌ๋กœํŒŒ ํก์ˆ˜ ํŠน์„ฑ์„ ๋ณด์˜€๋‹ค. ํŠนํžˆ 90% ๋ถ€ํ”ผ ๋ถ„์œจ์—์„œ 2.8 mm ๋‘๊ป˜์˜ SrFe1.5 Zn0.5W (x = 0.5) ๋ณตํ•ฉ์ฒด๋Š” -10 dB ์ดํ•˜์—์„œ0.43 GHz (3.38-3.81 GHz)์˜ ๋Œ€์—ญํญ๊ณผ 3.6 GHz์—์„œ -46 dB์˜ ๋งˆ์ดํฌ๋กœํŒŒ ํก์ˆ˜ ํŠน์„ฑ์„ ๋‚˜ํƒ€๋ƒ„์œผ๋กœ์จ 3.5 GHz์—์„œ 5์„ธ๋Œ€ ํ†ต์‹  ํ™œ์šฉ์„ ์œ„ํ•œ ์ ์ ˆํ•œ ํก์ˆ˜์ฒด์ž„์„ ์•Œ ์ˆ˜ ์žˆ์—ˆ๋‹ค. Ka-band์—์„œ๋Š” 30% ๋ถ€ํ”ผ ๋ถ„์œจ์—์„œ 0.64 mm ๋‘๊ป˜์˜ SrFe1.75 Zn0.25W (x = 0.25) ๋ณตํ•ฉ์ฒด๋Š” -10 dB ์ดํ•˜์—์„œ5.16 GHz (26.50-31.66 GHz)์˜ ๋Œ€์—ญํญ, -20 dB ์ดํ•˜์—์„œ๋Š” 2.48 GHz (26.50-28.98 GHz) ๋Œ€์—ญํญ๊ณผ 28 GHz์—์„œ -68.4 dB์˜ ๋งˆ์ดํฌ๋กœํŒŒ ํก์ˆ˜ ํŠน์„ฑ์„ ๋‚˜ํƒ€๋ƒ„์œผ๋กœ์จ 28 GHz์—์„œ 5์„ธ๋Œ€ ํ†ต์‹  ํ™œ์šฉ์„ ์œ„ํ•œ ์šฐ์ˆ˜ํ•œ ํก์ˆ˜์ฒด์ž„์„ ํ™•์ธํ•˜์˜€๋‹ค. ํ•œํŽธ ์•Œ๋ฃจ๋ฏธ๋‚˜๊ฐ€ ์ฝ”ํŒ…๋œ ์นด๋ณด๋‹ ์ฒ ๊ณผ 5wt.%์˜ ๋น„์ •์งˆ ์•Œ๋ฃจ๋ฏธ๋‚˜ ๋ถ„๋ง์„ ์„ž์€ ๋ณตํ•ฉ์ฒด๋Š” 4.36 mm์˜ ๋‘๊ป˜๋ฅผ ๊ฐ€์งˆ ๋•Œ -20 dB ์ดํ•˜์—์„œ0.51 GHz (3.25-3.76 GHz)์˜ ๋Œ€์—ญํญ๊ณผ -28.9 dB ๋งˆ์ดํฌ๋กœํŒŒ ํก์ˆ˜ ํŠน์„ฑ์„ ๋ณด์ž„์œผ๋กœ์จ 3.5 GHz์—์„œ 5์„ธ๋Œ€ ํ†ต์‹  ํ™œ์šฉ์„ ์œ„ํ•œ ์ ์ ˆํ•œ ํก์ˆ˜์ฒด์ž„์„ ํ™•์ธํ•˜์˜€๋‹ค. ๊ฒฐ๋ก ์ ์œผ๋กœ, Zn ๋ถ€๋ถ„ ์น˜ํ™˜๋œ SrW-ํƒ€์ž… ํ—ฅ์‚ฌํŽ˜๋ผ์ดํŠธ๋Š” ๋‘๊ป˜๊ฐ€ ์–‡๊ณ  ๋„“์€ ๋Œ€์—ญํญ์„ ๊ฐ€์ง์œผ๋กœ์จ 3.5 GHz์™€ 28 GHz ์ฃผํŒŒ์ˆ˜ ์˜์—ญ์—์„œ5์„ธ๋Œ€ ํ†ต์‹  ์‘์šฉ์— ์ ํ•ฉํ•œ ๋งˆ์ดํฌ๋กœํŒŒ ํก์ˆ˜ ์žฌ๋ฃŒ์ž„์„ ํ™•์ธํ•˜์˜€๋‹ค. ๋˜ํ•œ 3.5 GHz์—์„œ ์นด๋ณด๋‹ ์ฒ ์ด ์šฐ์ˆ˜ํ•œ ์ „์žํŒŒ ํก์ˆ˜ ํŠน์„ฑ๊ณผ ๋„“์€ ๋Œ€์—ญํญ์„ ๊ฐ€์ง€๊ธฐ ์œ„ํ•ด์„  ์นด๋ณด๋‹ ์ฒ  ๋ถ„๋ง์˜ ํ‘œ๋ฉด์— ๋น„์ •์งˆ ์•Œ๋ฃจ๋ฏธ๋‚˜์˜ ๋‚˜๋…ธ ์ฝ”ํŒ…์„ ํ•˜์—ฌ ์™€์ „๋ฅ˜๋ฅผ ์–ต์ œํ•ด์•ผ ํ•˜๋Š” ๊ฒƒ์ด ํ•„์ˆ˜์ ์ž„์„ ํ™•์ธํ•˜์˜€๋‹ค. ๋˜ํ•œ ๋งˆ์ดํฌ๋กœํŒŒ ํก์ˆ˜ ํŠน์„ฑ์˜ ๊ฐœ์„ ์„ ์œ„ํ•ด์„œ๋Š” ๋‹ค์Œ๊ณผ ๊ฐ™์€ ์ƒˆ๋กœ์šด ๋ฐฉ๋ฒ•์ด ์š”๊ตฌ๋  ๊ฒƒ์œผ๋กœ ์ƒ๊ฐ๋œ๋‹ค. ํ•˜๋‚˜, Zn ๋ถ€๋ถ„ ์น˜ํ™˜๋œ SrW-ํƒ€์ž… ํ—ฅ์‚ฌํŽ˜๋ผ์ดํŠธ ๋ณตํ•ฉ์ฒด์˜ ์ตœ์ ํ™”๋ฅผ ์œ„ํ•ด์„œ๋Š” Zn ์น˜ํ™˜์˜ ์–‘๊ณผ ํ•„๋Ÿฌ์˜ ๋ถ€ํ”ผ ๋ถ„์œจ, ํด๋ฆฌ๋จธ ๋งคํŠธ๋ฆญ์Šค์˜ ์ข…๋ฅ˜์™€ ์–‘ ๊ทธ๋ฆฌ๊ณ  ์‹œํŽธ ์ œ์กฐ ๋ฐฉ๋ฒ•์„ ๋ฐ”๊ฟ”๋ณผ ์ˆ˜ ์žˆ๋‹ค. ๋‹ค๋ฅธ ํ•˜๋‚˜๋Š” Fe2+ ์ž๋ฆฌ์— Co2+, Ni2+, Mn2+, Mg2+ ๋“ฑ๊ณผ ๊ฐ™์€ ๋‹ค๋ฅธ ์•ˆ์ •ํ•œ 2๊ฐ€ ์ด์˜จ์„ ๋ถ€๋ถ„์ ์œผ๋กœ ์น˜ํ™˜ํ•จ์œผ๋กœ์จ ๋‹ค๋ฅธ ํ˜•ํƒœ์˜ W-ํƒ€์ž… ํ—ฅ์‚ฌํŽ˜๋ผ์ดํŠธ๋ฅผ ํ•ฉ์„ฑํ•ด๋ณผ ์ˆ˜ ์žˆ์„ ๊ฒƒ์ด๋‹ค.With the development of the fifth-generation (5G) technology, microwave electronic devices for wireless telecommunication have been used. Simultaneously, electromagnetic interference (EMI) has been a challenging problem as it can human or animal health and also cause a serious malfunction in electronic devices. To solve the EMI problem, many research groups have tried to develop highly efficient thin broadband microwave absorbing materials (MAM) with lightweight of low filler loading. Meanwhile, since the microwave absorption properties of MAMs are mainly determined by the relative complex permittivity (ฮตr=ฮตโ€ฒโˆ’jฮตโ€ณ) and permeability (ฮผr=ฮผโ€ฒโˆ’jฮผโ€ณ), and their thickness values are inversely proportional to their refractive indices, researchers have focused on the improvement of their real and imaginary parts of ฮตr and ฮผr for real applications. Among various MAMs, while both spinel ferrites and M-type hexaferrites have been most widely used for real applications, W-type hexaferrites and carbonyl iron have been rarely reported. In particular, 3.5 and 28 GHz are regarded as the frequencies for 5G communication. Thus, in this study, the microwave absorption properties of the partially Zn-substituted W-type hexaferrites (SrFe2-xZnxFe16O27; SrFe2-xZnxW, 0.0 โ‰ค x โ‰ค 2.0) were carefully investigated to develop thin broadband microwave absorbers at two different frequencies of 3.5 and 28 GHz. In addition, the Al2O3-coated carbonyl irons prepared by the sol-gel method were investigated to develop high performance microwave absorbers at 3.5 GHz. The reason for the selection of partial Zn substitution is as follows. First, according to our previous study on Zn-substituted SrW-type hexaferrites, with increasing x up to 1.0 in SrFe2-xZnxW, the saturation magnetization (Ms) is almost linearly increased while the magnetic anisotropy field (Ha) is abruptly decreased. With further increase of x up to 2.0, the Ms value is largely decreased while the Ha value is slightly decreased. Therefore, the real parts of ฮผr are expected to continuously increase up to x =1.0 since they are proportional to the ratio of Ms/Ha. Second, higher real and imaginary parts of the ฮตr value is expected due to an increased electric conductivity through electron hopping between Fe2+ and Fe3+ ions. Therefore, the partial substitution of Zn2+ for the Fe2+ site of SrW-type hexaferrite is expected to increase the real and imaginary parts of both ฮตr and ฮผr values, leading to an improvement in the microwave absorption properties. On the other hand, since the carbonyl iron has very high Ms with very low Ha, it is possible to obtain high real parts of ฮผr. However, an excessive eddy current loss hindered to achieve high performance microwave absorber. To overcome this problem, we synthesized a core-shell of carbonyl iron-amorphous alumina by the sol-gel method since the inter-particular current path can be effectively. As the alumina insulation coating layer acts as a non-magnetic material which deteriorates their magnetic properties, especially the real part of ฮผr, its thickness was carefully controlled. Also, the dielectric materials such as amorphous alumina and ฮฑ-alumina were mixed additionally to control the complex permittivity. In order to evaluate the microwave absorption properties of composite samples, our specimens were prepared by the following procedures; At first, each hexaferrite filler or carbonyl iron was mixed with the epoxy-resin matrix, and then each powder mixture was pressed into a thin rectangular plate or a toroidal shape, respectively, and subsequently hardened at 175 หšC for 1 h in air. The measurements of complex permittivity and permeability were carried out for our specimens using the VNA (Agilent PNA N5525A). Their complex permittivity and permeability values were calculated from S-parameters by using a transmission and reflection method based on the algorithm developed by Nicolson and Ross. The microwave absorption properties of SrFe2-xZnxW (0.0 โ‰ค x โ‰ค 2.0) hexaferrite-epoxy resin composites were investigated in both Ku (0.5โ€“18 GHz) and Ka (26.5-40 GHz) bands. For Al2O3-coated carbonyl iron-epoxy resin composites, their microwave absorption properties were studied only in the Ku-band. As expected, owing to the increased real and imaginary parts ฮตr and ฮผr, the partially Zn-substituted SrW-type hexaferrite composites exhibited lower RL values with wider bandwidth. Especially, a 2.8 mm-thick SrFe1.5Zn0.5W (x = 0.5) composite with Vf of 90% exhibited the most appropriate for 5G application at 3.5 GHz in the Ku-band, having the RL value of โˆ’46 dB at 3.6 GHz with the bandwidth of 0.43 GHz (3.38-3.81 GHz) below โˆ’10 dB. In the Ka-band, a 0.64 mm-thick SrFe1.75Zn0.25W (x = 0.25) composite with the Vf of 30% exhibited the most appropriate for 5G application at 28 GHz, having the RL value of โˆ’68.4 dB at 28 GHz with the bandwidths of 5.16 GHz (26.50-31.66 GHz) and 2.48 GHz (26.50-28.98 GHz) below โˆ’10 and โˆ’20 dB, respectively. Meanwhile, Al2O3-coated carbonyl iron composite with amorphous alumina of 5wt.% exhibited the highest performance having the RL value of โˆ’28.9 dB at 3.5 GHz with a thickness of 4.36 mm and the bandwidth of 0.51 GHz (3.25-3.76 GHz) below โˆ’20 dB. In conclusion, partially Zn-substituted SrW-type hexaferrites are appropriate as the filler of MAM for 5G application near 3.5 and 28 GHz since thin broadband microwave absorbers can be fabricated with epoxy resin. Nano-coating of amorphous alumina on the surface of carbonyl iron is essential for the improvement of microwave absorption properties of carbonyl iron by greatly reducing the eddy current loss, leading to higher performance broadband microwave absorbers at 3.5 GHz. Further improvement of microwave absorption properties is expected by the following approaches. One is to fully optimize the processing parameters of partially Zn-substituted SrW-type hexaferrite composites, including the amount of Zn substituent x, its Vf, the kind and amount of polymer matrix, and the fabrication processing of specimen. Another may be to make other SrW-type hexaferrite fillers by the partial substitution of other stable divalent ions such as Co2+, Ni2+, Mn2+, Mg2+, and etc. for the Fe2+ sites.Chapter 1. General introduction 1 Chapter 2. General background 12 2.1 Theory of microwave absorption 12 2.2 Hexaferrites - 16 Chapter 3. Microwave absorption properties of Zn-substituted W-type hexaferrites in the Ku-band (0.5-18 GHz) 31 3.1 Introduction 31 3.2 Experimental 32 3.3 Results and discussion 34 3.4 Summary 44 Chapter 4. Microwave absorption properties of Zn-substituted W-type hexaferrites in the Ka- band (26.5-40 GHz) 66 4.1 Introduction 66 4.2 Experimental 68 4.3 Results and discussion 69 4.4 Summary 82 Chapter 5. Microwave absorption properties of Al2O3-coated carbonyl iron in the Ku-band (0.5- 18 GHz) 107 5.1 Introduction 107 5.2 Experimental 109 5.3 Results and discussion 110 5.4 Summary 114 Chapter 6. Overall conclusion 130 Abstract in Korean 133๋ฐ•

    MEMS piezoelectric vibrational energy harvesters and circuits for IoT applications

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    In the Internet of Things (IoT) world, more and more sensor nodes are being deployed and more mobile power sources are required. Alternative solutions to batteries are the subjects of worldwide extended research. Among the possibilities is the harvesting of energy from the ambient. A novel energy harvesting system to power wireless sensor nodes is a necessity and inevitable path, with more and more market interest. Microelectromechnaical systems (MEMS) based piezoelectric vibrational energy harvesters (PVEH) are considered in this thesis due to their good energy densities, conversion efficiency, suitability for miniaturization and CMOS integration. Cantilever beams are favored for their relatively high average strains, low frequencies and simplicity of fabrication. Proof masses are essential in micro scale devices in order to decrease the resonance frequency and increase the strain along the beam to increase the output power. In this thesis, the effects of proof mass geometry on piezoelectric vibration energy harvesters are studied. Different geometrical dimension ratios have significant impact on the resonance frequency, e.g., beam to mass lengths, and beam to mass widths. The responses of various prototypes are studied. Furthermore, the impact of geometry on the performance of cantilever-based PVEH is investigated. Namely, rectangular and trapezoidal T-shaped designs are fabricated and tested. Optimized cross-shaped geometries are fabricated using a commercial technology PiezoMUMPs process from MEMSCAP. They are characterized for their resonant frequency, strain distribution and output power. The output of an energy harvester is not directly suited as a power supply for circuits because of variations in its power and voltage over time, therefore a power management circuit is required. The circuit meets the requirements of responding to an input voltage that varies with the ambient conditions to generate a regulated output voltage, and the ability to power multiple outputs from a fixed input voltage. In this thesis, new design architectures for a reconfigurable circuit are considered. A charge pump which modifies dynamically the number of stages to generate a plurality of voltage levels has been designed and fabricated using a CMOS 0.13 ฮผm technology. This provides biasing voltages for electrostatic MEMS devices. Electrostatic MEMS require relatively high and variable actuation voltages and the fabricated circuit serves this goal and attains a measured maximum output voltage of 10.1 V from a 1.2 V supply. In this thesis, design recommendations are given and MEMS piezoelectric harvesters are implemented and validated through fabrications. T-shaped harvesters bring improvements over cantilever designs, namely the trapezoidal T-shaped structures. A cross-shaped design has the advantage of utilizing four beams and the proposed proof mass improves the performance significantly. A cross-coupled circuit rectifies the output efficiently towards an optimal energy harvesting solution
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