ТЕХНОЛОГИЯ ИЗГОТОВЛЕНИЯ ФОТОШАБЛОНОВ, ОСНОВАННАЯ НА ОПЕРАТИВНОМ МОДЕЛИРОВАНИИ ПАРАМЕТРИЗОВАННЫХ ПРОЦЕССОВ ФОТОЛИТОГРАФИИ

The paper presents results of the new developed approach to manufacturing of original topology using  photographic  masks  that allows to perform a real-time estimation of photolithographic  significance of the pattern defects on a mask being detected while controlling the correspondence of the photographic masks to the required topology.  In this case such operation as projection transfer of an image from the photographic mask to wafer has not been applied. The given approach excludes not only  single but topology group defects as well and also optical proximity correction structure defects. Приводятся результаты разработки нового подхода к изготовлению оригиналов топологии на фотошаблонах, обеспечивающего возможность оперативной оценки фотолитографической значимости дефектов маски, обнаруженных в процессе контроля фотошаблонов на соответствие топологии, без выполнения операции проекционного переноса изображения с фотошаблона на полупроводниковую пластину. Данный подход гарантирует отсутствие не только одиночных, но и групповых дефектов топологии, а также дефектов структур коррекции оптической близости

The Procedure for Determining and Quality Assurance Program for the Calculation of Dose Coefficients Using DCAL Software

The development of a spallation neutron source with a mercury target may lead to the production of rare radionuclides. The dose coefficients for many of these radionuclides have not yet been published. A collaboration of universities and national labs has taken on the task of calculating dose coefficients for the rare radionuclides using the software package: DCAL. The working group developed a procedure for calculating dose coefficients and a quality assurance (QA) program to verify the calculations completed. The first portion of this QA program was to verify that each participating group could independently reproduce the dose coefficients for a known set of radionuclides. The second effort was to divide the group of radionuclides among the independent participants in a manner that assured that each radionuclide would be redundantly and independently calculated. The final aspect of this program was to resolve any discrepancies arising among the participants as a group of the whole. The output of the various software programs for six QA radionuclides, 144Nd, 201Au, 50V, 61Co, 41Ar, and 38S were compared among all members of the working group. Initially, a few differences in outputs were identified. This exercise identified weaknesses in the procedure, which have since been revised. After the revisions, dose coefficients were calculated and compared to published dose coefficients with good agreement. The present efforts involve generating dose coefficients for the rare radionuclides anticipated to be produced from the spallation neutron source should a mercury target be employed

An Interdatabase Comparison of Nuclear Decay and Structure Data Utilized in the Calculation of Dose Coefficients for Radionuclides Produced in a Spallation Neutron Source

Internal and external dose coefficient values have been calculated for 14 anthropogenic radionuclides which are not currently presented in Federal Guidance Reports Nos. 11, 12, and 13 or Publications 68 and 72 of the International Commission on Radiological Protection. Internal dose coefficient values are reported for inhalation and ingestion of 1 μm and 5 μm AMAD particulates along with the f1 values and absorption types for the adult worker. Internal dose coefficient values are also reported for inhalation and ingestion of 1 μm AMAD particulates as well as the f1 values and absorption types for members of the public. Additionally, external dose coefficient values for air submersion, exposure to contaminated ground surface, and exposure to soil contaminated to an infinite depth are also presented. Information obtained from this study will be used to support the siting and permitting of future accelerator-driven nuclear initiatives within the U.S. Department of Energy complex, including the Spallation Neutron Source (SNS) and Accelerator Production of Tritium (APT) Projects

СТОХАСТИЧЕСКОЕ МОДЕЛИРОВАНИЕ СИСТЕМ АВТОМАТИЧЕСКОГО УПРАВЛЕНИЯ БЕСПИЛОТНОГО ЛЕТАТЕЛЬНОГО АППАРАТА С ПРИМЕНЕНИЕМ ОПТИМАЛЬНОГО ФИЛЬТРА КАЛМАНА

Сlosed loop continuous and discrete automatic control systems of unmanned aircraft which contain the autopilot, the glider, sensors and Kalman filters in a straight chain are considered. Discrete model of the system and present in graphs simulation results is proposed.Рассматриваются замкнутые непрерывные и дискретные системы автоматического управления беспилотного летательного аппарата, в прямой цепи которых последовательно включены автопилот, планер беспилотного летательного аппарата, измерители (датчики) параметров полета и фильтры Калмана. Предложена дискретная модель такой системы и представлены в виде графиков результаты моделирования

МЕТОДЫ АВТОМАТИЧЕСКОГО КОНТРОЛЯ ТОПОЛОГИИ ПЛАНАРНЫХ СТРУКТУР ИЗДЕЛИЙ ЭЛЕКТРОННОЙ ТЕХНИКИ

The given paper contains description of existing methods for automatic control of planar structure layout pertaining to products of micro- and nanoelectronics and other electronic technologies products and their classification. An algorithm of method selection is based on the analysis of  factors influencing on method preference and depends on characteristics of an object to be controlled and controlling conditions. The described algorythm is to be applied in the process of designing the equipment for automatic control of planar structure layout on  photographic masks, semiconductor wafers, printed-circuit boards with high-density assembly. Приводится описание существующих методов автоматического контроля топологии планарных структур изделий микро- и наноэлектроники, других изделий электронной техники, дается их классификация. На основании анализа факторов, влияющих на принятие решения о выборе метода контроля топологии, определяется алгоритм выбора метода в зависимости от характеристик контролируемого объекта и условий контроля. Описанный алгоритм предназначен для использования при проектировании оборудования для автоматического контроля топологии планарных структур на фотошаблонах, полупроводниковых пластинах, печатных платах высокой плотности монтажа.

MANUFACTURING TECHNOLOGY OF PHOTOGRAPHIC MASKS BASED ON REAL-TIME SIMULATION OF PARAMETRIZED PHOTOLITHOGRAPHY PROCESS

The paper presents results of the new developed approach to manufacturing of original topology using  photographic  masks  that allows to perform a real-time estimation of photolithographic  significance of the pattern defects on a mask being detected while controlling the correspondence of the photographic masks to the required topology.  In this case such operation as projection transfer of an image from the photographic mask to wafer has not been applied. The given approach excludes not only  single but topology group defects as well and also optical proximity correction structure defects

A local construction of Riemannian metric

A local construction of a Riemannian metric on a smooth manifold is given by the following theorem

A local construction of Riemannian metric

A local construction of a Riemannian metric on a smooth manifold is given by the following theorem

Stochastic simulation of the automatic control systems of unmanned aircraft using optimal Kalman filter

Сlosed loop continuous and discrete automatic control systems of unmanned aircraft which contain the autopilot, the glider, sensors and Kalman filters in a straight chain are considered. Discrete model of the system and present in graphs simulation results is proposed

Принципы построения системы комплексного информационного обслуживания сотрудников предприятия рецептурного производства

This paper discusses further applications of the ontology-based approach to the design of batch manufacturing enterprises. It involves, among other things, standards formalization. This paper, in particular, is dedicated to graphical representation of Piping and Instrumentation Diagram (P&ID) and Procedure Function Chart (PFC) languages, as per ISA-88 standard. They form a toolkit for automation engineer to work with. Contingency analysis and information retrieval agents were implemented. The article also discusses agent-oriented approach to robot interaction in robotic production systems, that is conducted via shared semantic memory