Process Control in IC Manufacturing with Thermal Waves

In today’s semiconductor market, manufacturers face a daunting challenge. Product concepts evolve rapidly in response to rapidly changing markets while design rules, i.e., device geometries, become increasingly smaller and wafers become larger. Devices must run faster, reliability must improve and the resultant increasing complexity in IC design and fabrication technology intensifies the need for tighter controls of process variables. To compete effectively in this market, manufacturers must improve both product development and product manufacturing processes

Contrast Mechanisms in the Thermoacoustic Microscope

The thermoacoustic microscope [1–9] uses a modulated particle beam (electrons, photons or ions) as a heat source on (or near) the surface of the sample, and a piezoelectric transducer attached elsewhere on the sample as a detector of acoustic waves generated by the beam. The modulation frequency is typically 103 to 107 Hz, so the acoustic signal is in the sonic to ultrasonic range. These acoustic signals are used to produce images of surface and near surface features of the solid by scanning the source over the face of the sample. In order to make full use of this type of microscope as a quantitative NDE tool, one must be able to interpret the images in terms of the physical properties of the features being imaged. The interpretation of an image resulting from variations in, say, the elastic constants as if it were caused by variations in, say, thermal expansion coefficient, could lead to totally incorrect conclusions about the nature of a defect. This paper summarizes a theoretical analysis which can form a basis for assessing the relative importance of different contrast mechanisms

Progress on Ultrasonic Flaw Sizing in Turbine Engine Rotor Components: Bore and Web Geometries

The application of generic flaw sizing techniques to specific components generally involves difficulties associated with geometrical complexity and simplifications arising from a knowledge of the expected flaw distribution. This paper is concerned with the case of ultrasonic flaw sizing in turbine engine rotor components. The sizing of flat penny shaped cracks in the web geometry will be discussed and new crack sizing algorithms based on the Born and Kirchhoff approximations will be introduced. Additionally we propose a simple method for finding the size of a flat, penny shaped crack given only the magnitude of the scattering amplitude. The bore geometry is discussed with primary emphasis on the cylindrical focussing of the incident beam. Important questions which are addressed include the effects of diffraction and the position of the flaw with respect to the focal line. The appropriate deconvolution procedures to account for these effects will be introduced. Generic features of the theory will be compared with experiment. Finally, the effects of focused transducers on the Born inversion algorithm are discussed

Buried Thermoplastic Layer Diagnostics by the Use of Photo-Thermo-Acoustic Radiometry

Nondestructive evaluation of buried layers finds important applications in industry. In this paper we describe a fast, non-contact photothermal technique for thermoacoustic characterization of a thermoplastic layer sandwiched between two metal foils used in heat sealed food containers. For this particular application a non-contact measurement was required of the thickness of the polymer layer between two layers of aluminum in a heat sealed container rim at a speed of four locations of the container in 60 sec

Deep Thermoacoustic Imaging Using Scanning Electron Acoustic Microscopy

There has developed over the past few years some controversy [1] over the meaning and use of terms such as “thermal wave imaging” vs. “thermoacoustic imaging” or “Thermal Wave Microscopy” as opposed to “Scanning Electron Acostic Microscopy” (SEAM). The issue in question is the extent of the role played by acoustics directly on the imaging. In the present work, SEAM studies of a prepared test standard are presented which show that macroscopic elastic properties can play an important role in imaging. The SEAM technique uses Coordinate Modulation (CM) of the electron beam [2] rather than the more commonly used intensity modulation via beam blanking. Defects as deep as 26 thermal diffusion lengths in stainless steel have been clearly imaged with this technique. This work strongly supports the Jackson -Amer thermal bending model [3] for low frequency (up to approximately 100kHz in small specimens) acoustic detection in the solid as compared to the theory of Opsal and Rosencwaig [4] which does not incorporate total specimen response to the thermal source. This problem has more recently been theoretically investigated by Favro [5,6], who has developed a more general theory encompasing both the Opsal-Rosencwaig short wavelength limit and the Jackson-Amer long wavelength limit. Favro’s theory also accounts for features in the image shown

Picosecond Transient Thermoreflectance: Time-Resolved Studies of Thin Film Thermal Transport

The advent of new and sophisticated material growth processes (molecular beam epitaxy, chemical vapor deposition and ion sputter deposition) has produced new exotic materials such as amorphous alloys and compositionally modulated structures [1]. The atomic level structure of these materials can be proved by techniques such as x-ray diffraction. The electrical and thermal transport properties are also used to characterize these materials, which are usually deposited as thin films onto supporting substrates. Although the substrate may be electrically isolated from the film, complete thermal isolation is more difficult to achieve and thermal transport measurements are complicated.</p

China\u27s hegemonic intentions and trajectory: Will it opt for benevolent, coercive, or Dutch‐style hegemony?

China\u27s unprecedented economic growth led some scholars to conclude that it will replace the United States as the future global hegemon. However, China\u27s intentions in exercising future global leadership are yet unknown and difficult to extrapolate from its often contradictory behaviour. A preliminary overview of China\u27s island building in the South China Sea reveals its potentially coercive intentions. This inference is consistent with the analysis of those who prognosticate China\u27s violent rise. Conversely and simultaneously, China\u27s participation in peacekeeping operations and its global investments evince its benevolent hegemonic intentions, which are congruent with the argument of those who predict China\u27s peaceful hegemonic ascent. Confronted with these divergent tendencies in China\u27s recent international relations, and assuming its continued rise, it is, thus, essential to examine China\u27s strategic intentions and how these may ultimately project its violent or peaceful hegemonic rise. This article argues that the “Third Way” or “Dutch‐style” hegemony is highly instructive in this context and, thus, should be examined and added to the existing debate on China\u27s rise as either a benevolent or coercive hegemon. We argue that Dutch‐style hegemony may be the most viable way for China to proceed in its global hegemonic ascendancy

Prospects for a Statistical Theory of LC/TOFMS Data

The critical importance of employing sound statistical arguments when seeking to draw inferences from inexact measurements is well-established throughout the sciences. Yet fundamental statistical methods such as hypothesis testing can currently be applied to only a small subset of the data analytical problems encountered in LC/MS experiments. The means of inference that are more generally employed are based on a variety of heuristic techniques and a largely qualitative understanding of their behavior. In this article, we attempt to move towards a more formalized approach to the analysis of LC/TOFMS data by establishing some of the core concepts required for a detailed mathematical description of the data. Using arguments that are based on the fundamental workings of the instrument, we derive and validate a probability distribution that approximates that of the empirically obtained data and on the basis of which formal statistical tests can be constructed. Unlike many existing statistical models for MS data, the one presented here aims for rigor rather than generality. Consequently, the model is closely tailored to a particular type of TOF mass spectrometer although the general approach carries over to other instrument designs. Looking ahead, we argue that further improvements in our ability to characterize the data mathematically could enable us to address a wide range of data analytical problems in a statistically rigorous manner

RNA expression of TLR10 in normal equine tissues

Background: Toll like receptors are one of the major innate immune system pathogen recognition systems. There is little data on the expression of the TLR10 member of this family in the horse. Results: This paper describes the genetic structure of the Equine TLR10 gene and its RNA expression in a range of horse tissues. It describes the phylogenetic analysis of the Equine TLR1,6,10,2 annotations in the horse genome, firmly identifying them in their corresponding gene clades compared to other species and firmly placing the horse gene with other TLR10 genes from odd-toed ungulates. Additional 3’ transcript extensions to that annotated for TLR10 in the horse genome have been identified by analysis of RNAseq data. RNA expression of the equine TLR10 gene was highest in peripheral blood mononucleocytes and lymphoid tissue (lymph nodes and spleen), however some expression was detected in all tissues tested (jejunum, caudal mesenteric lymph nodes, bronchial lymph node, spleen, lung, colon, kidney and liver). Additional data on RNAseq expression of all equine TLR genes (1–4 and 6–10) demonstrate higher expression of TLR4 than other equine TLRs in all tissues. Conclusion: The equine TLR10 gene displays significant homology to other mammalian TLR10 genes and could be reasonably assumed to have similar fuctions. Its RNA level expression is higher in resting state PBMCs in horses than in other tissues

Overview of cattle diseases listed under category C, D or E in the animal health law for wich control programmes are in place within Europe

13 páginas, 5 figuras, 3 tablas.The COST action “Standardising output-based surveillance to control non-regulated diseases of cattle in the European Union (SOUND control),” aims to harmonise the results of surveillance and control programmes (CPs) for non-EU regulated cattle diseases to facilitate safe trade and improve overall control of cattle infectious diseases. In this paper we aimed to provide an overview on the diversity of control for these diseases in Europe. A non-EU regulated cattle disease was defined as an infectious disease of cattle with no or limited control at EU level, which is not included in the European Union Animal health law Categories A or B under Commission Implementing Regulation (EU) 2020/2002. A CP was defined as surveillance and/or intervention strategies designed to lower the incidence, prevalence, mortality or prove freedom from a specific disease in a region or country. Passive surveillance, and active surveillance of breeding bulls under Council Directive 88/407/EEC were not considered as CPs. A questionnaire was designed to obtain country-specific information about CPs for each disease. Animal health experts from 33 European countries completed the questionnaire. Overall, there are 23 diseases for which a CP exists in one or more of the countries studied. The diseases for which CPs exist in the highest number of countries are enzootic bovine leukosis, bluetongue, infectious bovine rhinotracheitis, bovine viral diarrhoea and anthrax (CPs reported by between 16 and 31 countries). Every participating country has on average, 6 CPs (min–max: 1–13) in place. Most programmes are implemented at a national level (86%) and are applied to both dairy and non-dairy cattle (75%). Approximately one-third of the CPs are voluntary, and the funding structure is divided between government and private resources. Countries that have eradicated diseases like enzootic bovine leukosis, bluetongue, infectious bovine rhinotracheitis and bovine viral diarrhoea have implemented CPs for other diseases to further improve the health status of cattle in their country. The control of non-EU regulated cattle diseases is very heterogenous in Europe. Therefore, the standardising of the outputs of these programmes to enable comparison represents a challenge.Peer reviewe