9 research outputs found
Understanding of the depth of focus evolution from an analysis of the iso-focal point
No full textInternational audienc
Optimization of the Depth of Focus based on the analysis of the diffraction orders in the pupil plane
No full textInternational audienc
Using the CODE technique to print complex two-dimensional structures in a 90 nm ground rule process
No full textComplementary Double Exposure Technique (CODE): a way to print 80nm and 65nm gate level using a double exposure binary mask approach
No full textInternational audienc
Using the CODE technique to print complex two-dimensional structures in a 90 nm ground rule process
No full textComplementary double exposure technique (CODE), solutions to the two-dimensional structures of 90nm node
No full text
