KINSENS. Mikromechanik mit integrierter Elektronik fuer kinetische Sensoren Abschlussbericht

The KINSENS project aimed to extend the technologies for micromechanic sensors and to elaborate the basics for low cost, complex micro systems in which kinetic sensors are integrated with electronics. The technology transfer from the TU Chemnitz with the goal of an independent manufactoring of micromechanical accelerometers at LITEF has been successfully concluded. The digital electornic concept for capacitive kinetic sensors has been improved for higher integration. The developed ASIC contains the following elements: high voltage stages for electrostatic rebalance, charge amplifier and a 12-bit A/D converter. With this results an analog circuitry with charge measurement in micromechanical systems and amplifiers for electrostatic force rebalance are now available. Based on the technologies for the accelerometer several solutions for a coriolis rate sensor have been designed and verified. First prototypes of the coriolis rate sensor have been tested. (orig.)SIGLEAvailable from TIB Hannover: F99B609+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Bildung, Wissenschaft, Forschung und Technologie, Bonn (Germany)DEGerman

Mikromechanik-Labor: Fertigstellung des Labors zur Maskenherstellung und Waferdirektbelichtung mittels Foto- und Elektronenstrahllithografie Schlussbericht

With 12 figs.Available from TIB Hannover: D.Dt.F. QN1(1,52) / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEDEGerman

Projekt DREHSENS - Drehratensensor in Mikromechanik mit integrierter Elektronik Gemeinsamer Abschlussbericht

Available from TIB Hannover: F04B718 / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEBundesministerium fuer Bildung und Forschung (BMBF), Bonn (Germany)DEGerman