14 research outputs found
μ μΈ΅ λλ ΈμνΈ κ΅¬μ‘°μ μμ μ μ μ©λ μ κ³ ν¨κ³Ό νΈλμ§μ€ν°
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Όλ¬Έ(λ°μ¬) -- μμΈλνκ΅λνμ : 곡과λν μ κΈ°Β·μ 보곡νλΆ, 2022. 8. μ΅μ°μ.The development of integrated circuit (IC) technology has continued to improve speed and capacity through miniaturization of devices. However, power density is increasing rapidly due to the increasing leakage current as miniaturization advances. Although the remarkable advancement of process technology has allowed complementary-metal-oxide-semiconductor (CMOS) technology to consistently overcome its constraints, the physical limitations of the metal-oxide-semiconductor field-effect transistor (MOSFET) are unmanageable. Accordingly, research on logic device is being divided into a CMOS-extension and a beyond-CMOS. CMOS-extension focuses on the gate-all-around field-effect transistors (GAAFETs) which is a promising architecture for future CMOS thanks to the excellent electrostatic gate controllability. Particularly, nanosheet (NS) architecture with high current drivability required in ICs, is the most promising. However, NS GAAFET has a trade-off relation between the controllability and the drivability, which requires the necessity of a higher-level effective oxide thickness (EOT) scaling for further scaling of NS GAAFET.
On the other hand, beyond-CMOS mainly focuses on developing devices with novel mechanisms to overcome the MOSFETs' physical limits. Among several candidates, negative capacitance field-effect transistors (NCFETs) with exceptional CMOS compatibility and current drivability are highlighted as future logic devices for low-power, high-performance operation. Although the NCFET utilizing the negative capacitance (NC) effect of a ferroelectric has been demonstrated theoretically by the Landau model, it is challenging to be implemented due to the fact that stabilized NC and sub-thermionic subthreshold swing (SS) are incompatible.
In this dissertation, a GAA NCFET that maintains a stable capacitance boosting by NC effect and exhibits high performance is demonstrated. A ferroelectric-antiferroelectric mixed-phase hafnium-zirconium-oxide (HZO) thin film was introduced, whose effect was confirmed by capacitors and FET experiments. Furthermore, the mixed-phase HZO was demonstrated on a stacked nanosheet gate-all-around (stacked NS GAA) structure, the advanced CMOS technology, which exhibits a superior gate controllability as well as a satisfactory drivability for ICs. The hysteresis-free stable NC operation with the superior performance was confirmed in NS GAA NCFET. The improved SS and on-current (Ion) compared to MOSFETs fabricated in the same manner were validated, and its feasibility as a low-power, high-performance logic device was proven based on a variety of figure of merits.μ§μ νλ‘ κΈ°μ μ λ°μ μ μμμ μννλ₯Ό ν΅ν μλ λ° μ©λμ ν₯μμ μν΄ λ°μ μ κ±°λν΄μλ€. κ·Έλ¬λ μννλ₯Ό κ±°λν μλ‘ μ¦κ°νλ λμ€μ λ₯μ λ¬Έμ λ‘ μ λ ₯ λ°λκ° κΈκ²©νκ² μ¦κ°νκ³ μλ€. μ보ν κΈμ-μ°νλ§-λ°λ체(CMOS) κΈ°μ μ λλΆμ 곡μ κΈ°μ μ μ±μ₯μ νμ
μ΄ νκ³λ₯Ό λμμμ΄ κ·Ήλ³΅ν΄μμΌλ, κΈ°μ‘΄μ κΈμ-μ°νλ§-λ°λ체 μ κ³-ν¨κ³Ό-νΈλμ§μ€ν°(MOSFET)μ 물리μ νκ³λ 극볡ν μ μλ λ¬Έμ μ΄λ€. μ΄μ λ°λΌ λ
Όλ¦¬ λ°λ체μ κ΄ν μ°κ΅¬λ CMOSλ₯Ό μ°μ₯νλ λ°©ν₯κ³Ό CMOSλ₯Ό λ°μ΄λλ λ°©ν₯μΌλ‘ λλμ΄ μ§νλκ³ μλ€. CMOSλ₯Ό μ°μ₯νλ λ°©ν₯μ λ°μ΄λ μ μ κΈ°μ κ²μ΄νΈ μ₯μ
λ ₯μ κ°λ μ°¨μΈλ CMOS κ΅¬μ‘°λ‘ μ λ§ν κ²μ΄νΈ-μ¬-μ΄λΌμ΄λ μ κ³-ν¨κ³Ό-νΈλμ§μ€ν°(GAAFET)μ κ΄ν μ°κ΅¬κ° μ£Όλ₯Ό μ΄λ£¬λ€. νΉν λμ μ λ₯ ꡬλλ ₯μ κ°μ§ μ μλ λλ
ΈμνΈ(NS) κ΅¬μ‘°κ° κ°μ₯ μ λ§νλ°, κ²μ΄νΈ μ₯μ
λ ₯μ΄ μ λ₯ ꡬλλ ₯κ³Ό μμΆ©λλ€λ λ¨μ μ΄ μλ€. μ΄μ λ°λΌ NS GAAFET κΈ°μ μ μν΄μλ λ λμ μμ€μ μ ν¨μ°νλ§λκ» (EOT) μ€μΌμΌλ§μ΄ νμμ μ΄λ€. ννΈ, CMOSλ₯Ό λ°μ΄λλ λ°©ν₯μ μ°κ΅¬λ MOSFETμ 물리μ νκ³λ₯Ό 극볡νκΈ° μν΄ μλ‘μ΄ λ©μ»€λμ¦μ κ°λ μμλ₯Ό κ°λ°νλ λ°©ν₯μΌλ‘ μ΄λ£¨μ΄μ§λ€. λ€μν ν보ꡰ μ€ CMOS νΈνμ±κ³Ό μ λ₯ ꡬλλ₯λ ₯μ΄ λ°μ΄λ μμ μ μ μ©λ μ κ³-ν¨κ³Ό-νΈλμ§μ€ν°(NCFET)μ΄ μ μ λ ₯, κ³ μ±λ₯ λμμ μν λ―Έλ CMOS μμλ‘ κ°κ΄λ°κ³ μλ€. κ°μ μ 체μ μμ μ μ μ©λ (NC) ν¨κ³Όλ₯Ό μ΄μ©ν NCFETμ Landau λͺ¨λΈμ μν΄ μ΄λ‘ μ μΌλ‘ μ¦λͺ
λμμΌλ, μ΄μνμ μΌλ‘ μμ ν μνμ 60 mV/dec μ΄νμ λ¬Έν±μ μ-μ΄ν-κΈ°μΈκΈ°(SS)λ₯Ό λμμ ꡬννκΈ° λΆκ°λ₯νλ€λ λ¬Έμ κ° μλ€.
λ³Έ νμλ
Όλ¬Έμμλ μμ ν μ μ μ©λ ν₯μ νΉμ±μ κ°μ§λ©° λμ μ±λ₯μ κ°λ NS GAA NCFETμ ꡬννμλ€. κ°μ μ 체(ferroelectric)-λ°κ°μ μ 체(antiferroelectric) νΌν©μ(mixed-phase) ννλ-μ§λ₯΄μ½λ-μ₯μ¬μ΄λ(HZO) λ°λ§μ μ μ μ©λ ν₯μ ν¨κ³Όλ₯Ό 컀ν¨μν° λ° FET μ μμ ν΅ν΄ ν¨κ³Όλ₯Ό κ²μ¦νμλ€. λν λμ κ²μ΄νΈ μ₯μ
λ ₯μ κ°μ§λ©° μ§μ νλ‘μμ μꡬνλ μ λ₯ ꡬλλ ₯μ λ§μ‘±μν¬ μ μλ μ μΈ΅ν λλ
ΈμνΈ κ²μ΄νΈ-μ¬-μ΄λΌμ΄λ(stacked NS GAA) ꡬ쑰μ νΌν©μ NC λ°λ§μ μ μ©ν FETμ μμ°νκ³ μ±λ₯μ μ°μμ±μ νμΈνμλ€. λμΌνκ² μ μλ MOSFET λλΉ ν₯μλ SSμ ꡬλ μ λ₯(Ion)λ₯Ό νμΈνμκ³ , λ€μν μ±λ₯ μ§μλ₯Ό ν λλ‘ μ μ λ ₯, κ³ μ±λ₯ λ‘μ§ μμλ‘μμ νλΉμ±μ κ²μ¦νμλ€.Abstract i
Contents iv
List of Table vii
List of Figures viii
Chapter 1 Introduction 1
1.1 Power and Area Scaling Challenges 1
1.2 Nanosheet Gate-All-Around FETs 5
1.2.1 Gate-All-Around FETs 5
1.2.2 Nanosheet GAAFETs 6
1.3 Negative Capacitance FETs 11
1.3.1 Negative Capacitance in Ferroelectric Materials 11
1.3.2 Negative Capacitance for Steep Switching Devices 14
1.3.3 Stable NC vs. Sub-thermionic SS 17
1.4 Scope and Organization of Dissertation 21
Chapter 2 Stacked NS GAA NCFET with Ferroelectric-Antiferroelectric-Mixed-Phase HZO 22
2.1 Mixed-Phase HZO for Capacitance Boosting 22
2.2 NS GAA NCFET using Mixed-Phase HZO 25
Chapter 3 HZO ALD Stack Optimization 28
3.1 Metal-Ferroelectric-Interlayer-Silicon (MFIS) / MFM Capacitors 29
3.1.1 Fabrication of MFIS Capacitors 29
3.1.2 Electrical Characteristics of MFIS / MFM Capacitors 33
3.2 SOI Planar NCFETs 38
3.2.1 DC Measurements 38
3.2.2 Direct Capacitance Measurements 47
3.2.3 Speed Measurements 49
Chapter 4 Device Fabrication of Stacked NS GAA NCFET 51
4.1 Initial Process Flow of NS GAA NCFET 52
4.2 Process Issues and Solution 56
4.2.1 External Resistance 56
4.2.2 TiN Gate Sidewall Spacer 60
4.2.3 Unintentionally Etched Sacrificial Layer 65
4.2.4 Discussions 68
4.3 Channel Release Process 69
4.3.1 Consideration in Channel Release Process 69
4.3.2 Methods for SiGe Selective Etching 72
4.3.3 SiGe Selective Etching using Carboxylic Acid Solution 75
4.4 Revised Process of NS GAA NCFET 78
Chapter 5 Electrical Characteristics of Fabricated NS GAA NCFET 84
5.1 DC Characteristics 85
5.1.1 NS GAA NCFET vs. Planar SOI NCFET 85
5.1.2 Performance Enhancement of NS GAA NCFET 88
5.1.3 Performance Evaluation 96
5.2 Operating Temperature Properties 99
Chapter 6 Conclusion 102
Bibliography 105
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Abstract 74Maste
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κ³ μΆ (Capsicum annuum L.) μ΄λ§€μμ λ°νλλ wound-induced proteinase inhibitor II cDNA ν΄λ‘ μ λΆλ¦¬ λ° νΉμ±λΆμ
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Dept. of Rehabilitation Therapy/μμ¬The purpose of this study was to investigate lumbopelvic motion during seated hip flexion in subjects with lumbar flexion syndrome (LFS) accompanying limited hip flexion. Fifteen subjects with LFS accompanying limited hip flexion and sixteen subjects without this condition were recruited for this study. To classify the subjects into two groups, the physical examinations were performed by an examiner. The physical examinations included (1) a pain scale for the low back (visual analog scale) (2) a disability index for the low back (modified Oswestry Disability Index) (3) assessment of active and passive hip flexion range (4) a classification system for determining LFS. The subjects performed seated hip flexion with the dominant leg three times. A three-dimensional motion-analysis system was used to measure lumbopelvic motion during seated hip flexion, and an independent t-test was used to compare the lumbopelvic motion between the two groups. The angle of hip flexion was significantly lower in subjects with LFS accompanying limited hip flexion (p=0.014). The angle of the lumbar flexion and posterior pelvic tilting, however, were significantly greater in subjects with this condition (p=0.006; p=0.019, respectively). The results of this study suggest that limited hip flexion can contribute to excessive lumbar flexion and posterior pelvic tilting during hip flexion in the sitting position. Further studies are required to confirm whether improving the hip flexion range of motion can reduce excessive lumbar flexion in patients with LFS accompanying limited hip flexion.restrictio
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Dept. of Physical Therapy/λ°μ¬Walking is one of the most repetitive movements in daily activities and changes in
lumbopelvic motion and trunk muscle activities during walking are critical indicators
of spinal dysfunction. The purpose of Study 1 was to demonstrate the differences in- viii -
lumbopelvic motion and trunk muscle activities during walking between subjects with
and without a lumbar extension rotation (ExtRot) pattern. In total, 26 subjects with a
lumbar ExtRot pattern and 18 subjects without lumbar ExtRot were recruited. Twenty
reflective markers were placed on the lower extremity and lumbar spine and a 3βD
motion analysis system was used to measure lumbopelvic kinematics. A surface
electromyography (EMG) system was used to measure the trunk muscle activities and
surface electrodes were attached on both rectus abdominis (RA), abdominal external
oblique (EO), abdominal internal oblique (IO), and erector spinae (ES) muscles. All
subjects walked 12 times at a selfβselected (comfortable) walking speed on the
walkway. Kinematic data, at initial heel strike (HS), left toeβoff (TO), left HS, and
right TO, and EMG data at first double support, left swing, second double support,
and right swing phase were used for the statistical analyses. To compare kinematic
and EMG data between subjects with and without the lumbar ExtRot pattern,
independent tβtests for parametric variables and MannβWhitney Uβtests for nonβ
parametric variables were used. Subjects with a lumbar ExtRot pattern showed
significantly increased pelvic and lumbar angles in the sagittal plane (p < 0.05);
however, there was no significant difference in the pelvic or lumbar angle in the
transverse plane between subjects with and without a lumbar ExtRot pattern (p >
0.05). In EMG activity, significantly increased activities in both ES muscles at all
events and decreased right IO muscle activity at the second double support phase
were seen in subjects with a lumbar ExtRot pattern versus subjects without (p < 0.05).
Both RA, EO, and IO muscle activities, except the right IO muscle activity at the - ix -
second double support phase, were not significantly different between subjects with
and without the lumbar ExtRot pattern (p > 0.05).
The purpose of Study 2 was to demonstrate the effects of a 6βweek specific
movement control exercise on pain behavior, lumbopelvic motion, and trunk muscle
activities during walking in subjects with a lumbar ExtRot pattern. In total, 39
subjects with lumbar a ExtRot pattern (experimental = 19; control = 20) participated
in this study. Subjects in the experimental group performed 6 weeks of movement
control exercises and the exercise level of difficulty was adjusted progressively.
Clinical outcome measures included pain intensity (visual analog scale), level of
disability (Oswestry disability index and Roland Morris disability questionnaire), and
fear and avoidance level (Fearβavoidance beliefs questionnaire) caused by low back
pain (LBP). To measure lumbopelvic kinematics and EMG activities in the trunk
muscles (RA, EO, IO, and ES) during walking, all subjects walked on an 8βmβlong
straight walkway. Kinematic data at initial right HS, left TO, left HS, and right TO
and the EMG data at first double support, left swing, second double support and right
swing phase were used for the statistical analysis. The Wilcoxon signedβrank test for
nonβparametric variables and the paired tβtest for parametric variables were used to
compare baseline and followβup treatment within a group. After the 6βweek
intervention, pain intensity, level of disability, and fear and avoidance level caused by
LBP were decreased significantly in the experimental group. Additionally, there were
significantly decreased angles in the lumbar spine and pelvic region in the sagittal
plane at all events in the experimental group. However, there was no significant
difference in the pelvic or lumbar angle in the transverse plane in either group. In the
EMG data, right ES muscle activity was decreased significantly during the first and
second double support phase and left ES muscle activity was also decreased
significantly during the second double support phase in the experimental group.
However, in the control group, there was no significant difference in lumbopelvic
motion or ES muscle activity. After the 6βweek intervention, there was no significant
difference in abdominal muscle activity in either group.
Based on these two studies, it was demonstrated that subjects with a lumbar ExtRot
pattern had greater angle in the lumbar spine and pelvic region in the sagittal plane,
increased ES muscle activities at all events, and decreased right IO at the second
double support phase during walking, compared with subjects without a lumbar
ExtRot pattern. These changed patterns of lumbopelvic motion in the sagittal plane
and ES muscle activity and pain behavior in subjects with a lumbar ExtRot pattern
can be improved by specific movement control exercises over a 6βweek course. Thus,
specific movement control exercises can be an effective treatment for subjects with a
lumbar ExtRot pattern to modify their excessive lumbopelvic motion in the sagittal
plane and excessive muscle activity of the ES in walking.ope
Li-Zhi`s writing in `Fenshu`
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Fixed - point Optimization Utility for Digital Signal Processing Programs
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Effect of post-pancreatectomy symptoms on postoperative length of stay analysis of electronic nursing records
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νκΈ° μν΄ μλλ μ°κ΅¬μ΄λ€. μλ£ μμ§μ 2016λ
1μ 1μΌλΆν° 2016λ
12μ 31μΌκΉμ§ μμΈ μμ¬μ μΌ μκΈμ’
ν©λ³μμμ μ·μ₯μ μ μ μ μνν 333λͺ
μ λμμΌλ‘ νμμΌλ©°, μ μμλ¬΄κΈ°λ‘ μ€ κ°νΈκΈ°λ‘μμ λνλλ μ¦μμ μΆμΆνμ¬ SPSS/WIN 24.0μ μ΄μ©νμ¬ λΆμνμκ³ , ꡬ체μ μΈ μ°κ΅¬κ²°κ³Όλ λ€μκ³Ό κ°λ€. 1. μ°κ΅¬λμμ νΉμ±μ 보면 μ°λ Ήμ 59.46Β±11.68μΈμ΄κ³ , μ±λ³μ μ¬μ±μ΄ 169λͺ
(50.8%)μΌλ‘ λ§μμΌλ©°, λλΆλΆμ΄ κΈ°νΌμΌλ‘ 314λͺ
(94.3%), μ§μ
μ΄ μλ λμμκ° 174λͺ
(52.3%)μ΄μλ€. μ·μ₯μμ μ’
λ₯λ‘λ μ
μ± μ’
μμ΄ 237λͺ
(71.2%), κ°λ³΅μμ μ μνν λμμκ° 165λͺ
(49.5%), PPPDλ₯Ό μνν λμμκ° 161λͺ
(48.3), ν‘μ°κ³Ό μμ£Όλ ₯μ΄ μλ λμμκ° κ°κ° 206λͺ
(61.9%), 188λͺ
(56.5%)μΌλ‘ λ€μλ₯Ό μ°¨μ§νμκ³ , μμ μ serum albumin levelμ 194λͺ
(58.3%)μ΄ 3.5g/dLμ΄μμΌλ‘ μ μλ²μμ μμλ€. μμ ν ν©λ³μ¦μ΄ λ°μνμ§ μμ λμμλ 266λͺ
(79.9%)μ΄μλ€. μμ ν μ¬μμΌμλ 5μΌμμ 60μΌκΉμ§ λΆν¬νμμΌλ©°, μμ ν νκ· μ¬μμΌμλ 10.80Β±5.10μΌμ΄μλ€. 2. μΌλ°μ νΉμ± λ° μ§λ³κ΄λ ¨ νΉμ± μ€ μ±λ³, μμ μ
μ± μ 무, μμ λ°©λ², μμ λͺ
, μ
μ μ μ£Ό μ¦μ μ 무, μμ μ serum albumin level, ν©λ³μ¦ λ°μμ λ¬΄κ° μ¬μμΌμμ μ μν μ°¨μ΄κ° μμλ€. λ¨μ±μ΄ μ¬μ±λ³΄λ€ μ¬μμΌμκ° κΈΈμκ³ (t=2.858, p=.005), μμ±μ’
μλ³΄λ€ μ
μ±μ’
μμ΄(t=-2.778, p=.006), 볡κ°κ²½, λ‘λ΄μμ λ³΄λ€ κ°λ³΅μμ μ΄(F=29.410, p<.001) μ¬μμΌμκ° κΈΈμμΌλ©°, μμ λͺ
μμλ DPκ° PD, PPPD, TPλ³΄λ€ μ¬μμΌμκ° μ μνκ² μ§§μλ€(F=24.826, p<.001). μ
μ μ μ£Όμ¦μμ΄ μλ λμμκ° μλ λμμ보λ€(t=-2.112, p=.035), μμ μ serum albumin levelμ΄ 3.5g/dLλ―Έλ§μΈ λμμκ° 3.5g/dLμ΄μμΈ λμμ보λ€(t=4.405, p<.001), μμ ν ν©λ³μ¦μ΄ λ°μν λμμμ μ¬μμΌμκ° κΈΈμλ€(t=-5.798, p<.001). 3. μ·μ₯ μ μ μ ν λμμκ° νΈμνλ μ¦μμ ν΅μ¦, μ€μ¬, κ°μ¦, λ³΅λΆ λΆνΈκ°, ꡬν , μ΄κ°, λ°°λ¨μ₯μ , μ΄μ§λ¬μ, μ€ν, κ°μ΄ λ΅λ΅ν¨, μμ°λ¦Ό, λ³΅λΆ ν½λ§κ°, μλ©΄μ₯μ , μ€μ¬, νΈν‘κ³€λμ΄μλ€. λμμκ° κ²½ννλ μ¦μ μ€ μ¬μμΌμμ μ μν μ°¨μ΄λ₯Ό 보μ΄λ μ¦μμ κ°μ¦, ꡬν , μ€νμ΄μμΌλ©°, κ°μ¦(t=-2.120, p=.036), ꡬν (t=-2.755, p=.008), μ€ν(t=-3.301, p=.001)μ΄ λ°μν λμμμ μ¬μμΌμκ° μ μνκ² κΈΈμλ€. 4. λμμμ μΌλ°μ νΉμ± λ° μ§λ³κ΄λ ¨ νΉμ±μ λ°λ₯Έ μ¦μλ°μμ μ°¨μ΄λ₯Ό νμΈν κ²°κ³Ό μ±λ³μ λ°λΌ μ€μ¬ (Ο2=31.876, p<.001), κ°μ΄λ΅λ΅ν¨(Ο2=4.828, p=.028), μ€μ¬(Ο2=4.798, p=.034) λ°μμ μ°¨μ΄κ° μμλ€. μ€μ¬μ μ¬μ±μ΄ λ¨μ±λ³΄λ€ λ λ§μ΄ νΈμνμμΌλ©°, κ°μ΄λ΅λ΅ν¨κ³Ό μ€μ¬λ λ¨μ±μ΄ λ λ§μ΄ νΈμνμλ€. μ°λ Ήμ λ°λ₯Έ μ΄μ§λ¬μ λ°μμ μ°¨μ΄κ° μμλλ°(Ο2=7.579, p=.006) 65μΈ μ΄μμ λμμκ° 65μΈ λ―Έλ§μ λμμλ³΄λ€ μ΄μ§λ¬μμ λ λ§μ΄ νΈμνλ κ²μ νμΈνμλ€. μμ λ°©λ²μ λ°λΌ μ§ν΅μ ν¬μ½ νμμ μ°¨μ΄κ° μμκ³ (Ο2=11.075, p=.004), κ°λ³΅μμ μ μνν νμκ° λ³΅κ°κ²½ λ° λ‘λ΄μμ κ³Ό λΉκ΅νμ¬ μ§ν΅μ ν¬μ½νμκ° λ§μλ€. μ€μ¬ λ°μμ μ°¨μ΄λ μμ μ’
λ₯(Ο2=4.895, p=.027), μμ λ°©λ²(Ο2==7.214, p=.027), ν‘μ°(Ο2=30.087, p<.001) λ° μμ£Ό μ 무μ λ°λΌ(Ο2=20.101, p<.001)μ°¨μ΄κ° μμλλ°, μ
μ±μΈ λμμ, κ°λ³΅ λ° λ³΅κ°κ²½ μμ μ μνν λμμκ° λ‘λ΄ μμ λ³΄λ€ μ€μ¬μ λ λ§μ΄ νΈμνμκ³ , ν‘μ°κ³Ό μμ£Όλ ₯μ΄ μλ λμμμκ²μ μ€μ¬μ΄ λ λ§μ΄ λ°μνμλ€. κ°μ¦μ μμ μ’
λ₯μ λ°λ₯Έ μ°¨μ΄κ° μμκ³ (Ο2=4.727, p=.030), μ
μ±μΈ λμμκ° λ λ§μ΄ νΈμνμλ€. λ³΅λΆ λΆνΈκ°μ μμ μ’
λ₯μ λ°λΌ μ°¨μ΄κ° μμκ³ (Ο2=6.823, p=.033), 볡κ°κ²½ μμ κ³Ό κ°λ³΅μμ μ μνν λμμκ° λ‘λ΄μμ λ³΄λ€ λ³΅λΆ λΆνΈκ°μ λ§μ΄ νΈμνμλ€. ꡬν μ μ€νμ ν©λ³μ¦ λ°μ μ 무(Ο2=5.206, p=.023, Ο2=4.701, p=.041)μ λ°λ₯Έ μ°¨μ΄λ₯Ό 보μλλ°, ν©λ³μ¦μ΄ μλ λμμκ° λ§μ΄ νΈμνμλ€. λ°°λ¨μ₯μ λ μμ λ°©λ²μ λ°λΌ μ°¨μ΄κ° μμκ³ (Ο2=6.533, p=.038), κ°λ³΅μμ μ μνν λμμκ° λ§μ΄ νΈμνμλ€. κ°μ΄λ΅λ΅ν¨μ ν‘μ°μ 무μ λ°λ₯Έ μ°¨μ΄κ° μμλλ°(Ο2=5.769, p=0.24) ν‘μ°λ ₯μ΄ μλ λμμκ° λ λ§μ΄ νΈμνμλ€. 5. μ ννκ· λΆμ κ²°κ³Ό μμ ν μ¬μμΌμλ μ±λ³(Ξ²=-.100, p=.027), μμ λͺ
(Ξ²=-.222, p<.001), serum albumin level(Ξ²=-.122, p=.011), ν©λ³μ¦ μ 무(Ξ²=.331, p<.001), κ°μ¦μ 무(Ξ²=.118, p=.007), ꡬν μ 무(Ξ²=.190, p<.001), μ€νμ 무(Ξ²=.104, p=.018)μ 7κ°μ§ μμΈμ μνμ¬ ν΅κ³μ μΌλ‘ μ μνκ² μ€λͺ
λμλ€(Adjusted R2=.397, p<.001). μ¬μ±, PPPDλ³΄λ€ DP, 3.5g/dL μ΄μμ serum albumin levelμ΄ μμ ν μ¬μμΌμλ₯Ό κ°μμν€λ μν₯μμΈμ΄μκ³ , μμ ν ν©λ³μ¦ λ°μ, κ°μ¦, ꡬν , μ€νμ΄ μ¬μμΌμλ₯Ό μ¦κ°μν€λ μν₯μμΈμ΄μλ€. λ³Έ μ°κ΅¬μ κ²°κ³Όλ μ·μ₯μ μ μ μ μνν μ·μ₯μ νμμ κ°νΈμμ μμ ν λμμκ° κ²½ννλ μ¦μμ λ°λ₯Έ ν¨κ³Όμ μΈ μ€μ¬ μ λ΅μ΄ κ°λ°λμ΄μΌ ν νμμ±μ μμ¬νλ©°, μ μκ°νΈκΈ°λ‘μ μ΄μ©ν μ¦μμ°κ΅¬μ κ°λ₯μ±μ νμΈνμλ€.openμ