Electromagnetically levitated vibration isolation system for the manufacturing process of silicon monocrystals

This paper introduces a study on an Electromagnetically Levitated Vibration Isolation System (ELVIS) for isolation control of large-scale vibration. This system features no mechanical contact between the isolation table and the installation floor, using a total of four electromagnetic actuators which generate magnetic levitation force in the vertical and horizontal directions. The configuration of the magnet for the vertical direction is designed to prevent any generation of restoring vibratory force in the horizontal direction. The isolation system is set so that vibration control effects due to small earthquakes can be regulated to below 5(gal) versus horizontal vibration levels of the installation floor of up t 25(gal), and those in the horizontal relative displacement of up to 30 (mm) between the floor and levitated isolation table. In particular, studies on the relative displacement between the installation floor and the levitated isolation table have been made for vibration control in the horizontal direction. In case of small-scale earthquakes (Taft wave scaled: max. 25 gal), the present system has been confirmed to achieve a vibration isolation to a level below 5 gal. The vibration transmission ratio of below 1/10 has been achieved versus continuous micro-vibration (approx. one gal) in the horizontal direction on the installation floor

Magnetically Suspended Linear Pulse Motor for Semiconductor Wafer Transfer in Vacuum Chamber

This paper describes a magnetically suspended linear pulse motor for a semiconductor wafer transfer robot in a vacuum chamber. The motor can drive a wafer transfer arm horizontally without mechanical contact. In the construction of the magnetic suspension system, four pairs of linear magnetic bearings for the lift control are used for the guidance control as well. This approach allows us to make the whole motor compact in size and light in weight. The tested motor consists of a double-sided stator and a transfer arm with a width of 50 mm and a total length of 700 mm. The arm, like a ladder in shape, is designed as the floating element with a tooth width of 4 mm (a tooth pitch of 8 mm). The mover mass is limited to about 1.6 kg by adopting such an arm structure, and the ratio of thrust to mover mass reaches to 3.2 N/kg under a broad air gap (1 mm) between the stator teeth and the mover teeth. The performance testing was carried out with a transfer distance less than 450 mm and a transfer speed less than 560 mm/s. The attitude of the arm was well controlled by the linear magnetic bearings with a combined use, and consequently the repeatability on the positioning of the arm reached to about 2 micron. In addition, the positioning accuracy was improved up to about 30 micron through a compensation of the 128-step wave current which was used for the micro-step drive with a step increment of 62.5 micron

Positioning and Microvibration Control by Electromagnets of an Air Spring Vibration Isolation System

Active positioning and microvibration control has been attempted by electromagnets equipped in a bellows-type, air-spring vibration isolation system. Performance tests have been carried out to study the effects. The main components of the system's isolation table were four electromagnetic actuators and controllers. The vibration isolation table was also equipped with six acceleration sensors for detecting microvibration of the table. The electromagnetic actuators were equipped with bellows-type air springs for passive support of the weight of the item placed on the table, with electromagnets for active positioning, as well as for microvibration control, and relative displacement sensors. The controller constituted a relative feedback system for positioning control and an absolute feedback system for vibration isolation control. In the performance test, a 1,490 kg load (net weight of 1,820 kg) was placed on the vibration isolation table, and both the positioning and microvibration control were carried out electromagnetically. Test results revealed that the vibration transmission was reduced by 95%

Test Methods of Step Motors : Measurement of Static Torque

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Evaluation of the basic properties of the BANGkit™ gel dosimeter

We evaluated the basic properties of a commercially available BANGkit™ gel dosimeter, which is a normoxic type of BANG® gel. This gel-kit has the same composition as the BANG®3 gel, but is fully oxygenated. To exclude oxygen, oxygen scavenging ascorbic acid and copper sulfate as a catalyst are used. The properties that we examined are the effects of the concentrations of copper sulfate and ascorbic acid on the response, the reproducibility, the long-term stability, the temperature effect at irradiation, and the dose-rate effect. In our results, the excellent linear fit of the R2-dose response in a dose range for clinical use and its reproducibility were observed. The precision of a linear fit was preserved for about three weeks. The temperature at irradiation showed a significant effect on the dose response. Although the dose-rate dependence in the high dose range was observed, it was negligible for the clinical dose range up to 270 cGy. In conclusion, this gel dosimeter is thought to be utilizable in clinical practice, while we have to pay attention to the temperature during the entire measurement processes, and additionally there is room for improvement in the linearity and the dose-rate dependence in the high dose range