644 research outputs found

    Extraction of Process Specific Photolithogtaphy Model Parameters

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    In order to truly represent photolithography through simulation, the exposure, bake and development models and model parameters must be accurate. Models for the pre-bake, exposure, post-exposure/pre-development bake, and the development have been developed and are available with most commercial simulators.15 The extraction of the exposure parameters has been established.13 However, the extraction of the bake and development model parameters have been subject to question\u273 given the immersion type development that has been required for the measurement of the development rate and henceforth the extraction of these parameters. Using the approach for the measurement of the in-situ development rate, developed in the first paper of this two paper series, the model parameters were extracted for Shipley 812 resist with Shipley MF312 developer. Development rates for exposures of 66, 90 and ll4rnJ/cm2 were measured. It was discovered that the set of Kim model parameters, R1 through R, were highly correlated with the combination of the Dill exposure parameters. Thus, for A=O.581pin\u27, B=O.O82im1, C=O.013cm2/mJ, the parameters R1=25.559micrometers/min, R2=1O.45lmicrometersm/min, R3=1.879, R4=O.1l2, R5=1.586, R,=0.000micrometers, and a=O.OO16im were extracted. A comparison of simulated data using the extracted model parameters with the measured data demonstrated the quality of the fit

    Technique for the Measurement of the In-Situ Development Rate

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    In the past, a Perkin Elmer Development Rate Monitor (DRM) has been used to measure the development rate of photoresist. However, due to several limitations of the DRM, the development rates measured therein, are not truly representative of the resist processing on a production lire. Subtleties in the development system are not obtained through the DRM and hence an in-situ development rate is required. Using a Site Services Development Spray Monitor (DSM 100) and a post processing algorithm. the in-situ measured development rates were obtained. The interference signals for eight different wavelengths were simultaneously monitored on a pattemed wafer as it spun on the development module of a wafer track. Since the interference signal is generated from a circularly polarized light source, the DSM 100 has demonstrated robustness to the red cloud effect, developer spray, bubbles in the developer, and ambient light.\u27 Two algorithms for the calculation of the in-situ development rate are proposed. After collecting the eight interference curves, these post processing algorithms used the Marquardt Levenberg non-linear regression algorithm and a linear regression approach to find the development rate as a function of development time. Although the standing wave effect was visible in the plots of development rate versus time using both techniques, the first approach generated the better curve. A plot of development rate versus depth was generated via numerical integration of the plot of development rate versus time. Since the only equation used in the post processing algorithm is the interference relationship, this technique is equally well suited for other types of exposure and resist chemistries. Possession of the in-situ development rate could provide further insight into resist development mechanisms, the development of better models, and the extraction of photolithography model parameters that are specific to the production process

    Method for forming a glove attachment

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    An attachment principally for the palm of an astronaut glove to enhance the gripping area of the palm without detracting from the flexibility and utility of the glove is presented. The attachment is a composite construction formed from a layer of silicone rubber having an outer surface with a friction configuration and another layer of silicone rubber in which a Nomex Aramid mesh fabric is embedded prior to curing. The method of construction involves the use of a mold with a friction configuration surface. A first layer of silicone rubber or sealant is disposed in the mold and allowed to set for an hour. A second layer of silicone rubber or sealant is layered over the first layer and leveled. A Nomex Aramid mesh fabric is embedded into the second layer and the composite is permitted to cure. When cured, a configured area of the composite construction is glued or stitched to the palm area of the glove

    Examining the role of wine brand love on brand loyalty: a multi-country comparison

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    This study develops and tests a model through a multi-country study that considers consumer wine knowledge and wine experience, wine brand trust and wine brand satisfaction as antecedents of wine brand love, and wine brand loyalty as a consequence of wine brand love. Data were collected in five wine-producing countries (Australia, Chile, France, Mexico and Portugal) with a final sample of 3462 completed surveys. Hypotheses were tested with structural equation modeling and the findings confirm the importance of brand love as both a mediator and direct influence on brand loyalty for wine consumers. Furthermore, brand satisfaction was positively and significantly related to brand love. In addition, wine experience, rather than wine knowledge, positively influenced brand trust and satisfaction. Finally, results also identify differences between countries thereby providing insights into how companies should focus their marketing strategies internationally.info:eu-repo/semantics/acceptedVersio

    The ‘ins and outs’ of faecal microbiota transplant for recurrent Clostridium difficile diarrhoea at Wits Donald Gordon Medical Centre, Johannesburg, South Africa

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    Background. Clostridium difficile-associated diarrhoea (CDAD) is a potentially life-threatening condition that is becoming increasingly common. A persistent burden of this infectious illness has been demonstrated over the past 4 years at Wits Donald Gordon Medical Centre (WDGMC), Johannesburg, South Africa, through implementation of active surveillance of hospital-acquired infections as part of the infection prevention and control programme. Oral treatment with metronidazole or vancomycin is recommended, but there is a major problem with symptomatic recurrence after treatment. Replacement of normal flora by the administration of donor stool through colonoscopy or nasogastric/duodenal routes is becoming increasingly popular.Objectives. To identify risk factors for the development of CDAD in patients referred for faecal microbiota transplant (FMT) and evaluate the safety of administration of donor stool as an outpatient procedure, including via the nasogastric route.Methods. A retrospective record review of patients with recurrent CDAD referred for FMT at WDGMC between 1 January 2012 and 31 December 2016 was conducted.Results. Twenty-seven patients were identified, all of whom fulfilled the criteria for recurrent CDAD. One-third were aged >65 years, and the majority were female. The most common risk factors were prior exposure to antibiotics or proton-pump inhibitors and underlying inflammatory bowel disease. Three procedures were carried out as inpatients and 24 in the outpatient gastroenterology unit. At 4-week follow-up, all patients reported clinical resolution of their diarrhoea after a single treatment and there were no recurrences. The FMT procedure was associated with no morbidity (with particular reference to the risk of aspiration when administered via the nasogastric route) or mortality.Conclusions. This case series confirms that FMT is a safe and effective therapy for recurrent CDAD. In most cases it can be administered via the nasogastric route in the outpatient department. We propose that the recently published South African Gastroenterology Society guidelines be reviewed with regard to recommendations for the route of administration of FMT and hospital admission. Meticulous prescription practice by clinicians practising in hospitals and outpatient settings, with particular attention to antimicrobials and chronic medication, is urgently required to prevent this debilitating and potentially life-threatening condition
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