КОМПЛЕКС ДЛЯ НЕРАЗРУШАЮЩЕГО КОНТРОЛЯ СУБМИКРОННОЙ ТОПОЛОГИИ КРЕМНИЕВЫХ ПЛАСТИН ПРИ ПРОИЗВОДСТВЕ ИНТЕГРАЛЬНЫХ МИКРОСХЕМ

The advantages of using an atomic force microscopy in manufacturing of submicron integrated circuits are described. The possibilities of characterizing the surface morphology and the etching profile for silicon substrate and bus lines, estimation of the periodicity and size of bus lines, geometrical stability for elementary bus line are shown. Methods of optical and atomic force microcopies are combined in one diagnostic unit. Scanning  probe  microscope  (SPM  200)  is  designed  and  produced.  Complex  SPM  200  realizes  nondestructive control of microelectronics elements made on silicon wafers up to 200 mm in diameter and it is introduced by JSC «Integral» for the purpose of operational control, metrology and acceptance of the final product.Описаны преимущества использования атомно-силовой микроскопии для контроля технологических процессов при изготовлении интегральных микросхем субмикроэлектроники. Показана возможность визуализации морфологии поверхностей и профиля травления, оценки периодичности гребенок шин, определения стабильности размеров для одной шины. Выполнены работы по совмещению оптической и атомно-силовой микроскопии, разработан и изготовлен сканирующий зондовый микроскоп. Комплекс внедрен для промышленного неразрушающего контроля субмикроэлектроники, выполненной на кремниевых  пластинах диаметром  до  200 мм, с целью осуществления  операционного контроля, метрологических измерений и приемки качества готовой продукции

Hidden Middle Devonian Magmatism of North-Eastern Siberia: Age Constraints from Detrital Zircon U–Pb Data

We present new data on the tectonic evolution of north-eastern Siberia using an integrated provenance analysis based on U–Pb detrital zircon dating and sandstone petrography of Devonian sedimentary strata. Our petrographic data suggest that Upper Devonian sandstones of north-eastern Siberia were derived from a local provenance, supported by the widespread distribution of ca. 1900–2000 Ma magmatic events in the basement of the neighboring Ust’-Lena and Olenek uplifts. Devonian detrital zircon age distributions of the Devonian sandstones are similar to ages of Middle Paleozoic magmatic rocks of Yakutsk-Vilyui large igneous province (LIP). Therefore, we suggest that the studied sandstones were derived from proximally-located uplifted blocks composed of Proterozoic–Devonian rocks and Middle–Late Devonian volcanics. Moreover, the abundance of Middle–Late Devonian zircons is suggestive of a wider distribution of coeval magmatism across north-eastern Siberia than previously supposed. We propose that widespread Devonian magmatism associated with the Yakutsk-Vilyui LIP also occurred to the east of our study area and is now buried beneath thick Carboniferous–Jurassic sedimentary rocks of the eastern Siberian passive margin, subsequently deformed into the Late Jurassic–Cretaceous Verkhoyansk fold-and-thrust belt. We also propose that the major pulse of the Yakutsk-Vilyui LIP occurred in north-eastern Siberia during the Middle Devonian at ca. 390 Ma, some 15 million years earlier than within the Vilyui rift basin in eastern Siberia (ca. 375 Ma)

RESEARCH OF VIBRATION MECHANOCHEMICAL ZINC COATING MICRO/NANO-PROFILE

The research results of the micro/nano-profile of the vibration mechanochemical zinc coating are presented

Wyznaczanie parametrów lepkości cieczy w ultracienkich warstwach smarujących

This paper presents a new method for the estimation and, consequently, a new method of liquid viscosity measurements for non-Newtonian liquids retained in ultra thin layer. Essentially the test stand consists of a Piezoelectric Tuning Fork (PTF) and an Atomic Force Microscope (AFM). This method is to be based on the measurements of the amplitude values of PTF vibrations inside the liquid region using AFM and other devices described in this paper. Vibration implies a share rate in liquid and this implies changes of the apparent viscosity of non-Newtonian liquids. During measurements, the ultra thin layer of liquid is laying on the solid substratum. This solid substratum imitates the superficial layer on cooperating bearing surfaces. Experimental measurements prove that the physical properties of superficial layers have a significant influence on the liquid viscosity in ultra thin liquid layers. Viscosity changes within ultra thin layer in relation to height.Niniejsza praca przedstawia nową metodę oszacowania wartości, a w konsekwencji pomiaru wartości lepkości nie newtonowskiej cieczy w ultracienkich warstwach. Stanowisko badawcze składa się zasadniczo z dwóch części: piezoelektrycznego kamertona widelcowego (PTF) oraz mikroskopu sił atomowych (AFM). Polega ona na zastosowaniu pomierzonych wartości amplitudy mikrodrgań PTF z mikroskopem sił atomowych oraz na wykorzystaniu odpowiedniego oprzyrządowania. Drgania wywołują wzrost prędkości ścinania, a te zmieniają lepkość cieczy. W trakcie pomiarów warstwa badanej cieczy zalega na podkładce materiałowej ciała stałego imitującej warstwę wierzchnią współpracujących powierzchni w węzłach tarcia ślizgowego. Materiał podkładki można zmieniać w trakcie badań. Tak pomyślana metoda badań może mieć duże zastosowanie w praktyce projektowania mikrołożysk, ponieważ badania eksperymentalne wykazały, że w ultracienkich warstwach cieczy smarującej własności materiałowe warstwy wierzchniej, a zatem podkładki mają wpływ na kształtowanie się wartości lepkości cieczy smarującej. Lepkość cieczy smarującej w ultracienkich warstewkach zmienia się wraz z grubością warstwy. Prezentowana metoda pomiaru lepkości cieczy ma szczególne znaczenie w przypadku cienkich warstewek cieczy o właściwościach nie newtonowskich, czyli takich, gdzie zmiany prędkości deformacji w trakcie przepływu smarującego mają wpływ na wartość lepkości. Kamerton wykonuje mikrodrgania, których amplitudy mierzy się z użyciem AFM. Drgania powodują zmiany prędkości deformacji cząsteczek cieczy w trakcie przepływu. W konsekwencji uzyskuje się zmiany wartości lepkości, które zostają uchwycone w trakcie opisanej w pracy procedury pomiarowej. Procedura pomiaru została w niniejszej pracy szczegółowo opisana. Według informacji autorów badania takie mogą mieć duże zastosowania w projektowaniu mikrołożysk HDD

The dynamics of biochemical markers of enzymoemia and middle-weight molecules in the early post-traumatic period of brain injury

In the experimental model of brain injury (BI) markers of enzymoemia (aminotransferases ALT and AST, alkaline and acid phosphatase (AlP and AcP), cathepsin D (CD)) and middle-weight molecules (MWM) were estimated. 3 hours after trauma there were increase of all enzymes that evidences about damage of cytoplasmic (ALT, AST, AlF) and lysosomal membranes (AcP, CD). During period of observation different dynamics of enzymatic changes occurred: plateau phase for ALT and CD and progressive increase of concentration with the maximum on the 5th day of the experiment for AlP and AcP. Increase of the level of MWM displayed the development of endogenous intoxication in the post-traumatic period. Relation between particular components of MWM was studied. It was shown that primary accumulation of nucleotide fraction and aromatic peptides is adverse factor of the course of post-traumatic period, development of endotoxicosis, and multiorgan failure

EQUIPMENT FOR NONDESTRUCTIVE TESTING OF SILICON WAFERS SUBMICRON TOPOLOGY DURING THE FABRICATION OF INTEGRATED CIRCUITS

The advantages of using an atomic force microscopy in manufacturing of submicron integrated circuits are described. The possibilities of characterizing the surface morphology and the etching profile for silicon substrate and bus lines, estimation of the periodicity and size of bus lines, geometrical stability for elementary bus line are shown. Methods of optical and atomic force microcopies are combined in one diagnostic unit. Scanning  probe  microscope  (SPM  200)  is  designed  and  produced.  Complex  SPM  200  realizes  nondestructive control of microelectronics elements made on silicon wafers up to 200 mm in diameter and it is introduced by JSC «Integral» for the purpose of operational control, metrology and acceptance of the final product

New data on the basement of Franz Josef Land, Arctic region

We have studied pebbles of igneous rocks from the Lower Jurassic sedimentary succession of Hall Island, Franz Josef Land. Pebbles are represented by felsic intrusive and extrusive rocks, often cataclased and greisenized. The U–Pb age of crystallization for zircons of the studied samples yielded the Latest Devonian–Early Carboniferous and Early–Middle Permian ages. In addition, the studied zircons demonstrate a broad scatter of ages, from Middle Paleozoic to Mesozoic, suggesting repeated thermal reworking and metamorphism of granites. It is shown that coeval Late Paleozoic magmatism indicates the similarity of the geological evolution of the northern Barents Sea and the Severnaya Zemlya archipelago.</p