Energy-aware 3D micro-machined inductive suspensions with polymer magnetic composite core

This paper addresses the issue of Joule heating in micromachined inductive suspensions (MIS) and reports a significant decrease of the operating temperature by using a polymer magnetic composite (PMC) core. The PMC material has a high resistivity, thus inhibiting the formation of eddy currents, and a high permeability, thus guiding the magnetic field more efficiently within the MIS structure. We experimentally study the distribution of the PMC material inside the MIS structure and evaluate the effect of the core from the dependence of the levitation height on the excitation current. The experiments carried on in ambient room temperature demonstrate that the temperature inside the micromachined inductive suspension is reduced to 58°C, which is a record-low temperature compared to other MIS structures reported before

Hybrid electromagnetic and electrostatic micromachined suspension with adjustable dynamics

This paper introduces a novel design for a hybrid micromachined contactless suspension, whose operation is based on combining electromagnetic inductive and electrostatic actuation. Wirebonded microcoils provide the electromagnetic inductive actuation, while electrodes patterned on a Si wafer provide electrostatic control. The coil structure and the electrode structure are independently designed and fabricated, and are finally assembled into one device by flip-chip bonding. We demonstrate vertical linear positioning of an aluminium disk-shaped proof mass in a range from 30 to 200 μm based on the coil structure. The electrode structure is employed to dynamically adjust the stiffness components during the operation of the suspension, to control the tilting in a range from ±1° to ±4°, as well as to control the oscillation about the vertical axis with a displacement of 37° at about 1.5 Hz frequency

Heteronuclear micro-helmholtz coil facilitates μm-range spatial and sub-Hz spectral resolution NMR of nL-volume samples on customisable microfluidic chips

We present a completely revised generation of a modular micro-NMR detector, featuring an active sample volume of ∗ 100 nL, and an improvement of 87% in probe efficiency. The detector is capable of rapidly screening different samples using exchangeable, applicationspecific, MEMS-fabricated, microfluidic sample containers. In contrast to our previous design, the sample holder chips can be simply sealed with adhesive tape, with excellent adhesion due to the smooth surfaces surrounding the fluidic ports, and so withstand pressures of ∗2.5 bar, while simultaneously enabling high spectral resolution up to 0.62 Hz for H2 O, due to its optimised geometry. We have additionally reworked the coil design and fabrication processes, replacing liquid photoresists by dry film stock, whose final thickness does not depend on accurate volume dispensing or precise levelling during curing. We further introduced mechanical alignment structures to avoid time-intensive optical alignment of the chip stacks during assembly, while we exchanged the laser-cut, PMMA spacers by diced glass spacers, which are not susceptible to melting during cutting. Doing so led to an overall simplification of the entire fabrication chain, while simultaneously increasing the yield, due to an improved uniformity of thickness of the individual layers, and in addition, due to more accurate vertical positioning of the wirebonded coils, now delimited by a post base plateau. We demonstrate the capability of the design by acquiring a1 H spectrum of ∗ \11 nmol sucrose dissolved in D2 O, where we achieved a linewidth of 1.25 Hz for the TSP reference peak. Chemical shift imaging experiments were further recorded from voxel volumes of only ∗ 1.5nL, which corresponded to amounts of just 1.5 nmol per voxel for a 1 M concentration. To extend the micro-detector to other nuclei of interest, we have implemented a trap circuit, enabling heteronuclear spectroscopy, demonstrated by two 1H/13 C 2D HSQC experiments. © 2016 Spengler et al. This is an open access article distributed under the terms of the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original author and source are credited

Comparison of crystallization characteristics and mechanical properties of polypropylene processed by ultrasound and conventional micro injection molding

YesUltrasound injection molding has emerged as an alternative production route for the manufacturing of micro-scale polymeric components, where it offers significant benefits over the conventional micro-injection molding process. In this work, the effects of ultrasound melting on the mechanical and morphological properties of micro-polypropylene parts were characterized. The ultrasound injection molding process was experimentally compared to the conventional micro-injection molding process using a novel mold, which allows mounting on both machines and visualization of the melt flow for both molding processes. Direct measurements of the flow front speed and temperature distributions were performed using both conventional and thermal high-speed imaging techniques. The manufacturing of micro-tensile specimens allowed the comparison of the mechanical properties of the parts obtained with the different processes. The results indicated that the ultrasound injection molding process could be an efficient alternative to the conventional process