Inductively coupled plasmas sustained by an internal oscillating current

A global electromagnetic model of an inductively coupled plasma sustained by an internal oscillating current sheet in a cylindrical metal vessel is developed. The electromagnetic field structure, profiles of the rf power transferred to the plasma electrons, electron/ion number density, and working points of the discharge are studied, by invoking particle and power balance. It is revealed that the internal rf current with spatially invariable phase significantly improves the radial uniformity of the electromagnetic fields and the power density in the chamber as compared with conventional plasma sources with external flat spiral inductive coils. This configuration offers the possibility of controlling the rf power deposition in the azimuthal direction

Pinning and collective modes of a vortex lattice in a Bose-Einstein condensate

We consider the ground state of vortices in a rotating Bose-Einstein condensate that is loaded in a corotating two-dimensional optical lattice. Due to the competition between vortex interactions and their potential energy, the vortices arrange themselves in various patterns, depending on the strength of the optical potential and the vortex density. We outline a method to determine the phase diagram for arbitrary vortex filling factor. Using this method, we discuss several filling factors explicitly. For increasing strength of the optical lattice, the system exhibits a transition from the unpinned hexagonal lattice to a lattice structure where all the vortices are pinned by the optical lattice. The geometry of this fully pinned vortex lattice depends on the filling factor and is either square or triangular. For some filling factors there is an intermediate half-pinned phase where only half of the vortices is pinned. We also consider the case of a two-component Bose-Einstein condensate, where the possible coexistence of the above-mentioned phases further enriches the phase diagram. In addition, we calculate the dispersion of the low-lying collective modes of the vortex lattice and find that, depending on the structure of the ground state, they can be gapped or gapless. Moreover, in the half-pinned and fully pinned phases, the collective mode dispersion is anisotropic. Possible experiments to probe the collective mode spectrum, and in particular the gap, are suggested.Comment: 29 pages, 4 figures, changes in section

Low-frequency, high-density, inductively coupled plasma sources: operation and applications

Operation regimes, plasma parameters, and applications of the low-frequency ( - 500 kHz) inductively coupled plasma (ICP) sources with a planar external coil are investigated. It is shown that highly uniform, high-density (ne -9×1012 cm−3) plasmas can be produced in low-pressure argon discharges with moderate rf powers. The low-frequency ICP sources operate in either electrostatic (E) or electromagnetic (H) regimes in a wide pressure range without any Faraday shield or an external multipolar magnetic confinement, and exhibit high power transfer efficiency, and low circuit loss. In the H mode, the ICP features high level of uniformity over large processing areas and volumes, low electron temperatures, and plasma potentials. The low-density, highly uniform over the cross-section, plasmas with high electron temperatures and plasma and sheath potentials are characteristic to the electrostatic regime. Both operation regimes offer great potential for various plasma processing applications. As examples, the efficiency of the low-frequency ICP for steel nitriding and plasma-enhanced chemical vapor deposition of hydrogenated diamond-like carbon (DLC) films, is demonstrated. It appears possible to achieve very high nitriding rates and dramatically increase micro-hardness and wear resistance of the AISI 304 stainless steel. It is also shown that the deposition rates and mechanical properties of the DLC films can be efficiently controlled by selecting the discharge operating regime

Diagnostics and two-dimensional simulation of low-frequency inductively coupled plasmas with neutral gas heating and electron heat flares

This article presents the results on the diagnostics and numerical modeling of low-frequency (∼460 KHz) inductively coupled plasmas generated in a cylindrical metal chamber by an external flat spiral coil. Experimental data on the electron number densities and temperatures, electron energy distribution functions, and optical emission intensities of the abundant plasma species in low/intermediate pressure argon discharges are included. The spatial profiles of the plasma density, electron temperature, and excited argon species are computed, for different rf powers and working gas pressures, using the two-dimensional fluid approach. The model allows one to achieve a reasonable agreement between the computed and experimental data. The effect of the neutral gas temperature on the plasma parameters is also investigated. It is shown that neutral gas heating (at rf powers⩾0.55 kW) is one of the key factors that control the electron number density and temperature. The dependence of the average rf power loss, per electron–ion pair created, on the working gas pressure shows that the electron heat flux to the walls appears to be a critical factor in the total power loss in the discharge

NMR Experiments on Rotating Superfluid 3He-A : Evidence for Vorticity

Experiments on rotating superfluid 3He-A in an open cylindrical geometry show a change in the NMR line shape as a result of rotation: The amplitude of the peak decreases in proportion to f(T)g(Ω), where Ω is the angular velocity of rotation; at the same time the line broadens. Near Tc, f(T) is a linear function of 1−T/Tc. At small velocities g(Ω)∝Ω. These observations are consistent with the existence of vortices in rotating 3He-A.Peer reviewe