12 research outputs found

    Systematic Classification of LPCVD Processes

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    A simple classification scheme of low pressure chemical vapor deposition processes is discussed which is based on only three different one-dimensional models of the radial film thickness distribution on silicon wafers processed in a conventional horizontal hot-wall reactor. Comparing theoretical predictions of these models with experimental results obtained from various LPCVD processes, a good qualitative agreement can be stated. For better quantitative accuracy additional effects must be taken into account. The stoichiometrically induced radial flow for deposition reactions not preserving the mole number of involved gaseous species is very important for the parameter evaluation as well as model identification

    �ber den Einflu� von Fermentmetallen auf Tumoren

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    Single-Chip Loesung fuer bandbreiteneffizientes drahtloses Kommunikationssystem Schlussbericht

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    Available from TIB Hannover: F04B1849+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEBundesministerium fuer Bildung und Forschung (BMBF), Bonn (Germany)DEGerman

    A Radiation Hardened 16 GS/s Arbitrary Waveform Generator IC for a Submillimeter Wave Chirp-Transform Spectrometer

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    This paper describes a radiation hardening design approach of a dual channel 16 GSps single chip arbitrary waveform generator (AWG) - a complex mixed-signal ASIC - that consists of a low phase noise 16 GHz PLL, two 1.6 Mbit SRAM blocks, two multiplexing chains, and two 4-bit DACs. The ASIC is dedicated to be a part of a submillimeter wave spectrometer that shall operate in deep-space environment. Under stringent power budget conditions, a selective radiation protection of the ASIC has been applied. The arbitrary waveform generator has been fabricated in a 130 nm SiGe BiCMOS process. Correct functionality has been verified in lab and will be further tested in an irradiation facility

    A single chip 16 GS/s arbitrary waveform generator in 0.13 μm BiCMOS technology

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    This paper presents design considerations and measurements of a dual channel 16 GSps single chip arbitrary waveform generator. Each generator channel consists of a 1.6 Mbit SRAM block, a multiplexing chain, and a 4-bit DAC. A low phase noise 16 GHz PLL is integrated on the same chip. The prototype is designed to perform a lab experiment of a real-time SAW spectrometer. The overall power consumption of the chip is 1.45 W
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