Dual rate pressure relief valve

Pressure relief valve vents at a slow bleed rate at one pressure level and at a higher bleed rate at a higher pressure level. The value housing contains a sleeve, inlet port, outlet port, an orifice, a ball and seat arrangement, and a belleville spring diaphragm

Characterization of dielectric charging in RF MEMS capacitive switches

RF MEMS capacitive switches show great promise for use in wireless communication devices such as mobile phones, but the successful application of these switches is hindered by reliability concerns: charge injection in the dielectric layer (SiN) can cause irreversible stiction of the moving part of the switch. We present a new way to characterize charge injection. By stressing the dielectric with electric fields on the order of 1 MV/cm, we inject charge in the dielectric, and use a new method to measure the effects it has on the C-V curve. Instead of measuring the change in the pull-in voltage, this method measures the change in the voltage at which the capacitance is minimal. This way, no extra charge is injected during the measurement of the amount of injected charge, which reduces the effect it has on the tested switches, so that the effect of the intentionally induced stress voltage is not obscured by the measurement method

Fast RF-CV characterization through high-speed 1-port S-parameter measurements

We present a novel method to measure the capacitance-voltage relation of an electronic device. The approach is accurate, very fast, and cost-effective compared to the existing off-the-shelf solutions. Capacitances are determined using a single-frequency 1-port S-parameter setup constructed from discrete components. We introduce a new way to correct for non-linearities of the used components, which greatly increases the accuracy with which the phase and magnitude of the reflected signal is measured. The measurement technique is validated on an RF-MEMS capacitive switch and a BST tunable capacitor. Complete capacitance-voltage curves are measured in less than a millisecond, with a measurement accuracy well below 1%.\ud \u

Static capacitive pressure sensing using a single graphene drum

To realize nanomechanical graphene-based pressure and gas sensors, it is beneficial to have a method to electrically readout the static displacement of a suspended graphene membrane. Capacitive readout, typical in micro-electro-mechanical systems (MEMS), gets increasingly challenging as one starts shrinking the dimensions of these devices, since the expected responsivity of such devices is below 0.1 aF/Pa. To overcome the challenges of detecting small capacitance changes, we design an electrical readout device fabricated on top of an insulating quartz substrate, maximizing the contribution of the suspended membrane to the total capacitance of the device. The capacitance of the drum is further increased by reducing the gap size to 110 nm. Using external pressure load, we demonstrate successful detection of capacitance changes of a single graphene drum down to 50 aF, and pressure differences down to 25 mbar

Monitoring and analysing pressures around a TBM

The excess pore pressure in front of a TBM is described for a slurry shield as well as an earth pressure balance (EPB) shield when drilling in saturated sand. Excess pore water pressures are described by using Darcy’s law and theory to describe slurry behaviour. Measured pore pressures close to the TBM are explained for various phases of the tunnelling process. Grout pressures were measured and the possibility how these can cause deformation of the tail shield is discussed. The results of this research has led to a better understanding of the mechanisms and were also used in practice in the design and execution of tunnel projects

Amplitude calibration of 2D mechanical resonators by nonlinear optical transduction

Contactless characterization of mechanical resonances using Fabry-Perot interferometry is a powerful tool to study the mechanical and dynamical properties of atomically thin membranes. However, amplitude calibration is often not performed, or only possible by making assumptions on the device parameters such as its mass or the temperature. In this work, we demonstrate a calibration technique that directly measures the oscillation amplitude by detecting higher harmonics that arise from nonlinearities in the optical transduction. Employing this technique, we calibrate the resonance amplitude of two-dimensional nanomechanical resonators, without requiring knowledge of their mechanical properties, actuation force, geometric distances or the laser intensity