Supplementary document for X-ray ptychographic and fluorescence microscopy using virtual single-pixel imaging-based deconvolution with accurate probe images - 6521745.pdf

Preparation process for obtaining blur kernels, reconstruction results of Ta test chart without considering probe variation, and deconvolution results of STXM images of ZnS particles

High-resolution and high-sensitivity X-ray ptychographic coherent diffraction imaging using the CITIUS detector

Ptychographic coherent diffraction imaging (PCDI) is a synchrotron X-ray microscopy technique that provides high spatial resolution and a wide field of view. To improve the performance of PCDI, the performance of the synchrotron radiation source and imaging detector should be improved. In this study, ptychographic diffraction pattern measurements using the CITIUS high-speed X-ray image detector and the corresponding image reconstruction are reported. X-rays with an energy of 6.5 keV were focused by total reflection focusing mirrors, and a flux of ∼2.6 × 1010 photons s−1 was obtained at the sample plane. Diffraction intensity data were collected at up to ∼250 Mcounts s−1 pixel−1 without saturation of the detector. Measurements of tantalum test charts and silica particles and the reconstruction of phase images were performed. A resolution of ∼10 nm and a phase sensitivity of ∼0.01 rad were obtained. The CITIUS detector can be applied to the PCDI observation of various samples using low-emittance synchrotron radiation sources and to the stability evaluation of light sources