20 research outputs found

    Micro-tensile tests on micromachined metal on polymer specimens: elasticity, plasticity and rupture

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    This study is focused on the mechanical characterization of materials used in microelectronic and micro- electromechanical systems (MEMS) devices. In order to determine their mechanical parameters, a new deformation bench test with suitable micromachined specimens have been developed. Uniaxial tensile tests were performed on "low cost" specimens, consisting in electroplated thin copper films and structures, deposited on a polimide type substrate. Moreover, a cyclic mechanical actuation via piezoelectric actuators was tested on the same deformation bench. These experiments validate the device for performing dynamic characterization of materials, and reliability studies of different microstructures.Comment: Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838

    InïŹ‚uence of microstructure and internal stress on the mechanical behavior of electroplated gold freestanding thin ïŹlms

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    Mechanical properties of freestanding electroplated gold thin ïŹlms were studied in relationship to their geometrical and microstructural properties. Three diïŹ€erent techniques of characterization were used: nanoindentation, bulge tests and microtensile tests. Results were compared to literature and also discussed according to physical phenomena related to the elaboration process of the specimens like seed layer exodiïŹ€usion or internal stress state. The observed plasticity and failure mechanisms were found to be in good agreement with the literature and are consistent with the microstructure. The measured Young’s modulus is slightly higher than expected, and SIMS analysis is exploited to explain such a high value

    Experimental setup and realization of thin film specimens for microtensile tests

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    International audienceThis paper describes a microtensile test system and the design as the realization of the samples dedicated to the tensile experiments. Two different technologies for the development of miniaturized specimens are detailed: self-standing tensile samples sustained by silicon frames and metal on polymer specimens obtained by laser cutting. The design of the samples has been optimized by means of finite element simulations. Aluminum beams with very large length on thickness ratio have been released from their silicon substrate using a standard etching process. Stress/strain curves are derived from experimental force/displacement values and discussed in terms of Young's modulus values and critical parameters (flow and rupture stresses)
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