SiP design flow and 3D DRC for MEMS

International audienc

A RF tunable Agile Filter: From component to system design

International audienceThe work is related to an Agile Filter which is a specific RF block to be inserted between an antenna and a first stage of pre-amplification in future on board antenna systems or any future multi-purpose communications terminals. It will be able to process signals in the frequency range between 2 and 18 GHz with target insertion loss below 3dB. The basic idea of the demonstrator studied and developed in this project is to evaluate a SiP approach combining heterogeneous technologies and 3D integration and packaging. This paper presents the process flow used to design, fabricate and integrate in 3D a tunable RF filter which tunability is obtained by the use of MEMS varactors based on a copper on glass technology and stacked on micro-PCD for the electronic control functions. MEMS+ parameterized structures for RF MEMS varactor designs are presented with dimension constraints to be compatible with the space available at the end of each combline sub-filter. Indeed, the MEMS capacitors are composed of a mobile square membrane of 210μm by side and overall size of 600μm. In addition, these RF MEMS tunable capacitor models were automatically transferred into VerilogA for rapid system-level simulation usable further in ADS environment to verify the RF performances

A RF tunable Agile Filter: From component to system design

International audienc

Design of freeform geometries in a MEMS accelerometer with a mechanical motion preamplifier based on a genetic algorithm

This paper describes a novel, semiautomated design methodology based on a genetic algorithm (GA) using freeform geometries for microelectromechanical systems (MEMS) devices. The proposed method can design MEMS devices comprising freeform geometries and optimize such MEMS devices to provide high sensitivity, large bandwidth, and large fabrication tolerances. The proposed method does not require much computation time or memory. The use of freeform geometries allows more degrees of freedom in the design process, improving the diversity and performance of MEMS devices. A MEMS accelerometer comprising a mechanical motion amplifier is presented to demonstrate the effectiveness of the design approach. Experimental results show an improvement in the product of sensitivity and bandwidth by 100% and a sensitivity improvement by 141% compared to the case of a device designed with conventional orthogonal shapes. Furthermore, excellent immunities to fabrication tolerance and parameter mismatch are achieved. © 2020, The Author(s)

Simulation and design of a three axis navigation microsystem based on micromachined sensors

The project presented in this paper aims at defining the limits of microsystems through the realisation of a navigation system based on inertial microsensors. The work includes (i) design, fabrication, characterisation of accelerometers and angular rate sensors, (ii) development of techniques for simulation of sensor behaviour, and (iii) design of a sensor data processing system