Focused-ion-beam fabricated vertical fiber couplers on silicon-on-insulator waveguides

We fabricated grating couplers in silicon-on-insulator waveguides with focused-ion-beam. First devices were very lossy, but by using selective etchant and a hard mask we obtained efficiencies comparable to traditional fabrication techniques

Retroreflective optical marker chips for simultaneous identification and localization

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Focused-ion-beam fabrication of slots in silicon waveguides and ring resonators

We present the focused-ion-beam fabrication of slots in silicon waveguides and racetrack resonators. The silicon waveguides and resonators were pre-fabricated without slot with deep-UV lithography. The focused-ion-beam etch process was conducted with iodine etch enhancement and alumina hard mask. We demonstrate a propagation loss of 100 dB/cm for slot waveguides and a Q value of 850 for slot racetrack resonators with bend radius of 6 µm

Efficient, broadband and compact metal grating couplers for silicon-on-insulator waveguides

Metal grating couplers for Silicon-on-Insulator waveguides are proposed. A silver grating coupler with 33% coupling efficiency is designed. A gold gating coupler prototype is fabricated using Focused Ion Beams demonstrating over 10% coupling efficiency. (C) 2007 Optical Society of Americ

Compact focusing grating couplers for silicon-on-insulator integrated circuits

Abstract—We report experimental results on compact and broadband focusing grating couplers, both in silicon-on-insulator (SOI) and gold on SOI. An eight-fold length reduction of the coupling structure from fiber to photonic wire in SOI, as com-pared to a linear grating and adiabatic taper, is obtained, without performance penalty. A proof of principle is given for a focusing grating coupler in gold on SOI, with 20 % fiber-to-focus efficiency. Index Terms—Focusing grating coupler, gold, integrated optics, metal, nanophotonic waveguides, silicon-on-insulator (SOI). I